CN210240546U - Rotary lifting sealing structure of vacuum furnace - Google Patents
Rotary lifting sealing structure of vacuum furnace Download PDFInfo
- Publication number
- CN210240546U CN210240546U CN201920885346.2U CN201920885346U CN210240546U CN 210240546 U CN210240546 U CN 210240546U CN 201920885346 U CN201920885346 U CN 201920885346U CN 210240546 U CN210240546 U CN 210240546U
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- ring
- lip
- sealing
- vacuum furnace
- shaped sealing
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Abstract
The utility model discloses a vacuum furnace rotary lifting seal structure, its characterized in that: the device comprises a sealing sleeve (1) with a mounting cavity (2), and a pressing device, a first TC lip-shaped sealing ring (8) and a second TC lip-shaped sealing ring (9) which are sequentially arranged in the mounting cavity (2) from top to bottom; the mounting directions of the second TC lip-shaped sealing ring (9) and the first TC lip-shaped sealing ring (8) are opposite; the bottom of the sealing sleeve (1) is provided with a through hole communicated with the mounting cavity (2). The utility model discloses an installation opposite direction of first TC lip type sealing washer and second TC lip type sealing washer, consequently the utility model discloses the positive negative pressure that can realize the vacuum furnace is sealed simultaneously. The utility model discloses be provided with first clamping ring and second clamping ring, it can reduce the friction of end-to-end cover and TC lip type sealing washer, improves the life of TC lip type sealing washer.
Description
Technical Field
The utility model relates to an artificial crystal growth field specifically provides a rotatory seal structure of drawing of vacuum furnace.
Background
The single crystal furnace is special equipment for preparing artificial crystals of silicon, germanium, gallium arsenide, YAG, LSO and the like, and is a comprehensive system integrating the disciplines of machinery, electricity, computers, aerodynamic force, hydrodynamic force, thermodynamic force and the like. The heating element used for the growth of the artificial crystal is made of graphite, molybdenum, tungsten or iridium and the like, so that the heating element is easily oxidized under the conditions of high temperature and oxygen atmosphere, and the generated oxide and high-purity raw materials for crystal growth are easily polluted, so that the service performance of the crystal is influenced, and even the crystal growth cannot be finished.
At present, most of artificial crystals grow under the environment of high vacuum and protective atmosphere, the crystal growth process cannot be separated from rotation and pulling movement, and the sealing of the moving part is always a difficult problem of vacuum equipment sealing in order to ensure the vacuum degree of the crystal growth environment. The traditional sealing mode generally adopts a vacuum corrugated pipe for sealing, but the corrugated pipe structure and the processing technology are complex, high in cost and large in occupied space, and the reduction of the volume of equipment and the maintenance of the equipment are not facilitated. Therefore, the sealing structure specially used for sealing the rotating and pulling movement parts of the single crystal growing equipment adopting the pulling up method or the pulling down method is provided, the equipment can achieve the sealing effect of high vacuum, and the structure can be simplified to solve some defects of the traditional sealing.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to overcome above-mentioned defect, provide one kind and can make equipment reach the sealed effect of high vacuum, and the rotatory seal structure of drawing of vacuum furnace that the structure is simplified.
The utility model discloses a following technical scheme realizes: a rotary lifting sealing structure of a vacuum furnace comprises a sealing sleeve with an installation cavity, and a pressing device, a first TC lip-shaped sealing ring and a second TC lip-shaped sealing ring which are sequentially installed in the installation cavity from top to bottom; the second TC lip-shaped sealing ring and the first TC lip-shaped sealing ring are arranged in opposite directions; and the bottom of the sealing sleeve is provided with a through hole communicated with the mounting cavity.
Further, the pressing device comprises a sealing end cover, a second pressing ring and a first pressing ring which are sequentially arranged in the mounting cavity from top to bottom; the sealing end cover, the second pressing ring and the first pressing ring are all provided with through holes, and the sealing end cover is in threaded connection with the sealing sleeve.
An O-shaped sealing ring mounting groove is formed in the bottom of the sealing sleeve, and an O-shaped sealing ring is mounted in the O-shaped sealing ring mounting groove.
And the sealing sleeve is provided with a screw hole.
The second press ring can rotate in the installation cavity.
The seal sleeve, the seal end cover, the second pressing ring and the first pressing ring are all made of stainless steel.
Compared with the prior art, the utility model, have following advantage and beneficial effect:
(1) the utility model has the advantages of simple structure, it is small, it is convenient to maintain.
(2) The utility model discloses an installation opposite direction of first TC lip type sealing washer and second TC lip type sealing washer, consequently the utility model discloses the positive negative pressure that can realize the vacuum furnace is sealed simultaneously.
