CN210272665U - Miniature spherical reflector antenna and array antenna - Google Patents
Miniature spherical reflector antenna and array antenna Download PDFInfo
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- CN210272665U CN210272665U CN201921489721.8U CN201921489721U CN210272665U CN 210272665 U CN210272665 U CN 210272665U CN 201921489721 U CN201921489721 U CN 201921489721U CN 210272665 U CN210272665 U CN 210272665U
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Abstract
The utility model provides a miniature spherical reflector antenna and array antenna, spherical reflector antenna includes: the substrate is provided with an upper surface and a lower surface corresponding to the upper surface, and the upper surface of the substrate is provided with a groove; the glass bulb spherical reflecting surface is positioned on the upper surface of the substrate and is connected with the opening of the groove to form a spherical microcavity; the feed source is arranged at the focus of the spherical reflecting surface of the glass bulb; the glass bubble spherical reflecting surface comprises a glass bubble and a metal reflecting layer covering the surface of the glass bubble. The utility model discloses a spherical plane of reflection array antenna has realized the miniaturization of spherical plane of reflection and feed simultaneously, can show the holistic size and the weight of ground reduction wireless system, opens up new space for its application.
Description
Technical Field
The utility model belongs to the technical field of MEMS (micro electro mechanical system), especially, relate to a miniature spherical reflector antenna and array antenna.
Background
The antenna can realize the interconversion of guided waves and space free waves, and is an essential component of the existing radar and wireless communication systems. The traditional antenna is usually obtained by machining, the traditional mechanical technician has overlarge antenna size, the development of the traditional antenna is limited, the integration with the process of a modern integrated circuit is poor, the surface appearance of the small-size antenna is difficult to guarantee, and the transmission of signals in millimeter wave bands is greatly influenced.
Miniaturization is an important trend of antenna development at present, and with higher and higher microwave frequency, the size of the antenna will be smaller and smaller, and meanwhile, the size and the weight of the whole wireless system can be obviously reduced by the lighter antenna, so that a new space is opened up for the application of the antenna. Micro-electromechanical system (MEMS) processes produce microstructures with precision on the order of microns and can process complex three-dimensional structures with high aspect ratios.
Therefore, it is necessary for those skilled in the art to provide a spherical reflector antenna and to realize miniaturization and integration of the antenna.
Disclosure of Invention
In view of the above-mentioned shortcomings of the prior art, an object of the present invention is to provide a micro spherical reflector antenna and an array antenna, so as to realize miniaturization and integration of the spherical reflector antenna and reduce cost.
To achieve the above and other related objects, the present invention provides a micro spherical reflector antenna, an array antenna and a method for manufacturing the same, the spherical reflector antenna including:
the substrate is provided with an upper surface and a lower surface corresponding to the upper surface, and the upper surface of the substrate is provided with a groove;
the glass bulb spherical reflecting surface is positioned on the upper surface of the substrate and is connected with the groove to form a spherical microcavity;
the feed source is arranged at the focal position of the spherical reflecting surface of the glass bulb;
the glass bubble spherical reflecting surface comprises a glass bubble and a metal reflecting layer covering the surface of the glass bubble.
Optionally, the material of the substrate includes silicon, and the material of the metal reflective layer includes gold or copper.
Optionally, the structure of the feed source includes any one of a dipole linear structure, a ring structure, a microstrip line structure or a coplanar waveguide structure.
Optionally, the feed source has a microstrip line structure, the feed source includes a radiation patch disposed on the bottom surface of the groove, a metal ground middle portion disposed on the lower surface of the substrate and corresponding to the radiation patch, and a substrate between the radiation patch and the metal ground middle portion, and the feed source is led out by a transmission line.
Optionally, the feed source is of a coplanar waveguide structure, the feed source includes a radiation patch disposed on the lower surface of the substrate and a metal ground surrounding portion surrounding the radiation patch, and the feed source is led out by a transmission line.
Optionally, the material of the radiating patch includes gold or copper.
