CN210287514U - Vacuum coating machine dustproof structure capable of preventing pollution - Google Patents

Vacuum coating machine dustproof structure capable of preventing pollution Download PDF

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Publication number
CN210287514U
CN210287514U CN201920795709.3U CN201920795709U CN210287514U CN 210287514 U CN210287514 U CN 210287514U CN 201920795709 U CN201920795709 U CN 201920795709U CN 210287514 U CN210287514 U CN 210287514U
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CN
China
Prior art keywords
coating machine
vacuum coating
air
air supply
machine main
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201920795709.3U
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Chinese (zh)
Inventor
王金泉
何东孝
王菊姿
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Changzhou Aihua Vacuum Equipment Co ltd
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Changzhou Aihua Vacuum Equipment Co ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Application filed by Changzhou Aihua Vacuum Equipment Co ltd filed Critical Changzhou Aihua Vacuum Equipment Co ltd
Priority to CN201920795709.3U priority Critical patent/CN210287514U/en
Application granted granted Critical
Publication of CN210287514U publication Critical patent/CN210287514U/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Abstract

The utility model provides a vacuum coating machine dustproof structure capable of preventing pollution, which comprises a discharge hole, a seal seat, an air supply valve, a drying box, an air outlet valve, an air outlet, a seal bottom plate, a vacuum coating chamber, an air supply pipe and a drying agent, wherein the seal seat is assembled on the upper side of a coating machine main body, the discharge hole is arranged on the middle side of the seal seat, the air supply pipe is installed on the right side of the coating machine main body, the air supply valve is installed on the upper side of the air supply pipe, the right side of the air supply pipe is connected with the drying box, the drying agent is assembled in the drying box, the seal bottom plate is installed on the lower side in the coating machine main body, the air outlet is arranged, this design has solved original vacuum coating machine and can not effectively dirt-proof problem, the utility model discloses rational in infrastructure, external dust gets into when being convenient for effectively prevent to stop vacuum coating.