(3) The utility model is provided with the first compression ring and the second compression ring, which can reduce the friction between the sealing end cover and the TC lip-shaped sealing ring and prolong the service life of the TC lip-shaped sealing ring; meanwhile, the TC lip sealing ring is compressed through the first compression ring and the second compression ring, so that the plane stress of the TC lip sealing ring is more uniform, and the sealing effect is better.
Drawings
Fig. 1 is a sectional view of the present invention.
Figure 2 is a sectional view of the sealing sleeve of the present invention.
Fig. 3 is a sectional view of the end cap of the present invention.
Fig. 4 is a sectional view of the first pressure ring of the present invention.
Fig. 5 is a sectional view of the second pressure ring of the present invention.
Fig. 6 is a schematic view of the present invention connected to a rotating shaft.
The reference numbers in the drawings are:
1-seal cover, 2-installation cavity, 3-O type sealing washer mounting groove, 4-screw hole, 5-end cover, 6-first clamping ring, 7-second clamping ring, 8-first TC lip type sealing washer, 9-second TC lip type sealing washer, 10-rotation axis.
Detailed Description
The present invention will be described in further detail with reference to examples, but the embodiments of the present invention are not limited thereto.
Examples
As shown in fig. 1, the utility model discloses a rotary lifting seal structure of vacuum furnace, it includes seal cover 1, closing device, first TC lip type sealing washer 8 and second TC lip type sealing washer 9. As shown in fig. 2, the sealing sleeve 1 is provided with a mounting cavity 2 therein, and the bottom of the sealing sleeve is provided with a through hole communicated with the mounting cavity 2, so that the sealing sleeve 1 forms a sleeve body with openings at two ends; the size of the mounting cavity 2 is larger than that of the through hole at the bottom of the sealing sleeve 1. The pressing device, the first TC lip type sealing ring 8 and the second TC lip type sealing ring 9 are sequentially installed in the installation cavity 2 from top to bottom.
Specifically, the second TC lip seal ring 9 and the first TC lip seal ring 8 are installed in opposite directions; in this embodiment, the second TC lip seal 9 is installed in the installation cavity 2 in the forward direction, and plays a role of negative pressure sealing; the first TC lip-shaped sealing ring 8 is reversely arranged in the mounting cavity 2 and plays a role of positive pressure sealing; through making second TC lip type sealing washer 9 and first TC lip type sealing washer 8's installation opposite direction, can make the utility model discloses a seal structure can realize the effect sealed simultaneously to the positive negative pressure of vacuum furnace.
The pressing device is used for pressing a second TC lip type sealing ring 9 and a first TC lip type sealing ring 8, and comprises a sealing end cover 5, a second compression ring 7 and a first compression ring 6 which are sequentially installed in an installation cavity 2 from top to bottom as shown in figure 1. Specifically, this end cover 5 and 1 threaded connection of seal cover, when 5 twists installation cavity 2 of end cover promptly, it compresses tightly second TC lip type sealing washer 9 and first TC lip type sealing washer 8 through first clamping ring 6 and second clamping ring 7, through carrying out the concora crush to second TC lip type sealing washer 9 and first TC lip type sealing washer 8, makes second TC lip type sealing washer 9 and the even atress of first TC lip type sealing washer 8, improves sealed effect.
The seal sleeve 1, the seal end cover 5, the second press ring 7 and the first press ring 6 are all made of 316 stainless steel materials; because second clamping ring 7 and first clamping ring 6 are smooth contact surface, frictional force is less, and first clamping ring 6 contacts with first TC lip type sealing washer 8, its frictional force is great, when screwing up end cover 5, second clamping ring 7 will follow end cover 5 rotatory, and first clamping ring 6 and first TC lip type sealing washer 8 are then relatively fixed motionless, realize the protection to first TC lip type sealing washer 8, improve first TC lip type sealing washer 8's life.
This end cover 5, all be provided with the through-hole on second clamping ring 7 and the first clamping ring 6, during the use, as shown in fig. 6, rotation axis 10 or draw the through-hole that the axle passed sealing sleeve 1 bottom, second TC lip type sealing washer 9, first TC lip type sealing washer 8, the through-hole on the first clamping ring 6, the through-hole on the second clamping ring 7 and the through-hole on the end cover 5, through compressing tightly second TC lip type sealing washer 9 and first TC lip type sealing washer 8, thereby realize rotation axis 10 or draw the motion of axle sealed, improve the sealed effect of vacuum furnace. The structure of the sealing end cover 5, the second press ring 7 and the first press ring 6 is shown in figures 3-5.
