CN210313900U - Integrated treatment system for semiconductor industrial wastewater - Google Patents
Integrated treatment system for semiconductor industrial wastewater Download PDFInfo
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- CN210313900U CN210313900U CN201920830720.9U CN201920830720U CN210313900U CN 210313900 U CN210313900 U CN 210313900U CN 201920830720 U CN201920830720 U CN 201920830720U CN 210313900 U CN210313900 U CN 210313900U
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Abstract
The utility model discloses a be used for semiconductor industrial waste water integration processing system, including waste water collecting tank, MBR membrane processing unit, active carbon filter unit, MF processing unit, waste water collecting tank passes through the pipeline and is connected with MBR membrane processing unit, active carbon filter unit, MF processing unit in proper order, and the tank, each part passes through the pipe connection, has constituted integration processing system, and the semiconductor waste water of processing is mainly organic waste water, and its water after purifying mainly is used cooling tower, waste gas washing tower and afforestation water in the factory, and this integration processing system not only can practice thrift a large amount of water resources, reduces environmental pollution moreover, solves semiconductor industrial waste water recycling problem, realizes waste water resource.
Description
Technical Field
The utility model belongs to industry regeneration water treatment field especially relates to a be used for semiconductor industrial waste water integration processing system.
Background
The semiconductor industry is a high energy consumption industry, and a large amount of industrial wastewater is generated in the semiconductor production and manufacturing process. With the increasing shortage of water and other resources and the increasingly urgent need for environmental pollution control, the industrial wastewater is developed in the following ways: water and pollutants are recycled as useful resources and a closed cycle is implemented. The membrane separation technology can perfectly meet the standards, and with the development of water treatment technology, the technology is gradually applied to a water treatment link.
In the field of sewage treatment and water resource recycling, MBR (Membrane bioreactor) is a novel water treatment technology combining an activated sludge process and a Membrane separation technology.
In the application number: CN201820915919.7, having the filing date of 20180613 names: the utility model provides an in the patent to STREAMING MBR effluent treatment plant, discloses a STREAMING MBR effluent treatment plant, including MBR pond, MBR diaphragm and fan, the inside downside in MBR pond is connected with first connecting block, and the top block of first connecting block is connected with MBR membrane connecting block, the right downside in MBR pond is provided with the fourth valve, and the fourth valve is connected with the MBR pond through the bi-pass water pipe, the fan is connected with MBR membrane connecting block through the bi-pass water pipe, and the left side of fan is provided with first valve to first valve is located the right side in MBR pond, the upper and lower both sides of MBR diaphragm all set up with MBR membrane connecting block. The convection type MBR wastewater treatment equipment.
In the application number: CN201620520752.5, filed as follows: 20160601 name: a water treatment device is disclosed in the patent of the water treatment device, the water treatment device at least comprises a grid filter tank, an advanced oxidation unit, a biological activated carbon adsorption tank and an MF (media frequency) filtering unit, a first ozone contact tank and the biological activated carbon adsorption tank are connected with the grid filter tank in advance through a water tank after filtration in parallel, and a second ozone contact tank unit is connected with the biological activated carbon adsorption tank in a bidirectional mode; the biological activated carbon adsorption tank is connected with an MF filtration unit, and the MF filtration unit is connected with an MF water production tank; the mesh filter tank is respectively connected with a water inlet lift pump, a PFS/PFM dosing device, a wastewater collecting box, a wastewater lift pump, a filtered water tank, a filtered water lift pump and a backwashing pump; the advanced oxidation unit includes a first ozone contact tank and a second ozone contact tank. The utility model discloses have great meaning in the aspect of energy saving and consumption reduction environmental protection.
Disclosure of Invention
The utility model aims to provide a technical problem who is used for semiconductor industrial waste water integration processing system.
The purpose of the utility model can be realized through the following technical scheme:
an integrated treatment system for semiconductor industrial wastewater comprises a wastewater collection tank, an MBR membrane treatment unit, an active carbon filtration unit and an MF treatment unit, wherein the wastewater collection tank is sequentially connected with the MBR membrane treatment unit, the active carbon filtration unit and the MF treatment unit through pipelines, and a water storage tank;
the MBR membrane treatment unit comprises a pH adjusting tank, an anaerobic tank, an anoxic tank, an aerobic tank, an MBR integrated device and an MBR water production tank, wherein the pH adjusting tank, the anaerobic tank, the anoxic tank, the aerobic tank and the MBR integrated device are sequentially connected through a pipeline;
the active carbon filtering unit comprises an active carbon filter, the active carbon filter is a pressure container filled with a coarse quartz sand cushion layer and active carbon,
the MF treatment unit comprises a filter element, wherein the filter element comprises a microfiltration membrane, an inner flow guide layer, an outer flow guide layer, a filter element end cover, a shell and a center rod.