Description

Vacuum coating machine dustproof structure capable of preventing pollution
Technical Field
The utility model relates to a vacuum coating machine dustproof construction capable of preventing pollution, which belongs to the technical field of vacuum coating machines.
Background
The vacuum coating machine mainly refers to a coating machine which needs to be carried out under a higher vacuum degree, and specifically comprises various types, including vacuum ion evaporation, magnetron sputtering, MBE molecular beam epitaxy, PLD laser sputtering deposition and the like. The main idea is to divide into evaporation and sputtering.
When carrying out vacuum coating to the article, external dust particle entering device often can appear, and the coating film suffers the pollution, makes vacuum coating can not have effectively going on, and current equipment vacuum coating machine can not effectively prevent dust, and the problem that the aforesaid appears is solved to the urgent need for a vacuum coating machine dustproof construction that can prevent to receive the pollution now.
SUMMERY OF THE UTILITY MODEL
The utility model aims to provide a vacuum coating machine dustproof construction that can prevent to receive the pollution to solve the problem that proposes in the above-mentioned background art, the utility model discloses it is rational in infrastructure, be convenient for effectively prevent external dust when preventing vacuum coating and get into.
In order to achieve the above purpose, the present invention is realized by the following technical solution: a vacuum coating machine dustproof structure capable of preventing pollution comprises a coating machine main body, a sealing cover, a dustproof mechanism and an air blower, wherein the sealing cover is installed on the upper side of the coating machine main body, the dustproof mechanism is arranged inside the coating machine main body, the air blower is installed on the right side of the coating machine main body, the dustproof mechanism comprises a discharge hole, a sealing seat, an air supply valve, a drying box, an air outlet valve, an air outlet, a sealing bottom plate, a vacuum coating chamber, an air supply pipe and a drying agent, the sealing seat is assembled on the upper side of the coating machine main body, the discharge hole is formed in the middle side of the sealing seat, the air supply pipe is installed on the right side of the coating machine main body, the air supply valve is installed on the upper side of the air supply pipe, the drying box is connected to the right side of the air supply pipe, the, an air outlet valve is installed on the right side of the air outlet, and a vacuum coating chamber is formed in the coating machine main body.
Furthermore, a movable twisting head is installed on the rear end face of the sealing cover, and the sealing cover is connected with the sealing seat through the movable twisting head.
Further, the annular side surface of the sealing cover is provided with a rubber pad, and the annular side surface of the sealing cover is matched with the sealing seat.
Further, the lower side of the air supply valve is provided with a ball valve, and the annular side surface of the ball valve is matched with the inside of the air supply pipe.
Furthermore, the right side of the air outlet is connected with an air outlet pipe, and the air outlet pipe penetrates through the sealing bottom plate to be connected with the vacuum coating chamber.
Furthermore, a blast opening is formed in the rear side of the air blower, and the air blower is connected with an external power supply through a lead.
The utility model has the advantages that: the utility model discloses a can prevent to receive vacuum coating machine dustproof construction of pollution, because of the utility model discloses add drain hole, seal receptacle, air supply valve, drying cabinet, air outlet valve, gas outlet, sealing bottom plate, vacuum coating room, air supply pipe and drier, this design can effectively improve vacuum coating machine dustproofness, has solved original vacuum coating machine and can not effectively dirt-proof problem, has improved the utility model discloses a high-efficient dustproofness.
Because of sealed lid rear end face installs movable hank head, this design is convenient to be opened and close sealed lid, is equipped with the rubber pad because of sealed lid annular side, and this design makes sealed lid keep sealed with the external world when closing, is equipped with the globe valve because of the air feed valve downside, and this design is convenient to be opened and closes the air supply pipe, is connected with the outlet duct because of the gas outlet right side, and the outlet duct passes sealed bottom plate and is connected with the vacuum coating room, and this design makes the indoor portion of vacuum coating's gas effectively discharge, the utility model discloses it is rational in infrastructure, be convenient for effectively prevent external dust when preventing vacuum coating from.
Drawings
Other features, objects and advantages of the invention will become more apparent upon reading of the detailed description of non-limiting embodiments with reference to the following drawings:
FIG. 1 is a schematic structural view of a vacuum coater dustproof structure capable of preventing contamination according to the present invention;
FIG. 2 is a schematic structural view of a dustproof mechanism in a dustproof structure of a vacuum coating machine for preventing contamination according to the present invention;
FIG. 3 is a front sectional view of a dustproof mechanism of a vacuum coating machine for preventing contamination according to the present invention;
in the figure: 1-coating machine body, 2-sealing cover, 3-dustproof mechanism, 4-blower, 31-discharging port, 32-sealing seat, 33-air supply valve, 34-drying box, 35-air outlet valve, 36-air outlet, 37-sealing bottom plate, 38-vacuum coating chamber, 331-air supply pipe and 341-drying agent.
Detailed Description
In order to make the technical means, creation features, achievement purposes and functions of the present invention easy to understand, the present invention is further described below with reference to the following embodiments.
Referring to fig. 1-3, the present invention provides a technical solution: the utility model provides a can prevent to receive vacuum coating machine dustproof construction of pollution, includes coating machine main part 1, sealed lid 2, dustproof mechanism 3 and air-blower 4, and sealed lid 2 is installed to 1 upside of coating machine main part, and 1 inside dustproof mechanism 3 that is provided with of coating machine main part, air-blower 4 are installed on 1 right side of coating machine main part.
Dustproof mechanism 3 includes drain hole 31, seal receptacle 32, air feed valve 33, drying cabinet 34, air outlet valve 35, gas outlet 36, seal bottom plate 37, vacuum coating room 38, air supply pipe 331 and drier 341, 1 upside of coating machine main part is equipped with seal receptacle 32, seal receptacle 32 mid-side is opened and is equipped with drain hole 31, air supply pipe 331 is installed on coating machine main part 1 right side, air feed valve 33 is installed to air supply pipe 331 upside, air supply pipe 331 right side is connected with drying cabinet 34, 34 inside is equipped with drier 341 of drying cabinet, seal bottom plate 37 is installed to the inside downside of coating machine main part 1, gas outlet 36 has been seted up to seal bottom plate 37 downside, air outlet valve 35 is installed to 36 right sides in gas outlet, vacuum coating room 38 has been seted up to 1 inside of coating machine main part, this design has solved original vacuum coating machine and can not effectively dirt.
The movable hinge head is installed to 2 rear end faces of sealed lid, sealed lid 2 is connected with seal receptacle 32 through the movable hinge head, this design is convenient to open and close sealed lid 2, 2 annular side faces of sealed lid are equipped with the rubber pad, 2 annular side faces of sealed lid and seal receptacle 32 phase-match, this design makes sealed lid 2 keep sealed with the external world when closing, air feed valve 33 downside is equipped with the globe valve, and the inside phase-match of globe valve annular side face and air feed pipe 331, this design is convenient to open and close air feed pipe 331, 36 right sides in gas outlet are connected with the outlet duct, and the outlet duct passes sealed bottom plate 37 and is connected with vacuum coating room 38, this design makes the inside gas of vacuum coating room 38 effectively discharge, air-blower 4 rear side is opened and is equipped with the blast orifice, air-blower 4 is connected with external power supply through the wire, this design.
As an embodiment of the present invention: the worker firstly puts the object to be coated into the vacuum coating chamber 38 from the discharge port 31, tightly combines the sealing cover 2 with the sealing seat 32, opens the air supply valve 33 on the air supply pipe 331, connects the blower 4 with the external power supply through the lead, the blower 4 blows the external air into the drying box 34, through the drying and filtering action of the drying agent 341 in the drying box 34, the gas is changed into dust-free dry gas, the dust residue in the coating machine main body 1 is reduced, after the gas is introduced for a period of time, the gas supply valve 33 is closed, the blower 4 is closed, the gas vacuumized in the vacuum coating chamber 38 is discharged from the gas outlet 36 at the lower side of the sealing bottom plate 37, after the vacuum coating chamber 38 is evacuated, the air outlet valve 35 on the right side of the air outlet 36 is closed to start vacuum coating, and then the coated object is taken out from the coating machine main body 1 according to the above operation.
The basic principles and the main features of the invention and the advantages of the invention have been shown and described above, it will be evident to those skilled in the art that the invention is not limited to the details of the foregoing illustrative embodiments, but that the invention may be embodied in other specific forms without departing from the spirit or essential characteristics of the invention. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.
Furthermore, it should be understood that although the present description refers to embodiments, not every embodiment may contain only a single embodiment, and such description is for clarity only, and those skilled in the art should integrate the description, and the embodiments may be combined as appropriate to form other embodiments understood by those skilled in the art.

