CN210135234U - Slit valve device of vacuum chamber - Google Patents
Slit valve device of vacuum chamber Download PDFInfo
- Publication number
- CN210135234U CN210135234U CN201920622660.1U CN201920622660U CN210135234U CN 210135234 U CN210135234 U CN 210135234U CN 201920622660 U CN201920622660 U CN 201920622660U CN 210135234 U CN210135234 U CN 210135234U
- Authority
- CN
- China
- Prior art keywords
- vacuum chamber
- connecting rod
- slit valve
- positioning
- hole
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 230000007246 mechanism Effects 0.000 claims abstract description 31
- 238000007789 sealing Methods 0.000 claims abstract description 17
- 230000000903 blocking effect Effects 0.000 claims abstract description 11
- 238000009434 installation Methods 0.000 claims description 12
- 230000000149 penetrating effect Effects 0.000 claims description 4
- 230000002035 prolonged effect Effects 0.000 abstract 1
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000008450 motivation Effects 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000003252 repetitive effect Effects 0.000 description 1
Images
Landscapes
- Sliding Valves (AREA)
- Details Of Valves (AREA)
Abstract
The utility model relates to a slit valve device of vacuum chamber, including actuator, locating component, link mechanism and fender subassembly. The actuator has an actuating rod; the positioning assembly comprises a lower positioning seat and a pair of positioning plates, and the positioning plates are formed with sliding chutes and positioning grooves; the connecting rod mechanism comprises a base, a toggle connecting rod group and a sliding block connecting rod, the sliding block is provided with a pulley, and the connecting rod mechanism drives the sliding block to move under the driving of an actuator so as to enable the pulley to move in the sliding groove and be positioned in the positioning groove; the blocking component comprises a blocking block and a baffle plate which are combined with the connecting rod, the baffle plate can move towards the opening direction of the vacuum chamber when the pulley is positioned in the positioning groove, and the blocking is carried out under the driving of the connecting rod, so that the structure of the slit valve device is simplified, and the service life of the sealing element on the opening of the vacuum chamber is prolonged.
Description
Technical Field
The present invention relates to a semiconductor device, and more particularly to a slit valve device of a vacuum chamber.
Background
In general, the process of manufacturing electronic components is mostly performed in a vacuum chamber in a semiconductor device; opening and closing of the vacuum chamber is controlled by the repetitive movement of a slit valve Device (Lit Device).
Further, in order to maintain the sealing property between the slit valve device and the opening of the vacuum chamber, an airtight member such as an O-ring is provided on the opening periphery of the vacuum chamber. In addition, the baffle plate of the slit valve device moves linearly along the outer side surface of the vacuum chamber in one dimension to be attached to and pressed against the airtight element around the opening, thereby sealing the opening of the vacuum chamber. However, such a moving slit valve device causes a large loss of the airtight member, resulting in frequent replacement of the airtight member. Furthermore, if the conventional slit valve device needs to move in two directions, two actuating elements are required to complete the movement, which not only occupies space, but also greatly increases the cost.
In view of the above, the present invention provides a research motivation for the designers to solve the above problems by applying the above prior art and learning theory.
SUMMERY OF THE UTILITY MODEL
An object of the present invention is to provide a slit valve device of a vacuum chamber, in which an airtight member such as O-ring is provided at the periphery of an opening of the vacuum chamber, and a slider moves to one side along with a pulley to move a baffle toward the opening of the vacuum chamber, thereby prolonging the service life of a sealing member.
Another object of the present invention is to provide a slit valve device of a vacuum chamber, so as to simplify the overall structure and reduce the cost.
In order to achieve the above object, the present invention provides a slit valve apparatus for a vacuum chamber, for sealing an opening of the vacuum chamber, comprising:
an actuator having an actuating rod;
a positioning assembly, including a lower positioning seat combined with the actuator and a pair of positioning plates arranged on the opposite sides of the lower positioning seat, wherein a sliding groove and a positioning groove communicated with and protruding out of one side of the sliding groove are respectively formed on one opposite side surface of the pair of positioning plates;
the connecting rod mechanism is arranged between the pair of positioning plates, the connecting rod mechanism comprises a base combined with the actuating rod, a toggle connecting rod group combined on the base, a sliding block connected with the toggle connecting rod group and a connecting rod connected with the sliding block, the sliding block is provided with a pulley, and the connecting rod mechanism drives the sliding block to move under the driving of the actuator so as to enable the pulley to move in the sliding chute and be positioned in the positioning groove; and
and the blocking component comprises a stop block combined with the connecting rod and a baffle fixed on the stop block, and the baffle can move towards the opening of the vacuum chamber when the pulley is positioned in the positioning groove and can press the opening of the vacuum chamber under the driving of the connecting rod.
