CN210223980U

CN210223980U - Feeding mechanism capable of detecting flatness of wafer boat box on photoresist remover

Info

Publication number: CN210223980U
Application number: CN201920899725.7U
Authority: CN
Inventors: Haoming Wang; 王浩明
Original assignee: Suzhou Zishan Semiconductor Technology Co Ltd
Current assignee: Suzhou Zishan Semiconductor Technology Co Ltd
Priority date: 2019-06-15
Filing date: 2019-06-15
Publication date: 2020-03-31
Anticipated expiration: 2029-06-15

Abstract

The utility model discloses a last detectable wafer boat box roughness's of photoresistance gets rid of machine feed mechanism, including the board with inlay the sensor of establishing on the board top, the sensor guide way has been seted up at the top middle part of board, the sensor guide way internal fixation has first sensor, is provided with heavy groove and through-hole on the board of first sensor one side, the electrode slice of first sensor passes through the fix with screw and sinks the inslot, a electrode slice connection wire, this wire is worn out from the bottom of board through the through-hole. The utility model adds an inductor on the traditional photoresistance removing machine, the inductor and the inductor on the original photoresistance removing machine cooperate, a horizontal plane is determined by the inductor in the linear groove and the additional inductor, and the signal of the horizontal plane is connected in parallel with the signal of the sensor of the original machine table to form a linkage monitoring; the abnormal condition that the wafer carrier is not found when the wafer carrier is placed askew is prevented, the judgment accuracy is improved, and the rejection rate of products is reduced.

Description

Feeding mechanism capable of detecting flatness of wafer boat box on photoresist remover

Technical Field

The utility model relates to a feed mechanism specifically is a feed mechanism of detectable crystal boat box roughness on photoresistance gets rid of machine.

Background

The traditional photoresist remover is provided with a mechanism for detecting whether the wafer boat box is arranged or not. The working principle is that a sensor is arranged in a linear groove, and when the wafer boat box is placed, the sensor is pressed downwards by the wafer boat box to trigger; when the crystal boat box is taken down, the sensor is reset and is not triggered.

At present, a machine table only has one wafer cassette sensor and is located in the middle of a wafer cassette. When the wafer boat box spans the front half end and the rear half end of the wafer boat platform for artificial reasons, the sensor is easily pressed and the wafer boat box is not in a horizontal position; the machine station can only judge whether the wafer boat box is placed or not by pressing the sensor, and can not identify whether the placing position of the wafer boat box is horizontal or not, if the position of the wafer boat box is abnormal, abnormal transmission is easily caused, and products are scrapped. Therefore, we improve this and propose a loading mechanism for testing the flatness of the wafer cassette on the photoresist remover.

SUMMERY OF THE UTILITY MODEL

In order to solve the technical problem, the utility model provides a following technical scheme:

the utility model relates to a last detectable wafer boat box roughness's of photoresistance gets rid of machine feed mechanism, include the board and inlay the sensor of establishing on the board top, the sensor guide way has been seted up at the top middle part of board, the sensor guide way internal fixation has first sensor, is provided with heavy groove and through-hole on the board of first sensor one side, the electrode slice of first sensor passes through the fix with screw in heavy groove, a electrode slice connection wire, this wire is worn out from the bottom of board through the through-hole.

As an optimal technical scheme of the utility model, the both sides of board are provided with two big one little wafer boat box mountings, two respectively wafer boat box mountings are all through the top fixed connection of screw with the board.

One side of one of the wafer boat box fixing parts is provided with a second sensor, the second sensor is embedded in the machine table, and the top end of the second sensor is flush with the top end of the machine table.

As a preferred technical scheme of the utility model, the sensor guide way is the rectangle aluminium pig of a middle part rectangular shape recess, and the middle part of recess has seted up a through-hole, the fixed setting of first sensor is in the through-hole.

As a preferred technical scheme of the utility model, a locating hole has been seted up at the middle part of board, the bottom of board is provided with the platform fixed column, the top of platform fixed column is provided with the second order round platform, and the second order round platform block is in the locating hole, the board passes through platform fixed column fixed mounting at the top that the machine was got rid of to the photoresistance, and the location plane of board and the table surface that the machine was got rid of to the photoresistance are the horizontal plane.

