CN210347435U - Mounting clamping frame for in-situ detection of densely arranged large-caliber optical elements - Google Patents

Mounting clamping frame for in-situ detection of densely arranged large-caliber optical elements Download PDF

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Publication number
CN210347435U
CN210347435U CN201920893363.0U CN201920893363U CN210347435U CN 210347435 U CN210347435 U CN 210347435U CN 201920893363 U CN201920893363 U CN 201920893363U CN 210347435 U CN210347435 U CN 210347435U
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light source
mounting groove
linear light
source mounting
centre gripping
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CN201920893363.0U
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张传超
王海军
张丽娟
蒋晓龙
陈静
方振华
廖威
栾晓雨
蒋晓东
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Laser Fusion Research Center China Academy of Engineering Physics
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Laser Fusion Research Center China Academy of Engineering Physics
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Abstract

The utility model discloses an installation centre gripping frame that is used for normal position to detect intensive heavy-calibre optical element of arranging, including the centre gripping frame body, the sunken line source that is formed with the round along the extension of centre gripping frame body circumference light source mounting groove that is formed with on the inner wall of centre gripping frame body, installs round light source mounting groove along the line at the tank bottom of this line source mounting groove and extends the slit diaphragm that round light source mounting groove extends along the line is installed to the notch of line source mounting groove, the slit of this slit diaphragm the inboard of centre gripping frame body is provided with two rings of light-shading strips, the outer fringe of light-shading strip or closely laminate with the slit diaphragm, or closely laminate with the inner wall of centre gripping frame body. By adopting the technical scheme, the method has the capabilities of eliminating the interference of adjacent elements and obtaining the damage image of the high-quality element without pseudo damage in a matching way, so that the damage of the large-caliber optical element is monitored in situ on line intuitively, and the size and distribution position information of the damage is obtained conveniently and efficiently.

