CN210109529U - Polarized light irradiation device and optical orientation processing equipment - Google Patents
Polarized light irradiation device and optical orientation processing equipment Download PDFInfo
- Publication number
- CN210109529U CN210109529U CN201921188658.4U CN201921188658U CN210109529U CN 210109529 U CN210109529 U CN 210109529U CN 201921188658 U CN201921188658 U CN 201921188658U CN 210109529 U CN210109529 U CN 210109529U
- Authority
- CN
- China
- Prior art keywords
- light source
- assembly
- source assembly
- polarized light
- drive
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Landscapes
- Liquid Crystal (AREA)
Abstract
The utility model relates to a polarized light irradiation device and a light orientation processing device, wherein the polarized light irradiation device comprises a light source component, and the light source component comprises a lamp tube extending in a second direction; a reflection assembly disposed at one side of the light source assembly; the position adjusting mechanism is connected with the reflecting assembly; wherein: the polarized light irradiation device is provided with a scanning position and a maintenance position; when the light source assembly is located at the scanning position, the position adjusting mechanism drives the reflecting assembly to be close to the light source assembly so as to reflect the light rays emitted by the lamp tube to the substrate; the position adjusting mechanism is also used for driving the reflecting assembly to move along a third direction so as to be far away from the light source assembly, and an included angle is formed between the third direction and the horizontal plane; the displacement of the light source assembly and the reflection assembly in the second direction is always zero during the movement. The utility model has the advantages of, reduced the fluorescent tube and changed the required space of maintaining, and reduced the fluorescent tube and taken place the possibility of damaging when maintaining.
Description
Technical Field
The utility model relates to a liquid crystal display panel manufacture equipment technical field, concretely relates to polarisation irradiation apparatus and optical orientation treatment facility.
Background
In a liquid crystal display element, it is necessary to change the state of molecular arrangement of liquid crystal and optically apply the change to display. Currently, a common alignment treatment method performed to achieve alignment of liquid crystals in a specific direction is photo-alignment treatment in which liquid crystals are aligned in a specific direction by irradiating polarized ultraviolet rays to an alignment film.
Fig. 1 shows a conventional photo-alignment treatment apparatus, which is configured with a rod-shaped lamp tube 1 (i.e., a long arc lamp), a reflection assembly 2, a wavelength selective filter 3, and a polarizer 4, wherein a part of light emitted from the lamp tube 1 is directly emitted to an alignment film through the wavelength selective filter 3 and the polarizer 4, and another part of light is reflected by the reflection assembly 2 and then emitted to the alignment film through the wavelength selective filter 3 and the polarizer 4. The lamp tube 1 needs to be maintained frequently, for example, needs to be replaced after being used for a certain time (generally 2000 hours), so that the illumination intensity, uniformity and wavelength characteristic of the lamp tube can meet the expected requirements, and the display quality can be ensured.
The conventional lamp tube replacement and maintenance method is to horizontally draw a single side of the light orientation processing equipment along the axial direction of the lamp tube and use a special maintenance vehicle to lead out the light source, so that the light orientation processing equipment is required to have a space at one side at least equivalent to the length of the lamp tube for the light source maintenance. However, with the continuous development of liquid crystal display technology, the length of the lamp tube used for the alignment of the large-sized liquid crystal panel is at least more than 1.5m, especially the length of the lamp tube used for the high-generation (G5 and above) liquid crystal panel is more than 4m (G10.5), which means that the space required for maintaining the lamp tube by adopting the single-side drawing mode is larger, thereby increasing the production cost of the liquid crystal panel manufacturer and being not beneficial to the enlargement of the manufacturer.
Therefore, developing a light processing apparatus capable of performing replacement and maintenance of the lamp in a small space has become an urgent problem to be solved in the production of liquid crystal panels.
SUMMERY OF THE UTILITY MODEL
The utility model aims at providing a polarisation illuminator and optical orientation treatment facility not only can reduce the light source and change required maintenance space when maintaining, reduces liquid crystal display panel's manufacturing cost to good operation performance still has.
In order to achieve the above object, the present invention provides a polarized light irradiation device for scanning a substrate formed with an alignment film in a first direction to perform photo-alignment processing, comprising:
the light source assembly comprises a lamp tube extending in a second direction, the lamp tube is used for emitting light to scan the substrate, and the first direction and the second direction are both horizontal directions and are arranged in an intersecting manner;
a reflection assembly disposed at one side of the light source assembly; and the number of the first and second groups,
the position adjusting mechanism is connected with the reflecting assembly to drive the reflecting assembly to move;
wherein: the polarized light irradiation device is provided with a scanning position and a maintenance position;
the position adjusting mechanism is configured to drive the reflecting component to be close to the light source component when the light source component is located at the scanning position so as to reflect the light rays emitted by the lamp tube to the substrate;
the position adjustment mechanism is further configured to drive the reflection assembly to move in a third direction away from the light source assembly before the light source assembly moves from the scanning position to the maintenance position, the third direction forming an included angle with a horizontal plane;
the light source assembly and the reflective assembly are configured such that the displacement in the second direction is always zero during the movement.
Optionally, the polarized light irradiation device further includes a driving mechanism connected to the light source assembly to drive the light source assembly to move.
Optionally, the drive mechanism comprises a first drive mechanism; the first drive mechanism is configured to drive the light source assembly to move in the first direction from the scanning position to the maintenance position.
