CN210176462U - Device for purifying carbonyl fluoride - Google Patents
Device for purifying carbonyl fluoride Download PDFInfo
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- CN210176462U CN210176462U CN201920426741.4U CN201920426741U CN210176462U CN 210176462 U CN210176462 U CN 210176462U CN 201920426741 U CN201920426741 U CN 201920426741U CN 210176462 U CN210176462 U CN 210176462U
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Abstract
The utility model belongs to the field of fluorine chemistry, in particular to a carbonyl fluoride purifying device, which comprises a distillation tower body unit, a temperature control unit and a pressure unit; the distillation tower body unit comprises a tower body and a partition plate arranged along the height direction of the tower; a reboiler is arranged at the bottom of the distillation tower, and a condenser is arranged at the top of the distillation tower; the left side end of the distillation tower is provided with a pre-separation product inlet, and the right side end of the distillation tower is provided with a separation product outlet; the area between the upper end of the clapboard and the tower top is a liquid distribution section; the area between the lower end of the clapboard and the bottom of the tower is a gas distribution section. The utility model provides a device of purification carbonyl fluoride utilizes the setting of tower body baffle, can realize once that the rectification gets rid of low boiling and high boiling impurity simultaneously, and the purity of carbonyl fluoride is > 99% higher even after the purification, and the simple easy industrialization of process equipment.
Description
Technical Field
The invention belongs to the field of fluorine chemistry, and particularly relates to a carbonyl fluoride purification device.
Background
Carbonyl fluoride (COF2) has very low Global Warming Potential (GWP) and excellent cleaning properties, and thus can replace conventional cleaning gases and etching gases such as conventional Perfluorocarbon (PFC) and nitrogen trifluoride (NF3), and is widely used in the semiconductor manufacturing industry. In addition, because carbonyl fluoride is decomposed into carbon dioxide when meeting water, residual carbonyl fluoride in the industry can be directly removed by washing with water, and an additional tail gas treatment device is not needed for other etching gases, so that the industrial investment is reduced. In addition, carbonyl fluoride is also an important fluorinated gas and raw material of an organic compound, an intermediate for organic synthesis, a fluorinating agent, and the application of carbonyl fluoride in the field of liquid crystal manufacturing is gradually developed. However, high purity carbonyl fluoride is required as a cleaning gas and an etching gas in the semiconductor manufacturing industry.
At present, the synthesis and preparation process of carbonyl fluoride is mature, and a plurality of patents and documents report. The carbonyl fluoride synthesis method mainly comprises the following steps of: 1. a synthesis method using carbon monoxide or carbon dioxide as a raw material; 2. a synthesis method using carbonyl chloride as a raw material; 3. a synthetic method using trifluoromethane as a raw material; 4. a synthetic method using tetrafluoroethylene as a raw material; 5. a synthetic method using perfluoroalkyl iodide as a raw material; 6. a synthetic method using hexafluoropropylene as a raw material. The crude carbonyl fluoride prepared by the above method usually contains low boiling impurities such as N2, O2, CO, CF4, etc., and high boiling impurities such as CO2, HCl, HF, COCl2, CF3COF, CF3OCOF, CF3CF2COF, CF3OCF2COF, etc.
However, so far, there are very few patents on carbonyl fluoride purification. Chinese patent CN105967166A provides a method for purifying carbonyl fluoride by reacting one or more of purified gases ClF, ClF3, ClF5 or F2 with impurities in the carbonyl fluoride crude product, and rectifying after the reaction. CN103303894 describes a method for obtaining purified gas by performing light weight removal and heavy weight removal treatment on a crude product of carbonyl fluoride gas, and then performing secondary rectification purification.
Aiming at the defects that the prior crude gas of carbonyl fluoride has various impurity gases, high content, complicated separation process, difficult industrialization and the like, a simple and convenient device for purifying carbonyl fluoride is urgently needed.
Disclosure of Invention
The invention aims to provide a device for purifying carbonyl fluoride.
