CN210319099U

CN210319099U - Micro-shock prevention base for precision instrument

Info

Publication number: CN210319099U
Application number: CN201921316521.2U
Authority: CN
Inventors: 商富祥; 商富彬
Original assignee: Jiangsu Ruixin Integrated Circuit Equipment Co Ltd
Current assignee: Jiangsu Ruixin Integrated Circuit Equipment Co Ltd
Priority date: 2019-08-14
Filing date: 2019-08-14
Publication date: 2020-04-14
Anticipated expiration: 2029-08-14

Abstract

The utility model relates to an accurate equipment technical field specifically is a slight shock proof base for accurate instrument, which comprises a bod and a pedestal, organism bottom integrated into one piece symmetry sets up circular convex block, the circular convex block joint is in first standing groove, first standing groove sets up on the cylinder, and cylinder integrated into one piece sets up the upper end in the main part, main part bottom joint is in the second standing groove, second standing groove integrated into one piece sets up in the slide upper end, slide both sides integrated into one piece symmetry sets up the slider, to the slight shock proof base of semiconductor and photoelectron dustless room precision measurement board, through the utility model discloses can swiftly install, dismantle and change to guarantee the shockproof performance of slight shock proof base, and then guarantee accurate instrument's operating mass.

Description

Micro-shock prevention base for precision instrument

Technical Field

The utility model relates to an accurate equipment technical field specifically is a prevent slight shock base for accurate instrument.

Background

The base is used as a supporting base and a mounting platform of the precision instrument and is fixedly connected with the precision instrument through a steel fitting, the stability and the dimensional accuracy directly influence the working accuracy of the instrument, have great influence on the quality and the production safety of products after being put into production, particularly in the industries of semiconductors, photoelectricity and the like with extremely high requirements on the precision of used instruments, the installation of the anti-microseismic base of the precision measuring machine table of the semiconductor and photoelectron clean room in the prior art is usually realized by fixing the anti-microseismic base on the ground through fixing screws or realizing the fixed connection through the solidification of concrete, namely, the anti-micro-shock base is embedded into the concrete, so that although the anti-micro-shock base is fixedly installed, if the anti-micro-shock base breaks down, the anti-micro-shock base needs to be overhauled and replaced, which causes great trouble, and then the effect that takes precautions against earthquakes is influenced, influences precision instruments's operating mass, for this reason, the utility model provides a prevent slight shake base for precision instruments is used for solving above-mentioned problem.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a slight shock proof base for precision instruments to solve the problem of proposing among the above-mentioned background art.

In order to achieve the above object, the utility model provides a following technical scheme: a slight shock proof base for a precision instrument comprises a machine body and a base, wherein the bottom end of the machine body is integrally formed and symmetrically provided with round convex blocks, the round convex blocks are clamped in a first placing groove, the first placing groove is arranged on a cylinder, the cylinder is integrally formed and arranged at the upper end of a main body, the bottom end of the main body is clamped in a second placing groove, the second placing groove is integrally formed and arranged at the upper end of a sliding plate, the two sides of the sliding plate are integrally formed and symmetrically provided with sliding blocks, one end of the sliding plate is integrally formed and provided with a pull ring, the sliding blocks are slidably connected with first sliding grooves, the first sliding grooves are symmetrically arranged at the two sides of a first groove, the first groove is arranged on the base, the two sides of the inner side of the first groove are symmetrically provided with a second sliding groove and a fixing hole, a pin is inserted into the fixing hole, the bottom end of the first groove is provided, rack one end integrated into one piece sets up in backup pad, the other end extends to the third recess, the third recess sets up at the base avris, the rack is connected with gear engagement, the gear welding is in the one end of axis of rotation, axis of rotation other end integrated into one piece sets up the disc, the axis of rotation runs through the setting in the fixed plate, the fixed plate passes through screw fixed connection with the base, base bottom avris integrated into one piece symmetry sets up the connection foot, it sets up the fixed orifices to connect the foot.

Preferably, the first sliding groove is communicated with the second sliding groove, the second sliding groove corresponds to the sliding block in arrangement position, and the distance between the two second sliding grooves on the same side of the first groove is equal to the distance between the two sliding blocks on the same side of the sliding plate.

Preferably, the diameter of the round bump is the same as that of the first placing groove.

Preferably, the rack and the gear have the same tooth form angle and module.

Preferably, the diameter of the supporting plate is the same as the diameter of the second groove, and the thickness of the supporting plate is the same as the height of the second groove.

