CN210168277U - Metal foil supporting flange structure for electron accelerator - Google Patents
Metal foil supporting flange structure for electron accelerator Download PDFInfo
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- CN210168277U CN210168277U CN201920863605.1U CN201920863605U CN210168277U CN 210168277 U CN210168277 U CN 210168277U CN 201920863605 U CN201920863605 U CN 201920863605U CN 210168277 U CN210168277 U CN 210168277U
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Abstract
The application discloses a metal foil support flange structure for electron accelerator includes: the metal foil support frame, the gasket and the second flange piece; the metal foil support frame is placed on the second flange piece, and the lateral outer edge of the metal foil support frame is sealed by a gasket. The inner side of the frame of the second flange part is provided with a knife edge groove and a step groove, the metal foil support frame is placed in the step groove, and the gasket is placed in the knife edge groove. The frame of the first flange part is provided with a semi-cylindrical pressing platform which is pressed against the gasket; when the bolt is screwed down, the first flange piece is tightly attached to the second flange piece. The utility model provides an electron accelerator metal forming supports flange structure is owing to use the sword mouth groove to combine copper packing ring sealed, and second flange spare uses the stainless steel, and the metal forming support frame is processed alone, processes sword mouth groove and metal forming support frame step (ladder groove) on second flange spare, consequently not only easy processing, can change the copper packing ring when changing the dismantlement moreover, and the sword is sealed the reliability high.
Description
Technical Field
The present application relates to the field of electronic scanning technologies, and in particular, to a metal foil support flange structure for an electron accelerator.
Background
The electron accelerator is a device which accelerates electron beams by high voltage and leads the electron beams out to bombard scanning products to achieve the purpose of scanning modification. In which the heating of the filament must be performed in a high vacuum, and the metal foil is a thin film made of a metal material (e.g., titanium) for cutting off vacuum and air. With the wider application range of electron accelerators and the continuous application of low-energy electron accelerators, the thickness of the metal foil must be reduced to 0.007mm, and the strength of the thin metal foil is very low, so that a metal foil support flange must be developed to support and seal the metal foil.
The prior art has proposed a titanium foil supporting flange structure of an electron accelerator, but it adopts the integrated molding processing copper flange piece and metal foil to support and realize the flange supporting structure, so the processing cost is high, and the processing difficulty is also very big. And prior art uses compressing tightly of silk materials such as aluminium silver gold to warp and plays sealed effect, put this kind of metal silk material the flange round promptly, the packing force through flange threaded connection makes the metal wire extrusion warp, thereby play sealed effect, this kind of way is on the one hand placing of silk material not to fix a position, put by manual overlap joint, the diversity is serious, and change need change whole second flange spare and foil support frame (second flange spare copper can extrusion deformation) after screwing up at every turn, consequently, the replacement cost is high.
For the technical problems of high processing cost and large processing difficulty of a metal foil support flange structure of an electron accelerator in the prior art and the problems of high replacement cost and difficult positioning of sealing wire materials, no good solution is provided.
SUMMERY OF THE UTILITY MODEL
It is an object of the present application to overcome the above problems or to at least partially solve or mitigate the above problems.
According to one aspect of the present application, there is provided a metal foil support flange structure for an electron accelerator, for supporting a metal foil for isolating a vacuum environment in which a filament of the electron accelerator is located from air. The metal foil support flange structure includes: the device comprises a first flange part, a second flange part and a metal foil support frame, wherein the first flange part and the second flange part are arranged oppositely and are provided with hollow parts for electron beams to pass through; a first surface of the first flange piece opposite to the second flange piece and/or a second surface of the second flange piece opposite to the first flange piece are/is provided with an accommodating groove for accommodating the metal foil support frame, and the accommodating groove corresponds to the hollow part; and the metal foil support frame is arranged in the accommodating groove.
Optionally, a gasket is further included that is disposed around the metal foil support frame, and wherein the gasket is also disposed in the receiving groove.
Optionally, the accommodating groove includes: a stepped slot for receiving the metal foil support frame; and a knife edge groove arranged around the stepped groove and used for accommodating the gasket.
Optionally, the receiving groove is provided at the second surface, and wherein the first surface is provided with a boss abutting the washer at a position corresponding to the washer.
Optionally, the boss is a semi-cylindrical platen.
Optionally, the frame of the first flange part and the frame of the second flange part are provided with corresponding mounting holes at corresponding positions.
Optionally, the first flange part and the second flange part are internally or externally provided with cooling water paths.