As a preferred technical scheme of the utility model, first sensor with the second sensor is for being the switch sensor.

As an optimized technical scheme of the utility model, two the mutual just right one side of crystal boat box mounting is two planes that are parallel to each other, and the corner of one of them crystal boat box mounting is provided with straight chamfer.

As a preferred technical solution of the present invention, the first sensor and the second sensor are connected in parallel to form a chain monitoring.

The utility model has the advantages that: the method comprises the following steps that a sensor is additionally arranged on a traditional photoresist remover, the sensor and the sensor on the original photoresist remover cooperate, a horizontal plane is determined through the sensor in a linear groove and an additional sensor, and signals of the horizontal plane and signals of a sensor of an original machine platform are connected in parallel to form linkage monitoring; if one of the two sensors is not triggered, the sensor signal is not triggered, thereby preventing the abnormal situation that the wafer carrier box is placed askew but not found, improving the judgment accuracy and reducing the rejection rate of products.

Drawings

The accompanying drawings are included to provide a further understanding of the invention, and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention, and together with the description serve to explain the invention and not to limit the invention. In the drawings:

FIG. 1 is an isometric view of a loading mechanism of a photoresist remover for testing the flatness of a wafer cassette;

FIG. 2 is a top view of a loading mechanism of the photoresist remover for testing the flatness of the cassette;

fig. 3 is a circuit diagram of a feeding mechanism for detecting the flatness of a wafer cassette on a photoresist remover according to the present invention.

In the figure: 1. a machine platform; 2. a sensor; 201. a first sensor; 202. a second sensor; 203. an electrode sheet; 204. a wire; 3. a sensor guide groove; 4. sinking a groove; 5. a through hole; 6. a wafer cassette fixture; 7. positioning holes; 8. the platform is fixed with a column.

Detailed Description

The preferred embodiments of the present invention will be described in conjunction with the accompanying drawings, and it will be understood that they are presented herein only to illustrate and explain the present invention, and not to limit the present invention.

Example (b): as shown in fig. 1, fig. 2 and fig. 3, the utility model relates to a photoresistance gets rid of feed mechanism of last detectable crystal boat box roughness, including board 1 with inlay the sensor 2 of establishing on the board top, sensor guide way 3 has been seted up at the top middle part of board 1, sensor guide way 3 internal fixation has first sensor 201, is provided with heavy groove 4 and through-hole 5 on the board 1 of first sensor 201 one side, electrode slice 203 of first sensor 201 passes through the fix with screw in heavy groove 4, electrode slice 203 connects a wire 204, this wire 204 is worn out from the bottom of board 1 through-hole 5.

Wherein, two sides of the machine table 1 are respectively provided with a big wafer boat box fixing piece 6 and a small wafer boat box fixing piece 6, and the two wafer boat box fixing pieces 6 are fixedly connected with the top end of the machine table 1 through screws; one side of one of the wafer cassette fixing members 6 is provided with a second sensor 202, the second sensor 202 is embedded in the machine table 1, and the top end of the second sensor 202 is flush with the top end of the machine table 1; one side of the two wafer boat fixing pieces 6 opposite to each other is two planes parallel to each other, and a straight chamfer is arranged at the corner of one wafer boat fixing piece 6.

According to actual conditions, the first sensor 201 and the second sensor 202 can be switch sensors, the switch sensors are in a normally closed state, when a square boat box exists, the switch sensors are disconnected, and induction signals are triggered.

The sensor guide groove 3 is a rectangular aluminum block with a strip-shaped groove in the middle, a through hole is formed in the middle of the groove, and the first sensor 201 is fixedly arranged in the through hole; a positioning hole 7 is formed in the middle of the machine table 1, a platform fixing column 8 is arranged at the bottom of the machine table 1, a second-order round table is arranged at the top of the platform fixing column 8 and clamped in the positioning hole 7, the machine table 1 is fixedly installed at the top of the photoresist remover through the platform fixing column 8, and the positioning plane of the machine table 1 and the working platform surface of the photoresist remover are horizontal planes; the first sensor 201 and the second sensor 202 are connected in parallel and form a chain monitoring.