In order to achieve the purpose, the invention adopts the following technical scheme:
a device for purifying carbonyl fluoride comprises a distillation tower body unit, a temperature control unit and a pressure unit; the distillation tower body unit comprises a tower body and a partition plate arranged along the height direction of the tower; a reboiler is arranged at the bottom of the distillation tower, and a condenser is arranged at the top of the distillation tower; the left side end of the distillation tower is provided with a pre-separation product inlet, and the right side end of the distillation tower is provided with a separation product outlet; the area between the upper end of the clapboard and the tower top is a liquid distribution section; the area between the lower end of the clapboard and the bottom of the tower is a gas distribution section.
The temperature control unit comprises temperature control pipes which are respectively arranged at the bottom of the tower and at the top of the tower; and temperature control medium flows into the temperature control pipe to control the temperature of the tower top and the tower bottom.
The pressure unit comprises an air supply pipeline and a pressure relief pipeline which are communicated with the tower top; the air supplementing pipeline and the pressure relief pipeline are respectively provided with a pressure supplementing valve and a pressure relief valve; the tower top is provided with a pressure sensor connected with a control center; the control center is communicated with the pressure compensating valve and the pressure relief valve; the opening and closing of the pressure supplementing valve or the pressure relief valve are controlled by the index of the pressure sensor.
Also comprises a gas supplementing branch; the air supply branch is connected in parallel on the air supply pipeline and is provided with a branch valve and a branch flowmeter; the gas supplementing branch continuously supplements gas into the distillation tower to maintain the tower pressure in the distillation tower within 1KPa above and below the pressure relief threshold.
The distillation tower is a packed tower, and the packing is selected from iron, stainless steel, copper, nickel, Monel alloy,At least one of nichrome or polytetrafluoroethylene; the type of the filler is at least one of pall ring, intalox saddle ring or theta ring; the specific surface area of the filler is 100-2000m2/m3(ii) a The packing adopts a random or regular mode; the filling height of the filler is 1000mm-20000 mm.
Compared with the prior art, the invention has the beneficial effects that:
the invention provides a carbonyl fluoride purification device, which can realize the simultaneous removal of low-boiling-point and high-boiling-point impurities by one-time rectification by utilizing the arrangement of a tower body partition plate, the purity of the carbonyl fluoride after purification is more than 99 percent or even higher, and the process equipment is simple and easy to industrialize.
Drawings
FIG. 1 is a schematic view showing the overall structure of a carbonyl fluoride purification apparatus according to the present invention;
Detailed Description
In order to make the technical solutions of the present invention better understood by those skilled in the art, the present invention will be further described in detail with reference to the accompanying drawings and preferred embodiments. All pressures referred to herein are absolute pressures; the gas component was analyzed for gas composition by fourier transform infrared spectroscopy (FT-IR), and carbonyl fluoride purity and yield were determined by gas chromatography-mass spectrometry (GC-MS).
Fig. 1 shows a carbonyl fluoride purification apparatus including a distillation column body unit, a temperature control unit, and a pressure unit; the distillation tower body unit comprises a tower body 1 and a partition plate 2 arranged along the height direction of the tower; a reboiler 3 is arranged at the bottom of the distillation tower, and a condenser 4 is arranged at the top of the distillation tower; the left side end of the distillation tower is provided with a pre-separation product inlet 5, and the right side end of the distillation tower is provided with a separation product outlet 6; the area between the upper end of the clapboard and the tower top is a liquid distribution section 7; the area between the lower end of the clapboard and the bottom of the tower is a gas distribution section 8. The temperature control unit comprises temperature control pipes 9 which are respectively arranged at the bottom and the top of the tower; and temperature control medium flows into the temperature control pipe to control the temperature of the tower top and the tower bottom.
