CN210325686U - Ion implanter detection device - Google Patents
Ion implanter detection device Download PDFInfo
- Publication number
- CN210325686U CN210325686U CN201921324931.1U CN201921324931U CN210325686U CN 210325686 U CN210325686 U CN 210325686U CN 201921324931 U CN201921324931 U CN 201921324931U CN 210325686 U CN210325686 U CN 210325686U
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- China
- Prior art keywords
- control box
- lead screw
- spring
- outer barrel
- outer cylinder
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000001514 detection method Methods 0.000 title claims abstract description 11
- 238000005452 bending Methods 0.000 claims description 6
- ZZUFCTLCJUWOSV-UHFFFAOYSA-N furosemide Chemical compound C1=C(Cl)C(S(=O)(=O)N)=CC(C(O)=O)=C1NCC1=CC=CO1 ZZUFCTLCJUWOSV-UHFFFAOYSA-N 0.000 claims 1
- 230000000903 blocking effect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000010884 ion-beam technique Methods 0.000 description 2
- 230000001360 synchronised effect Effects 0.000 description 2
- 230000004075 alteration Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000002513 implantation Methods 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
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Abstract
The utility model relates to the technical field of ion implanters, in particular to an ion implanter detection device, which comprises a scanning disc, a plurality of control devices which are evenly distributed are annularly arranged around the scanning disc, one end of each control device is connected with the scanning disc, a Faraday cup is arranged on each control device, each control device comprises a handle, a lead screw, an outer cylinder, a spring, a control box and a fixing seat, one end of each lead screw is fixedly connected with the handle, the other end of each lead screw extends into the outer cylinder, the outer cylinder is in a cylindrical shell structure with an open end, the inner cavity of the outer cylinder is internally provided with the spring and the control box, the control box is positioned at the open end of the outer cylinder, one end of the control box is contacted with the spring, one end of the spring is propped against the bottom surface of a groove of the outer cylinder, the structure design of the utility model realizes that the Faraday cup is fast and the space, saving a large amount of time and improving the working efficiency of the ion implanter.
Description
Technical Field
The utility model relates to an ion implanter technical field specifically is an ion implanter detection device.
Background
In order to improve the working quality of an ion implanter in the prior art, a faraday cup needs to be installed on a scanning disk, a current measuring mechanism is arranged in the ion implanter, the ion beams received by the faraday cups are different in size, so that the converted currents are different in size, and a current measuring unit detects the converted currents, so that the deviation degree of the ion beams and the scanning disk relative to an implantation angle can be quickly judged, and deviation information can be timely fed back to a control end for adjustment.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide an ion implanter detection device to solve the problem that proposes among the above-mentioned background art.
In order to achieve the above object, the utility model provides a following technical scheme: a detection device of an ion implanter comprises a scanning disc, a plurality of control devices which are uniformly distributed are annularly arranged around the scanning disc, one end of each control device is connected with the scanning disc, a Faraday cup is arranged on each control device, each control device comprises a handle, a lead screw, an outer cylinder, a spring, a control box and a fixing seat, one end of each lead screw is fixedly connected with the handle, the other end of each lead screw extends into the outer cylinder, the outer cylinder is of a cylindrical shell structure with an open end, the spring and the control box are arranged in an inner cavity of the outer cylinder, the control box is located at the position of the open end of the outer cylinder, one end of each control box is contacted with the spring, one end of each spring is abutted against the bottom surface of a groove of the outer cylinder, the spring is movably sleeved with the lead screw, one end of each lead screw extends into the control box, the control box is of a cylindrical shell structure, a circular plate, the outer barrel is provided with a handle, the outer barrel is provided with an outer barrel, one end of the outer barrel, which is far away from the handle, is connected with a fixed seat, the end part of one end of the fixed seat is fixedly embedded into a shell of the scanning disc, and the Faraday cup is arranged in the fixed seat.