The utility model also provides a miniature spherical reflector array antenna, spherical reflector array antenna be by a plurality of as above-mentioned arbitrary miniature spherical reflector antenna form according to specific array permutation and combination, specific array includes any one in rectangle net array, circular array, rectangle triangle-shaped net array, hexagon array, the concentric circles array.
The miniature spherical reflecting surface and the miniature feed source of the utility model can obviously reduce the size and the weight of the whole wireless system and open up a new space for the application of the wireless system; and simultaneously, the utility model discloses a spherical plane of reflection integrates with the feed, and this has the significance to mass production and reduction in production cost.
Drawings
Fig. 1 shows a schematic structural diagram of a substrate provided as a first embodiment.
Fig. 2 is a schematic structural diagram illustrating a groove formed by etching a substrate according to an embodiment.
Fig. 3 is a schematic structural diagram of forming a radiation patch according to an embodiment.
FIG. 4 is a schematic structural diagram of a bonded glass plate according to the first embodiment.
Fig. 5 is a schematic structural diagram of forming a glass bubble according to the first embodiment.
Fig. 6 is a schematic structural diagram of forming a metal reflective layer according to an embodiment.
Fig. 7 is a schematic top view illustrating a patterned metal ground plane according to an embodiment of the invention.
FIG. 8 is a schematic sectional view taken along line A-A' of FIG. 7 according to one embodiment.
FIG. 9 is a schematic top view of a substrate with a metal ground plane uncovered by a complete etch according to an embodiment.
FIG. 10 is a schematic sectional view taken along line B-B' of FIG. 9 according to one embodiment.
Fig. 11 is a schematic structural diagram of a spherical reflector array antenna according to an embodiment.
Fig. 12 is a schematic structural view of a substrate provided in the second embodiment.
Fig. 13 is a schematic structural diagram illustrating a groove formed by etching according to the second embodiment.
FIG. 14 is a schematic view of a bonding structure with a glass plate according to a second embodiment.
Fig. 15 is a schematic structural view of forming a glass bubble according to the second embodiment.
Fig. 16 is a schematic structural diagram illustrating the formation of a metal reflective layer according to the second embodiment.
Fig. 17 is a schematic structural diagram illustrating a patterned metal ground layer according to a second embodiment.
FIG. 18 is a schematic sectional view taken along line C-C' in FIG. 17 according to the second embodiment.
Description of the element reference numerals
1 micro spherical reflector antenna
10 substrate
101 upper surface
102 lower surface
11 groove
12 radiation patch
13 spherical reflecting surface
131 glass plate or glass bulb
132 metal reflective layer
14 metal ground plane
141 metal ground wire middle part
142 metal ground wire connecting part
15 transmission line
20 substrate
201 upper surface
202 lower surface
21 groove
22 radiation patch
23 spherical reflecting surface
231 glass plate or glass bulb
232 metal reflecting layer
241 metal ground wire surrounding part
242 transmission line
Detailed Description
The following description of the embodiments of the present invention is provided for illustrative purposes, and other advantages and effects of the present invention will be readily apparent to those skilled in the art from the disclosure herein. The present invention can also be implemented or applied through other different specific embodiments, and various details in the present specification can be modified or changed based on different viewpoints and applications without departing from the spirit of the present invention.
Please refer to fig. 1 to 18. It should be noted that the drawings provided in the present embodiment are only schematic and illustrative of the basic idea of the present invention, and although the drawings only show the components related to the present invention and are not drawn according to the number, shape and size of the components in actual implementation, the form, quantity and proportion of the components in actual implementation may be changed at will, and the layout of the components may be more complicated.
Example one
The utility model provides a miniature spherical reflector antenna, it mainly includes: the spherical glass bulb reflector comprises a glass bulb, a metal reflecting layer covering the surface of the glass bulb and a feed source located at the focus position of the spherical reflecting surface.
As an example, the material of the substrate may be silicon. The metal reflective layer is made of gold or copper, and has a thickness of 0.5-3 μm.