Preferably, the MBR integrated device comprises an activated sludge system, the activated sludge system is arranged in front of the MBR membrane module, and the wastewater enters the activated sludge system through a pipeline through an aerobic tank.
More preferably, a suction pump is arranged between the MBR water storage tank and the MBR water production tank.
More preferably, the pore size of the MBR membrane module is 0.01-0.03 μm.
More preferably, the MBR membrane treatment unit further comprises a sludge return system and a backwash pump, wherein the sludge return system is arranged in the MBR integrated device, and the backwash pump is arranged in the sludge return system.
Preferably, the shell of the activated carbon filter is made of stainless steel or glass fiber reinforced plastic.
Preferably, the microfiltration membrane of the MF treatment unit is an organic polymer membrane.
The utility model has the advantages that:
this system wastewater collection pond, MBR membrane processing unit, active carbon filter unit, MF processing unit's setting make this system not only can effectually get rid of the pollutant of semiconductor industrial waste water, can realize waste water cycle recycle moreover, not only can practice thrift a large amount of water resources, reduce environmental pollution moreover.
Drawings
FIG. 1 is a schematic structural diagram of an integrated treatment system for semiconductor industrial wastewater.
Detailed Description
The technical scheme of the utility model is further described with the attached drawings:
an integrated treatment system for semiconductor industrial wastewater comprises a wastewater collection tank, an MBR membrane treatment unit, an active carbon filtration unit and an MF treatment unit, wherein the wastewater collection tank is sequentially connected with the MBR membrane treatment unit, the active carbon filtration unit and the MF treatment unit through pipelines, and a water storage tank;
the MBR membrane treatment unit comprises a pH adjusting tank, an anaerobic tank, an anoxic tank, an aerobic tank, an MBR integrated device and an MBR water production tank, wherein the pH adjusting tank, the anaerobic tank, the anoxic tank, the aerobic tank and the MBR integrated device are sequentially connected through a pipeline;
the active carbon filtering unit comprises an active carbon filter, the active carbon filter is a pressure container filled with a coarse quartz sand cushion layer and active carbon,
the MF treatment unit comprises a filter element, wherein the filter element comprises a microfiltration membrane, an inner flow guide layer, an outer flow guide layer, a filter element end cover, a shell and a center rod.
In this embodiment, preferably, the MBR integrated apparatus includes an activated sludge system, the activated sludge system is disposed before the MBR membrane module, and the wastewater enters the activated sludge system through a pipeline via an aerobic tank.
In this embodiment, preferably, a suction pump is disposed between the MBR water storage tank and the MBR water production tank.
In this embodiment, preferably, the pore size of the MBR membrane module is 0.01 μm to 0.03 μm.
In this embodiment, preferably, the MBR membrane treatment unit further includes a sludge return system and a backwash pump, the sludge return system is disposed in the MBR integrated device, and the backwash pump is disposed in the sludge return system.
In this embodiment, preferably, the housing of the activated carbon filter is made of stainless steel or glass fiber reinforced plastic.
In this embodiment, the microfiltration membrane of the MF treatment unit is preferably an organic polymer membrane.
The MBR membrane treatment unit comprises a pH adjusting tank, an anaerobic tank, an anoxic tank, an aerobic tank and an MBR integrated device, and a water production tank. The semiconductor industrial wastewater is firstly discharged into a wastewater collecting tank, sequentially enters a pH adjusting tank, an anaerobic tank, an anoxic tank and an aerobic tank, is subjected to biochemical treatment at the front end of an activated sludge system, and then enters an MBR integrated device, wherein the MBR integrated device is provided with the activated sludge system, a bioreactor, an air blower, a suction pump, a sludge reflux system and a backwashing pump, and an MBR membrane assembly is arranged inside the bioreactor.
Wherein the MBR process belongs to an integrated structure, the membrane module is arranged in the bioreactor, the inlet water enters the membrane-bioreactor, most pollutants in the inlet water are removed by activated sludge in the mixed liquid, the aeration is continuously carried out by adopting an air blower, and the outlet water is filtered by the MBR membrane under the action of negative pressure. And enters the MBR water production tank through a suction pump. Effluent enters an MBR water production tank, then enters an active carbon filtering device through a pump, the wastewater is deeply treated by utilizing the stronger adsorption property of active carbon, then the effluent enters a microfiltration filter, and finally the effluent is mainly used for water consumption of cooling towers, waste gas washing towers, greening irrigation and the like in a plant area.