Preferably, the fixing seat is a square plate, the end part of the fixing seat is integrally connected with the L-shaped bending plate, one end part of the L-shaped bending plate of the fixing seat is fixedly connected with the outer wall of the outer barrel, the square plate of the fixing seat is provided with a clamping seat, and the clamping seat is a triangular prism-shaped groove.
Preferably, the inner wall of the outer barrel is provided with a cuboid sliding groove, the outer wall of the control box is fixedly provided with a plurality of protruding sliding blocks which are uniformly distributed, and one end of each protruding sliding block extends into the sliding groove in the outer barrel.
Preferably, the outer cylinder is provided with a threaded hole, the screw rod penetrates through the threaded hole formed in the outer cylinder, and the screw rod penetrates through the columnar through hole formed in the control box.
Compared with the prior art, the beneficial effects of the utility model are that:
1. the utility model has the advantages that the structural design realizes the rapid fixation of the Faraday cup and the synchronous fixation of the space position of the scanning disc, the operation is simple, the rapid separation and combination of the Faraday cup can be completed by rotating the handle, a large amount of time is saved, and the working efficiency of the ion implanter is improved;
2. the utility model discloses a Faraday cup is cliied in the design of spring, makes control box and fixing base cooperation, and for the elasticity centre gripping, and then avoids the long-term work of ion implantation machine to get off, the vibrations problem between Faraday cup and the scanning dish.
Drawings
FIG. 1 is a schematic structural view of the present invention;
FIG. 2 is a diagram of the position distribution of the present invention;
fig. 3 is a schematic structural diagram of the control device.
In the figure: the device comprises a scanning disc 1, a control device 2, a handle 3, a lead screw 4, an outer cylinder 5, a spring 6, a control box 7, a fixing seat 8, a blocking plate 9, a blocking groove 10, a protruding sliding block 11 and a Faraday cup 12.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the technical scheme in the utility model, all other embodiments that ordinary skilled person in the art obtained under the prerequisite of not making the creative work all belong to the scope of the utility model protection.
Referring to fig. 1 to 3, the present invention provides a technical solution: a detection device of an ion implanter comprises a scanning disc 1, a plurality of control devices 2 which are uniformly distributed are annularly arranged around the scanning disc 1, one end of each control device 2 is connected with the scanning disc 1, a Faraday cup 12 is arranged on each control device 2, each control device 2 comprises a handle 3, a lead screw 4, an outer cylinder 5, a spring 6, a control box 7 and a fixed seat 8, one end of each lead screw 4 is fixedly connected with the handle 3, the other end of each lead screw 4 extends into the outer cylinder 5, the outer cylinder 5 is in a cylindrical shell structure with an open end, the spring 6 and the control box 7 are arranged in an inner cavity of the outer cylinder 5, the control box 7 is positioned at the open end position of the outer cylinder 5, one end of the control box 7 is contacted with the spring 6, one end of the spring 6 is abutted against the bottom surface of a groove of the outer cylinder 5, the spring 6 is movably sleeved with the lead screw 4, one end of, be provided with circular plate shape interception board 9 in the control box 7 inner chamber, 4 one end tip of lead screw and interception board 9 fixed connection, the one end of keeping away from handle 3 on the urceolus 5 is connected with fixing base 8, 8 one end tip fixings of fixing base imbed in the casing of scanning dish 1, faraday cup 12 sets up in fixing base 8, refer to fig. 3, faraday cup 12 is the device among the prior art, faraday cup 12's cylinder shell body runs through the inner chamber of screens seat 10, control box 7 descends to a take the altitude like this, control box 7 and screens seat 10 cooperation, clip faraday cup 12, fix its spatial position.
The fixing seat 8 is a square plate with an end integrally connected with the L-shaped bending plate, one end of the L-shaped bending plate of the fixing seat 8 is fixedly connected with the outer wall of the outer barrel 5, a clamping seat 10 is arranged on the square plate of the fixing seat 8, and the clamping seat 10 is a triangular prism-shaped groove.
The inner wall of the outer barrel 5 is provided with a cuboid sliding groove, the outer wall of the control box 7 is fixedly provided with a plurality of protruding sliding blocks 11 which are uniformly distributed, and one end of each protruding sliding block 11 extends into the sliding groove in the outer barrel 5.