The slit valve apparatus of a vacuum chamber, wherein: the lower positioning seat is provided with a through hole, and the actuating rod passes through the through hole and is combined on a bottom side of the base.
The slit valve apparatus of a vacuum chamber, wherein: the toggle connecting rod group comprises a fixed rod and a crank, the fixed rod is fixed on the base, one end of the crank is connected with the fixed rod, and the other end of the crank is connected with the sliding block.
The slit valve apparatus of a vacuum chamber, wherein: the link mechanism further comprises a first through shaft, the fixing rod is provided with a first through hole, and the fixing rod is fixed on the base through the first through shaft penetrating through the first through hole.
The slit valve apparatus of a vacuum chamber, wherein: the base is formed with a containing groove, and at least one part of the fixing rod penetrates through the containing groove.
The slit valve apparatus of a vacuum chamber, wherein: the connecting rod mechanism also comprises an adjusting piece, an adjusting hole communicated with the accommodating groove is formed in one side of the base, and the adjusting piece penetrates into the accommodating groove from the adjusting hole and can push one end of the fixing rod.
The slit valve apparatus of a vacuum chamber, wherein: the connecting rod mechanism also comprises a second through shaft, the fixed rod is provided with a second through hole, the crank is provided with a slot and a pair of third through holes positioned at two sides of the slot, and the second through shaft penetrates through the second through hole and the pair of third through holes so that one end of the fixed rod penetrates through the slot.
The slit valve apparatus of a vacuum chamber, wherein: the connecting rod mechanism also comprises a third through shaft, a pair of convex plates are formed on one bottom side of the sliding block, a combination hole is respectively formed in each of the convex plates, a fourth through hole is formed in one end of the crank, and the crank is combined on the sliding block by penetrating through the combination hole and the fourth through hole through the third through shaft.
The slit valve apparatus of a vacuum chamber, wherein: the upper positioning seat is provided with an annular positioning part, the spring is sleeved outside the connecting rod, one side of the elastic block abuts against the annular positioning part, and the other side abuts against the sliding block.
The slit valve apparatus of a vacuum chamber, wherein: the vacuum chamber is provided with an opening, the opening of the vacuum chamber is arranged on one side face of the installation box, and one end of the connecting rod extends into the installation space from the installation opening so that the blocking group moves in the installation space.
The slit valve apparatus of a vacuum chamber, wherein: and a sealing member disposed in the installation space and enclosing a periphery of the opening of the vacuum chamber.
Compared with the prior art, the slit valve device of the utility model has the advantages that the positioning plate is formed with the chute and the positioning groove which is communicated with and protrudes out of one side of the chute, and when the link mechanism is driven by the actuator to drive the slide block to move in the chute and be positioned in the positioning groove; when the sliding block moves to one side along with the pulley, the baffle plate can move towards the opening direction of the vacuum chamber, so that the blocking component can move in two directions, the sealing element can be prevented from being abraded, and the purpose of prolonging the service life of the sealing element is achieved; in addition, the slit valve device uses one actuator to make the blocking component move in two directions, thereby achieving the purposes of simplifying the structure and reducing the cost.
Drawings
Fig. 1 is a schematic perspective exploded view of a slit valve device of a vacuum chamber according to the present invention.
Fig. 2 is a schematic perspective view of a slit valve device of a vacuum chamber according to the present invention.
Fig. 3 is a schematic view of the slit valve apparatus of the vacuum chamber according to the present invention in combination with an installation box.
Fig. 4 is a sectional view of fig. 3.
Fig. 5 to 7 are schematic views showing the operation of the slit valve device of the vacuum chamber according to the present invention.
Description of reference numerals: 1-a slit valve device; 2-an opening of the vacuum chamber; 10-an actuator; 11-an actuating lever; 12-an electrical connector; 20-a positioning assembly; 21-lower positioning seat; 210-a via; 22-a positioning plate; 221-a chute; 222-a positioning groove; 30-a linkage mechanism; 31-a base; 310-a receiving groove; 311-an adjustment hole; 32-toggle linkage; 321-a fixing rod; 3210-first perforation; 3211-second perforation; 322-crank; 3220-slotting; 3221-a third perforation; 3222-fourth perforation; 33-a slide block; 331-a pulley; 332-a convex plate; 3320-bonding holes; 34-a connecting rod; 35-a first through shaft; 36-a second through shaft; 37-third through shaft; 38-an adjustment member; 40-a catch assembly; 41-a block; 42-a baffle plate; 50-an upper positioning seat; 51-a ring-type positioning portion; 60-a spring; 70-mounting the box; 71-installation space; 72-a mounting port; 80-sealing element.
