CN210221072U

CN210221072U - Mounting position detecting device for semiconductor equipment

Info

Publication number: CN210221072U
Application number: CN201921021565.2U
Authority: CN
Inventors: Dixing Wang; 王迪杏; Wei Jiang; 蒋伟; Ning Wang; 王宁; Yang Zhang; 张阳; Wenbing Qin; 秦文兵; Jinyu Wang; 王金裕; Quan Miao; 苗全; Luyang Sheng; 盛路阳; Wei Wang; 王伟; Yuqi Gu; 顾育琪
Original assignee: Wuxi Diyuante Technology Co Ltd
Current assignee: Wuxi Diyuante Technology Co Ltd
Priority date: 2019-07-03
Filing date: 2019-07-03
Publication date: 2020-03-31
Anticipated expiration: 2029-07-03

Abstract

The utility model discloses an installation position detection device for semiconductor equipment, including detecting the ring body, be connected with the spliced pole on detecting the inner wall of ring body, seted up the movable groove in the middle of the top of spliced pole, the bottom of detecting the ring body is connected with and links up the stand, links up the stand and keeps away from the one end of detecting the ring body and is connected with and places the board, places and is connected with supplementary fagging on the inner wall of board, the utility model discloses the beneficial effect who reaches is: can make the stability of spliced pole self stronger through supplementary fagging, lay on the loop body structure through placing the board, before placing, the bottom and the loop body structure that need place the board clean, avoid the micronic dust to influence the testing result, the level detector is liquid level detector, the horizontality of loop body structure installation can audio-visually be known to the difference through observing the liquid level, can be timely make corresponding adjustment, it makes for the horizontal detection post of erectting to link up the stand, can cooperate with the level detector through linking up the stand, the levelness that makes the detection is more accurate.

Description

Mounting position detecting device for semiconductor equipment

Technical Field

The utility model relates to a detection device, in particular to installation position detection device for semiconductor equipment belongs to semiconductor installation position level detection equipment technical field.

Background

The utility model provides a ring structure can be installed usually on semiconductor equipment's platform, and this ring structure is a comparatively important subassembly in the semiconductor equipment, consequently to the detection after this ring dress structure installation especially important, and especially the levelness after the installation can directly influence the subsequent use of semiconductor equipment, needs the shut down adjustment to this when the installation is not in place, and this can waste a large amount of time undoubtedly, for solving foretell technical problem, the utility model provides an installation position detection device for semiconductor equipment.

SUMMERY OF THE UTILITY MODEL

The to-be-solved technical problem of the utility model is to overcome prior art's defect, provide an installation position detection device for semiconductor equipment, can the foretell technical problem of effectual solution.

In order to solve the technical problem, the utility model provides a following technical scheme:

the utility model discloses an installation position detection device for semiconductor equipment, including detecting the ring body, be connected with the spliced pole on detecting the inner wall of ring body, the movable groove has been seted up in the middle of the top of spliced pole, the bottom of detecting the ring body is connected with and links up the stand, it is connected with and places the board to link up the stand and keep away from the one end that detects the ring body, it is connected with supplementary fagging on the inner wall of board to place.

As a preferred technical scheme of the utility model, the activity groove is including removing the slider, the slot has all been seted up on the relative both sides lateral wall of activity inslot portion, remove fixedly connected with picture peg on slider and the corresponding position of slot, picture peg swing joint is in the slot.

As a preferred technical scheme of the utility model, swing joint has a plurality of to remove the gyro wheel on one side that removes the slider relative with the activity tank bottom, fixedly connected with connecting plate on the top of removal slider, fixedly connected with level detector on one side of removal slider is kept away from to the connecting plate, level detector is the strip formula detector.

As an optimized technical scheme of the utility model, the spliced pole is "ten" font structure, the spliced pole is on the inner wall that detects the ring body through four end fixed connection, it just is cylindrical structure for erectting the detector of stand to link up the stand.

As a preferred technical scheme of the utility model, the one end fixed connection that links up the stand through keeping away from the detection ring body is on the top of placing the board, links up the stand and establishes four altogether, supplementary fagging is through both ends slope fixed connection on the bottom of spliced pole and the inner wall of placing the board.

The utility model discloses the beneficial effect who reaches is: can make the stability of spliced pole self stronger through supplementary fagging, lay on the loop body structure through placing the board, before placing, the bottom and the loop body structure that need place the board are cleaned totally, avoid the micronic dust to influence the testing result, the level detector is liquid level detection appearance, the horizontality of loop body structure installation can audio-visually be known to the difference through observing the liquid level, can be timely make corresponding adjustment, it makes for the horizontal detection post of erectting to link up the stand, can cooperate with the level detector through linking up the stand, make the levelness that detects more accurate, can make the removal slider carry out nimble removal as required through removing the gyro wheel, so that detect the horizontality of different positions, and it is comparatively sensitive with being connected of removal slider to remove the gyro wheel, it is more convenient to make the removal slider remove.

Drawings

The accompanying drawings are included to provide a further understanding of the invention, and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention, and together with the description serve to explain the invention and not to limit the invention. In the drawings:

fig. 1 is a schematic perspective view of the present invention;

fig. 2 is a schematic plan view of the present invention.

In the figure: 1. detecting a ring body; 2. connecting columns; 3. a movable groove; 31. moving the slide block; 32. inserting plates; 33. a slot; 34. moving the roller; 35. a connecting plate; 36. a level detector; 4. connecting the upright columns; 5. placing the plate; 6. and an auxiliary supporting plate.

Detailed Description

The preferred embodiments of the present invention will be described in conjunction with the accompanying drawings, and it will be understood that they are presented herein only to illustrate and explain the present invention, and not to limit the present invention.