Threaded holes are formed in the outer barrel 5, the screw rod 4 penetrates through the threaded holes formed in the outer barrel 5, and the screw rod 4 penetrates through the columnar through holes formed in the control box 7.
The working principle is as follows: rotating handle 3 during the use, handle 3 drives lead screw 4 and rotates, scanning dish 1 and the synchronous fixed of fixing base 8 position, fixing base 8 control urceolus 5, urceolus 5 position is motionless like this, lead screw 4 carries out axial displacement, lead screw 4 drives interception board 9, refer to figure 3, interception board 9 position descends, spring 6 rebounds like this and promotes control box 7, control box 7 moves down, control box 7 promotes faraday cup 12, faraday cup 12 is blocked the position by the card seat 10, faraday cup 12 is cliied in control box 7 and the cooperation of fixing base 8 like this, the rotation of control box 7 is avoided in the design of protrusion slider 11, and then realize that spring 6 takes place deformation steadily, reverse rotating handle 3, make faraday cup 12 break away from by the centre gripping state.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (4)
1. An ion implanter detection apparatus, comprising a scan disk (1), characterized in that: the scanning device is characterized in that a plurality of control devices (2) which are uniformly distributed are annularly arranged around the scanning disc (1), one end of each control device (2) is connected with the scanning disc (1), a Faraday cup (12) is arranged on each control device (2), each control device (2) comprises a handle (3), a lead screw (4), an outer barrel (5), a spring (6), a control box (7) and a fixing seat (8), one end of each lead screw (4) is fixedly connected with the handle (3), the other end of each lead screw (4) extends into the outer barrel (5), the outer barrel (5) is of a cylindrical shell structure with one open end, the spring (6) and the control box (7) are arranged in an inner cavity of the outer barrel (5), the control box (7) is located at the position of the open end of the outer barrel (5), one end of the control box (7) is contacted with the spring (6), one end of the spring (6) is abutted against the, spring (6) and lead screw (4) activity cup joint, during lead screw (4) one end extended to control box (7), control box (7) shape was cylindrical shell structure, was provided with discoid interception board (9) in control box (7) inner chamber, lead screw (4) one end tip and interception board (9) fixed connection, the one end of keeping away from handle (3) on urceolus (5) is connected with fixing base (8), fixing base (8) one end fixing imbeds in the casing of scanning dish (1), and faraday cup (12) set up in fixing base (8).
2. The ion implanter detection apparatus of claim 1, wherein: fixing base (8) shape is square board tip integrated connection L type bending plate, the L type bending plate one end tip and urceolus (5) outer wall fixed connection of fixing base (8), screens seat (10) have been seted up on the square board of fixing base (8), screens seat (10) shape is triangular prism form recess.
3. The ion implanter detection apparatus of claim 2, wherein: the inner wall of the outer barrel (5) is provided with a cuboid-shaped sliding groove, the outer wall of the control box (7) is fixedly provided with a plurality of protruding sliding blocks (11) which are uniformly distributed, and one end of each protruding sliding block (11) extends into the sliding groove in the outer barrel (5).
4. The ion implanter detection apparatus of claim 1, wherein: threaded holes are formed in the outer barrel (5), the screw rod (4) penetrates through the threaded holes formed in the outer barrel (5), and the screw rod (4) penetrates through the columnar through holes formed in the control box (7).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921324931.1U CN210325686U (en) | 2019-08-15 | 2019-08-15 | Ion implanter detection device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921324931.1U CN210325686U (en) | 2019-08-15 | 2019-08-15 | Ion implanter detection device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN210325686U true CN210325686U (en) | 2020-04-14 |
Family
ID=70130049
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201921324931.1U Expired - Fee Related CN210325686U (en) | 2019-08-15 | 2019-08-15 | Ion implanter detection device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN210325686U (en) |
-
2019
- 2019-08-15 CN CN201921324931.1U patent/CN210325686U/en not_active Expired - Fee Related
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20200414 |