CN210111879U - Composite nano motor and preparation device thereof - Google Patents
Composite nano motor and preparation device thereof Download PDFInfo
- Publication number
- CN210111879U CN210111879U CN201920486015.1U CN201920486015U CN210111879U CN 210111879 U CN210111879 U CN 210111879U CN 201920486015 U CN201920486015 U CN 201920486015U CN 210111879 U CN210111879 U CN 210111879U
- Authority
- CN
- China
- Prior art keywords
- micro
- power amplifier
- composite nano
- spheres
- driving plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000002131 composite material Substances 0.000 title claims abstract description 29
- 238000002360 preparation method Methods 0.000 title claims abstract description 15
- 239000002120 nanofilm Substances 0.000 claims abstract description 10
- 238000004519 manufacturing process Methods 0.000 claims abstract description 8
- 239000002184 metal Substances 0.000 claims abstract description 4
- 229910052751 metal Inorganic materials 0.000 claims abstract description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 19
- 239000000377 silicon dioxide Substances 0.000 claims description 13
- 239000002245 particle Substances 0.000 claims description 9
- 229910052681 coesite Inorganic materials 0.000 claims description 7
- 229910052906 cristobalite Inorganic materials 0.000 claims description 7
- 229910052682 stishovite Inorganic materials 0.000 claims description 7
- 229910052905 tridymite Inorganic materials 0.000 claims description 7
- 239000002077 nanosphere Substances 0.000 claims description 6
- 239000011521 glass Substances 0.000 claims description 5
- 239000000758 substrate Substances 0.000 claims description 5
- 238000002604 ultrasonography Methods 0.000 claims description 3
- 229910004205 SiNX Inorganic materials 0.000 claims description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 2
- 239000002923 metal particle Substances 0.000 claims description 2
- 229910052710 silicon Inorganic materials 0.000 claims description 2
- 239000010703 silicon Substances 0.000 claims description 2
- 239000012528 membrane Substances 0.000 claims 1
- 150000001875 compounds Chemical class 0.000 abstract description 2
- 239000002105 nanoparticle Substances 0.000 description 21
- 239000004793 Polystyrene Substances 0.000 description 11
- 239000000463 material Substances 0.000 description 11
- 239000000725 suspension Substances 0.000 description 11
- 239000004005 microsphere Substances 0.000 description 10
- 229920002223 polystyrene Polymers 0.000 description 10
- 239000011859 microparticle Substances 0.000 description 8
- 239000000126 substance Substances 0.000 description 8
- 239000000919 ceramic Substances 0.000 description 6
- 239000011248 coating agent Substances 0.000 description 6
- 238000000576 coating method Methods 0.000 description 6
- 238000001755 magnetron sputter deposition Methods 0.000 description 6
- 235000012239 silicon dioxide Nutrition 0.000 description 6
- 239000010410 layer Substances 0.000 description 5
- 239000007788 liquid Substances 0.000 description 5
- 238000005459 micromachining Methods 0.000 description 4
- 238000001259 photo etching Methods 0.000 description 4
- 230000005653 Brownian motion process Effects 0.000 description 3
- 230000009471 action Effects 0.000 description 3
- 238000005537 brownian motion Methods 0.000 description 3
- 239000008367 deionised water Substances 0.000 description 3
- 229910021641 deionized water Inorganic materials 0.000 description 3
- 238000005566 electron beam evaporation Methods 0.000 description 3
- 238000011010 flushing procedure Methods 0.000 description 3
- 239000000446 fuel Substances 0.000 description 3
- 239000003292 glue Substances 0.000 description 3
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 3
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 239000011241 protective layer Substances 0.000 description 3
- 238000011160 research Methods 0.000 description 3
- 238000001771 vacuum deposition Methods 0.000 description 3
- 238000007738 vacuum evaporation Methods 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- 230000008859 change Effects 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 241000894006 Bacteria Species 0.000 description 1
- 239000003054 catalyst Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000011246 composite particle Substances 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000003814 drug Substances 0.000 description 1
- 229940079593 drug Drugs 0.000 description 1
- 238000012377 drug delivery Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 239000006249 magnetic particle Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000005329 nanolithography Methods 0.000 description 1
- 239000002073 nanorod Substances 0.000 description 1
- 239000002071 nanotube Substances 0.000 description 1
- 239000002070 nanowire Substances 0.000 description 1
- 239000011664 nicotinic acid Substances 0.000 description 1
- 238000005293 physical law Methods 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000000746 purification Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 239000012798 spherical particle Substances 0.000 description 1
- 238000003892 spreading Methods 0.000 description 1
- 230000007480 spreading Effects 0.000 description 1
- 238000002626 targeted therapy Methods 0.000 description 1
Images
Landscapes
- Micromachines (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Abstract
The utility model discloses a compound nanometer motor and preparation facilities thereof. The composite nanometer motor consists of several nanometer spheres adhered together in symmetrical structure, and some spheres have magnetic metal layer deposited on their surface and are adhered via molecular film. A manufacturing apparatus comprising: the output end of the signal generator is connected with the input end of the power amplifier, the output end of the power amplifier is connected with the ultrasonic control platform, the ultrasonic control platform is positioned on a sample table of the microscope, and the microscope is connected with the computer.
