CN210165394U - Double-layer water washing tower device for cooling waste gas - Google Patents
Double-layer water washing tower device for cooling waste gas Download PDFInfo
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- CN210165394U CN210165394U CN201920697384.5U CN201920697384U CN210165394U CN 210165394 U CN210165394 U CN 210165394U CN 201920697384 U CN201920697384 U CN 201920697384U CN 210165394 U CN210165394 U CN 210165394U
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Abstract
The utility model discloses a double-layer water washing tower device for cooling waste gas, which relates to the technical field of waste gas cleaning in the semiconductor industry and comprises a water tank, the water tank is connected with a hollow washing tower through a hoop, the washing tower of the utility model is divided into a first washing chamber and a second washing chamber, the upper ends of the first and the second water pipes are respectively provided with a water pipe I and a water pipe II, the water pipe I of the second washing chamber is connected with a pump in the water tank, so that circulating water is introduced, the water inlet of the first washing chamber is a workshop water source which is purer than water in the first water pipe, the cooling and washing effects are enhanced, the electromagnetic valve is arranged on the second water pipe, a temperature sensor is arranged on the second washing chamber, the temperature sensor transmits signals to the processor after measuring the temperature of the waste gas which is washed and cooled for three times, thereby the discharge of adjustment water pipe two promotes equipment's treatment effeciency, and filter equipment's setting has promoted the emission quality of waste gas.
Description
Technical Field
The utility model relates to a clean technical field of semiconductor waste gas, concretely relates to double-deck washing tower device that cools down the processing to waste gas.
Background
The gas generated by the semiconductor manufacturing process has strong characteristics, such as toxicity, combustibility and corrosion, is directly discharged into the atmosphere and does not accord with the discharge standard, each workshop is required to perform waste gas treatment firstly and then discharge the gas through a discharge system of a main factory, the waste gas treatment generally comprises combustion firstly and then washing and cooling, but the existing waste gas cooling treatment is that the gas after the combustion treatment is directly discharged after the water tank cooling treatment, the cooling and washing effect is not obvious, the treatment efficiency of equipment is not high, and the discharged gas is difficult to reach the discharge standard.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide a double-deck washing tower device of processing of cooling down to waste gas to solve among the prior art to waste gas the washing effect that cools down unobvious, the treatment effeciency of equipment is not high, the gas of emission is difficult to reach emission standard's defect.
The utility model provides a double-deck washing tower device of processing of cooling down waste gas, includes the water tank, there is hollow scrubbing tower through clamp connection on the water tank, the scrubbing tower has two-layer and includes first washing cavity and the second washing cavity through clamp connection, be connected with water pipe one on the first washing cavity, water pipe one end is connected to the water pump in the water tank, be equipped with water pipe two on the second washing cavity, workshop running water source is connected to water pipe two, all be equipped with the water valve on water pipe one and the water pipe two, second washing cavity top is equipped with further filterable filter equipment with waste gas.
Preferably, the filtering device comprises an exhaust pipe in threaded connection with the top end of the second washing chamber, and a filtering mechanism is mounted at the bottom end of the exhaust pipe.
Preferably, filtering mechanism includes the support frame, the support frame bottom is equipped with the several gas pocket and its inside is equipped with several layers of filter screen and threaded connection clamp ring.
Preferably, the side surface of the support frame is provided with inserting strips which are annularly arranged along the axis of the support frame, the bottom end of the exhaust pipe is provided with inserting slots which are annularly arranged along the axis of the exhaust pipe, and the inserting strips are inserted into the inserting slots.
Preferably, the end faces of the inserting strips of the supporting frame are provided with pulling pins.
The utility model has the advantages that: the scrubbing tower divide into first washing cavity and second washing cavity, install water pipe one and water pipe two respectively in their upper end, water pipe one and the pump connection in the water tank of second washing cavity, make and let in the circulating water, what the intaking of first washing cavity let in is the workshop water source, it is purer than the water in the water pipe one, the cooling washing effect has been strengthened, through be equipped with the solenoid valve on water pipe two, set up temperature sensor on second washing cavity, temperature sensor will transmit signal for the treater after the waste gas temperature measurement of cubic washing cooling, thereby the discharge capacity of adjustment water pipe two, lifting means's treatment effeciency, filter equipment's setting has promoted the discharge quality of waste gas.
Drawings
Fig. 1 and fig. 2 are schematic views of the present invention at different viewing angles.
Fig. 3 is a schematic structural diagram of the middle filtering device of the present invention.
Fig. 4 is a schematic structural diagram of the middle exhaust pipe of the present invention.
Fig. 5 and fig. 6 are schematic structural views of different viewing angles of the middle filter mechanism of the present invention.