Claims (6)

1. The utility model provides a can prevent to receive vacuum coating machine dustproof construction who pollutes, includes coating machine main part, sealed lid, dustproof mechanism and air-blower, its characterized in that: the upper side of the film coating machine main body is provided with a sealing cover, a dustproof mechanism is arranged in the film coating machine main body, and the right side of the film coating machine main body is provided with a blower;
dustproof mechanism includes drain hole, seal receptacle, air feed valve, drying cabinet, air outlet valve, gas outlet, seal bottom plate, vacuum coating room, air supply pipe and drier, coating machine main part upside is equipped with the seal receptacle, the drain hole has been seted up to the seal receptacle mid side, the air supply pipe is installed on coating machine main part right side, the air feed valve is installed to the air supply pipe upside, the air supply pipe right side is connected with the drying cabinet, drying cabinet inside is equipped with the drier, seal bottom plate is installed to the inside downside of coating machine main part, the gas outlet has been seted up to the seal bottom plate downside, the air outlet valve is installed on the gas outlet right side, the inside vacuum coating room of having seted up of coating machine main part.
2. The vacuum coating machine dustproof structure capable of preventing pollution of claim 1, is characterized in that: the rear end face of the sealing cover is provided with a movable twisting head, and the sealing cover is connected with the sealing seat through the movable twisting head.
3. The vacuum coating machine dustproof structure capable of preventing pollution of claim 1, is characterized in that: the annular side surface of the sealing cover is provided with a rubber pad, and the annular side surface of the sealing cover is matched with the sealing seat.
4. The vacuum coating machine dustproof structure capable of preventing pollution of claim 1, is characterized in that: the air supply valve is provided with a ball valve at the lower side, and the annular side surface of the ball valve is matched with the inside of the air supply pipe.
5. The vacuum coating machine dustproof structure capable of preventing pollution of claim 1, is characterized in that: the right side of the air outlet is connected with an air outlet pipe, and the air outlet pipe penetrates through the sealing bottom plate to be connected with the vacuum coating chamber.
6. The vacuum coating machine dustproof structure capable of preventing pollution of claim 1, is characterized in that: the rear side of the air blower is provided with an air outlet, and the air blower is connected with an external power supply through a lead.
CN201920795709.3U 2019-05-30 2019-05-30 Vacuum coating machine dustproof structure capable of preventing pollution Expired - Fee Related CN210287514U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201920795709.3U CN210287514U (en) 2019-05-30 2019-05-30 Vacuum coating machine dustproof structure capable of preventing pollution

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201920795709.3U CN210287514U (en) 2019-05-30 2019-05-30 Vacuum coating machine dustproof structure capable of preventing pollution

Publications (1)

Publication Number Publication Date
CN210287514U true CN210287514U (en) 2020-04-10

Family

ID=70071555

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201920795709.3U Expired - Fee Related CN210287514U (en) 2019-05-30 2019-05-30 Vacuum coating machine dustproof structure capable of preventing pollution

Country Status (1)

Country Link
CN (1) CN210287514U (en)

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CF01 Termination of patent right due to non-payment of annual fee
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Granted publication date: 20200410