As an example, the feed source may take the form of a dipole linear structure, a loop structure, a microstrip line structure, or a coplanar waveguide structure, among other miniature antennas.
In this embodiment, the feed source has a microstrip line structure, the feed source of the microstrip line structure includes a radiation patch disposed on the bottom surface of the groove, a metal ground wire intermediate portion disposed on the lower surface of the substrate and corresponding to the radiation patch, and a substrate between the radiation patch and the metal ground wire intermediate portion, and the feed source is led out by a transmission line.
As shown in fig. 7 and 8, in this embodiment, the micro spherical reflector antenna with a microstrip line structure as a feed source includes: the substrate comprises a substrate 10, wherein the substrate is provided with an upper surface 101 and a lower surface 102 corresponding to the upper surface, the upper surface of the substrate is provided with a groove 11 and a glass bubble spherical reflecting surface 13 connected with the opening of the groove 11, and the glass bubble spherical reflecting surface 13 comprises a glass bubble 131 and a metal reflecting layer 132 covering the glass bubble; the feed source is positioned at the focal position of the spherical reflecting surface, the feed source comprises a radiation patch 12 positioned on the bottom surface of the groove, a metal ground wire middle part 141 positioned on the lower surface 102 of the substrate and corresponding to the radiation patch 12, and the substrate between the radiation patch 12 and the metal ground wire middle part 141, and the transmission line 15 is connected with the feed source. Fig. 8 is a cross-sectional view taken along line a-a' of fig. 7.
The utility model also provides a preparation method of miniature spherical reflector antenna based on MEMS technology, it includes following step at least: providing a substrate, wherein the substrate is provided with an upper surface and a lower surface corresponding to the upper surface;
forming a groove on the upper surface of the substrate by adopting an etching process;
bonding a glass plate with the upper surface of the substrate to form a sealing structure, and heating the sealing structure to form a glass bubble;
depositing metal on the surface of the glass bubble to form a metal reflecting layer, wherein the glass bubble and the metal reflecting layer form a spherical reflecting surface;
and forming a feed source at the focal position of the spherical reflecting surface.
As an example, the feed source structure may take the form of various micro antennas such as a dipole linear structure, a loop structure, a microstrip line structure, or a coplanar waveguide structure.
In this embodiment, the step of forming the feed of the microstrip line structure includes:
forming a radiation patch on the bottom surface of the groove after the step of forming the groove on the upper surface of the substrate by adopting an etching process and before bonding the glass plate with the upper surface of the substrate;
depositing metal on the lower surface of the substrate and patterning to form a metal ground wire layer, wherein the metal ground wire layer is provided with a metal ground wire middle part arranged corresponding to the radiation patch and a metal ground wire connecting part connected with the metal ground wire middle part;
and removing the substrate which is not covered by the metal ground wire by using the metal ground wire layer as a mask through an etching process to form the feed source and a transmission line connected with the feed source.
The following describes in detail the preparation method of the micro spherical reflector antenna using the microstrip line structure as the feed source with reference to the accompanying drawings.
As shown in fig. 1, step 1) is performed to provide a substrate 10, where the substrate 10 is provided with an upper surface 101 and a lower surface 102 corresponding to the upper surface.
In the present embodiment, silicon is selected as the substrate 10.
As shown in fig. 2, step 2) is performed, and an etching process is used to form a groove 11 on the upper surface of the substrate 10.
By way of example, the size of the grooves 11 determines the size and shape of the glass bubbles, and may define a groove radius in the range of 100 μm to 10 mm.
As shown in fig. 3, step 3) is performed to form a radiation patch 12 on the bottom surface of the recess 11.
As an example, the material of the radiation patch 12 is gold or copper, and in the present embodiment, gold is selected as the material of the radiation patch. The shape of the radiating patch may be selected as desired to be square or circular or other shape. The radiation patch is arranged at the focus position of the spherical reflecting surface, and the focus of the spherical reflecting surface is adjusted by the size and the shape of the glass bulb.
