CN210128017U - Multistage air supporting plate device - Google Patents

Multistage air supporting plate device Download PDF

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Publication number
CN210128017U
CN210128017U CN201920634226.5U CN201920634226U CN210128017U CN 210128017 U CN210128017 U CN 210128017U CN 201920634226 U CN201920634226 U CN 201920634226U CN 210128017 U CN210128017 U CN 210128017U
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CN
China
Prior art keywords
air
cavity
level
air inlet
air cavity
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Expired - Fee Related
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CN201920634226.5U
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Chinese (zh)
Inventor
李葵
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Guangzhou Ke Qin Education Consulting Co Ltd
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Guangzhou Ke Qin Education Consulting Co Ltd
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Priority to CN201920634226.5U priority Critical patent/CN210128017U/en
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Abstract

The utility model provides a multistage air supporting board device, include: a base; the air floatation seat is fixed on one side of the base, and an air film cavity is arranged at the joint of the air floatation seat and the base; a primary air cavity air inlet hole which is arranged in the center of the air floating seat and penetrates inwards; the primary air cavity is arranged at the tail end of an air inlet hole of the primary air cavity and communicated with the air film cavity; the two secondary air cavities are symmetrically arranged on the left side and the right side of the primary air cavity, the top of one secondary air cavity is provided with a secondary air cavity air inlet, and the top of the other secondary air cavity is provided with a secondary air cavity rapid balancing hole; two three-level air cavities symmetrically arranged on the left side and the right side of the one-level air cavity, wherein a three-level air cavity air inlet is formed in the top of one of the three-level air cavities, and a three-level air cavity quick balancing hole is formed in the top of the other three-level air cavity. This multistage air supporting plate device through setting up the cavity of a plurality of different pressures, corresponds different bearing capacity respectively, can adapt to different bearing capacity's operation requirement.

