CN210270506U

CN210270506U - Device for cleaning photomask

Info

Publication number: CN210270506U
Application number: CN201921299428.5U
Authority: CN
Inventors: 凌永康; 张勇; 杜良辉
Original assignee: Jiangsu Yidu Technology Co ltd
Current assignee: Jiangsu Yidu Technology Co ltd
Priority date: 2019-08-12
Filing date: 2019-08-12
Publication date: 2020-04-07
Anticipated expiration: 2029-08-12

Abstract

The utility model relates to an optical shield technical field specifically is a wash light shield's device, the on-line screen storage device comprises a base, the top of base is equipped with the purge chamber, the vertical first through-hole of having seted up of bottom center department of purge chamber, the bottom of purge chamber just is located the position that is close to first through-hole and is equipped with the first annular brush of a plurality of from inside to outside, the top of purge chamber is equipped with the top cap, the second recess has been seted up to the bottom of top cap, the bottom center department of second recess is equipped with annular cylinder groove, the bottom of second recess just is located the position that is close to annular cylinder groove and is equipped with a plurality of second annular brush from. This device of washing light shield can play the effect of fixing mutually with the light shield through first fixed disk and second fixed disk, can wash light shield both sides simultaneously through first annular brush and second annular brush, can pour into clean pure water into always in the cleaning process through the interface of intaking, can put out the water after wasing through the play water interface that is equipped with, has improved the cleaning efficiency to the light shield.

Description

Device for cleaning photomask

Technical Field

The utility model relates to a light shield technical field specifically is a device of washing light shield.

Background

The photomask needs to be cleaned before use, and the cleaning of the photomask in the photomask cleaning machine is mainly divided into front cleaning and back cleaning, the cleaning efficiency of the existing photomask cleaning machine is not high, and the cleaned liquid is easy to splash to the cleaned surface when the photomask is turned over.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a device for washing light shield to solve the problem that proposes among the above-mentioned background art.

In order to achieve the above object, the utility model provides a following technical scheme:

a device for cleaning a photomask comprises a base, wherein a first groove is formed in the surface of the base, a motor is arranged at the bottom of the first groove, a cleaning chamber is arranged at the top of the base, a water outlet is vertically formed in the position, close to the inner wall, of the bottom of the cleaning chamber, a water outlet port is formed in the bottom of the water outlet, a first through hole is vertically formed in the center of the bottom of the cleaning chamber, a plurality of first annular brushes are arranged at the position, close to the first through hole, of the bottom of the cleaning chamber from inside to outside, a top cover is arranged at the top of the cleaning chamber, a second groove is formed in the bottom of the top cover, a water inlet is vertically formed in the position, close to the inner wall, of the bottom of the second groove, a water inlet port is formed in the top of the water inlet, an annular cylindrical groove is formed in the center of the bottom of the second groove, a plurality of second annular brushes are, and a first fixed disc and a second fixed disc which are symmetrically distributed are arranged between the first annular brush and the second annular brush.

Preferably, the center of the surface of the first fixed disk is provided with a second through hole, the surface of the first fixed disk is provided with a plurality of third through holes arranged in an annular array, each of the third through holes is provided with an annular limiting block on the inner wall, and the second fixed disk and the first fixed disk are of the same specification structure.

Preferably, a mechanical sealing block is arranged at the center of the bottom of the cleaning chamber, and an output shaft of the motor sequentially penetrates through the mechanical sealing block, the cleaning chamber, the first fixing disc and the second fixing disc and is rotatably connected with the annular cylindrical groove.

Preferably, the first fixed disk is fixedly connected with an output shaft of the motor.

Preferably, the first annular brush and the second annular brush are in corresponding positions and are in the same number, and the first annular brush and the second annular brush are in structures with the same specification.

Preferably, the height of the inner wall of the second groove is half of the height of the outer circumference of the cleaning chamber.

Compared with the prior art, the beneficial effects of the utility model are that:

this device of washing light shield can play the effect of fixing mutually through first fixed disk and the second fixed disk that is equipped with the light shield, can wash light shield both sides simultaneously through first annular brush and the second annular brush that is equipped with, can pour into clean pure water into always in the cleaning process through the interface of intaking that is equipped with, can put out the water after wasing through the play water interface that is equipped with, has improved the cleaning efficiency to the light shield.