As an optimal scheme, an O-shaped sealing ring mounting groove 3 is formed in the bottom of the sealing sleeve 1, an O-shaped sealing ring is mounted in the O-shaped sealing ring mounting groove 3, and a screw hole 4 is formed in the sealing sleeve 1. Screws are screwed in from the screw holes 4, so that the sealing sleeve 1 is arranged on the vacuum furnace, and the sealing sleeve and the vacuum furnace body are sealed by screwing the screws to press the O-shaped sealing ring.
The utility model discloses a rotatory seal structure of drawing of vacuum furnace installs according to following step:
(1) the end face of the vacuum furnace body connected with the sealing sleeve and the inside and the outside of the sealing sleeve are cleaned by alcohol abrasive cloth.
(2) And wiping the O-shaped sealing ring, the second TC lip-shaped sealing ring and the first TC lip-shaped sealing ring by using wine material abrasive cloth.
(3) And coating a small amount of vacuum grease on the O-shaped sealing ring, and filling the O-shaped sealing ring into the O-shaped sealing ring mounting groove of the sealing sleeve.
(4) And (3) flatly placing the sealing sleeve on the installation position of the furnace body, aligning the screw holes, adjusting the concentricity of the sealing sleeve and the furnace body, uniformly flatly pressing, and tightening all the fixing screws.
(5) The second TC lip-shaped sealing ring 9 is placed into the mounting cavity of the sealing sleeve in the positive direction, and then the first TC lip-shaped sealing ring is placed into the sealing sleeve in the negative direction.
(6) And sequentially placing the first pressing ring 6, the second pressing ring 7 and the sealing end cover 5 into the mounting cavity.
(7) And a rotating shaft or a lifting shaft passes through a through hole at the bottom of the sealing sleeve 1, a second TC lip-shaped sealing ring 9, a first TC lip-shaped sealing ring 8, a through hole on the first pressing ring 6, a through hole on the second pressing ring 7 and a through hole on the sealing end cover 5.
(8) The sealing end cover 5 is screwed into the mounting cavity.
As described above, the present invention can be implemented well.
Claims (6)
1. The utility model provides a vacuum furnace rotation is carried and is drawn seal structure which characterized in that: the device comprises a sealing sleeve (1) with a mounting cavity (2), and a pressing device, a first TC lip-shaped sealing ring (8) and a second TC lip-shaped sealing ring (9) which are sequentially arranged in the mounting cavity (2) from top to bottom; the mounting directions of the second TC lip-shaped sealing ring (9) and the first TC lip-shaped sealing ring (8) are opposite; the bottom of the sealing sleeve (1) is provided with a through hole communicated with the mounting cavity (2).
2. The rotary lifting seal structure of a vacuum furnace according to claim 1, wherein: the pressing device comprises a sealing end cover (5), a second pressing ring (7) and a first pressing ring (6) which are sequentially arranged in the mounting cavity (2) from top to bottom; all be provided with the through-hole on end cover (5), second clamping ring (7) and first clamping ring (6), and end cover (5) and seal cover (1) threaded connection.
3. A vacuum furnace rotary lifting seal structure according to claim 1 or 2, characterized in that: an O-shaped sealing ring mounting groove (3) is formed in the bottom of the sealing sleeve (1), and an O-shaped sealing ring is mounted in the O-shaped sealing ring mounting groove (3).
4. A vacuum furnace rotary lifting seal structure according to claim 1 or 2, characterized in that: the sealing sleeve (1) is provided with a screw hole (4).
5. The rotary lifting seal structure of a vacuum furnace according to claim 2, wherein: the second compression ring (7) can rotate in the installation cavity (2).
6. The rotary lifting seal structure of a vacuum furnace according to claim 2, wherein: the sealing sleeve (1), the sealing end cover (5), the second pressing ring (7) and the first pressing ring (6) are all made of stainless steel.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920885346.2U CN210240546U (en) | 2019-06-12 | 2019-06-12 | Rotary lifting sealing structure of vacuum furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920885346.2U CN210240546U (en) | 2019-06-12 | 2019-06-12 | Rotary lifting sealing structure of vacuum furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN210240546U true CN210240546U (en) | 2020-04-03 |
Family
ID=69973714
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201920885346.2U Ceased CN210240546U (en) | 2019-06-12 | 2019-06-12 | Rotary lifting sealing structure of vacuum furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN210240546U (en) |
-
2019
- 2019-06-12 CN CN201920885346.2U patent/CN210240546U/en not_active Ceased
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| IW01 | Full invalidation of patent right | ||
| IW01 | Full invalidation of patent right |
Decision date of declaring invalidation: 20210831 Decision number of declaring invalidation: 51536 Granted publication date: 20200403 |