Description

Multistage air supporting plate device
Technical Field
The utility model relates to an air supporting technical field, concretely relates to multistage air supporting plate device.
Background
The air floating plate is a device for suspending by controlling air pressure, also called as air floating cushion, which takes pressure air as input and generates bearing force by an air film formed by the pressure air, and has the advantages of no contact, no friction, accurate positioning and the like. The device has been widely applied to devices such as an ultra-precise air-floatation positioning workbench, a three-coordinate measuring machine, an air-floatation guide rail, an air-floatation gyroscope and the like. Such as three-coordinate measuring machines for measuring workpieces, ultra-precision five-axis machining tools. The air floating plate is arranged on a part needing relative movement, such as a base and a moving part of a three-dimensional coordinate measuring machine, wherein the air floating plate is arranged on the moving part, and gas with certain pressure is introduced into the air floating plate to form an air film support between the relatively moving parts. The motion supporting mode can provide high detection precision for machine tools, measuring instruments and the like.
The existing air floating plates are supplied with air in a single stage, namely the limit supporting capacity of each plate is fixed after the ventilation is installed. The actual load to which the air flotation plates are subjected during movement varies, typically within the limits of support capacity. However, under the condition of changing processing parameters or other reasons, the air floating plate can actually bear the load beyond the limit bearing capacity, and in this case, the damage or other errors of the air floating plate can be caused.
SUMMERY OF THE UTILITY MODEL
The utility model provides a to prior art not enough, the utility model provides a multistage air supporting board device through the cavity that sets up a plurality of different pressures, corresponds different bearing capacity respectively, can adapt to different bearing capacity's operation requirement.
In order to realize the technical scheme, the utility model provides a multistage air supporting board device, include: a base; the air floating seat is fixed on one side of the base, and an air film cavity is arranged at the joint of the air floating seat and the base; a primary air cavity air inlet hole which is arranged in the center of the air floating seat and penetrates inwards; the primary air cavity is arranged at the tail end of an air inlet hole of the primary air cavity and communicated with the air film cavity; the two secondary air cavities are symmetrically arranged on the left side and the right side of the primary air cavity and communicated with the air film cavity, the top of one secondary air cavity is provided with a secondary air cavity air inlet, and the top of the other secondary air cavity is provided with a secondary air cavity rapid balancing hole; the two symmetrical three-level air cavities are arranged on the left side and the right side of the one-level air cavity, the three-level air cavity is located on the outer side of the two-level air cavity and communicated with the air film cavity, a three-level air cavity air inlet is formed in the top of one of the three-level air cavities, and a three-level air cavity quick balancing hole is formed in the top of the other three-level air cavity.
In the above technical scheme, under a normal working condition, the primary air cavity is in an open state to provide initial supporting capacity, the state at this time is a single-stage air floatation state, when the actual bearing of the air floatation plate is detected to be increased, the secondary air supply cavity is rapidly opened to perform pressure compensation to improve the bearing capacity, and the state at this time is a secondary air floatation state. If the actual bearing of the air floating plate is detected to exceed the second-stage bearing range again, the three-stage air pressure chamber is opened to continuously enhance the bearing capacity, and the state is a three-stage air floating state. And conversely, when the actual bearing is detected to be reduced in the high-grade air flotation state, the air cavities are closed in sequence to degrade. Therefore, the problem that the single-stage air floating plate is poor in bearing capacity is well solved, air cavities of different stages can be opened according to different bearing requirements, and the air floating plate can meet the use requirements of different bearing capacities.
Preferably, the outer end of the air inlet hole of the primary air cavity is connected with the primary air inlet pipe, the primary air inlet pipe is provided with an automatic air inlet valve, and the automatic air inlet valve arranged on the primary air inlet pipe controls the air inlet or the air outlet of the primary air inlet pipe to realize the air pressure control in the primary air cavity.
Preferably, the outer end of the air inlet of the secondary air cavity is connected with a secondary air inlet pipe, the secondary air inlet pipe is provided with an automatic air inlet valve, and the automatic air inlet valve arranged on the secondary air inlet pipe controls air inlet or closing of the secondary air inlet pipe to realize air pressure control in the secondary air cavity.
Preferably, the outer end of the air inlet hole of the third-level air cavity is connected with the third-level air inlet pipe, the third-level air inlet pipe is provided with an automatic air inlet valve, and the air inlet or the air outlet of the third-level air inlet pipe can be controlled through the automatic valve arranged on the third-level air inlet pipe, so that the air pressure in the third-level air cavity can be controlled.
Preferably, the outer end of the quick balance hole of the secondary air cavity is connected with the secondary balance pipe, the automatic balance valve is installed on the secondary balance pipe, the automatic balance valve installed on the secondary balance pipe can be matched with the automatic air inlet valve on the secondary air inlet pipe to realize quick balance of air pressure in the air film cavity when the secondary air cavity is opened, air pressure fluctuation when the secondary air cavity is opened is reduced, and therefore the moving error caused by pressure fluctuation after the secondary air cavity is opened is reduced.
Preferably, the outer end of the quick balance hole of the third-level air cavity is connected with the third-level balance pipe, the automatic balance valve is installed on the third-level balance pipe, the automatic balance valve installed on the third-level balance pipe can be matched with the automatic air inlet valve on the third-level air inlet pipe to realize quick balance of air pressure in the air film cavity when the third-level air cavity is opened, air pressure fluctuation when the third-level air cavity is opened is reduced, and therefore moving errors caused by pressure fluctuation after the third-level air cavity is opened are reduced.
The utility model provides a pair of multistage air supporting plate device's beneficial effect lies in: the multistage air floating plate device is simple in structure and ingenious in design, the problem that the single-stage air floating plate is weak in bearing capacity can be well solved by arranging the three air cavities with different bearing capacities, the air cavities with different stages can be opened according to different bearing requirements, and the use requirements of different bearing capacities can be met.