Optionally, the gasket is a copper gasket.
Optionally, the metal foil support frame is provided with a hollow-out groove for passing an electron beam, and the hollow-out groove is in any one of the following shapes: circular, rectangular, and rectangular shaped.
Optionally, the surface profile of the first and second flange members has any one of the following shapes: circular and rectangular.
Therefore, in the technical solution of the present invention, the metal foil support frame and the first flange piece and the second flange piece are independent parts that can be separated from each other. And forming a containing groove for containing the metal foil support frame on the first surface of the first flange part and/or the second surface of the second flange part by means of surface machining, so as to contain the metal foil support frame. Therefore, compared with the mode of integrally forming the metal foil support frame and the flange piece in the prior art, the first flange piece, the second flange piece and the metal foil support frame in the metal foil support flange structure of the embodiment are assembled after being independently processed, so that the processing difficulty and the processing cost can be effectively reduced. Therefore, the technical problems that the metal foil supporting flange structure in the prior art is high in processing difficulty and high in processing cost are solved. Furthermore, the utility model discloses a metal foil support frame can fix a position the packing ring through the holding tank to the silk material of existence is placed and is not fixed a position in having solved current manufacturing method, leans on the manual overlap joint to put, the serious problem of diversity. .
The above and other objects, advantages and features of the present application will become more apparent to those skilled in the art from the following detailed description of specific embodiments thereof, taken in conjunction with the accompanying drawings.
Drawings
Some specific embodiments of the present application will be described in detail hereinafter by way of illustration and not limitation with reference to the accompanying drawings. The same reference numbers in the drawings identify the same or similar elements or components. Those skilled in the art will appreciate that the drawings are not necessarily drawn to scale. In the drawings:
FIG. 1 is a top view of an electron accelerator metal foil support flange structure according to an embodiment of the present application;
fig. 2 is a side cross-sectional view of the electron accelerator metal foil support flange structure shown in fig. 1.
Detailed Description
FIG. 1 is a top view of an electron accelerator metal foil support flange structure according to an embodiment of the present application. Fig. 2 is a side cross-sectional view of the electron accelerator metal foil support flange structure shown in fig. 1.
Referring to fig. 1 and 2, the present embodiment provides a metal foil support flange structure for an electron accelerator, for supporting a metal foil 3. Wherein the metal foil 3 is used for isolating the vacuum environment where the filament of the electron accelerator is located from air.
Referring to fig. 2, the foil support flange structure comprises a first flange member 1, a second flange member 5 and a foil support frame 2. The first flange member 1 is disposed opposite to the second flange member 5, and is provided with hollowed-out portions 13 and 23 through which electron beams pass; a first surface 11 of the first flange part 1 opposite to the second flange part 5 and/or a second surface 12 of the second flange part 5 opposite to the first flange part 1 are provided with accommodating grooves (see reference numerals 8 and 9) for accommodating the metal foil support frame 2, the accommodating grooves corresponding to the positions of the hollowed-out portions 13 and 23; and the metal foil support frame 2 is arranged in the accommodating groove.
Although fig. 2 shows a scenario in which a receiving groove is provided in the second surface 12 of the second flange part 5, the receiving groove may also be formed in the first surface 11 of the first flange part 1, thereby providing the foil support frame 2 in the first flange part 1. Alternatively, receiving grooves are provided on both the first surface 11 and the second surface 12, so that a portion of the metal foil support frame 2 can be received, respectively.
Referring to the background art, the existing titanium foil support flange structure of the electron accelerator adopts the integrated molding processing of the copper flange piece and the metal foil support to realize the flange support structure, so the processing cost is high, and the processing difficulty is high.
To the problem that exists among the prior art the technical scheme of the utility model, foil support frame 2 and first flange spare 1 and second flange spare 5 are the independent part that can separate each other. A receiving groove for receiving the metal foil support frame 2 is formed on the first surface 11 of the first flange member 1 and/or the second surface 12 of the second flange member 5 by surface machining, so as to receive the metal foil support frame 2.
Therefore, compared with the mode of integrally forming the metal foil support frame and the flange piece in the prior art, the first flange piece 1, the second flange piece 5 and the metal foil support frame 2 in the metal foil support flange structure of the embodiment are assembled after being independently processed, so that the processing difficulty and the processing cost can be effectively reduced. Therefore, the technical problems that the metal foil supporting flange structure in the prior art is high in processing difficulty and high in processing cost are solved.