The active carbon filter unit is mainly an active carbon filter, is a pressure container filled with a coarse quartz sand cushion layer and high-quality active carbon, the shell is generally stainless steel or glass fiber reinforced plastic, and the active carbon filter is used for filtering free objects, microorganisms and partial heavy metal ions in water and effectively reducing the chromaticity of the water.
The activated carbon filter mainly utilizes the activated carbon organic flocculating constituent with high carbon content, large molecular weight and large specific surface area to physically adsorb impurities in water, so as to meet the water quality requirement, and when water flows through pores of activated carbon, various suspended particles, organic matters and the like are adsorbed in the pores of the activated carbon under the action of van der Waals force; meanwhile, chlorine (hypochlorous acid) adsorbed on the surface of the activated carbon is chemically reacted on the surface of the activated carbon and reduced into chloride ions, thereby effectively removing chlorine and ensuring that the residual chlorine content of effluent is less than 0.1 ppm. And further removing residual chlorine, organic matters and suspended matters in the effluent of the MBR membrane reactor by using granular activated carbon, thereby providing good conditions for subsequent MF treatment.
The principle of activated carbon adsorption is that a layer of balanced surface concentration is formed on the surface of the particles, and then organic substances are adsorbed into the activated carbon particles, so that the adsorption effect is very high at the initial stage of use. However, the adsorption capacity of the activated carbon is reduced to some extent with a long time, and the adsorption effect is reduced. The performance difference of the filled active carbon can achieve different treatment effects, and organic matters, chromaticity, residual chlorine, partial heavy metal ions, detergents, bacteria, viruses and the like in water are mainly removed; the content of the effluent of the activated carbon filter is detected regularly, when the residual chlorine is more than 0.1mg/l, the adsorption is saturated, the effluent can not be sent to a microfiltration filter treatment device, and the activated carbon must be replaced in time.
The wastewater is further purified after being filtered by the activated carbon, and is pumped into a microfiltration treatment unit of a precision filter by a pump, the microfiltration operation is simple, the water passing capacity is large, the working pressure is low, and the water production rate is high; microfiltration is also called microfiltration, and belongs to a separation process of microfiltration, wherein particles such as gravel, silt, clay and the like in a solution, giardia, cryptosporidium, algae, some bacteria and the like are trapped, and a large amount of solvent, small molecules and a small amount of macromolecular solute can permeate a membrane.
The MF treatment unit organically combines microfiltration equipment with matched equipment to form an independent microfiltration system, wherein the microfiltration system comprises a microfiltration membrane, an inner flow guide layer, an outer flow guide layer, a filter element end cover, a shell, a center rod and the like and can also form a filter element. The physical structure, shape and size of the large pores of the membrane determine the separation effect of the membrane. According to the interception position of the particles in the micro-filtration process, the micro-filtration process can be divided into 3 interception mechanisms, namely screening, adsorption and bridging. The wastewater is further purified after being filtered by the activated carbon, and is pumped into a microfiltration treatment unit of a precision filter by a pump, the microfiltration operation is simple, the water passing capacity is large, the working pressure is low, and the water production rate is high; microfiltration is also called microfiltration, and belongs to a separation process of microfiltration, wherein particles such as gravel, silt, clay and the like in a solution, giardia, cryptosporidium, algae, some bacteria and the like are trapped, and a large amount of solvent, small molecules and a small amount of macromolecular solute can permeate a membrane.
The semiconductor industrial wastewater after microfiltration treatment is mainly used for cooling towers in factories, waste gas washing towers and greening irrigation water.
Wherein, the main water quality indexes of the organic wastewater are as follows: the pH value is 5.5-8.5, the COD is 500-1000mg/l, the NH3-N is 50-100mg/l, the SS is 10-100mg/l, the effluent treated by the combined process has the index pH value of 6.5-7.5, the COD is 10-30mg/l, and the NH content is3the-N is 0.1-1mg/l, the removal rate of main pollutants can reach more than 95%, the removal rate of SS is 100%, the quality of effluent water reaches the quality of municipal sewage recycling industry, and the quality of effluent water is good and stable.
The MBR processing unit sequentially comprises: a pH adjusting tank, an anaerobic tank, an anoxic tank, an aerobic tank and an MBR integrated device, wherein the aperture of an MBR membrane component is 0.01-0.03 μm; the MBR membrane bioreactor is a new technology combining a biological treatment technology and a membrane separation technology, replaces a secondary sedimentation tank in the traditional technology, and can efficiently carry out solid-liquid separation to obtain directly used stable reclaimed water. But also can maintain high-concentration microorganism biomass in the biological tank, the process has less excess sludge, extremely effectively removes ammonia nitrogen, the suspended matters and turbidity of the effluent are close to zero, bacteria and viruses in the effluent are greatly removed, the energy consumption is low, and the occupied area is small.