Description
Technical Field
The utility model belongs to the technical field of the nanometer, concretely relates to compound nanometer motor and preparation facilities thereof.
Background
Nanomotors refer to nanosystems, also commonly referred to as nanomotics, that are capable of converting chemical, light, sound, or other forms of energy into mechanical motion and performing complex tasks. It is essentially different from the traditional colloidal particles which are in thermodynamic equilibrium state and only do Brownian motion. Their movement and interaction can be compared with cells or bacteria in nature, and thus are considered as a novel class of bionic intelligent materials and gain wide attention. In recent years, nanomotors have become one of the research hotspots and difficulties in related fields such as nanotechnology. Preliminary studies indicate that the research of the nanomotor is expected to make a revolutionary breakthrough in the fields of targeted therapy, cell capture and separation, drug delivery, environmental purification, nano-lithography and the like.
At the microscopic scale, especially the nanometer scale, some applicable physical laws are changed, in order to overcome the huge viscous resistance in the field of low Reynolds number and the dominant Brownian motion under the small size, other mechanisms are needed to realize the motion, the driving energy mainly comes from the outside, the motion can be divided into chemical driving and non-chemical driving, the chemical driving mainly depends on chemical reaction, and catalysts (such as platinum) and chemical fuels (such as H) are often needed2O2) Rather than chemical driving, energy is provided mainly by means of external electric field, ultrasonic field, magnetic field, light irradiation, and the like.
The common morphology of the present nanomotors mainly includes structures such as yin-yang (Janus) spherical particles, nanotubes, nanowires, and nanorods. In order to meet the increasingly complex functional requirements, the nano motor with a complex configuration needs to be developed. However, due to the difficulty of the existing preparation technology and the limitation of a driving mechanism, the shape of the nano motor is limited to spherical shape and linear shape, and the nano motor with a complex configuration is difficult to produce in a large scale. With the continuous development and application of ultrasound, the motion mode of micro-nano particles is greatly expanded, and an idea is provided for constructing a complex-configuration nano motor, so that the development of the research on the composite nano motor has obvious practical significance and practical value.
Disclosure of Invention
The invention provides a composite nano motor and a preparation device thereof, wherein an ultrasonic field is introduced into the preparation device, sound wave vibration is used as a means for controlling the movement and assembly of micro particles, chemical fuel is not needed, no special requirement is required for the material of the micro particles, and the assembly mode of the micro particles can be changed by adjusting the distribution and the strength of the sound field, so that the nano motors with various complex configurations are formed.
In order to achieve the purpose, the invention adopts the following technical scheme:
a composite nano motor is composed of several nano spheres adhered together in symmetrical structure, and the magnetic metal layer is evaporated on part of spheres, which are adhered together by molecular film.
The symmetrical structure is in a shape of a circular ring, a U shape or a long chain, the size is 1-100 mu m, and the movement mode is precession or horizontal advancement; the nanospheres are PS spheres and SiO2Particles or magnetic metal particles of size 500nm to 30 μm; the molecular film is SiO2Or SiNxAnd the thickness of the molecular film is 100 nm.
A composite nanomotor fabrication apparatus, comprising: the device comprises a signal generator 1, a power amplifier 2, a microscope 3, a computer 4 and an ultrasonic control platform 5; the output end of the signal generator 1 is connected with the input end of the power amplifier 2, the output end of the power amplifier 2 is connected with the ultrasonic control platform 5, the ultrasonic control platform 5 is positioned on a sample table of the microscope 3, and the microscope 3 is connected with a computer.