Drawings

Fig. 1 is a schematic view of the overall structure of the present invention;

FIG. 2 is a schematic view of the overall exploded structure of the present invention;

FIG. 3 is a schematic view of the structure of the cleaning chamber of the present invention;

FIG. 4 is a schematic view of the structure of the cleaning chamber and the motor of the present invention;

fig. 5 is a schematic structural view of a first fixing tray of the present invention;

fig. 6 is a schematic view of the top cover structure of the present invention;

fig. 7 is a schematic sectional view of the present invention;

fig. 8 is an enlarged view of a position a in the present invention.

In the figure: the cleaning device comprises a base 1, a first groove 1a, a cleaning chamber 2, a water outlet 20, a first through hole 21, a top cover 3, a second groove 30, a water inlet 300, an annular cylindrical groove 31, a water outlet 4, a water inlet 5, a motor 6, a first fixed disk 7, a second through hole 70, a third through hole 71, an annular limiting block 710, a second fixed disk 8, a first annular brush 9, a second annular brush 10 and a mechanical sealing block 11.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and to simplify the description, but do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore should not be construed as limiting the present invention.

Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless specifically limited otherwise.

Referring to fig. 1-8, the present invention provides a technical solution:

a device for cleaning a photomask comprises a base 1, wherein a first groove 1a is formed in the surface of the base 1, a motor 6 is arranged at the bottom of the first groove 1a, a cleaning chamber 2 is arranged at the top of the base 1, a water outlet 20 is vertically formed in the position, close to the inner wall, of the bottom of the cleaning chamber 2, a water outlet port 4 is formed in the bottom of the water outlet 20, a first through hole 21 is vertically formed in the center of the bottom of the cleaning chamber 2, a plurality of first annular brushes 9 are arranged at the position, close to the first through hole 21, of the bottom of the cleaning chamber 2 from inside to outside, a top cover 3 is arranged at the top of the cleaning chamber 2, a second groove 30 is formed in the bottom of the top cover 3, a water inlet 300 is vertically formed in the position, close to the inner wall, of the bottom of the second groove 30, a water inlet port 5 is formed in the top of the water inlet 300, an annular cylindrical groove 31 is formed in the center of the bottom of, a first fixed disc 7 and a second fixed disc 8 which are symmetrically distributed are arranged between the first annular brush 9 and the second annular brush 10.

Specifically, the center of the surface of the first fixing disk 7 is provided with a second through hole 70, the surface of the first fixing disk 7 is provided with a plurality of third through holes 71 arranged in an annular array, the inner wall of each third through hole 71 is provided with an annular limiting block 710, the second fixing disk 8 and the first fixing disk 7 are of the same specification structure, the same structure facilitates fixing of the photomask, and the diameter of each third through hole 71 needs to be set according to the specific diameter size of the photomask.

Specifically, the bottom center department of purge chamber 2 is equipped with mechanical seal piece 11, and the output shaft of motor 6 passes mechanical seal piece 11, purge chamber 2 in proper order, first fixed disk 7 and second fixed disk 8 and rotates with annular cylinder groove 31 and be connected, ensures that first fixed disk 7 and second fixed disk 8 rotate along with the output shaft of motor 6 together, prevents that top cap 3 from following the output shaft rotation of motor 6.

Specifically, the first fixed disk 7 is fixedly connected with the output shaft of the motor 6, so that the first fixed disk 7 and the second fixed disk 8 can drive the light shield to rotate between the first annular brush 9 and the second annular brush 10, and therefore two sides of the light shield can be cleaned simultaneously.

Specifically, the position of the first annular brush 9 corresponds to the position of the second annular brush 10, the number of the first annular brush 9 is the same as that of the second annular brush 10, the first annular brush 9 and the second annular brush 10 are of the same specification structure, the same degree of cleaning of two surfaces is ensured, and the condition that a certain surface is not cleaned cleanly is avoided.

Further, the height of the inner wall of the second groove 30 is half of the height of the outer side of the circumference of the cleaning chamber 2, so that the top cover 3 can be tightly attached to the cleaning chamber 2, and the position deviation of the top cover 3 caused by the action of the motor 6 is avoided.

The brush is a disc brush made of a material with excellent water absorption, recovery, wear resistance, corrosion resistance and the like, and can be made of a man-made fiber material; when the rotating mechanism rotates, the contact area of the periphery of the brush is large, so that the cleaning effect can be effectively improved, and when the photomask is cleaned, the cleaning effect can be improved by setting the rotating speed of the motor 6; the mechanical sealing block 11 can effectively prevent water in the cleaning chamber 2 from flowing down from the output shaft of the motor 6; the first fixing disk 7 and the second fixing disk 8 can be fixed in a bolt or clamping mode, or a connecting structure is not needed, the light cover is placed on the third through hole 71 and supported by the annular limiting block 710, then the other part of the light cover is in the limiting groove of the second fixing disk 8, and when the second fixing disk 8 is attached to the first fixing disk 7, the light cover, the second fixing disk 8 and the first fixing disk 7 can be mutually fixed; the water outlet connector 4 and the water inlet connector 5 are both provided with valves, so that the water inlet and the water outlet can be controlled conveniently.