Compared with the prior art, the beneficial effects of the utility model are that:

to the anti-microseism base of semiconductor and photoelectron dust free chamber precision measurement board, through the utility model discloses can swiftly install, dismantle and change to guarantee the anti-seismic performance of anti-microseism base, and then guarantee the operating mass with rated load of precision instruments.

Drawings

FIG. 1 is a schematic structural view of the present invention;

FIG. 2 is a top view of the base structure of the present invention;

FIG. 3 is a bottom view of the base structure of the present invention;

fig. 4 is the schematic view of the connection structure of the placing groove and the sliding plate of the present invention.

In the figure: the structure comprises a machine body 1, a circular convex block 2, a column 3, a first placing groove 4, a second placing groove 5, a sliding plate 6, a sliding block 7, a pull ring 8, a first sliding groove 9, a second sliding groove 10, a fixing hole 11, a base 12, a first groove 13, a second groove 14, a main body 15, a rack 16, a supporting plate 17, a gear 18, a rotating shaft 19, a disc 20, a fixing plate 21, a screw 22, a connecting foot 23, a fixing hole 24, a third groove 25 and a pin 26.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

Referring to fig. 1 to 4, the present invention provides a technical solution: the utility model provides a slight shock proof base for precision instrument, the utility model discloses a organism 1 and base 12, to 1 bottom integrated into one piece symmetry of this organism set up circular convex block 2, circular convex block 2 joint is in first standing groove 4, and circular convex block 2 diameter and first standing groove 4 diameter require the same, so can firm joint, set up on cylinder 13 for first standing groove 4, and cylinder 13 integrated into one piece sets up in the upper end of main part 15, and main part 15 bottom joint is in second standing groove 5, second standing groove 5 integrated into one piece here sets up in slide 6 upper end, slide 6 both sides integrated into one piece symmetry sets up slider 7, set up pull ring 8 in slide 6 one end integrated into one piece, slider 7 sliding connection first spout 9, first spout 9 symmetry sets up in first recess 13 both sides, first recess 13 sets up on base 12, and the inboard both sides of first recess 13 still symmetry set up second spout 10, Fixed orifices 11, it sets up to require first spout 9 and second spout 10 to be linked together, second spout 10 and slider 7 set up the position and will correspond, and the distance between two second spouts 10 on the same avris of first recess 13 will equal with the distance between two sliders 7 on the same avris of slide 6, like this when slide 6 slides and gets into first spout 9, the slider 7 on slide 6 both sides can be aimed at with second spout 10, and then can carry out the upwards slip, peg 26 has been pegged graft in fixed orifices 11, peg 26 is for fixed slide 6 with the grafting purpose of fixed orifices 11, thereby can not let its whereabouts.

The second groove 14 is arranged at the bottom end of the first groove 13, the second groove 14 is provided with a rack 16 in a penetrating way, one end of the rack 16 is integrally provided with a support plate 17, the other end of the rack extends into a third groove 25, the support plate 17 is used for supporting the sliding plate 6 to move upwards under the pushing action of the rack 16, the diameter of the support plate 17 is the same as that of the second groove 14, the thickness of the support plate 17 is the same as that of the second groove 14, only the upper surface of the support plate 17 is kept flush with the bottom surface of the first groove 13 when the support plate 17 is stopped in the second groove 14, the third groove 25 is arranged at the side of the base 12, the rack 16 is meshed with the gear 18, the rack 16 and the gear 18 are required to have the same tooth form angle and module, the transmission action can be better realized, the gear 18 is welded at one end of the rotating shaft 19, the rotating shaft 19 is arranged in the fixing plate 21 in a penetrating way, the fixing plate 21 is fixedly connected with the base 12 through the screw 22, the connecting feet 23 are symmetrically arranged at the bottom end side of the base 12 in an integrated forming way, the connecting feet 23 are provided with the fixing holes 24, when the main body 1 of the utility model needs to be disassembled and replaced, the pins 26 at the two sides of the base 12 are firstly pulled out from the fixing holes 11, then the disc 20 is rotated to drive the gear 18 and the rack 16 to run, further the supporting plate 17 is driven to move downwards, the main body 15 arranged in the second placing groove 5 can also move downwards until the first placing groove 4 on the main body 15 is separated from the circular ring lug 2 on the machine body 1, at the moment, the sliding plate 6 just reaches the bottom end of the first groove 13, then the pull ring 8 is pulled to pull out the sliding plate 6, then the main body 1 is taken out from the second placing groove 5 to complete the disassembling work, and then the maintenance, when needs install, place new main part 1 in second standing groove 5 earlier, promote slide 6 at this moment again and get into first recess 13, when slider 7 aligns with second spout 10, when slide 6 slided the first recess 13 other end promptly, at this moment reverse rotation disc 20 again, drive the operation of gear 18 and rack 16, and then promote backup pad 17 rebound, and then promote slide 6 and main part 1 rebound, when slider 7 removed second spout 10 top is first standing groove 4 promptly and carries out the joint with circular convex block 2, insert pin 26 again in the fixed orifices 11, can fix slide 6, and then install fixedly fast main part 1.