Description

Mounting clamping frame for in-situ detection of densely arranged large-caliber optical elements
Technical Field
The utility model relates to an optical element installs and detects technical field, concretely relates to an installation centre gripping frame that is used for the normal position to detect intensive heavy-calibre optical element of arranging.
Background
For high power laser devices, although new laser damage resistant optical materials and processing techniques are continuously developed, laser designers are continuously raising the operating power of the system to the limit of these new materials and new processes driven by economic and technological factors, in order to achieve the goal of obtaining higher output energy as possible at a certain cost. One of the most serious challenges facing high power laser devices operating near or above the damage threshold of the optical element is the problem of laser-induced damage of the optical element, and the catastrophic problem is that once laser damage occurs, the size of the laser rapidly increases under the subsequent irradiation of laser, so that the element is scrapped, and the economic stable operation of the high power laser device is greatly restricted.
Aiming at the special operating state that the high-power laser device operates in a super-threshold mode, each damage point on a serving optical element needs to be monitored and identified, the size increase condition of each damage point is tracked, basic data of the damage state of the element is obtained, once the damage point reaches the specified size, the element is immediately off-shelf, the damage point is repaired, and the service life of the element is prolonged. Therefore, in order to economically and reliably operate a large-sized high-power laser device and maintain the stability of the optical element to improve the service life of the optical element, the capability of in-situ monitoring the laser-induced damage of the large-diameter optical element must be grasped.
At present, a large number of methods and devices for detecting damage states of large-aperture optical elements of a high-power laser device are disclosed, but the methods and devices basically perform off-line detection on elements which are arranged on a lower frame, the off-line detection is simple in working condition, only a single detected element is provided, interference of adjacent elements is avoided, and high-precision detection of element damage can be realized. For on-line in-situ monitoring, because the working conditions of elements are extremely complex and the mutual interference among the elements is very serious, a new damage in-situ monitoring method different from off-line detection must be developed.
Aiming at online in-situ detection of densely-arranged elements, an upright of the university of the Harbin industry and an upright of the university of the Harbin industry [ D ] 2017, which is an upright of a high-signal-to-noise ratio detection technology for detecting damage of large-caliber optical elements, disclose a system for realizing in-situ damage detection of large-caliber optical elements by utilizing internal total reflection side illumination of a laser light source and combining a machine vision related technology. The in-situ monitoring method does not have the capability of simply and efficiently identifying the damage, the false damage can be effectively removed and the damage information can be extracted only by means of the later machine vision algorithm processing, the constraint of removing the false damage depending on the later image processing algorithm is broken through aiming at the short board faced by the in-situ damage monitoring of the large-caliber optical element at present, design innovation is carried out, a new method and new equipment for obtaining a high-precision element damage image without the false damage are explored, and the positioning and the identification of the damage of the densely arranged large-caliber optical element are realized at a glance.
SUMMERY OF THE UTILITY MODEL
For solving the technical problem that existing equipment can not succinctly detect the damage of heavy-calibre optical element on line with high efficiency ground normal position, the utility model provides an installation centre gripping frame that is used for the normal position to detect heavy-calibre optical element of arranging intensively.
The technical scheme is as follows:
the utility model provides an installation centre gripping frame that is used for normal position to detect intensive heavy-calibre optical element of arranging, includes the centre gripping frame body, its main points lie in: the utility model discloses a clamping frame body, including the clamping frame body, the clamping frame body is provided with the slot opening, the slot opening of slot opening, the line light source mounting groove that the clamping frame body circumference extends is followed to the round that is formed with the round on the inner wall of clamping frame body is sunken, installs the line light source that the round light source mounting groove extends along the line at the tank bottom of this line light source mounting groove the slit diaphragm that the round light source mounting groove extends along the line is installed to the notch of line light source mounting groove, the slit of this slit diaphragm the inboard of clamping frame body is provided with two rings of anti-dazzling screen, the outer.
By adopting the structure, the original mounting clamping frame of the large-caliber optical element is modified, light emitted by the line light source is emitted into the large-caliber optical element through the slit of the slit diaphragm, the shading strip is used for shading the part, which is not strictly polished, of the outer edge of the large-caliber optical element to prevent scattered light from being emitted, stray light is strictly controlled, damage to other large-caliber optical elements is avoided being illuminated, only damage to the detected large-caliber optical element is illuminated, the capacity of eliminating interference of adjacent elements to obtain a high-quality element damage image without false damage is achieved, noise reduction treatment for eliminating background false damage is completely not needed for the obtained damage image, rapid distinguishing of damage to the large-caliber optical element in situ can be achieved, and damaged size and distribution position information can be conveniently and efficiently obtained.
Preferably, the method comprises the following steps: the linear light source is positioned in the middle of the bottom of the linear light source mounting groove. By adopting the structure, the arrangement of components such as a slit diaphragm and the like is convenient.
Preferably, the method comprises the following steps: the line light source is an LED line light source. By adopting the structure, the structure is stable and reliable.
Preferably, the method comprises the following steps: the slit is positioned in the middle of the slit diaphragm and is opposite to the linear light source. By adopting the structure, the light emitted by the linear light source enters from the middle position of the outer edge of the large-aperture optical element.
Preferably, the method comprises the following steps: the width and the depth of the linear light source mounting groove are the same. By adopting the structure, the arrangement of components such as a linear light source, a slit diaphragm and the like is facilitated.
Preferably, the method comprises the following steps: the width of the light-emitting surface of the linear light source is 0.3 times of the width of the linear light source mounting groove, the width of the slit diaphragm is the same as the width of the linear light source mounting groove, and the width of the slit is 0.3 times of the width and the thickness of the linear light source mounting groove. By adopting the structure, the light only can be totally reflected after entering the large-caliber optical element and can not be scattered outwards.
Preferably, the method comprises the following steps: the distance between the two circles of the shading strips is equal to the width of the linear light source mounting groove, and the shading strips are not less than 0.94 times of the width of the linear light source mounting groove. By adopting the structure, the large-caliber optical element is shielded as little as possible while light is prevented from being scattered outwards.
Compared with the prior art, the beneficial effects of the utility model are that:
the installation clamping frame for in-situ detection of densely arranged large-caliber optical elements has the advantages of being novel in concept, ingenious in design, easy to achieve, capable of eliminating interference of adjacent elements and matching with the ability of obtaining a high-quality element damage image without pseudo damage, so that damage of the large-caliber optical elements can be monitored in situ visually, and the size and distribution position information of the damage can be obtained conveniently and efficiently.
Drawings
Fig. 1 is a schematic structural view of the present invention;
FIG. 2 is a schematic diagram of the fitting relationship between a large-aperture optical element and an installation clamping frame;
FIG. 3 is a schematic diagram showing the arrangement of mounting frames each having a large-diameter optical element in a high-power laser device;
