CN210251289U - Carbon tetrafluoride trap - Google Patents
Carbon tetrafluoride trap Download PDFInfo
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- CN210251289U CN210251289U CN201920957283.7U CN201920957283U CN210251289U CN 210251289 U CN210251289 U CN 210251289U CN 201920957283 U CN201920957283 U CN 201920957283U CN 210251289 U CN210251289 U CN 210251289U
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- liquefaction
- trap
- pipe
- carbon tetrafluoride
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Abstract
The utility model discloses a carbon tetrafluoride catcher, which relates to the technical field of catchers and comprises a catcher body, wherein both sides of the catcher body are respectively provided with an air inlet and an air outlet, and the air inlet is connected with an air inlet pipe; a liquefaction groove is arranged in the catcher body, and a liquid inlet and a liquid outlet are respectively arranged at the upper end and the lower end of the catcher body; the intake pipe is located the inside one end of trap body is connected with the one end of liquefaction house steward, the liquefaction house steward is T style of calligraphy, the other end interval of liquefaction house steward evenly is provided with a plurality of exports, and is a plurality of the export all is connected with the one end of liquefaction branch pipe, the other end of liquefaction branch pipe passes the liquefaction groove and with the outlet duct is linked together. The mixed gas containing carbon tetrafluoride is uniformly distributed into the plurality of liquefaction branch pipes, and the liquefaction branch pipes are filled with the liquefaction tanks filled with the liquefaction medium, so that other components of the mixed gas can be efficiently liquefied, and the capture efficiency of the carbon tetrafluoride is improved.
Description
Technical Field
The utility model relates to a trap technical field, concretely relates to carbon tetrafluoride trap.
Background
Carbon tetrafluoride is the largest amount of plasma etching gas in the microelectronic industry at present, and is widely used for etching thin film materials such as silicon, silicon dioxide, silicon nitride, phosphorosilicate glass, tungsten and the like, and because of the extremely strong chemical stability, the carbon tetrafluoride can also be used for metal smelting, plastic industry and the like. Because the carbon tetrafluoride structure is extremely stable, the trapping efficiency is low by adopting the existing trap.
SUMMERY OF THE UTILITY MODEL
For solving the prior art problem, the utility model discloses a during the mist evenly distributed that will contain carbon tetrafluoride arrived a plurality of liquefaction branch pipes, and made the liquefaction branch pipe through filling up the liquefaction groove that has the liquefaction medium, utilize the higher characteristic of other compositions of the liquefaction temperature of carbon tetrafluoride than the mist, liquefy other compositions efficient of mist, improved the entrapment efficiency, can catch comparatively pure carbon tetrafluoride gas.
The utility model discloses specifically adopt following technical scheme:
a carbon tetrafluoride trap comprises a trap body;
an air inlet and an air outlet are respectively arranged on two sides of the trap body, the air inlet is connected with an air inlet pipe, and the air outlet is connected with an air outlet pipe;
a liquefaction groove is arranged in the trap body, and the liquefaction groove is fixed at the bottom of the trap body through a support;
the upper end and the lower end of the catcher body are respectively provided with a liquid inlet and a liquid outlet; the liquid inlet is connected with one end of a liquid inlet pipe, and the other end of the liquid inlet pipe is communicated with the upper end of the liquefaction tank; the liquid outlet is connected with one end of a liquid outlet pipe; the other end of the liquid outlet pipe is communicated with the lower end of the liquefaction tank;
the intake pipe is located the inside one end of trap body is connected with the one end of liquefaction house steward, the liquefaction house steward is T style of calligraphy, the other end interval of liquefaction house steward evenly is provided with a plurality of exports, and is a plurality of the export all is connected with the one end of liquefaction branch pipe, the other end of liquefaction branch pipe passes the liquefaction groove and with the outlet duct is linked together.
As an improvement of the utility model, the upper and lower ends in the liquefaction branch pipe are all fixedly provided with a guide plate, and the included angle between the guide plate and the horizontal plane is 20-40 degrees.
As an improvement of the utility model, the upper end of the catcher body is provided with a thermometer, the temperature measuring probe of the thermometer is inserted into the liquefaction groove.
As an improvement of the utility model, the upper end of the catcher body is provided with the level gauge, the measuring end of the level gauge stretches into in the liquefaction groove.
As an improvement of the utility model, a drying box is arranged in the catcher body, and the air inlet of the drying box is connected with the air outlet of the liquefaction branch pipe; and the air outlet of the drying box is connected with the air outlet pipe.
As an improvement of the utility model, the upper end of the catcher body is provided with a control box, a control system is arranged in the control box, and the surface of the control box is provided with a control panel; and the air inlet pipe and the air outlet pipe are both provided with electromagnetic valves, and the electromagnetic valves are electrically connected with the control system.