Detailed Description
The following detailed description and technical contents of the present invention are described with reference to the drawings, but the drawings are only for reference and illustration and are not intended to limit the present invention.
Referring to fig. 1 to 4, there are respectively shown a three-dimensional exploded view, a three-dimensional external view, a use view of the slit valve device of the vacuum chamber combined with the mounting box, and a combined cross-sectional view. The slit valve device 1 of the vacuum chamber of the present invention includes an actuator 10, a positioning member 20, a link mechanism 30, and a stopper member 40. The positioning assembly 20 is coupled to the actuator 10; the link mechanism 30 is driven by the actuator 10 to move relative to the positioning component 20; the stopper assembly 40 is coupled to the link mechanism 30 and can seal an opening of a vacuum chamber by the movement of the link mechanism 30. The structure of the slit valve apparatus 1 of the vacuum chamber will be described in more detail as follows.
The actuator 10 is a driving element having an actuating rod 11 and an electrical connector 12, wherein the electrical connector 12 is used to connect an external power to provide the power required by the actuator 10 during operation.
The positioning assembly 20 includes a lower positioning seat 21 combined with the actuator 10 and a pair of positioning plates 22 disposed at opposite sides of the lower positioning seat 21. The pair of positioning plates 22 are respectively formed with a sliding slot 221 and a positioning slot 222 on opposite sides thereof and protruding from the sliding slot 221.
The link mechanism 30 is disposed between the pair of positioning plates 22. The link mechanism 30 includes a base 31 combined with the actuating rod 11, a toggle linkage 32 combined on the base 31, a slider 33 connected with the toggle linkage 32, and a link 34 connected with the slider 33, and the slider 33 is provided with a pulley 331. The link mechanism 30 drives the slide block 33 to move under the driving of the actuator 10, so that the pulley 331 moves in the sliding slot 221 and is positioned in the positioning slot 222.
In an embodiment of the present invention, the lower positioning seat 21 has a through hole 210; also, the actuating rod 11 is coupled to a bottom side of the base 31 through the through hole 210.
Furthermore, the stopping element 40 comprises a stopper 41 combined with the connecting rod 34 and a baffle 42 fixed on the stopper 41, wherein the baffle 42 moves towards the opening 2 of the vacuum chamber when the pulley 331 is positioned in the positioning groove 222, and is driven by the connecting rod 34 to press the opening 2 of the vacuum chamber.
Specifically, the toggle linkage 32 includes a fixing rod 321 and a crank 322, the fixing rod 321 is fixed on the base 31, one end of the crank 322 is connected to the fixing rod 321, and the other end is connected to the sliding block 33.
In more detail, the link mechanism 30 further includes a first through shaft 35; in addition, the fixing rod 321 has a first through hole 3210, and the fixing rod 321 is fixed to the base 31 by the first through shaft 35 passing through the first through hole 3210. In addition, the base 31 is formed with a receiving groove 310, and at least a portion of the fixing rod 321 is inserted into the receiving groove 310.
Further, the link mechanism 30 further includes a second through shaft 36, and in addition, the fixing rod 321 has a second through hole 3211; the crank 322 has a slot 3220 and a pair of third through holes 3221 located at two sides of the slot 3220. The second through shaft 36 penetrates the second through hole 3211 and the pair of third through holes 3221, so that one end of the fixing rod 321 penetrates the slot 3220.
Furthermore, the link mechanism 30 further includes a third through shaft 37. In addition, a pair of protruding plates 332 are formed on a bottom side of the slider 33, and each of the pair of protruding plates is provided with a coupling hole 3320; in addition, a fourth through hole 3222 is disposed at one end of the crank 322, and the crank 322 is coupled to the slider 33 through the third through hole 37 passing through the coupling hole 3320 and the fourth through hole 3222.
Preferably, the linkage mechanism 30 further includes an adjustment member 38; in addition, an adjusting hole 311 communicating with the accommodating groove 310 is formed at one side of the base 31; in addition, the adjusting member 38 penetrates the accommodating slot 310 from the adjusting hole 311 to push one end of the fixing rod 321 (see fig. 4), so as to adjust the positions of the toggle linkage 32 and the slider 33 pushed by the toggle linkage 32, thereby further adjusting the position of the blocking component 40.