The pressure unit comprises an air supply pipeline 10 and a pressure relief pipeline 11 which are communicated with the tower top; the air supplementing pipeline and the pressure relief pipeline are respectively provided with a pressure supplementing valve and a pressure relief valve; the tower top is provided with a pressure sensor connected with a control center; the control center is communicated with the pressure compensating valve and the pressure relief valve; the opening and closing of the pressure supplementing valve or the pressure relief valve are controlled by the index of the pressure sensor.
Also comprises an air supply branch 12; the air supply branch is connected in parallel with the air supply pipeline and is provided with a branch valve and a branch flowmeter 13; the gas supplementing branch continuously supplements gas into the distillation tower to maintain the tower pressure in the distillation tower within 1KPa above and below the pressure relief threshold.
The distillation tower is a packed tower, and the packing is selected from at least one of iron, stainless steel, copper, nickel, Monel alloy, nickel-chromium alloy or polytetrafluoroethylene; the type of the filler is at least one of pall ring, intalox saddle ring or theta ring; the specific surface area of the filler is 100-2000m2/m3(ii) a The packing adopts a random or regular mode; the filling height of the filler is 1000mm-20000 mm.
Example 1:
the purification apparatus used in this example was the distillation column described above, carbonyl fluoride crude product gas entering the distillation column through the pre-separation product inlet, and product (pure carbonyl fluoride) being withdrawn in liquid form through the separation product outlet, low boiling impurities being withdrawn from the top of the column, high boiling impurities being withdrawn from the bottom of the column. Each part of the distillation column is made of stainless steel SUS304, the diameter in the column is 150mm, the height of a longitudinal partition is 5000mm, the height of a packing is 8000mm, the packing is a theta ring which is made of stainless steel SUS304 and has the nominal size of 5mm, and the specific surface area of the packing is 1000m 2/m 3. The carbonyl fluoride crude product enters a pre-separation product inlet of the distillation tower for purification, and the specific components of the crude product are shown in the table 1. The operating pressure in the column was 1.5MPa, the temperature at the top of the column was-50 ℃ and the temperature at the bottom of the column was-15 ℃. The components and contents of the purified gas were measured, and the results are shown in Table 1.
TABLE 1
Example 2
The purification apparatus used in this example was the same as that used in example 1 except that the operation pressure in the column was 1.5MPa, the temperature at the top of the column was-30 ℃ and the temperature at the bottom of the column was 0 ℃. The carbonyl fluoride crude product enters the distillation tower from a pre-separation product inlet of the distillation tower for purification, and the gas components of the crude product and the purified gas components are shown in a table 2.
TABLE 2
| Components | Gas content before purification | Gas content after purification |
| COF2 | >89％ | >99.9％ |
| N2 | Not detected out | Not detected out |
| O2 | <3％ | <100ppm |
| CF4 | <1％ | <10ppm |
| CO2 | <1％ | <800ppm |
| CF3COF | <4％ | <10ppm |
| CF3OCF2COF | <1％ | <10ppm |
| HF | <100ppm | <10ppm |
| Others | <1％ | <10ppm |
Example 3
The purification apparatus used in this example was the same as that used in example 1 except that the operation pressure in the column was 0.5MPa, the temperature at the top of the column was-50 ℃ and the temperature at the bottom of the column was-15 ℃. The carbonyl fluoride crude product enters the distillation tower from a pre-separation product inlet of the distillation tower for purification, and the gas components of the crude product and the purified gas components are shown in a table 3.
TABLE 3
Example 4
The height of the packing in the purification apparatus used in this example was 1000mm, as in example 1. The carbonyl fluoride crude product enters a pre-separation product inlet of the distillation tower for purification, and the specific components of the crude product are shown in a table 4. The operating pressure in the column was 1.5MPa, the temperature at the top of the column was-50 ℃ and the temperature at the bottom of the column was-15 ℃. The components and contents of the purified gas were measured, and the results are shown in Table 4.