Fig. 7 is a schematic structural view of fig. 2 with the solenoid valve and the temperature sensor mounted thereon.
The device comprises a water tank, a clamp 2, a washing tower 3, a first washing chamber 4, a second washing chamber 5, a water pipe I6, a water pipe II 7, a filtering device 8, an exhaust pipe 9, a filtering mechanism 10, a support frame 11, a filtering net 12, a pressing ring 13, a cutting 14, a slot 15 and a pull pin 16.
Detailed Description
In order to make the technical means, creation features, achievement purposes and functions of the present invention easy to understand, the present invention is further described below with reference to the following embodiments.
As shown in fig. 1 to 6, a double-deck washing tower device of processing of cooling down is carried out waste gas, including water tank 1, be connected with hollow scrubbing tower 3 through clamp 2 on the water tank 1, scrubbing tower 3 has two-layer and includes first washing cavity 4 and the second washing cavity 5 of connecting through clamp 2, be connected with water pipe one 6 on the first washing cavity 4, the water pipe one 6 other end is connected to the water pump in the water tank 1, be equipped with water pipe two 7 on the second washing cavity 5, workshop running water source is connected to water pipe two 7, all be equipped with the water valve on water pipe one 6 and the water pipe two 7, 5 tops of second washing cavity are equipped with the filter equipment 8 with waste gas further filtration.
In this embodiment, the filtering device 8 comprises an exhaust pipe 9 screwed to the top end of the second washing chamber 5, and the bottom end of the exhaust pipe 9 is provided with a filtering mechanism 10. The filtering mechanism 10 comprises a supporting frame 11, wherein a plurality of air holes are formed in the bottom end of the supporting frame 11, a plurality of layers of filter screens 12 are arranged in the supporting frame 11, and the supporting frame is in threaded connection with a pressing ring 13.
In addition, the side surface of the support frame 11 is provided with inserting strips 14 which are annularly arranged along the axis, the bottom end of the exhaust pipe 9 is provided with inserting grooves 15 which are annularly arranged along the axis, and the inserting strips 14 are inserted in the inserting grooves 15. The end surfaces of the inserting strips 14 of the supporting frame 11 are provided with pulling pins 16.
As shown in fig. 7, the second water pipe 7 may further include an electromagnetic valve, the second washing chamber 5 is provided with a temperature sensor, the electromagnetic valve and the temperature sensor are both electrically connected to a controller of the workshop, and the temperature sensor transmits a signal to the processor after measuring the temperature of the exhaust gas subjected to the three-time washing and cooling, so as to adjust the water flow rate of the second water pipe 7.
The working process and principle are as follows: the device is used by matching with a waste gas treatment system of a semiconductor production workshop, waste gas after combustion treatment passes through the water tank 1, water in the water tank 1 is used for primarily cooling the waste gas, then the waste gas enters the first washing chamber 4 from the lower end of the washing tower 3, water in the water pipe I6 is used for secondarily washing and cooling the waste gas, the waste gas enters the second washing chamber 5 from the first washing chamber 4, water in the water pipe II 7 is used for thirdly washing and cooling the waste gas, the waste gas enters the filtering device 8 from the second washing chamber 5, a part of particles are filtered under the action of the filtering net 12 and then discharged to a waste gas discharge system of a main factory, a pump is arranged in the water tank 1, so that water in the water pipe I6 is recycled for secondarily washing and cooling, water in the water pipe II 7 is connected with a workshop water source and is purer than the water in the water pipe I6, the washing effect is enhanced when the tertiary, the water pipe II 7 can be also provided with an electromagnetic valve, the second washing chamber 5 is provided with a temperature sensor, the electromagnetic valve and the temperature sensor are both electrically connected with a controller of a workshop, the temperature sensor transmits a signal to a processor after measuring the temperature of the waste gas which is washed for three times and cooled, so as to adjust the water flow of the water pipe II 7, the filter device 8 is convenient to install and disassemble, when the filter screen 12 is installed, the filter screen 12 is firstly placed in the support frame 11, then the pressing ring 13 is screwed, the inserting strip 14 of the support frame 11 is inserted and installed corresponding to the inserting slot 15 at the bottom end of the exhaust pipe 9, then the filter device 8 is in threaded connection with the upper end of the second washing chamber 5, when the filter screen 12 is replaced, the pulling pin 16 is held to pull out the filter mechanism 10 from the bottom end of the exhaust pipe 9, the pressing ring 13 is firstly rotated out from the support frame 11, the filter screen 12 is replaced, then the, and then the filtering device 8 is in threaded connection with the upper end of the second washing chamber 5, fine particles in a part of waste gas can be filtered out through the design of the filtering device 8, the waste gas treatment effect is further improved, and water in the water tank 1 is periodically discharged by technicians and is periodically maintained.