In this embodiment, a pair of sliding grooves 221 are formed on one side of the positioning plate 22, and positioning grooves 222 are respectively formed on the sliding grooves 221. Accordingly, the slit valve device 1 can perform the sealing and pressing operation for the vacuum chambers in both directions.
In the present embodiment, the slit valve apparatus 1 further includes an upper positioning seat 50 and a spring 60. The upper positioning seat 50 has a ring-shaped positioning portion 51, the spring 60 is sleeved outside the connecting rod 34, one side of the elastic element 60 is abutted against the ring-shaped positioning portion 51, and the other side is abutted against the sliding block 33. The provision of the spring element 60 facilitates the urging of the slider 33 into position.
Further, the slit valve apparatus further includes a mounting case 70. The mounting box 70 has a mounting space 71 and a mounting opening 72 communicating with the mounting space 71. The opening 2 of the vacuum chamber is provided on one side surface of the mounting case 70. One end of the connecting rod 34 extends into the mounting space 71 from the mounting opening 72 so as to move the blocking set 40 in the mounting space 71, in this embodiment, the annular positioning portion 51 of the upper positioning seat 50 is located in the mounting opening 72.
In addition, the slit valve apparatus further includes a sealing member 80. The sealing member 80 is disposed in the mounting space 71 and surrounds a periphery of the opening 2 of the vacuum chamber, and the disposition of the sealing member 80 increases the adhesion between the opening 2 of the vacuum chamber and the baffle plate 42 to improve the sealing effect therebetween.
Please refer to fig. 5 to 7, which are schematic operation diagrams of the slit valve device of a vacuum chamber according to the present invention. As shown in fig. 5 and 6, when the slit valve apparatus 1 is to seal the opening 2 of the vacuum chamber, the actuator 10 is operated and drives the link mechanism 30 to push the slider 30, the slider 30 is moved upward along the slide slot 221 of the positioning plate 22 by the pulley 331, and the baffle plate 42 is located substantially outside the opening 2 of the vacuum chamber when the slider 30 is continuously moved to the position shown in fig. 6.
Referring to fig. 7 again, when the slider 30 continues to move upward to the position shown in fig. 7, the pulley 331 falls into the positioning slot 222, and the positioning slot 222 protrudes out of the sliding slot 221, so that the slider 30 moves to one side (left side) along with the pulley 331. At this time, the shutter 42 moves in the direction of the opening 2 of the vacuum chamber with the displacement of the slider 30. Accordingly, the baffle plate 42 can press the opening 2 of the vacuum chamber to maintain the sealing between the baffle plate 42 and the opening 2 of the vacuum chamber.
The foregoing description is intended to be illustrative rather than limiting, and it will be appreciated by those skilled in the art that many modifications, variations or equivalents may be made without departing from the spirit and scope of the invention as defined in the appended claims.
Claims (11)
1. A slit valve apparatus of a vacuum chamber for sealing an opening of the vacuum chamber, comprising:
an actuator having an actuating rod;
a positioning assembly, including a lower positioning seat combined with the actuator and a pair of positioning plates arranged on the opposite sides of the lower positioning seat, wherein a sliding groove and a positioning groove communicated with and protruding out of one side of the sliding groove are respectively formed on one opposite side surface of the pair of positioning plates;
the connecting rod mechanism is arranged between the pair of positioning plates, the connecting rod mechanism comprises a base combined with the actuating rod, a toggle connecting rod group combined on the base, a sliding block connected with the toggle connecting rod group and a connecting rod connected with the sliding block, the sliding block is provided with a pulley, and the connecting rod mechanism drives the sliding block to move under the driving of the actuator so as to enable the pulley to move in the sliding chute and be positioned in the positioning groove; and
and the blocking component comprises a stop block combined with the connecting rod and a baffle fixed on the stop block, and the baffle can move towards the opening of the vacuum chamber when the pulley is positioned in the positioning groove and can press the opening of the vacuum chamber under the driving of the connecting rod.
2. The slit valve apparatus of vacuum chamber of claim 1, wherein: the lower positioning seat is provided with a through hole, and the actuating rod passes through the through hole and is combined on a bottom side of the base.
3. The slit valve apparatus of vacuum chamber of claim 1, wherein: the toggle connecting rod group comprises a fixed rod and a crank, the fixed rod is fixed on the base, one end of the crank is connected with the fixed rod, and the other end of the crank is connected with the sliding block.