Optionally, a gasket 4 is further included, which is arranged around the metal foil support frame 2, and wherein the gasket 4 is also arranged in the receiving groove. Thereby compare with current foil support frame, the utility model discloses a foil support frame can fix a position packing ring 4 through the holding tank to the placing of the silk material that exists has been solved among the current manufacturing approach does not have the location, leans on the manual overlap joint to put, the serious problem of diversity. In addition, the metal foil support frame of the embodiment can directly replace the gasket 4 when replacing the gasket, and the whole lower flange and the metal foil support frame do not need to be replaced, so that the cost is saved. And the holding tank contacts as much as possible, improving the sealing effect.
Optionally, the accommodating groove includes: a stepped slot 9 for receiving the metal foil support frame 2; and a knife-edge slot 8 disposed around the stepped slot 9 for receiving the gasket 4. Thereby the utility model discloses processing knife edge groove 8 and ladder groove 9 on first flange spare 1 and/or second flange spare 5, consequently can change the copper packing ring very conveniently when changing the dismantlement to easy processing is and practice thrift the cost. In addition, the knife edge groove has high sealing reliability, thereby improving the vacuum reliability of the equipment.
Alternatively, a receiving groove is provided to the second surface 12, and wherein the first surface 11 is provided with a projection 7 abutting against the gasket 4 at a position corresponding to the gasket 4. So that when the first and second flange parts 1 and 5 are compressed, the protrusions 7 can further compress the gasket 4, thereby deforming the gasket 4 and thus enhancing the sealing effect.
Alternatively, the boss 7 is a semi-cylindrical press table. So that when the first and second flange parts 1 and 5 are compressed, the contact area of the semi-cylindrical protrusions with the gasket 4 is larger, thereby making the sealability of the gasket better.
Optionally, the rim of the first flange part 1 and the rim of the second flange part 5 are provided with corresponding mounting holes 6 at corresponding positions. The metal foil flange support structure of the present embodiment can thus press the first and second flange pieces 1 and 5 by means of bolts and nuts passing through the mounting holes 6, so that the installation is more secure.
Optionally, cooling water paths are arranged inside or outside the first flange part 1 and the second flange part 5. Thereby when the temperature of first flange spare 1 or second flange spare 5 is higher, can contact cold water and flange spare through cooling water route to take away the heat of flange spare and realize the cooling, can prolong life-saving cost simultaneously.
Optionally, the gasket 4 is a copper gasket. Of course washers of other materials, such as aluminum, may be used. The metal foil 3 may be, for example, a titanium foil.
Optionally, the metal foil support frame 2 is provided with a hollow-out groove for passing the electron beam, and the hollow-out groove is in any one of the following shapes: circular, rectangular, and rectangular shaped. So that the electron beam can be emitted through the hollowed-out groove.
Alternatively, the surface profile of the first flange member 1 and the second flange member 2 may have any one of the following shapes: circular and rectangular. Therefore, the user can select the shapes of the surface profiles of the first flange part and the second flange part according to the requirements during the use process.
In summary, in the technical solution of the present invention, the metal foil support frame 2 and the first flange 1 and the second flange 5 are independent parts that can be separated from each other. A receiving groove for receiving the metal foil support frame 2 is formed on the first surface 11 of the first flange member 1 and/or the second surface 12 of the second flange member 5 by surface machining, so as to receive the metal foil support frame 2. Therefore, compared with the mode of integrally forming the metal foil support frame and the flange piece in the prior art, the first flange piece 1, the second flange piece 5 and the metal foil support frame 2 in the metal foil support flange structure of the embodiment are assembled after being independently processed, so that the processing difficulty and the processing cost can be effectively reduced. Therefore, the technical problems that the metal foil supporting flange structure in the prior art is high in processing difficulty and high in processing cost are solved. Furthermore, the utility model discloses a metal foil support frame can fix a position packing ring 4 through the holding tank to the placing of the silk material that exists has been solved among the current manufacturing method does not have the location, leans on the manual overlap joint to put, the serious problem of diversity.
The above description is only for the preferred embodiment of the present application, but the scope of the present application is not limited thereto, and any changes or substitutions that can be easily conceived by those skilled in the art within the technical scope of the present application should be covered within the scope of the present application. Therefore, the protection scope of the present application shall be subject to the protection scope of the claims.