The utility model has the advantages that:
the mixed gas containing carbon tetrafluoride is uniformly distributed into the plurality of the liquefaction branch pipes, and the liquefaction branch pipes are filled with the liquefaction medium in the liquefaction tank, so that other components of the mixed gas are efficiently liquefied, the capture efficiency is improved, and the relatively pure carbon tetrafluoride gas can be captured;
the mixed gas moves from the inlet to the outlet of the liquefaction branch pipe and passes through the inside of the liquefaction tank in a transverse mode;
through setting up the thermometer to make the temperature probe of thermometer insert the liquefaction groove in, the temperature of liquefaction medium in the liquefaction groove can be monitored in real time, the efficiency of assurance liquefaction.
Drawings
Fig. 1 is a schematic structural view of a carbon tetrafluoride trap according to the present invention;
the attached drawings are marked as follows: 1-a trap body; 10-a scaffold; 11-an air inlet pipe; 12-an air outlet pipe; 13-a liquefaction tank; 14-a liquid inlet pipe; 15-a liquid outlet pipe; 16-a drying oven; 17-a control box; 171-a control panel; 20-a liquefaction header; 21-a liquefaction branch; 211-a baffle; 3-a thermometer; 4-a liquid level meter; 5-electromagnetic valve.
Detailed Description
The technical solution in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention.
As shown in fig. 1, one embodiment of the present invention discloses a carbon tetrafluoride trap, which comprises a trap body 1, wherein both sides of the trap body 1 are respectively provided with an air inlet and an air outlet, the air inlet is connected with an air inlet pipe 11, and the air outlet is connected with an air outlet pipe 12; a liquefaction groove 13 is formed in the trap body 1, and the liquefaction groove 13 is fixed at the bottom of the trap body 1 through a support 10; the upper end and the lower end of the catcher body 1 are respectively provided with a liquid inlet and a liquid outlet; the liquid inlet is connected with one end of a liquid inlet pipe 14, and the other end of the liquid inlet pipe 14 is communicated with the upper end of the liquefaction tank 13; the liquid outlet is connected with one end of a liquid outlet pipe 15; the other end of the liquid outlet pipe 15 is communicated with the lower end of the liquefaction tank 13; the intake pipe 11 is located the inside one end of trap body 1 is connected with the one end of liquefaction house steward 20, liquefaction house steward 20 is the T style of calligraphy, liquefaction house steward 20 other end interval evenly is provided with a plurality of exports, and is a plurality of the export all is connected with the one end of liquefaction branch pipe 21, the other end of liquefaction branch pipe 21 passes liquefaction groove 13 and with outlet duct 12 is linked together. Filling a certain proportion of mixed solution of dry ice and ethanol into a liquefaction tank in the catcher body through a liquid inlet pipe and filling the whole liquefaction tank; then the gas mixture that will contain carbon tetrafluoride enters into the inside liquefaction house steward of trap body through the air inlet that even has the intake pipe to in even entering into a plurality of liquefaction branch pipes of the liquefaction house steward other end and crossing the inside of liquefaction groove carry out abundant efficient liquefaction to other compositions of gas mixture, the gas after the liquefaction finishes is pure carbon tetrafluoride gas accessible outlet duct discharge, has promoted the efficiency of trap entrapment carbon tetrafluoride.
In this embodiment, the upper end and the lower end of the liquefaction branch pipe 21 are both fixedly provided with a guide plate 211, and an included angle between the guide plate 211 and a horizontal plane is 20-40 °. The guide plate which forms a certain included angle with the horizontal plane is arranged in the liquefaction branch pipe, so that the mixed gas moves to the outlet from the inlet of the liquefaction branch pipe and transversely passes through the inside of the liquefaction tank.
In this embodiment, a thermometer 3 is disposed at the upper end of the catcher body 1, and a temperature measuring probe of the thermometer 3 is inserted into the liquefaction tank 13. Through setting up the thermometer to make the temperature probe of thermometer insert the liquefaction groove in, the temperature of liquefaction medium in the liquefaction groove can be monitored in real time, the efficiency of assurance liquefaction.
In this embodiment, a liquid level meter 4 is disposed at the upper end of the catcher body 1, and a measuring end of the liquid level meter 4 extends into the liquefaction tank 13. The height of the liquid level in the liquefaction tank can be measured through the liquid level meter, and the whole liquefaction tank is full of the liquefaction medium.
In the embodiment, a drying box 16 is arranged in the trap body 1, and an air inlet of the drying box 16 is connected and communicated with an air outlet of the liquefaction branch pipe 12; the air outlet pipe 12 is connected to the air outlet of the drying box 16. And drying the liquefied gas.