FIG. 4 is a dark field image of a large-caliber optical element I separately acquired offline;
FIG. 5 is a dark field image separately acquired offline by the large-caliber optical element II;
FIG. 6 is a dark field image of the large-caliber optical element I acquired by the existing method when the distance between the large-caliber optical element I and the large-caliber optical element II is 100 mm;
FIG. 7 is a dark field image of the large-caliber optical element I acquired by the method of the invention when the large-caliber optical element I and the large-caliber optical element II are separated by 100 mm.
Detailed Description
The present invention will be further described with reference to the following examples and accompanying drawings.
As shown in fig. 1-3, an installation clamping frame for in-situ detection dense arrangement of large-diameter optical elements comprises a clamping frame body 1, a circle of linear light source installation groove 1a extending along the circumferential direction of the clamping frame body 1 is formed on the inner wall of the clamping frame body 1 in a recessed manner, a circle of linear light source 2 extending along the linear light source installation groove 1a is installed at the bottom of the linear light source installation groove 1a, a circle of slit diaphragm 3 extending along the linear light source installation groove 1a is installed at the notch of the linear light source installation groove 1a, a slit 3a of the slit diaphragm 3 is arranged on the inner side of the clamping frame body 1, two circles of shading strips 4 are arranged on the inner side of the clamping frame body 1, and the outer edges of the shading strips 4 are tightly attached to the slit diaphragm 3 or are tightly attached to the inner wall.
Referring to fig. 2, the width and depth of the linear light source mounting groove 1a are the same. The linear light source 2 is positioned in the middle of the bottom of the linear light source mounting groove 1a, and the linear light source 2 is an LED linear light source. The slit 3a is positioned in the middle of the slit diaphragm 3 and is opposite to the linear light source 2.
The width of the light emitting surface of the linear light source 2 is 0.3 times of the width of the linear light source mounting groove 1a, the width of the slit diaphragm 3 is the same as that of the linear light source mounting groove 1a, and the width of the slit 3a is 0.3 times of the width and thickness of the linear light source mounting groove 1 a. The distance between the two circles of the shading strips 4 is equal to the width of the linear light source mounting groove 1a, and the shading strips 4 are not less than 0.94 times of the width of the linear light source mounting groove 1 a.
A method for in-situ monitoring damage of densely-arranged large-caliber optical elements is carried out according to the following steps:
s1: each large-aperture optical element 5 is embedded into each clamping frame body 1, so that the outer edge of the large-aperture optical element 5 is abutted against the slit diaphragm 3 positioned on the inner side of the corresponding clamping frame body 1, and the slit 3a of the slit diaphragm 3 is opposite to the outer edge of the corresponding large-aperture optical element 5.
S2: two circles of shading strips 4 are respectively arranged on the front side surface and the rear side surface of each large-aperture optical element 5, the outer edge of each shading strip 4 is respectively or tightly attached to the corresponding slit diaphragm 3 or tightly attached to the inner wall of the corresponding clamping frame body 1, namely, the shading strips 4 are positioned on the edges of the front light-passing surface and the rear light-passing surface of the large-aperture optical element 5 so as to shield the side edges of the large-aperture optical element 5 which are not strictly polished and avoid scattered light from escaping.
S3: the holding frame bodies 1 each of which is provided with the large-caliber optical element 5 are equidistantly installed in the high-power laser device in the front-rear direction, and thereafter, the high-power laser device can be always in an online operation state.
S4: when the damage condition of any large-caliber optical element 5 needs to be monitored in situ, the linear light source 2 of the large-caliber optical element 5 is turned on, and the linear light sources 2 of the rest large-caliber optical elements 5 are turned off.
At this time, only the damage on the large-aperture optical element 5 to be detected is illuminated, and the damage on the other large-aperture optical element 5 is not illuminated, so that a high-quality element damage image without pseudo damage can be acquired.
S5: and acquiring a dark field image of the large-caliber optical element 5 by using an image acquisition device to obtain damage and distribution data of the large-caliber optical element 5.
The image acquisition equipment is a CCD camera and an imaging lens, and can accurately acquire image information.
Repeating steps S4 and S5 can obtain an image of the damage of any large-caliber optical element 5 of interest.
The following is a comparison of dark field images of a large-aperture optical element I (430mm × 430mm × 10mm) acquired by the conventional method and a large-aperture optical element II (430mm × 430mm × 10mm) acquired by the method of the present invention in the case of the large-aperture optical element I (430mm × 430mm × 10 mm):
fig. 4 is a dark field image separately acquired by a large-aperture optical element i offline, fig. 5 is a dark field image separately acquired by a large-aperture optical element ii offline, it can be observed from fig. 4 and fig. 5 that laser damage points on the identification element can be clearly distinguished by offline detecting a dark field image of a single large-aperture optical element 5, but there are serious stray light sources around the large-aperture optical element 5, arrow a indicates stray light of a side illumination light source, arrow B indicates stray light of a side edge of the large-aperture optical element 5 which is not strictly polished, and the stray light hardly affects dark field damage detection of the single large-aperture optical element 5, but has a great effect on dark field image acquisition of the densely arranged large-aperture optical elements 5.
FIG. 6 is a dark field image of the large-caliber optical element I acquired by the existing method when the large-caliber optical element I and the large-caliber optical element II are spaced by 100mm and densely arranged front and back. Specifically, the illumination light source of the large-aperture optical element i is turned on, and the illumination light source of the large-aperture optical element ii is turned off, at this time, the illumination light source and the side stray light of the large-aperture optical element i illuminate the damage point and the side of the adjacent large-aperture optical element ii (for example, the arrow C in fig. 6), a large number of damage points of the large-aperture optical element ii appear on the dark field image of the large-aperture optical element i acquired at this time (for example, the circle surrounded by the circle frame D in fig. 6), and the damage point of the large-aperture optical element ii becomes a pseudo damage point on the dark field image of the large-aperture optical element i after being illuminated by the stray light.
Fig. 7 shows dark field images of the large-aperture optical element i acquired by the method of the present invention when the large-aperture optical element i and the large-aperture optical element ii are spaced apart by 100mm and densely arranged front and back, as can be seen from a comparison between fig. 4 and fig. 7, the dark field image of fig. 7 not only has the bright point damage characteristic completely consistent with that of the dark field image of the large-aperture optical element i acquired separately offline, but also does not have stray light of the side illumination light source indicated by the arrow a in fig. 4, and does not have stray light of the side edge of the large-aperture optical element 5 which is not strictly polished indicated by the arrow B. Therefore, by adopting the illumination method, the illumination light source and the edge scattered light of the large-caliber optical element 5 are strictly controlled, and the collected dark field image of the densely arranged large-caliber optical elements 5 can eliminate the false damage point to the maximum extent.
In this embodiment, because the thickness of heavy-calibre optical element I and heavy-calibre optical element II is 10mm, the event the width and the degree of depth of the line source mounting groove 1a of centre gripping frame body 1 are 10mm, line source 2 is LED line source, and fixed mounting is in line source mounting groove 1a intermediate position, and the luminescent surface width of LED line source is 3mm, slit 3a width of slit diaphragm 3 is 3mm, and it is installed in the notch department of line source mounting groove 1a, the width 10mm of light-shading strip 4.
Finally, it should be noted that the above description is only a preferred embodiment of the present invention, and those skilled in the art can make various similar representations without departing from the spirit and the scope of the present invention.