Based on the above, the utility model discloses scrubbing tower 3 divide into first washing cavity 4 and second washing cavity 5, install water pipe 6 and water pipe two 7 respectively in their upper end, water pipe 6 and the pump connection in the water tank 1 of second washing cavity 5, make and let in the circulating water, what first washing cavity 4 intake let in is the workshop water source, it is pure than the water in water pipe 6, the cooling washing effect has been strengthened, through be equipped with the solenoid valve on water pipe two 7, set up temperature sensor on second washing cavity 5, temperature sensor will transmit signal for the treater after the waste gas temperature measurement of cubic washing cooling, thereby adjust the discharge of water pipe two 7, lifting means's treatment effeciency, the setting of filter equipment 8 has promoted the discharge quality of waste gas.
It will be appreciated by those skilled in the art that the invention may be embodied in other specific forms without departing from the spirit or essential characteristics thereof. The embodiments disclosed above are therefore to be considered in all respects as illustrative and not restrictive. All changes which come within the scope of the invention or which are equivalent to the scope of the invention are embraced by the invention.
Claims (5)
1. The utility model provides a double-deck washing tower device of processing of cooling down waste gas, a serial communication port, including water tank (1), be connected with hollow scrubbing tower (3) through clamp (2) on water tank (1), scrubbing tower (3) have two-layer and include first washing cavity (4) and second washing cavity (5) connected through clamp (2), be connected with water pipe (6) on first washing cavity (4), water pipe (6) other end is connected to the water pump in water tank (1), be equipped with water pipe two (7) on second washing cavity (5), workshop running water source is connected in water pipe two (7), all be equipped with the water valve on water pipe (6) and water pipe two (7), second washing cavity (5) top is equipped with further filterable filter equipment (8) with waste gas.
2. The double-layer water scrubber device for cooling the waste gas according to claim 1, wherein: the filtering device (8) comprises an exhaust pipe (9) in threaded connection with the top end of the second washing chamber (5), and a filtering mechanism (10) is installed at the bottom end of the exhaust pipe (9).
3. The double-layer water scrubber device for cooling waste gas according to claim 2, wherein: the filtering mechanism (10) comprises a supporting frame (11), wherein a plurality of air holes are formed in the bottom end of the supporting frame (11), and a plurality of layers of filter screens (12) are arranged in the supporting frame and are connected with a pressing ring (13) in a threaded mode.
4. The double-layer water scrubber device for cooling waste gas according to claim 3, wherein: the side surface of the support frame (11) is provided with inserting strips (14) which are annularly arranged along the axis of the support frame, the bottom end of the exhaust pipe (9) is provided with inserting grooves (15) which are annularly arranged along the axis of the exhaust pipe, and the inserting strips (14) are inserted into the inserting grooves (15).
5. The double-layer water scrubber device for cooling the exhaust gas as recited in claim 4, wherein: the end faces of the inserting strips (14) of the supporting frame (11) are provided with pulling pins (16).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920697384.5U CN210165394U (en) | 2019-05-16 | 2019-05-16 | Double-layer water washing tower device for cooling waste gas |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920697384.5U CN210165394U (en) | 2019-05-16 | 2019-05-16 | Double-layer water washing tower device for cooling waste gas |
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| Publication Number | Publication Date |
|---|---|
| CN210165394U true CN210165394U (en) | 2020-03-20 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201920697384.5U Active CN210165394U (en) | 2019-05-16 | 2019-05-16 | Double-layer water washing tower device for cooling waste gas |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115400532A (en) * | 2022-08-09 | 2022-11-29 | 湖北鑫星节能炉具有限公司 | Environment-friendly combustion stove with dust removal filtration |
-
2019
- 2019-05-16 CN CN201920697384.5U patent/CN210165394U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115400532A (en) * | 2022-08-09 | 2022-11-29 | 湖北鑫星节能炉具有限公司 | Environment-friendly combustion stove with dust removal filtration |
| CN115400532B (en) * | 2022-08-09 | 2023-08-11 | 湖北鑫星节能炉具有限公司 | Environment-friendly combustion stove with dust removal filtering structure |
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Address after: 100176 block a, 14th floor, yard 8, Liangshuihe 2nd Street, Beijing Economic and Technological Development Zone, Daxing District, Beijing Patentee after: Beijing Jingyi automation equipment Technology Co.,Ltd. Address before: 100000 block a, 14 / F, courtyard 8, Liangshuihe Second Street, Beijing Economic and Technological Development Zone, Daxing District, Beijing Patentee before: BEIJING JINGYI AUTOMATION EQUIPMENT Co.,Ltd. |