As shown in fig. 4 and 5, step 4) is performed to bond the glass plate 131 to the upper surface of the substrate 10 to form a sealing structure, and the sealing structure is heated to form the glass bulb 131.
Specifically, the process of step 4) is as follows: the glass plate 131 is anodically bonded to the upper surface of the substrate 10 to form a sealed structure, and then the sealed structure is heated in a heating furnace to a temperature higher than the glass softening temperature and is kept warm. Under the action of high temperature, the gas in the groove 11 is heated to make the pressure in the cavity greater than the external pressure, and the pressure difference between the inside and the outside of the cavity makes the softened glass plate 131 far away from the groove 11 to form a spherical glass bubble. The size and shape of the glass bubbles can be controlled by the size of the grooves 11 and the process conditions of heating.
As shown in fig. 6, step 5) is performed to deposit a layer of metal on the surface of the glass bulb 131 to form a metal reflective layer 132, and the glass bulb 131 and the metal reflective layer 132 form the spherical reflective surface 13.
As an example, the material of the metal reflective layer 132 includes gold or copper. The metal reflective layer can be formed by sputtering or vapor deposition, and in this embodiment, the metal reflective layer 132 is formed by sputtering.
As shown in fig. 7 and 8, step 6) is performed to deposit a metal layer on the lower surface of the substrate 10 and to pattern the metal layer to form the metal ground 14, wherein the metal ground 14 is provided with a metal ground middle portion 141 corresponding to the radiation patch 12 and a metal ground connection portion 142 connecting the metal ground middle portion 141.
As shown in fig. 9, the substrate not covered by the metal ground layer is removed by an etching process using the metal ground layer 14 on the lower surface as a mask, and the feed source and the transmission line 15 connected to the feed source are formed. Fig. 10 is a cross-sectional view taken along line B-B' of fig. 9.
In this embodiment, a microstrip line structure is used as a feed source, the radiation direction of the antenna is on one side of the radiation patch, and the absorption and interference of the substrate to incident or emergent microwave signals can be reduced by removing the substrate on the rest part of the bottom of the groove.
As shown in fig. 11, the utility model also provides a spherical reflector array antenna based on MEMS, spherical reflector array antenna be by a plurality of closely arrange as above spherical reflector antenna 1 arrange according to specific array combination and form, its specific structure can be any one in rectangle net array, circular array, rectangle triangle-shaped net array, hexagon array, the concentric circle array.
The utility model also provides a preparation method of spherical plane of reflection array antenna based on MEMS adopts as above the preparation of the preparation mode of miniature spherical plane of reflection antenna based on MEMS forms, nevertheless is different with above-mentioned method, adopts the etching process to form the groove array of settlement in the step of substrate upper surface formation recess on adopting the etching process. Other steps are the same as the preparation method of the micro spherical reflector antenna, and are not described herein again.
The antenna is formed in an array form according to different parameters such as feed current, spacing, electrical length and the like, so that the effective area can be increased, and the beam directivity can be adjusted.
The embodiment realizes the miniaturization of the spherical reflecting surface and the feed source simultaneously through the MEMS process, can obviously reduce the size and the weight of the whole wireless system, and opens up a new space for the application of the wireless system; in addition, the spherical reflector array antenna of the embodiment utilizes the MEMS technology to realize the integrated design and preparation of the spherical reflector and the feed source, and has important significance for batch production and production cost reduction.
Example two
The present embodiment provides a micro spherical reflector antenna, which has a similar technical solution to that of the first embodiment, and is different from the first embodiment in that the feed source structure is a coplanar waveguide structure.
In this embodiment, the feed source of the coplanar waveguide structure comprises a radiation patch on the lower surface of the substrate and a metal ground wire surrounding part surrounding the radiation patch, and the feed source is led out by a transmission line.