Claims (7)

1. The utility model provides an installation centre gripping frame that is used for normal position to detect intensive heavy-calibre optical element of arranging, includes centre gripping frame body (1), its characterized in that: sunken being formed with the round on the inner wall of centre gripping frame body (1) along the line source mounting groove (1a) that centre gripping frame body (1) circumference extends, installing round line source (2) that extend along line source mounting groove (1a) at the tank bottom of this line source mounting groove (1a) the slit diaphragm (3) that the round extends along line source mounting groove (1a) are installed to the notch of line source mounting groove (1a), slit (3a) of this slit diaphragm (3) the inboard of centre gripping frame body (1) is provided with two circles of anti-dazzling screen (4), the outer fringe of anti-dazzling screen (4) or closely laminate with slit diaphragm (3), or closely laminate with the inner wall of centre gripping frame body (1).
2. The mounting and clamping frame for in-situ detection of densely arranged large-caliber optical elements according to claim 1, wherein: the linear light source (2) is positioned in the middle of the bottom of the linear light source mounting groove (1 a).
3. The mounting and clamping frame for in-situ detection of densely arranged large-caliber optical elements according to claim 1 or 2, wherein: the linear light source (2) is an LED linear light source.
4. The mounting and clamping frame for in-situ detection of densely arranged large-caliber optical elements according to claim 2, wherein: the slit (3a) is positioned in the middle of the slit diaphragm (3) and is opposite to the linear light source (2).
5. The mounting and clamping frame for in-situ detection of densely arranged large-caliber optical elements according to claim 1, wherein: the width and the depth of the linear light source mounting groove (1a) are the same.
6. The mounting and clamping frame for in-situ detection of densely arranged large-caliber optical elements according to claim 5, wherein: the width of the light-emitting surface of the linear light source (2) is 0.3 time of the width of the linear light source mounting groove (1a), the width of the slit diaphragm (3) is the same as the width of the linear light source mounting groove (1a), and the width of the slit diaphragm (3a) is 0.3 time of the width and the thickness of the linear light source mounting groove (1 a).
7. The mounting and clamping frame for in-situ detection of densely arranged large-caliber optical elements according to claim 5, wherein: the distance between the two circles of the shading strips (4) is equal to the width of the linear light source mounting groove (1a), and the width of the shading strips (4) is not less than 0.94 times of the width of the linear light source mounting groove (1 a).
CN201920893363.0U 2019-06-14 2019-06-14 Mounting clamping frame for in-situ detection of densely arranged large-caliber optical elements Active CN210347435U (en)

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CN201920893363.0U CN210347435U (en) 2019-06-14 2019-06-14 Mounting clamping frame for in-situ detection of densely arranged large-caliber optical elements

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201920893363.0U CN210347435U (en) 2019-06-14 2019-06-14 Mounting clamping frame for in-situ detection of densely arranged large-caliber optical elements

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CN210347435U true CN210347435U (en) 2020-04-17

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