The MF treatment unit selects a microporous filter membrane as a filter medium, and removes impurity particles with certain sizes in water in a physical interception mode. Under the driving of pressure, substances with small sizes such as water, organic low molecules, inorganic ions and the like in the solution can reach the other side of the membrane through micropores on the fiber wall, and large-sized substances such as thalli, colloids, particulate matters, organic macromolecules and the like in the solution cannot penetrate through the fiber wall to be intercepted, so that the aim of screening different components in the solution is fulfilled. The process is operated at normal temperature, has no phase change and does not produce secondary pollution.
Finally, it should be noted that:
the skilled person can, with reference to the present disclosure, carry out the method and carry out its application, it being expressly noted that all similar substitutes and modifications apparent to the skilled person are deemed to be included within the present invention. The method and application of the present invention have been described in terms of preferred embodiments, and it will be apparent to those skilled in the art that the techniques of the present invention may be practiced and used without departing from the spirit and scope of the present invention by modifying or otherwise appropriately changing or combining the various methods and applications of the present invention.
The above embodiments are only used for illustrating but not limiting the technical solutions of the present invention, and although the present invention is described in detail with reference to the above embodiments, those of ordinary skill in the art should understand that: modifications and equivalents may be made thereto without departing from the spirit and scope of the invention, and the appended claims are intended to cover such modifications and equivalents as fall within the spirit and scope of the invention.
Claims (7)
1. The utility model provides a be used for semiconductor industrial waste water integration processing system which characterized in that:
the device comprises a wastewater collection tank, an MBR membrane treatment unit, an active carbon filtration unit and an MF treatment unit, wherein the wastewater collection tank is sequentially connected with the MBR membrane treatment unit, the active carbon filtration unit and the MF treatment unit through pipelines, and a water storage tank;
the MBR membrane treatment unit comprises a pH adjusting tank, an anaerobic tank, an anoxic tank, an aerobic tank, an MBR integrated device and an MBR water production tank, wherein the pH adjusting tank, the anaerobic tank, the anoxic tank, the aerobic tank and the MBR integrated device are sequentially connected through a pipeline;
the active carbon filtering unit comprises an active carbon filter, the active carbon filter is a pressure container filled with a coarse quartz sand cushion layer and active carbon,
the MF treatment unit comprises a filter element, wherein the filter element comprises a microfiltration membrane, an inner flow guide layer, an outer flow guide layer, a filter element end cover, a shell and a center rod.
2. The integrated semiconductor industrial wastewater treatment system according to claim 1, wherein: the MBR integrated device comprises an activated sludge system, wherein the activated sludge system is arranged in front of an MBR membrane module, and the wastewater enters the activated sludge system through a pipeline through an aerobic tank.
3. The integrated semiconductor industrial wastewater treatment system according to claim 2, wherein: and a suction pump is arranged between the MBR water storage tank and the MBR water production tank.
4. The integrated semiconductor industrial wastewater treatment system according to claim 3, wherein: the aperture of the MBR membrane module is 0.01-0.03 μm.
5. The integrated semiconductor industrial wastewater treatment system according to claim 4, wherein: the MBR membrane treatment unit further comprises a sludge backflow system and a backwashing pump, the sludge backflow system is arranged in the MBR integrated device, and the backwashing pump is arranged in the sludge backflow system.
6. The integrated semiconductor industrial wastewater treatment system according to claim 1, wherein: the shell of the activated carbon filter is made of stainless steel or glass fiber reinforced plastic.
7. The integrated semiconductor industrial wastewater treatment system according to claim 1, wherein: and the microfiltration membrane of the MF treatment unit is an organic polymer membrane.
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| CN201920830720.9U CN210313900U (en) | 2019-06-04 | 2019-06-04 | Integrated treatment system for semiconductor industrial wastewater |
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| CN201920830720.9U CN210313900U (en) | 2019-06-04 | 2019-06-04 | Integrated treatment system for semiconductor industrial wastewater |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN112028378A (en) * | 2019-06-04 | 2020-12-04 | 伟泰科技（无锡）有限公司 | Integrated treatment system for semiconductor industrial wastewater |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN112028378A (en) * | 2019-06-04 | 2020-12-04 | 伟泰科技（无锡）有限公司 | Integrated treatment system for semiconductor industrial wastewater |
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