Drawings
Fig. 1 is a sectional view of the present invention.
Fig. 2 is a top view of the present invention.
In the figure: 1. a base; 2. a tertiary air cavity; 3. a tertiary air cavity air inlet; 4. a secondary air cavity air inlet; 5. a secondary air cavity; 6. a primary air cavity air inlet; 7. a primary air cavity; 8. the secondary air cavity is a quick balancing hole; 9. the third-level air cavity is provided with a quick balancing hole; 10. an air floating seat; 11. an air film cavity.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. All other embodiments obtained by a person skilled in the art without any inventive step are within the scope of the present invention.
Example (b): a multi-stage air floating plate device.
Referring to fig. 1 and 2, a multistage air floating plate device includes: the device comprises a base 1, wherein a screw hole is formed in the surface of the base 1 so as to be conveniently connected with an external part; the air floatation seat 10 is fixed above the base 1, an air film cavity 11 is arranged at the joint of the air floatation seat 10 and the base 1, and in actual work, an air film is formed at the air film cavity 11, so that the air floatation seat 10 and the base 1 are in a non-contact suspension state; the air inlet device comprises a first-stage air cavity air inlet hole 6 which is arranged in the center of an air floating seat 10 and penetrates inwards, the outer end of the first-stage air cavity air inlet hole 6 is connected with a first-stage air inlet pipe, an automatic air inlet valve is arranged on the first-stage air inlet pipe, and the automatic air inlet valve arranged on the first-stage air inlet pipe controls the air inlet or the air closing of the first-stage air inlet pipe to realize the air inlet or air closing control of the first-stage air; the air floatation seat comprises a primary air cavity 7 arranged at the tail end of a primary air cavity air inlet 6, wherein the primary air cavity 7 is communicated with an air film cavity 11, when the primary air cavity air inlet 6 conveys air into the primary air cavity 7, an air film is formed at the air film cavity 11 through the primary air cavity 7, and non-contact suspension of the air floatation seat 10 is realized under the action of reverse thrust; two symmetry sets up the second grade air cavity 5 in the one-level air cavity 7 left and right sides, second grade air cavity 5 and air film cavity 11 intercommunication, and wherein the top that is located the left second grade air cavity 5 of one-level air cavity 7 is provided with second grade air cavity inlet port 4, and the top that is located the right side of one-level air cavity 7 is provided with second grade air cavity quick balance hole 8, the outer end and the second grade intake-tube connection of second grade air cavity inlet port 4, install automatic air inlet valve in the second grade intake-tube, through installing the air inlet valve control second grade intake-tube on the second grade intake-tube admit air or close, realize the atmospheric pressure control in second grade air cavity inlet port 4, the outer end and the second grade balance pipe connection of second grade air cavity quick balance hole 8, install automatic balance valve on the second grade balance pipe, can cooperate the automatic air inlet valve on the second grade intake-tube to realize The air pressure fluctuation when the secondary air cavity 5 is opened is reduced, so that the movement error caused by the pressure fluctuation after the secondary air cavity 5 is opened is reduced; two symmetrical tertiary air cavities 2 arranged on the left side and the right side of the primary air cavity 7, wherein the tertiary air cavity 2 is positioned on the outer side of the secondary air cavity 5, the tertiary air cavity 2 is communicated with an air film cavity 11, a tertiary air cavity air inlet 3 is arranged at the top of the left tertiary air cavity 2, a tertiary air cavity quick balance hole 9 is arranged at the top of the right tertiary air cavity 2, the outer end of the tertiary air cavity air inlet 3 is connected with a tertiary air inlet pipe, an automatic air inlet valve is arranged on the tertiary air inlet pipe, air inlet or closing of the tertiary air inlet pipe can be controlled through an automatic valve arranged on the tertiary air inlet pipe, air inlet or closing of the tertiary air cavity air inlet 3 is controlled, the outer end of the tertiary air cavity quick balance hole 9 is connected with the tertiary balance pipe, an automatic balance valve is arranged on the tertiary balance pipe, and the automatic air inlet valve arranged on the tertiary balance pipe can be matched with The air pressure in the air chamber 11 is quickly balanced, and the air pressure fluctuation when the three-stage air chamber 2 is opened is reduced, so that the movement error caused by the pressure fluctuation after the three-stage air chamber 2 is opened is reduced.
In this embodiment, the initial working state is a first-stage air-floating state, at this time, four holes, namely a third-stage air cavity air inlet 3, a second-stage air cavity air inlet 4, a second-stage air cavity rapid balancing hole 8, and a third-stage air cavity rapid balancing hole 9, are in a closed state, a first-stage air cavity air inlet 6 is in an open state, and external pressure enters a first-stage air cavity 7 through the first-stage air cavity air inlet 6 and then is diffused in an air film cavity 11 to form a pressure region, so that the base 1 and the air-floating seat. When the system detects that the actual bearing rises, the secondary pressure gas is quickly opened by the secondary air cavity air inlet hole 4 and the secondary air cavity quick balance hole 8 and quickly enters the secondary air cavity 5 for pressure supplement, so that the pressure in the air film gap is increased, and the bearing capacity of the air floatation plate is increased. When the actual load of the system exceeds the second-stage bearing capacity, the air inlet 3 of the third-stage air cavity and the quick balancing hole 9 of the third-stage air cavity are quickly opened to carry out an ultra-large load mode state, and the air film pressure is continuously supplemented to enable the bearing capacity of the air floating plate to reach the third-stage state. And conversely, when the actual bearing is detected to be reduced in the high-grade air flotation state, the air cavities are closed in sequence to degrade.
This multistage air supporting plate device simple structure, design benefit, through the air cavity that sets up three different bearing capacity, can fine solution single-stage air supporting plate bearing capacity weak problem, and can open the air cavity of different progression according to the bearing requirement of difference, can adapt to different bearing capacity's operation requirement, in addition through setting up two second grade air cavities and two tertiary air cavities, and correspond and set up inlet port and quick balancing hole, can realize the quick balance of 11 internal gas pressures in air film cavity, reduce the movement error.
The above description is a preferred embodiment of the present invention, but the present invention should not be limited to the disclosure of the embodiment and the accompanying drawings, and therefore, all equivalents and modifications that can be accomplished without departing from the spirit of the present invention are within the protection scope of the present invention.