Claims (10)
1. A metal foil support flange structure for an electron accelerator for supporting a metal foil (3), the metal foil (3) being for isolating a vacuum environment in which a filament of the electron accelerator is located from air, comprising: a first flange part (1), a second flange part (5) and a metal foil support frame (2), wherein
The first flange piece (1) and the second flange piece (5) are arranged oppositely, and hollow parts (13, 23) for electron beams to pass through are arranged;
a first surface (11) of the first flange part (1) opposite to the second flange part (5) and/or a second surface (12) of the second flange part (5) opposite to the first flange part (1) are/is provided with a containing groove for containing the metal foil support frame (2), and the containing groove corresponds to the positions of the hollow parts (13, 23); and
the metal foil support frame (2) is arranged in the accommodating groove.
2. A metal foil support flange structure according to claim 1, further comprising a gasket (4) arranged around the metal foil support frame (2), and wherein the gasket (4) is also arranged in the receiving groove.
3. The metal foil support flange structure of claim 2, wherein the receiving groove comprises: a stepped slot (9) for receiving the metal foil support frame (2); and a knife edge groove (8) which is arranged around the stepped groove (9) and is used for accommodating the gasket (4).
4. Metal foil support flange structure according to claim 2 or 3, wherein said receiving groove is provided at said second surface (12), and wherein,
the first surface (11) is provided with a projection (7) that abuts against the gasket (4) at a position corresponding to the gasket (4).
5. A metal foil support flange structure according to claim 4, wherein the boss (7) is a semi-cylindrical press table.
6. A metal foil support flange structure according to claim 1, wherein the rim of the first flange part (1) and the rim of the second flange part (5) are provided with corresponding mounting holes (6) at corresponding positions.
7. A foil support flange structure according to claim 1, wherein cooling water paths are provided inside or outside the first (1) and second (5) flange parts.
8. A metal foil support flange structure according to claim 2, wherein the gasket (4) is a copper gasket.
9. The metal foil support flange structure according to claim 1, wherein the metal foil support frame (2) is provided with a hollowed-out groove for passing an electron beam therethrough, and the hollowed-out groove is in any one of the following shapes: circular, rectangular, and rectangular shaped.
10. A metal foil support flange structure according to claim 1, wherein the surface profile of the first flange part (1) and the second flange part (5) has any one of the following shapes: circular and rectangular.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920863605.1U CN210168277U (en) | 2019-06-10 | 2019-06-10 | Metal foil supporting flange structure for electron accelerator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920863605.1U CN210168277U (en) | 2019-06-10 | 2019-06-10 | Metal foil supporting flange structure for electron accelerator |
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| Publication Number | Publication Date |
|---|---|
| CN210168277U true CN210168277U (en) | 2020-03-20 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201920863605.1U Active CN210168277U (en) | 2019-06-10 | 2019-06-10 | Metal foil supporting flange structure for electron accelerator |
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| CN (1) | CN210168277U (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111447723A (en) * | 2020-04-09 | 2020-07-24 | 西北核技术研究院 | Knife edge sealing type quick-release flange assembly applied to accelerator vacuum system |
| CN112040627A (en) * | 2020-07-17 | 2020-12-04 | 中国原子能科学研究院 | High-energy electron irradiation accelerator |
| CN113115507A (en) * | 2021-05-11 | 2021-07-13 | 上海高鹰科技有限公司 | Beam extraction window structure of electron curtain accelerator |
| CN115143328A (en) * | 2022-08-31 | 2022-10-04 | 兰州大学 | Flange structure capable of being rapidly disassembled |
-
2019
- 2019-06-10 CN CN201920863605.1U patent/CN210168277U/en active Active
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111447723A (en) * | 2020-04-09 | 2020-07-24 | 西北核技术研究院 | Knife edge sealing type quick-release flange assembly applied to accelerator vacuum system |
| CN111447723B (en) * | 2020-04-09 | 2022-06-03 | 西北核技术研究院 | Knife edge sealing type quick-release flange assembly applied to accelerator vacuum system |
| CN112040627A (en) * | 2020-07-17 | 2020-12-04 | 中国原子能科学研究院 | High-energy electron irradiation accelerator |
| CN112040627B (en) * | 2020-07-17 | 2021-09-28 | 中国原子能科学研究院 | High-energy electron irradiation accelerator |
| CN113115507A (en) * | 2021-05-11 | 2021-07-13 | 上海高鹰科技有限公司 | Beam extraction window structure of electron curtain accelerator |
| CN115143328A (en) * | 2022-08-31 | 2022-10-04 | 兰州大学 | Flange structure capable of being rapidly disassembled |
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