During operation, the boat box is placed on the machine table 1 at the top of the photoresistance removing machine in a manual or mechanical automatic mode, the machine table 1 is positioned through the platform fixing column 8 at the bottom of the machine table, in the placing process, the two boat box fixing pieces 6 can align and level the boat box through two parallel edges, meanwhile, one boat box fixing piece 6 with a straight chamfer can level and adjust the boat box through the straight chamfer at the corner, when the boat box falls on the middle part of the top end of the machine table 1, the first sensor 201, namely the rectangular strip-shaped sensor 2 positioned in one of the sensor guide grooves 3 can position a line because the shape of the rectangular strip, the second sensor 202, namely the sensor 2 positioned at one side of one of the boat box fixing pieces 6, is not positioned on the straight line positioned by the first sensor 201, through a straight line of first sensor 201 location, a point of second sensor 202 location, a plane can be fixed a position to both synergism, and two inductor 2's signal is parallelly connected, forms a chain control, and only when two inductor 2 are triggered simultaneously, the sensing signal is just triggered to prevent that the wafer boat box from putting askew but not the unusual emergence of being discovered, improve its detection precision, reduce the disability rate of product.

In the description of the present invention, it should be noted that the terms "vertical", "upper", "lower", "horizontal", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplification of description, but do not indicate or imply that the device or element referred to must have a specific orientation, be constructed in a specific orientation, and be operated, and thus should not be construed as limiting the present invention.

In the description of the present invention, it should also be noted that, unless otherwise explicitly specified or limited, the terms "disposed," "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood according to specific situations by those skilled in the art.

Finally, it should be noted that: although the present invention has been described in detail with reference to the foregoing embodiments, it will be apparent to those skilled in the art that modifications may be made to the embodiments described in the foregoing embodiments, or equivalents may be substituted for elements thereof. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims

1. The utility model provides a last detectable wafer boat box roughness's of photoresistance gets rid of machine feed mechanism, includes board (1) and inlays sensor (2) of establishing on the board top, its characterized in that, sensor guide way (3) have been seted up at the top middle part of board (1), sensor guide way (3) internal fixation has first sensor (201), is provided with heavy groove (4) and through-hole (5) on board (1) of first sensor (201) one side, electrode slice (203) of first sensor (201) pass through the fix with screw in heavy groove (4), a wire (204) is connected in electrode slice (203), and this wire (204) are worn out from the bottom of board (1) through-hole (5).

2. The loading mechanism for testing the flatness of wafer boat cassette in photoresist stripper according to claim 1, wherein two wafer boat cassette holders (6) are respectively installed on two sides of the machine base (1), and the two wafer boat cassette holders (6) are fixedly connected to the top end of the machine base (1) by screws.

3. The loading mechanism for wafer cassette flatness detection on a photoresist stripper according to claim 2, wherein one side of one of the wafer cassette holders (6) is provided with a second sensor (202), the second sensor (202) is embedded in the machine table (1), and the top end of the second sensor (202) is flush with the top end of the machine table (1).

4. The loading mechanism for testing the flatness of a wafer cassette on a photoresist stripper as claimed in claim 1, wherein the sensor guide groove (3) is a rectangular aluminum block with a long strip-shaped groove at the middle, and a through hole is opened at the middle of the groove, and the first sensor (201) is fixedly disposed in the through hole.

5. The feeding mechanism for detecting the flatness of a wafer cassette on a photoresist stripper as claimed in claim 1, wherein a positioning hole (7) is opened at the middle part of the machine table (1), a platform fixing column (8) is provided at the bottom of the machine table (1), a second step table is provided at the top of the platform fixing column (8) and is clamped in the positioning hole (7), the machine table (1) is fixedly installed at the top of the photoresist stripper through the platform fixing column (8), and the positioning plane of the machine table (1) and the working table surface of the photoresist stripper are both horizontal.

6. The loading mechanism of claim 3, wherein the first sensor (201) and the second sensor (202) are switch sensors.

7. The loading mechanism for wafer cassette flatness detection on a photoresist stripper as claimed in claim 3 wherein the opposite sides of two wafer cassette holders (6) are two parallel planes, and a straight chamfer is provided at the corner of one wafer cassette holder (6).

8. The loading mechanism of claim 6, wherein the first sensor (201) and the second sensor (202) are connected in parallel to form an interlock monitor.