In the above device, the ultrasonic manipulation platform includes a driving board 6, a transducer 7, and a micro-scale array structure 8; the driving plate 6 is connected with the output end of the power amplifier 2, the transducer 7 is installed on the surface of one end of the driving plate 6, the micro-scale array structures 8 are evenly installed on the surface of the driving plate 6, the transducer 7 excites the ultrasonic vibration of the driving plate 6, under a certain vibration mode, liquid is caused to generate strong local flow near the micro-scale array structures 8, and micro-particles are captured by the micro-scale array structures 8 under the action of local strong convection and are assembled and prepared around the outlines of the micro-scale array structures.
The thickness of the driving plate 6 is 1mm, the thickness of the transducer 7 is 0.5mm, the thickness of the micro-scale array structure 8 is 1-20 μm, the driving plate 6 is a silicon substrate or a glass plate, a micro-nano-scale array structure is constructed on the surface of the driving plate 6 through a micro-machining method, the micro-scale array structure 8 is a novel structure form formed by stacking a round, square, V-shaped, linear or spiral form or the above forms, and the line width of a single micro-scale structure is 5-50 μm.
The signal generator 1 is a signal generator capable of generating 50-1000 KHZ sine waves, square waves and triangular waves, the power amplifier 2 is a high-frequency power amplifier, and the ultrasonic field frequency is 50-500 KHZ.
Has the advantages that: the invention provides a composite nano motor and a preparation device thereof, wherein an ultrasonic field is introduced into the preparation device, sound wave vibration is used as a means for controlling the movement and assembly of micro particles, chemical fuel is not needed, no special requirement is required for the material of the micro particles, and the assembly mode of the micro particles can be changed by adjusting the distribution and the strength of the sound field, so that the nano motors with various complex configurations are formed. The nano motor structure mainly depends on a micro-scale array structure, the array structure is processed by adopting a photoetching technology, the nano motor structure has the characteristics of high precision, convenience in processing and stable structure, and customized design can be developed according to the requirements of nano particle materials and working modes. Under the action of a sound field, the adopted preparation device attracts and captures the nano particles by the array structure, effectively inhibits Brownian motion in a three-dimensional space, has the characteristics of high accuracy and high controllability, and can change the assembly mode of the nano particles by changing parameters of ultrasonic control, such as excitation frequency, working voltage and the like. The nano motor preparation device is based on ultrasonic drive, has no special requirement on nano particles, so that artificially synthesized composite particles or single particles in the nature can be used as materials for preparing the nano motor, and can meet specific requirements such as cell capture, drug transportation and the like through certain surface modification or assembly.
Drawings
FIG. 1 is a schematic structural diagram of a composite nanomotor fabrication apparatus;
FIG. 2 is a schematic structural view of an ultrasonic control platform;
FIG. 3 is a schematic illustration of nanoparticles being captured by a micro-scale array structure;
FIG. 4 is a view of a circular array configuration;
FIG. 5 is a view of a linear array structure;
fig. 6 is a view of a ring-type nanomotor structure.
Fig. 7 is a structural view of a U-shaped nanomotor.
In the figure, 1 is a signal generator; 2 is a power amplifier; 3 is a microscope; 4 is a computer; 5 is an ultrasonic control platform; 6 is a driving plate; 7 is a transducer; 8 is a micro-scale array structure; 9 is a nanoparticle; 10 is the capture track of the nanoparticles; 11 is a circular array structure; 12 is a linear array structure; 13 is a motion mode of the annular nanometer motor; and 14, a U-shaped nano motor motion mode.
Detailed Description
A composite nano motor is composed of several nano spheres adhered together in symmetrical structure, and the magnetic metal layer is evaporated on part of spheres, which are adhered together by molecular film.
A composite nanomotor fabrication apparatus, comprising: the device comprises a signal generator 1, a power amplifier 2, a microscope 3, a computer 4 and an ultrasonic control platform 5; the output end of the signal generator 1 is connected with the input end of the power amplifier 2, the output end of the power amplifier 2 is connected with the ultrasonic control platform 5, the ultrasonic control platform 5 is positioned on a sample table of the microscope 3, and the microscope 3 is connected with a computer.