The working principle is as follows: for the micro-vibration-proof base of the precision measuring machine platform of the semiconductor and photoelectron dust-free chamber, the utility model can be quickly installed, disassembled and replaced, thereby ensuring the vibration-proof performance of the micro-vibration-proof base and further ensuring the working quality of the precision instrument, when the installation and the fixation are needed, a new main body 1 is firstly placed in the second placing groove 5, then the sliding plate 6 is pushed to enter the first groove 13, when the sliding block 7 is aligned with the second sliding groove 10, namely the sliding plate 6 slides to the other end of the first groove 13, then the disc 20 is rotated to drive the operation of the gear 18 and the rack 16, further the supporting plate 17 is pushed to move upwards, further the sliding plate 6 and the main body 1 are pushed to move upwards, when the sliding block 7 moves to the top end of the second sliding groove 10, namely the first placing groove 4 is clamped with the round lug 2, then the pin 26 is inserted into the fixing hole 11, thus the sliding plate 6 can be fixed, and then install fixedly fast main part 1, when needing to dismantle and change main part 1, only need earlier follow the fixed orifices 11 with the pin 26 of both sides on the base 12 in, extract, the operation that the disc 20 drove gear 18 and rack 16 is rotated in the opposite direction again, and then drive backup pad 17 downstream, main part 15 placed in second standing groove 5 also can downstream, until first standing groove 4 on main part 15 separates with ring lug 2 on the organism 1, at this moment, slide 6 just reachs the bottom of first recess 13, pull tab 8 again, pull out slide 6, take out main part 1 from second standing groove 5 again and can accomplish fast and dismantle the work, just can maintain and change work after that.

Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.

Claims

1. The utility model provides an anti-microseismic base for precision instruments, includes organism (1) and base (12), its characterized in that: organism (1) bottom integrated into one piece symmetry sets up circular convex block (2), circular convex block (2) joint is in first standing groove (4), first standing groove (4) set up on cylinder (3), and cylinder (3) integrated into one piece sets up the upper end in main part (15), main part (15) bottom joint is in second standing groove (5), second standing groove (5) integrated into one piece sets up in slide (6) upper end, slide (6) both sides integrated into one piece symmetry sets up slider (7), slide (6) one end integrated into one piece sets up pull ring (8), slider (7) sliding connection first spout (9), first spout (9) symmetry sets up in first recess (13) both sides, first recess (13) set up on base (12), first recess (13) inboard both sides symmetry sets up second spout (10), A fixing hole (11), a pin (26) is inserted into the fixing hole (11), a second groove (14) is arranged at the bottom end of the first groove (13), the second groove (14) is provided with a rack (16) in a penetrating way, one end of the rack (16) is integrally provided with a support plate (17), the other end extends into the third groove (25), the third groove (25) is arranged at the side of the base (12), the rack (16) is meshed and connected with the gear (18), the gear (18) is welded at one end of the rotating shaft (19), the other end of the rotating shaft (19) is integrally provided with a disc (20), the rotating shaft (19) is arranged in a fixing plate (21) in a penetrating way, the fixing plate (21) is fixedly connected with the base (12) through a screw (22), base (12) bottom avris integrated into one piece symmetry sets up connects foot (23), connect foot (23) and set up fixed orifices (24).

2. A microseismic proof base for precision instruments as recited in claim 1 wherein: the first sliding groove (9) is communicated with the second sliding groove (10), the second sliding groove (10) corresponds to the sliding block (7) in position, and the distance between the two second sliding grooves (10) on the same side of the first groove (13) is equal to the distance between the two sliding blocks (7) on the same side of the sliding plate (6).

3. A microseismic proof base for precision instruments as recited in claim 1 wherein: the diameter of the round convex block (2) is the same as that of the first placing groove (4).

4. A microseismic proof base for precision instruments as recited in claim 1 wherein: the rack (16) and the gear (18) have the same tooth form angle and module.

5. A microseismic proof base for precision instruments as recited in claim 1 wherein: the diameter of the support plate (17) is the same as that of the second groove (14), and the thickness of the support plate (17) is the same as that of the second groove (14).