TABLE 4
| Components | Gas content before purification | Gas content after purification |
| COF2 | >89％ | >99.2％ |
| N2 | Not detected out | Not detected out |
| O2 | <3％ | <1000ppm |
| CF4 | <1％ | <100ppm |
| CO2 | <1％ | <4000ppm |
| CF3COF | <4％ | <10ppm |
| CF3OCF2COF | <1％ | <10ppm |
| HF | <100ppm | <10ppm |
| Others | <1％ | <1000ppm |
Example 5
The specific surface area of the filler in the purification apparatus used in this example was 100m2/m3, as in example 1. The carbonyl fluoride crude product enters a pre-separation product inlet of the distillation tower for purification, and the specific components of the crude product are shown in a table 5. The operating pressure in the column was 1.5MPa, the temperature at the top of the column was-50 ℃ and the temperature at the bottom of the column was-15 ℃. The gas components and contents obtained by purification were tested and the test results are shown in table 5.
TABLE 5
Example 6
The specific surface area of the filler in the purification apparatus used in this example was 2000m2/m3, as in example 1. The carbonyl fluoride crude product enters a pre-separation product inlet of the distillation tower for purification, and the specific components of the crude product are shown in a table 6. The operating pressure in the column was 1.5MPa, the temperature at the top of the column was-50 ℃ and the temperature at the bottom of the column was-15 ℃. The gas components and contents obtained by purification were measured, and the results are shown in Table 6.
TABLE 6
| Components | Gas content before purification | Gas content after purification |
| COF2 | >89％ | >99.99％ |
| N2 | Not detected out | Not detected out |
| O2 | <3％ | <10ppm |
| CF4 | <1％ | <10ppm |
| CO2 | <1％ | <50ppm |
| CF3COF | <4％ | <10ppm |
| CF3OCF2COF | <1％ | <10ppm |
| HF | <100ppm | <10ppm |
| Others | <1％ | <10ppm |
The above description is only a preferred embodiment of the present invention, and for those skilled in the art, the present invention should not be limited by the description of the present invention, which should be interpreted as a limitation.
Claims (4)
1. The device for purifying carbonyl fluoride is characterized by comprising a distillation tower body unit, a temperature control unit and a pressure unit; the distillation tower body unit comprises a tower body and a partition plate arranged along the height direction of the tower; a reboiler is arranged at the bottom of the distillation tower, and a condenser is arranged at the top of the distillation tower; the left side end of the distillation tower is provided with a pre-separation product inlet, and the right side end of the distillation tower is provided with a separation product outlet; the area between the upper end of the clapboard and the tower top is a liquid distribution section; the area between the lower end of the clapboard and the bottom of the tower is a gas distribution section.
2. The apparatus for purifying carbonyl fluoride according to claim 1, wherein, the temperature control unit comprises temperature control pipes respectively arranged at the bottom and the top of the tower; and temperature control medium flows into the temperature control pipe to control the temperature of the tower top and the tower bottom.
3. The apparatus for purifying carbonyl fluoride according to claim 1, wherein said pressure unit comprises a gas supply line and a pressure relief line in communication with said tower top; the air supplementing pipeline and the pressure relief pipeline are respectively provided with a pressure supplementing valve and a pressure relief valve; the tower top is provided with a pressure sensor connected with a control center; the control center is communicated with the pressure compensating valve and the pressure relief valve; the opening and closing of the pressure supplementing valve or the pressure relief valve are controlled by the index of the pressure sensor.
4. The apparatus for purifying carbonyl fluoride according to claim 3, further comprising an air supply branch; the air supply branch is connected in parallel on the air supply pipeline and is provided with a branch valve and a branch flowmeter; the gas supplementing branch continuously supplements gas into the distillation tower to maintain the tower pressure in the distillation tower within 1KPa above and below the pressure relief threshold.
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN112856004A (en) * | 2020-12-30 | 2021-05-28 | 江苏安泰安全技术有限公司 | Proportional control safety valve pressure relief method and device |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN112856004A (en) * | 2020-12-30 | 2021-05-28 | 江苏安泰安全技术有限公司 | Proportional control safety valve pressure relief method and device |
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