In the above device, the ultrasonic manipulation platform includes a driving board 6, a transducer 7, and a micro-scale array structure 8; the driving plate 6 is connected with the output end of the power amplifier 2, the transducer 7 is installed on the surface of one end of the driving plate 6, the micro-scale array structures 8 are evenly installed on the surface of the driving plate 6, the transducer 7 excites the ultrasonic vibration of the driving plate 6, under a certain vibration mode, liquid is caused to generate strong local flow near the micro-scale array structures 8, and micro-particles are captured by the micro-scale array structures 8 under the action of local strong convection and are assembled and prepared around the outlines of the micro-scale array structures.
The invention is described in detail below with reference to the following figures and specific examples:
example 1
The preparation process of the annular nano motor comprises the following steps:
step 1: a composite nano-motor manufacturing device shown in fig. 1 was built, including: the device comprises a signal generator 1, a power amplifier 2, a microscope 3, a computer 4 and an ultrasonic control platform 5; the output end of the signal generator 1 is connected with the input end of the power amplifier 2, the output end of the power amplifier 2 is connected with the ultrasonic control platform 5, the ultrasonic control platform 5 is positioned on a sample stage of the microscope 3, and the microscope 3 is connected with a computer;
step 2: preparing an ultrasonic control platform as shown in fig. 2, wherein the ultrasonic control platform 5 is composed of a driving plate 6, a piezoelectric transducer 7 and a micro-scale array structure 8, the driving plate 6 is a high-light-transmission glass substrate, the length is 25mm, the width is 15mm, the thickness is 1mm, and the micro-scale array structure 8 is fixed on one surface of the driving plate 6. The piezoelectric ceramic plate made of lead zirconate titanate is used as the transducer 7, the length of the transducer 7 is 15mm, the width of the transducer is 4mm, the thickness of the transducer is 0.5mm, and the piezoelectric ceramic plate is pasted at the same end of the driving plate 6 and the microscale array structure 8 and used for converting electric energy into mechanical energy. The array structure 8 is a circular structure, the diameter is 10 mu m, the height is 5 mu m, photosensitive glue is used as a base material, the base material is processed in a photoetching and micromachining mode, and a silicon dioxide protective layer with the thickness of 100nm is formed by magnetron sputtering;
and step 3: a suspension containing nanoparticles 9 was spread on an ultrasound manipulation platform, 4 μ L of deionized water containing a large amount of nanoparticles 9, polystyrene microspheres with a diameter of 5 μm were used as nanoparticles 9, and the suspension was spread on a micro-scale array structure 8 using a pipette gun.
And 4, step 4: the micro-scale array structure 8 captures and assembles nanoparticles 9: when a high-frequency sinusoidal alternating current signal with the frequency of 180kHz and the amplitude of 15V is applied to the piezoelectric transducer 7 through the signal generator 1 and the power amplifier 2, the driving plate 6 is in a resonance state, vibration is transmitted to the micro-scale array structure 8 to be further amplified, so that strong eddy current motion of surrounding liquid is caused, the polystyrene microspheres can be captured by the flow, the polystyrene microspheres are assembled around the outline of the micro-scale array structure, the capture track can be observed under a microscope 3 and a computer 4, and the effect of arrangement of nanoparticles around a circular array is shown in FIG. 4;
and 5: magnetron sputtering of a molecular film: and after the polystyrene microspheres are assembled around the circular array structure, standing for tens of minutes until the suspension is evaporated, and closing the ultrasonic field. Using electron beam evaporation coating equipment, and performing vacuum evaporation coating under the air pressure of less than 1X10-6In the vacuum deposition chamber, SiO is deposited on the ring-shaped nano motor formed by adhering polystyrene microspheres at the speed of 30nm/min2A 100nm thick silicon dioxide layer is formed.
Step 6: separating the composite nano motor: and (3) separating the composite nano motor from the ultrasonic control platform by flushing with a liquid-transfering gun to obtain an annular nano motor, wherein the advancing direction is precession, as shown in fig. 6.