Claims (6)

1. A multistage air supporting plate device is characterized by comprising:
a base;
the air floating seat is fixed on one side of the base, and an air film cavity is arranged at the joint of the air floating seat and the base;
a primary air cavity air inlet hole which is arranged in the center of the air floating seat and penetrates inwards;
the primary air cavity is arranged at the tail end of an air inlet hole of the primary air cavity and communicated with the air film cavity;
the two secondary air cavities are symmetrically arranged on the left side and the right side of the primary air cavity and communicated with the air film cavity, the top of one secondary air cavity is provided with a secondary air cavity air inlet, and the top of the other secondary air cavity is provided with a secondary air cavity rapid balancing hole;
the two symmetrical three-level air cavities are arranged on the left side and the right side of the one-level air cavity, the three-level air cavity is located on the outer side of the two-level air cavity and communicated with the air film cavity, a three-level air cavity air inlet is formed in the top of one of the three-level air cavities, and a three-level air cavity quick balancing hole is formed in the top of the other three-level air cavity.
2. The multi-stage air bearing plate apparatus of claim 1, wherein: the outer end of the air inlet hole of the primary air cavity is connected with a primary air inlet pipe, and an automatic air inlet valve is installed on the primary air inlet pipe.
3. The multi-stage air bearing plate apparatus of claim 1, wherein: the outer end of the air inlet of the secondary air cavity is connected with a secondary air inlet pipe, and an automatic air inlet valve is installed on the secondary air inlet pipe.
4. The multi-stage air bearing plate apparatus of claim 1, wherein: the outer end of the air inlet of the third-level air cavity is connected with a third-level air inlet pipe, and an automatic air inlet valve is installed on the third-level air inlet pipe.
5. The multi-stage air bearing plate apparatus of claim 1, wherein: the outer end of the quick balance hole of the secondary air cavity is connected with a secondary balance pipe, and an automatic balance valve is installed on the secondary balance pipe.
6. The multi-stage air bearing plate apparatus of claim 1, wherein: the outer end of the quick balance hole of the third-level air cavity is connected with a third-level balance pipe, and an automatic balance valve is installed on the third-level balance pipe.
CN201920634226.5U 2019-05-06 2019-05-06 Multistage air supporting plate device Expired - Fee Related CN210128017U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201920634226.5U CN210128017U (en) 2019-05-06 2019-05-06 Multistage air supporting plate device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201920634226.5U CN210128017U (en) 2019-05-06 2019-05-06 Multistage air supporting plate device

Publications (1)

Publication Number Publication Date
CN210128017U true CN210128017U (en) 2020-03-06

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Application Number Title Priority Date Filing Date
CN201920634226.5U Expired - Fee Related CN210128017U (en) 2019-05-06 2019-05-06 Multistage air supporting plate device

Country Status (1)

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CN (1) CN210128017U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114294330A (en) * 2021-12-30 2022-04-08 哈尔滨工业大学 High-precision rotating ring-shaped part inner supporting air-floating type static balancing device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114294330A (en) * 2021-12-30 2022-04-08 哈尔滨工业大学 High-precision rotating ring-shaped part inner supporting air-floating type static balancing device

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CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20200306

Termination date: 20210506

CF01 Termination of patent right due to non-payment of annual fee