4. The slit valve apparatus of vacuum chamber of claim 3, wherein: the link mechanism further comprises a first through shaft, the fixing rod is provided with a first through hole, and the fixing rod is fixed on the base through the first through shaft penetrating through the first through hole.
5. The slit valve apparatus of vacuum chamber of claim 4, wherein: the base is formed with a containing groove, and at least one part of the fixing rod penetrates through the containing groove.
6. The slit valve apparatus of vacuum chamber of claim 5, wherein: the connecting rod mechanism also comprises an adjusting piece, an adjusting hole communicated with the accommodating groove is formed in one side of the base, and the adjusting piece penetrates into the accommodating groove from the adjusting hole and can push one end of the fixing rod.
7. The slit valve apparatus of vacuum chamber of claim 4, wherein: the connecting rod mechanism also comprises a second through shaft, the fixed rod is provided with a second through hole, the crank is provided with a slot and a pair of third through holes positioned at two sides of the slot, and the second through shaft penetrates through the second through hole and the pair of third through holes so that one end of the fixed rod penetrates through the slot.
8. The slit valve apparatus of vacuum chamber of claim 7, wherein: the connecting rod mechanism also comprises a third through shaft, a pair of convex plates are formed on one bottom side of the sliding block, a combination hole is respectively formed in each of the convex plates, a fourth through hole is formed in one end of the crank, and the crank is combined on the sliding block by penetrating through the combination hole and the fourth through hole through the third through shaft.
9. The slit valve apparatus of vacuum chamber of claim 1, wherein: the upper positioning seat is provided with an annular positioning part, the spring is sleeved outside the connecting rod, one side of the elastic block abuts against the annular positioning part, and the other side abuts against the sliding block.
10. The slit valve apparatus of vacuum chamber of claim 1, wherein: the vacuum chamber is provided with an opening, the opening of the vacuum chamber is arranged on one side face of the installation box, and one end of the connecting rod extends into the installation space from the installation opening so that the blocking group moves in the installation space.
11. The slit valve apparatus of vacuum chamber of claim 10, wherein: and a sealing member disposed in the installation space and enclosing a periphery of the opening of the vacuum chamber.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920622660.1U CN210135234U (en) | 2019-04-30 | 2019-04-30 | Slit valve device of vacuum chamber |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920622660.1U CN210135234U (en) | 2019-04-30 | 2019-04-30 | Slit valve device of vacuum chamber |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN210135234U true CN210135234U (en) | 2020-03-10 |
Family
ID=69704132
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201920622660.1U Expired - Fee Related CN210135234U (en) | 2019-04-30 | 2019-04-30 | Slit valve device of vacuum chamber |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN210135234U (en) |
-
2019
- 2019-04-30 CN CN201920622660.1U patent/CN210135234U/en not_active Expired - Fee Related
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US7852633B2 (en) | Connector for connection to a module board | |
| US8160661B2 (en) | Slide mechanism for slide-type portable terminal devices | |
| JP5197297B2 (en) | IC socket | |
| CA3050499C (en) | Switch panel assembly, switch assembly and associated manufacturing method | |
| US7161805B2 (en) | Latch means for socket connector assembly | |
| US20110056818A1 (en) | Key switch device | |
| JP2006218560A (en) | Trigger switch | |
| US20140048995A1 (en) | Clamping mechanism | |
| US20110101835A1 (en) | Latching mechanism and computer chassis using the same | |
| CA2695602A1 (en) | Latch-bolt mechanism operable to allow for idle rotation of an exterior handle | |
| CN114126275A (en) | Floating type pivot mechanism, reciprocating clamping mechanism and related airtight device | |
| JP4879335B2 (en) | Trigger switch | |
| CN210135234U (en) | Slit valve device of vacuum chamber | |
| US7182310B2 (en) | Position return device for an open and close apparatus | |
| US6602084B2 (en) | Open top IC socket | |
| US8320117B2 (en) | Drive mounting assembly and computer chassis using the same | |
| CN217502742U (en) | Electric actuator | |
| MY124038A (en) | Socket for pin grid array package | |
| TW200511657A (en) | Moment/bow reducing wear plate | |
| US11612074B2 (en) | Waterproofing structure and related electronic device | |
| CN107346809B (en) | Battery assembling and disassembling structure of electronic device | |
| KR970000114B1 (en) | Switch device | |
| TWM582226U (en) | Slit valve device of vacuum chamber | |
| US9958915B1 (en) | Slot assembly | |
| US7661975B2 (en) | Electrical socket connector with metal reinforced device between cover and base |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20200310 |