As shown in fig. 12 and 13, the micro spherical reflector antenna having a coplanar waveguide feed includes: the substrate 20, the substrate 20 has upper surfaces 201 and lower surfaces 202 corresponding to the upper surfaces, there are grooves 21 and glass bubble spherical reflecting surfaces 23 connected with the openings of the grooves 21 on the upper surfaces of the substrate, the glass bubble spherical reflecting surfaces 23 include glass bubbles 231 and metal reflecting layers 232 covering the glass bubbles; the feed source is positioned in the focus center of the spherical reflecting surface 23, the feed source comprises a radiation patch 22 positioned on the lower surface of the substrate 20 and a metal ground wire surrounding part 241 surrounding the radiation patch 22, and the feed source is led out by a transmission line 242.
In this embodiment, a radiation patch and a metal ground wire surrounding part surrounding the radiation patch are formed by depositing metal on the lower surface of a substrate and patterning, and the radiation patch and the metal ground wire surrounding part form a feed source; meanwhile, a transmission line for leading out the feed source is formed.
The following further describes the preparation method of the micro spherical reflector antenna using the coplanar waveguide structure as the feed source in detail through the attached drawings.
As shown in fig. 12, step 1) is performed to provide a substrate 20, and the substrate 20 is provided with an upper surface 201 and a lower surface 202.
As an example, a semiconductor substrate such as a silicon substrate or a gallium nitride substrate can be used as the material of the substrate 20, and in the present embodiment, silicon is used as the substrate 20.
As shown in fig. 13, step 2) is performed, and an etching process is performed to form a groove 21 on the upper surface of the substrate 20.
By way of example, the size of the grooves 21 determines the size and shape of the glass bubbles, and may define a groove radius in the range of 100 μm to 10 mm.
As shown in fig. 14 and 15, step 3) is performed to bond the glass plate 231 to the upper surface of the substrate 20 to form a sealing structure, and the sealing structure is heated to form the glass bubbles 231.
Specifically, the process of step 3) is as follows: the glass plate 231 is anodically bonded to the upper surface of the substrate 20 to form a sealed structure, and then the sealed structure is heated in a heating furnace to a temperature above the glass softening temperature and maintained at the temperature. Under the action of high temperature, the gas in the groove 21 is heated so that the pressure in the cavity is greater than the external pressure, and the pressure difference between the inside and the outside of the cavity makes the softened glass plate 231 far away from the groove 11 to form a spherical glass bubble 231. The size and shape of the glass bubbles can be controlled by the size of the grooves 21 and the process conditions of heating.
As shown in fig. 16, step 4) is performed to deposit a layer of metal on the surface of the glass bubble 231 to form a metal reflective layer 232, and the glass bubble 231 and the metal reflective layer 232 form the spherical reflective surface 23.
As an example, the material of the metal reflective layer 232 includes gold or copper. The metal reflective layer can be formed by sputtering or vapor deposition, and in this embodiment, the metal reflective layer 232 is formed by sputtering.
As shown in fig. 17 and 18, step 5) is performed to deposit a layer of metal on the lower surface of the substrate 20 and to form a pattern, so as to form the radiation patch 22, the metal ground surrounding portion 241 surrounding the radiation patch 22, and the transmission line 242 leading out the radiation patch 22 and the metal ground surrounding portion 241. Fig. 18 is a cross-sectional view in the direction of C-C' in fig. 17. The radiation patch is arranged at the focus position of the spherical reflecting surface, and the focus of the spherical reflecting surface is adjusted by the size and the shape of the glass bulb.
In the present embodiment, the array antenna may also be manufactured by using the above-mentioned method for manufacturing a micro spherical reflector antenna using a coplanar waveguide structure as a feed source.
The embodiment realizes the miniaturization of the spherical reflecting surface and the feed source simultaneously through the MEMS process, can obviously reduce the size and the weight of the whole wireless system, and opens up a new space for the application of the wireless system; in addition, the spherical reflector array antenna of the embodiment utilizes the MEMS technology to realize the integrated design and preparation of the spherical reflector and the feed source, and has important significance for batch production and production cost reduction.