Example 2
The preparation process of the U-shaped nano motor comprises the following steps:
step 1: a composite nano-motor manufacturing device shown in fig. 1 was built, including: the device comprises a signal generator 1, a power amplifier 2, a microscope 3, a computer 4 and an ultrasonic control platform 5; the output end of the signal generator 1 is connected with the input end of the power amplifier 2, the output end of the power amplifier 2 is connected with the ultrasonic control platform 5, the ultrasonic control platform 5 is positioned on a sample stage of the microscope 3, and the microscope 3 is connected with a computer;
step 2: preparing an ultrasonic control platform as shown in fig. 2, wherein the ultrasonic control platform 5 is composed of a driving plate 6, a piezoelectric transducer 7 and a micro-scale array structure 8, the driving plate 6 is a high-light-transmission glass substrate, the length is 25mm, the width is 15mm, the thickness is 1mm, and the micro-scale array structure 8 is fixed on one surface of the driving plate 6. The piezoelectric ceramic plate made of lead zirconate titanate is used as the transducer 7, the length of the transducer 7 is 15mm, the width of the transducer is 4mm, the thickness of the transducer is 0.5mm, and the piezoelectric ceramic plate is pasted at the same end of the driving plate 6 and the microscale array structure 8 and used for converting electric energy into mechanical energy. The array structure 8 is a linear structure, the diameter is 10 mu m, the height is 1.5 mu m, photosensitive glue is used as a base material, the base material is processed in a photoetching and micromachining mode, and a silicon dioxide protective layer with the thickness of 100nm is formed by magnetron sputtering;
and step 3: a suspension containing nanoparticles 9 was spread on an ultrasonic manipulation platform, the suspension being 3 μ L of deionized water containing a large amount of nanoparticles 9, magnetic polystyrene microspheres with a diameter of 10 μm were used as the nanoparticles 9, and the suspension was spread on the micro-scale array structure 8 using a pipette.
And 4, step 4: the micro-scale array structure 8 captures and assembles nanoparticles 9: when a high-frequency sinusoidal alternating current signal with the frequency of 223kHz and the amplitude of 12V is applied to the piezoelectric transducer 7 through the signal generator 1 and the power amplifier 2, the driving plate 6 is in a resonance state, vibration is transmitted to the micro-scale array structure 8 to be further amplified, so that strong eddy current motion of surrounding liquid is caused, the flow can capture magnetic polystyrene microspheres, the polystyrene microspheres are assembled around the outline of the micro-scale array structure, and the effect of the magnetic particles around the linear array is shown in FIG. 5;
and 5: magnetron sputtering of a molecular film: and after the magnetic polystyrene microspheres are assembled around the linear array structure, standing for tens of minutes until the suspension is evaporated, and closing the ultrasonic field. Using electron beam evaporation coating equipment, and performing vacuum evaporation coating under the air pressure of less than 1X10-6In a vacuum deposition chamber, SiO is deposited on a U-shaped nanometer motor formed by bonding magnetic polystyrene microspheres at the speed of 30nm/min2A 200nm thick silicon dioxide layer was formed.
Step 6: separating the composite nano motor: and (3) separating the composite nano motor from the ultrasonic control platform by flushing with a liquid-transfering gun to obtain a U-shaped nano motor, wherein the advancing direction is horizontal advancing, as shown in fig. 7.
Example 3
The preparation process of the long-chain nano motor comprises the following steps:
step 1: a composite nano-motor manufacturing device shown in fig. 1 was built, including: the device comprises a signal generator 1, a power amplifier 2, a microscope 3, a computer 4 and an ultrasonic control platform 5; the output end of the signal generator 1 is connected with the input end of the power amplifier 2, the output end of the power amplifier 2 is connected with the ultrasonic control platform 5, the ultrasonic control platform 5 is positioned on a sample stage of the microscope 3, and the microscope 3 is connected with a computer;
step 2: preparing an ultrasonic control platform as shown in fig. 2, wherein the ultrasonic control platform 5 is composed of a driving plate 6, a piezoelectric transducer 7 and a micro-scale array structure 8, the driving plate 6 is a high-light-transmission glass substrate, the length is 25mm, the width is 15mm, the thickness is 1mm, and the micro-scale array structure 8 is fixed on one surface of the driving plate 6. The piezoelectric ceramic plate made of lead zirconate titanate is used as the transducer 7, the length of the transducer 7 is 15mm, the width of the transducer is 4mm, the thickness of the transducer is 0.5mm, and the piezoelectric ceramic plate is pasted at the same end of the driving plate 6 and the microscale array structure 8 and used for converting electric energy into mechanical energy. The array structure 8 is a V-shaped structure, the diameter is 10 mu m, the height is 1.5 mu m, photosensitive glue is used as a base material, the base material is processed in a photoetching and micromachining mode, and a silicon dioxide protective layer with the thickness of 100nm is formed by magnetron sputtering;
and step 3: spreading a suspension containing nanoparticles 9 on an ultrasonic control platform, wherein the suspension is 5 μ L of deionized water containing a large amount of nanoparticles 9, and SiO with a diameter of 10 μm is adopted2Particles as nanoparticles 9, the suspension was spread on the micro-scale array structure 8 using a pipette gun.