Examples

As shown in fig. 1-2, the installation position detection device for the semiconductor device comprises a detection ring body 1, wherein a connection column 2 is connected to the inner wall of the detection ring body 1, a movable groove 3 is formed in the middle of the top of the connection column 2, a connection column 4 is connected to the bottom of the detection ring body 1, a placement plate 5 is connected to one end, away from the detection ring body 1, of the connection column 4, and an auxiliary supporting plate 6 is connected to the inner wall of the placement plate 5.

The movable groove 3 comprises a movable sliding block 31, slots 33 are respectively formed in two opposite side walls inside the movable groove 3, a plugboard 32 is fixedly connected to the corresponding position of the movable sliding block 31 and the slots 33, the plugboard 32 is movably connected into the slots 33, a plurality of movable rollers 34 are movably connected to one side of the movable sliding block 31 opposite to the bottom of the movable groove 3, a connecting plate 35 is fixedly connected to the top end of the movable sliding block 31, a horizontal detector 36 is fixedly connected to one side of the connecting plate 35 far away from the movable sliding block 31, the horizontal detector 36 is a bar-type detector, the connecting column 2 is in a cross-shaped structure, the connecting column 2 is fixedly connected to the inner wall of the detection ring body 1 through four ends, the column 4 is in a vertical type and is in a cylindrical structure, the column 4 is fixedly connected to the top of the placement plate 5 through one end far away from the detection ring body 1, four linking columns 4 are arranged, and the auxiliary supporting plates 6 are fixedly connected to the bottoms of the connecting columns 2 and the inner walls of the placing plates 5 in an inclined mode through two ends.

Specifically, a cross-shaped connecting column 2 is fixedly connected to the inner wall of the detection ring body 1, a movable groove 3 is formed in the middle of the top of the connecting column 2, a movable slider 31 is movably connected to the inside of the movable groove 3, slots 33 are formed in the side walls of two opposite sides of the movable groove 3, an inserting plate 32 is fixedly connected to the position, corresponding to the slot 33, of the movable slider 31, the inserting plate 32 is movably connected into the slot 33, a movable roller 34 is movably connected to one side, opposite to the bottom of the movable groove 3, of the movable slider 31, the movable slider 31 can flexibly move as required through the movable roller 34, so that the horizontal states of different positions can be detected, the movable roller 34 is flexibly connected with the movable slider 31, the movable slider 31 can move more conveniently, a connecting plate 35 is fixedly connected to the top end of the movable slider 31, the top of the connecting plate 35 is fixedly connected with a horizontal detector 36, the horizontal detector 36 is a liquid level detector, the horizontal state of the installation of the ring body structure can be intuitively known by observing the difference of liquid levels, corresponding adjustment can be timely made, the bottom of the detection ring body 1 is connected with a linking upright post 4, one end of the linking upright post 4 far away from the detection ring body 1 is connected with a placing plate 5, the linking upright post 4 is made of a vertical horizontal detection post, four connecting posts 2 are respectively and fixedly connected on four opposite points of the detection ring body 1 and the placing plate 5, the linking upright post 4 can be matched with the horizontal detector 36, the detected levelness is more accurate, an auxiliary supporting plate 6 is fixedly connected on the inner wall of the placing plate 5, one end of the auxiliary supporting plate 6 far away from the placing plate 5 is fixedly connected on the bottom of the connecting post 2, the stability of the connecting post 2 can be stronger through the auxiliary supporting plate 6, lay on the loop configuration through placing board 5, before placing, need clean bottom and the loop configuration that will place board 5, avoid the micronic dust to influence the testing result.

Finally, it should be noted that: although the present invention has been described in detail with reference to the foregoing embodiments, it will be apparent to those skilled in the art that modifications may be made to the embodiments described in the foregoing embodiments, or equivalents may be substituted for elements thereof. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims

1. A installation position detection device for semiconductor equipment, its characterized in that, including detecting ring body (1), be connected with spliced pole (2) on the inner wall of detecting ring body (1), activity groove (3) have been seted up in the middle of the top of spliced pole (2), the bottom of detecting ring body (1) is connected with linking stand (4), the one end of keeping away from detecting ring body (1) in linking stand (4) is connected with places board (5), it is connected with supplementary fagging (6) on the inner wall of board (5) to place.

2. The mounting position detection device for the semiconductor device according to claim 1, wherein the movable slot (3) includes a movable slider (31), slots (33) are formed in opposite side walls inside the movable slot (3), an insertion plate (32) is fixedly connected to positions of the movable slider (31) corresponding to the slots (33), and the insertion plate (32) is movably connected to the slots (33).

3. The mounting position detecting apparatus for semiconductor devices as claimed in claim 2, wherein a plurality of movable rollers (34) are movably connected to a side of the movable slider (31) opposite to the bottom of the movable groove (3), a connecting plate (35) is fixedly connected to a top end of the movable slider (31), a horizontal detector (36) is fixedly connected to a side of the connecting plate (35) away from the movable slider (31), and the horizontal detector (36) is a bar detector.

4. The mounting position detecting device for semiconductor equipment according to claim 1, wherein the connecting column (2) is a cross-shaped structure, the connecting column (2) is fixedly connected to the inner wall of the detecting ring body (1) through four ends, and the connecting column (4) is a vertical detector and is a cylindrical structure.

5. The mounting position detecting apparatus for semiconductor devices according to claim 1, wherein the joining columns (4) are fixedly connected to the top of the placing plate (5) through one end far from the detecting ring body (1), four joining columns (4) are provided in total, and the auxiliary supporting plate (6) is fixedly connected to the bottom of the connecting column (2) and the inner wall of the placing plate (5) through two ends inclined.