To sum up, the utility model provides a miniature spherical reflecting surface antenna based on MEMS technology, spherical reflecting surface antenna includes: the substrate is provided with an upper surface and a lower surface corresponding to the upper surface, and the upper surface of the substrate is provided with a groove; the glass bulb spherical reflecting surface is positioned on the upper surface of the substrate and is connected with the opening of the groove to form a spherical microcavity; the feed source is arranged in the center of the focus of the glass bubble spherical reflecting surface; the glass bubble spherical reflecting surface comprises a glass bubble and a metal reflecting layer covering the glass bubble. Based on the technical scheme, the utility model discloses a miniature spherical reflecting surface and miniaturized feed can show the whole size and the weight that reduce wireless system, open up new space for wireless system's application; and simultaneously, the utility model discloses a spherical plane of reflection integrates with the feed, and this has the significance to mass production and reduction in production cost.
The above embodiments are merely illustrative of the principles and effects of the present invention, and are not to be construed as limiting the invention. Modifications and variations can be made to the above-described embodiments by those skilled in the art without departing from the spirit and scope of the present invention. Accordingly, it is intended that all equivalent modifications or changes which may be made by those skilled in the art without departing from the spirit and technical spirit of the present invention be covered by the claims of the present invention.
Claims (7)
1. A micro spherical reflector antenna, comprising:
the substrate is provided with an upper surface and a lower surface corresponding to the upper surface, and the upper surface of the substrate is provided with a groove;
the glass bulb spherical reflecting surface is positioned on the upper surface of the substrate and is connected with the groove to form a spherical microcavity;
the feed source is arranged at the focal position of the spherical reflecting surface of the glass bulb;
the glass bubble spherical reflecting surface comprises a glass bubble and a metal reflecting layer covering the surface of the glass bubble.
2. The micro spherical reflector antenna of claim 1, wherein the material of the substrate comprises silicon and the material of the metallic reflective layer comprises gold or copper.
3. The micro-spherical reflector antenna of claim 1, wherein the structure of the feed comprises any one of a dipole linear structure, a loop structure, a microstrip line structure or a coplanar waveguide structure.
4. The micro spherical reflector antenna according to claim 3, wherein the feed source has a microstrip line structure, the feed source comprises a radiation patch disposed on the bottom surface of the groove, a metal ground middle portion disposed on the lower surface of the substrate and corresponding to the radiation patch, and a substrate disposed between the radiation patch and the metal ground middle portion, and the feed source is led out by a transmission line.
5. The micro spherical reflector antenna as claimed in claim 3, wherein the feed source has a coplanar waveguide structure, and comprises a radiation patch disposed on the lower surface of the substrate and a metal ground surrounding portion surrounding the radiation patch, and the feed source is led out by a transmission line.
6. The micro spherical reflector antenna as claimed in claim 4 or 5, wherein the material of the radiating patch comprises gold or copper.
7. A spherical reflector array antenna, characterized in that the spherical reflector array antenna is formed by arranging and combining a plurality of micro spherical reflector antennas according to any one of claims 1 to 6 according to a specific array, wherein the specific array comprises any one of a rectangular grid array, a circular array, a rectangular triangular grid array, a hexagonal array and a concentric circular array.
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| CN201921489721.8U CN210272665U (en) | 2019-09-02 | 2019-09-02 | Miniature spherical reflector antenna and array antenna |
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| CN201921489721.8U CN210272665U (en) | 2019-09-02 | 2019-09-02 | Miniature spherical reflector antenna and array antenna |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110474159A (en) * | 2019-09-02 | 2019-11-19 | 上海南麟电子股份有限公司 | A kind of miniature spherical-reflector antenna and array antenna and preparation method thereof based on MEMS technology |
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2019
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110474159A (en) * | 2019-09-02 | 2019-11-19 | 上海南麟电子股份有限公司 | A kind of miniature spherical-reflector antenna and array antenna and preparation method thereof based on MEMS technology |
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