And 4, step 4: the micro-scale array structure 8 captures and assembles nanoparticles 9: when a high frequency sinusoidal AC signal of 195kHz frequency and 10V amplitude is applied to the piezoelectric transducer 7 via the signal generator 1 and the power amplifier 2, the drive plate 6 is in resonance and the vibration is transmitted to the micro-scale array structure 8 to be further amplified, thereby causing a strong eddy current motion in the surrounding liquid, which can trap SiO2Particles of and SiO2The particles will assemble at the ends of the V-shaped array structure.
And 5: magnetron sputtering of a molecular film: to SiO2After the particles are assembled around the V-shaped array structure, standing for tens of minutes until the suspension is evaporated, and closing the ultrasonic field. Using electron beam evaporation coating equipment, and performing vacuum evaporation coating under the air pressure of less than 1X10-6In a vacuum deposition chamber of the susceptor, in SiO2Depositing SiO on the long-chain nanometer motor formed by the adhered particles at the speed of 30nm/min2A 100nm thick silicon dioxide layer is formed.
Step 6: separating the composite nano motor: and (4) separating the composite nano motor from the ultrasonic control platform by flushing with a liquid-transfering gun to obtain the long-chain nano motor.
The preferred embodiments of the present invention described above with reference to the drawings are only for illustrating the embodiments of the present invention, and are not to be considered as limiting the objects of the invention and the contents and scope of the appended claims, and any simple modification, equivalent change and modification made according to the above embodiments of the technical spirit of the present invention still belong to the technical and rights protection scope of the present invention.
Claims (10)
1. A composite nano motor is composed of several nano spheres adhered together in symmetrical structure, part of spheres coated by magnetic metal layer, and molecular membrane between spheres.
2. The composite nanomotor according to claim 1, wherein the symmetrical structure is in the shape of a circular ring, a U-shape or a long chain, and has a size of 1-100 μm.
3. The composite nano-motor according to claim 1, wherein the nano-spheres are PS spheres, SiO spheres2Particles or magnetic metal particles, the molecular film being SiO2Or SiNx。
4. A composite nanomotor according to claim 1 or 3, characterized in that the nanospheres have a size of 500nm to 30 μm; the thickness of the molecular film is 100 nm.
5. A composite nano-motor preparation device is characterized by comprising: the device comprises a signal generator (1), a power amplifier (2), a microscope (3), a computer (4) and an ultrasonic control platform (5); the output end of the signal generator (1) is connected with the input end of the power amplifier (2), the output end of the power amplifier (2) is connected with the ultrasonic control platform (5), the ultrasonic control platform (5) is positioned on the sample table of the microscope (3), and the microscope (3) is connected with the computer (4).
6. A hybrid nanomotor fabrication device according to claim 5, characterized in that the ultrasound manipulation platform (5) comprises a driving board (6), a transducer (7), a micro-scale array structure (8); the driving plate (6) is connected with the output end of the power amplifier (2), the transducer (7) is installed on the surface of one end of the driving plate (6), and the micro-scale array structures (8) are evenly installed on the surface of the driving plate (6).
7. The device for preparing the composite nano motor as claimed in claim 6, wherein the thickness of the driving plate (6) is 1mm, the thickness of the transducer (7) is 0.5mm, and the thickness of the micro-scale array structure (8) is 1-20 μm.
8. The device for preparing the composite nano motor according to claim 6 or 7, wherein the driving plate (6) is a silicon substrate or a glass plate, and the micro-scale array structure (8) is a circular, square, V-shaped, linear or spiral structure or a novel structural form formed by overlapping the circular, square, V-shaped, linear or spiral structures.