It is worth supplementing that the motor 6 related to in the utility model adopts the motor with model number HF-MP13 produced by Shenzhen Shanchuan society automation equipment Limited company, and the matched driving power supply can also be provided by the manufacturer; furthermore, the present invention relates to the motor in the prior art, and can be implemented by those skilled in the art, without extra description, and the protection of the present invention does not relate to the improvement of the structure and working principle of the motor.

When the device for cleaning the photomask is used, a user firstly places the photomask on the third through hole 71 of the first fixed disk 7, the edge of the photomask can be fixed under the action of the annular limiting block 710, then places the second fixed disk 8 on the first fixed disk 7, then installs the top cover 3 on the top of the cleaning chamber 2 to enable the top cover to be tightly attached to the cleaning chamber 2, opens the valve of the water inlet interface 5, injects pure water into the cleaning chamber 2, finally, the user connects the motor 6 with an external power supply to enable the motor to work, drives the first fixed disk 7 and the second fixed disk 8 to rotate, thereby drives the photomask to rotate between the first annular brush 9 and the second annular brush 10, realizes the simultaneous cleaning of two surfaces of the photomask, opens the valve of the water outlet interface 4 after the cleaning is finished, discharges the water after the cleaning of the cleaning chamber 2, then opens the top cover 3 to take out the second fixed disk 8, finally, the mask is taken out.

The foregoing shows and describes the general principles, essential features, and advantages of the invention. It should be understood by those skilled in the art that the present invention is not limited by the above embodiments, and the description in the above embodiments and the description is only preferred examples of the present invention, and is not intended to limit the present invention, and that the present invention can have various changes and modifications without departing from the spirit and scope of the present invention, and these changes and modifications all fall into the scope of the claimed invention. The scope of the invention is defined by the appended claims and equivalents thereof.

Claims

1. A device for cleaning a photomask comprises a base (1), and is characterized in that: the cleaning device is characterized in that a first groove (1a) is formed in the surface of the base (1), a motor (6) is arranged at the bottom of the first groove (1a), a cleaning chamber (2) is arranged at the top of the base (1), a water outlet (20) is vertically formed in the position, close to the inner wall, of the bottom of the cleaning chamber (2), a water outlet interface (4) is arranged at the bottom of the water outlet (20), a first through hole (21) is vertically formed in the center of the bottom of the cleaning chamber (2), a plurality of first annular brushes (9) are arranged at the position, close to the first through hole (21), of the bottom of the cleaning chamber (2) from inside to outside, a top cover (3) is arranged at the top of the cleaning chamber (2), a second groove (30) is formed in the bottom of the top cover (3), a water inlet (300) is vertically formed in the position, close to the inner wall, of the bottom of the second groove (, the bottom center department of second recess (30) is equipped with annular cylinder groove (31), the bottom of second recess (30) just is located and is close to the position of annular cylinder groove (31) is equipped with a plurality of second annular brush (10) from inside to outside in proper order, first annular brush (9) with be equipped with first fixed disk (7) and second fixed disk (8) of symmetric distribution between second annular brush (10).

2. The apparatus according to claim 1, wherein: the surface center department of first fixed disk (7) is equipped with second through-hole (70), a plurality of third through-hole (71) of arranging with annular array are seted up on the surface of first fixed disk (7), every the inner wall of third through-hole (71) all is equipped with annular stopper (710), second fixed disk (8) with first fixed disk (7) are the structure of same specification.

3. The apparatus according to claim 1, wherein: the bottom center department of purge chamber (2) is equipped with mechanical seal piece (11), the output shaft of motor (6) passes in proper order mechanical seal piece (11), purge chamber (2), first fixed disk (7) and second fixed disk (8) and with annular cylinder groove (31) rotate the connection.

4. The apparatus according to claim 1, wherein: the first fixed disc (7) is fixedly connected with an output shaft of the motor (6).

5. The apparatus according to claim 1, wherein: the positions of the first annular brushes (9) correspond to those of the second annular brushes (10) in the same number, and the first annular brushes (9) and the second annular brushes (10) are of the same specification structure.

6. The apparatus according to claim 1, wherein: the height of the inner wall of the second groove (30) is half of the height of the outer side of the circumference of the cleaning chamber (2).