In the embodiment, a control box 17 is arranged at the upper end of the catcher body 1, a control system is arranged in the control box 17, and a control panel 171 is arranged on the surface of the control box 17; and the air inlet pipe 11 and the air outlet pipe 12 are both provided with electromagnetic valves 5, and the electromagnetic valves 5 are electrically connected with the control system. The control system in the control box is started by operating the control panel and controls the on-off of the electromagnetic valves on the air inlet pipe and the air outlet pipe, so that the automatic control of air inlet and air outlet is realized.
Finally, only the specific embodiments of the present invention have been described in detail. The invention is not limited to the specific embodiments described above. Equivalent modifications and substitutions by those skilled in the art to the present invention are also within the scope of the present invention. Accordingly, variations and modifications in equivalents may be made without departing from the spirit and scope of the invention, which is intended to be covered by the following claims.
Claims (6)
1. A carbon tetrafluoride trap, includes trap body (1), its characterized in that:
an air inlet and an air outlet are respectively arranged on two sides of the trap body (1), the air inlet is connected with an air inlet pipe (11), and the air outlet is connected with an air outlet pipe (12);
a liquefaction groove (13) is formed in the trap body (1), and the liquefaction groove (13) is fixed at the bottom of the trap body (1) through a support (10);
the upper end and the lower end of the catcher body (1) are respectively provided with a liquid inlet and a liquid outlet; the liquid inlet is connected with one end of a liquid inlet pipe (14), and the other end of the liquid inlet pipe (14) is communicated with the upper end of the liquefaction tank (13); the liquid outlet is connected with one end of a liquid outlet pipe (15); the other end of the liquid outlet pipe (15) is communicated with the lower end of the liquefaction tank (13);
intake pipe (11) are located the inside one end of trap body (1) is connected with the one end of liquefaction house steward (20), liquefaction house steward (20) are the T style of calligraphy, the other end interval of liquefaction house steward (20) evenly is provided with a plurality of exports, and is a plurality of the export all is connected with the one end of liquefaction branch pipe (21), the other end of liquefaction branch pipe (21) passes liquefaction groove (13) and with outlet duct (12) are linked together.
2. The carbon tetrafluoride trap of claim 1, wherein:
guide plates (211) are fixedly arranged at the upper end and the lower end in the liquefaction branch pipe (21), and the included angle between each guide plate (211) and the horizontal plane is 20-40 degrees.
3. The carbon tetrafluoride trap of claim 1, wherein:
the upper end of the catcher body (1) is provided with a thermometer (3), and a temperature measuring probe of the thermometer (3) is inserted into the liquefaction tank (13).
4. The carbon tetrafluoride trap of claim 1, wherein:
the upper end of the catcher body (1) is provided with a liquid level meter (4), and the measuring end of the liquid level meter (4) extends into the liquefaction tank (13).
5. The carbon tetrafluoride trap of claim 1, wherein:
a drying box (16) is arranged in the trap body (1), and an air inlet of the drying box (16) is connected and communicated with an air outlet of the liquefaction branch pipe (21); the air outlet of the drying box (16) is connected with the air outlet pipe (12).
6. The carbon tetrafluoride trap of claim 1, wherein:
a control box (17) is arranged at the upper end of the catcher body (1), a control system is arranged in the control box (17), and a control panel (171) is arranged on the surface of the control box (17); and the air inlet pipe (11) and the air outlet pipe (12) are both provided with electromagnetic valves (5), and the electromagnetic valves (5) are electrically connected with the control system.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920957283.7U CN210251289U (en) | 2019-06-24 | 2019-06-24 | Carbon tetrafluoride trap |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920957283.7U CN210251289U (en) | 2019-06-24 | 2019-06-24 | Carbon tetrafluoride trap |
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| Publication Number | Publication Date |
|---|---|
| CN210251289U true CN210251289U (en) | 2020-04-07 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201920957283.7U Active CN210251289U (en) | 2019-06-24 | 2019-06-24 | Carbon tetrafluoride trap |
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| CN (1) | CN210251289U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112426742A (en) * | 2020-11-04 | 2021-03-02 | 北京高麦克仪器科技有限公司 | Cold hydrazine |
-
2019
- 2019-06-24 CN CN201920957283.7U patent/CN210251289U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112426742A (en) * | 2020-11-04 | 2021-03-02 | 北京高麦克仪器科技有限公司 | Cold hydrazine |
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| GR01 | Patent grant | ||
| CP03 | Change of name, title or address |
Address after: No. 6, Gongye Road, Jiaoyang industrial concentration zone, Jiaoyang Town, Shanghang County, Longyan City, Fujian Province, 364204 Patentee after: Fujian del Technology Co.,Ltd. Address before: No.6, Gongye Road, Jiaoyang industrial concentration zone, Jiaoyang Town, Shanghang County, Longyan City, Fujian Province, 364200 Patentee before: FUJIAN DEER TECHNOLOGY CO.,LTD. |
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| CP03 | Change of name, title or address |