9. The device for preparing a composite nano motor according to claim 8, wherein the line width of a single micro-scale structure is 5-50 μm.
10. The device for preparing the composite nano motor according to claim 5, wherein the signal generator (1) is a signal generator capable of generating 50-1000 KHZ sine waves, square waves and triangular waves, the power amplifier (2) is a high-frequency power amplifier, and the ultrasonic field frequency is 50-500 KHZ.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201920486015.1U CN210111879U (en) | 2019-04-11 | 2019-04-11 | Composite nano motor and preparation device thereof |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201920486015.1U CN210111879U (en) | 2019-04-11 | 2019-04-11 | Composite nano motor and preparation device thereof |
Publications (1)
Publication Number | Publication Date |
---|---|
CN210111879U true CN210111879U (en) | 2020-02-21 |
Family
ID=69535427
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201920486015.1U Expired - Fee Related CN210111879U (en) | 2019-04-11 | 2019-04-11 | Composite nano motor and preparation device thereof |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN210111879U (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111496764A (en) * | 2020-05-29 | 2020-08-07 | 三峡大学 | Miniature magnetic drive capture robot and preparation method thereof |
WO2023102774A1 (en) * | 2021-12-08 | 2023-06-15 | 深圳先进技术研究院 | Acoustic control method and system based on human-machine interaction |
-
2019
- 2019-04-11 CN CN201920486015.1U patent/CN210111879U/en not_active Expired - Fee Related
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111496764A (en) * | 2020-05-29 | 2020-08-07 | 三峡大学 | Miniature magnetic drive capture robot and preparation method thereof |
WO2023102774A1 (en) * | 2021-12-08 | 2023-06-15 | 深圳先进技术研究院 | Acoustic control method and system based on human-machine interaction |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
Raeymaekers et al. | Manipulation of diamond nanoparticles using bulk acoustic waves | |
Wang et al. | Preparation of biosilica structures from frustules of diatoms and their applications: current state and perspectives | |
CN110002397A (en) | A kind of preparation method of complex configuration nano-motor | |
CN210111879U (en) | Composite nano motor and preparation device thereof | |
US10944339B2 (en) | Electrode design and low-cost fabrication method for assembling and actuation of miniature motors with ultrahigh and uniform speed | |
CN1821048A (en) | Micronl nano thermoacoustic vibration excitor based on thermoacoustic conversion | |
CN108467006A (en) | The rotary-type nano-motor and its working method of micro- acoustic streaming driving | |
Zhou et al. | Manipulations of silver nanowires in a droplet on a low-frequency ultrasonic stage | |
Lu et al. | Universal control for micromotor swarms with a hybrid sonoelectrode | |
CN110961031B (en) | Non-contact micro/nano particle control method | |
CN115041245B (en) | Method and device for capturing and separating particles based on ultrahigh frequency bulk acoustic wave acoustic current potential well | |
Qi et al. | Controlled concentration and transportation of nanoparticles at the interface between a plain substrate and droplet | |
CN102109535A (en) | Controllable method for preparing atomic force microscope needlepoint with carbon nano tube | |
CN102976267A (en) | Low speed driving method for single nanowire or nanotube and device thereof | |
Hill et al. | Ultrasonic particle manipulation | |
CN107694475B (en) | Micro-nano substance annular aggregate forming device | |
Li et al. | Single-metal hybrid micromotor | |
Liu et al. | A new strategy to capture single biological micro particles at the interface between a water film and substrate by ultrasonic tweezers | |
WO2007020703A1 (en) | Method of manipulation by rotational magnetic field | |
WO2023216229A1 (en) | Microfluidic chip and application thereof | |
Suma et al. | Experimental evaluation of ZnO nanowire array based dynamic pressure sensor | |
Zhao et al. | Reversible Swarming of Micro Robots Controlled by Acoustic Field | |
CN114100707B (en) | Device for capturing micro-nano particles | |
CN118185760A (en) | Preparation method and device of cell-coated hydrogel microsphere regulated and controlled by three-dimensional focusing sound field | |
Guo | High-performance artificial micro/nanomachines and their bioapplications |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
GR01 | Patent grant | ||
GR01 | Patent grant | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20200221 |
|
CF01 | Termination of patent right due to non-payment of annual fee |