Optionally, the first driving mechanism is configured to drive the light source assembly to move linearly along the first direction.
Optionally, the drive mechanism comprises a second drive mechanism; the second driving mechanism is configured to drive the light source assembly to rotate in a vertical direction to move from the scanning position to the maintenance position.
Optionally, the axis of rotation of the light source assembly is parallel to the second direction.
Optionally, the polarized light irradiation device further includes a control mechanism, connected to the position adjustment mechanism and the driving mechanism, respectively, for controlling the position adjustment mechanism to drive the reflection assembly to approach or leave the light source assembly, and further for controlling the driving mechanism to drive the light source assembly to move between the scanning position and the maintenance position.
Optionally, the first direction, the second direction and the third direction are perpendicular to each other, and the position adjusting mechanism is a lifting mechanism to drive the reflecting assembly to make linear motion in a vertical manner so as to be close to or far away from the light source assembly.
Further, in order to achieve the above object, the present invention provides a photo-alignment treatment apparatus for performing a photo-alignment treatment on a substrate on which an alignment film is formed, the photo-alignment treatment apparatus comprising:
a work table;
the bearing table is arranged on the workbench and used for bearing the substrate; and the number of the first and second groups,
the polarized light irradiation device is arranged on the workbench;
when the light source assembly of the polarized light irradiation device is located at the scanning position, the bearing table and the light source assembly generate relative motion so that the light source assembly scans the substrate.
Optionally, when the light source assembly is in the scanning position, the light source assembly is configured to remain stationary relative to the stage while the stage moves in the first direction over the stage to cause the substrate to be scanned by the light source assembly.
Compared with the prior art, the utility model discloses a polarisation is shone device and light orientation treatment facility has following advantage:
the polarized light irradiation device is used for carrying out light orientation treatment on a substrate, and the polarized light irradiation device is provided with a light source component, a reflection component and a position adjusting mechanism, wherein the light source component comprises a lamp tube, the lamp tube is used for treating the substrate in a horizontal first direction, the length of the lamp tube extends along a horizontal second direction, when the lamp tube needs to be replaced and maintained, the position adjusting mechanism drives the reflection component to move in a third direction and keep away from the light source component, then the light source component moves to a maintenance position and replaces and maintains the light source in the maintenance position, in the relative movement process of the reflection component and the light source component, the displacement of the reflection component and the light source component in the second direction is zero, namely, when the lamp tube is replaced and maintained, the lamp tube does not need to be horizontally pulled from one side of the light orientation treatment equipment (namely, the lamp tube is pulled along the axial direction of the, therefore, the space required by lamp tube maintenance is reduced, and meanwhile, only the light source assembly moves to the maintenance position, and when the lamp tube is disassembled and assembled, the lamp tube can be effectively prevented from colliding with the reflection assembly to be damaged.
Drawings
FIG. 1 is a schematic diagram of a prior art photo-alignment processing apparatus;
FIG. 2 is a schematic view of another prior art photoalignment processing apparatus during replacement maintenance of a lamp;
fig. 3 is a top view of a photo-alignment treatment apparatus according to an embodiment of the present invention;
FIG. 4 is a side view of the photo-alignment treatment apparatus shown in FIG. 3;
fig. 5 a-5 c are schematic views illustrating a light-orienting processing apparatus according to an embodiment of the present invention in performing tube maintenance and replacement, wherein fig. 5c is a top view of fig. 5 b;
FIG. 6 is a schematic view of a light-directing processing apparatus according to another embodiment of the present invention during tube maintenance and replacement.
In the figure:
100-a light source assembly;
1, 10, 110-lamp tube;
120-a scaffold;
2, 20, 200-reflective components;
3, 30, 400-wavelength selective filter;
4, 40, 500-polarizers;
50-a support guide;
p1-scan position; p2-maintenance location;
300-a position adjustment mechanism;
1000-a workbench;
2000-carrying platform.
Detailed Description
To make the objects, advantages and features of the present invention clearer, embodiments of a polarized light irradiation device and a photo-alignment processing apparatus according to the present invention will be described in detail with reference to the accompanying drawings. It should be noted that the drawings are in simplified form and are not to precise scale, and are provided for convenience and clarity in order to facilitate the description of the embodiments of the present invention.
As used in this specification and the appended claims, the singular forms "a", "an", and "the" include plural referents unless the content clearly dictates otherwise. As used in this specification and the appended claims, the term "or" is generally employed in its sense including "and/or" unless the content clearly dictates otherwise, and the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either fixedly connected, detachably connected, or integrally connected. Either mechanically or electrically. Either directly or indirectly through intervening media, either internally or in any other relationship. The specific meaning of the above terms in the present invention can be understood according to specific situations by those skilled in the art. The same or similar reference numbers in the drawings identify the same or similar elements.
As described in the background art, for manufacturers of large-sized liquid crystal panels, the maintenance and replacement of the lamp tube by pulling the lamp tube horizontally along the axial direction of the lamp tube from one side of the photo-alignment processing equipment greatly increases the production cost, which is not favorable for expanding the production. To overcome this problem, manufacturers have developed new polarized light irradiation devices for photo-alignment.
Fig. 2 is a schematic view showing a conventional polarized light irradiation device for light alignment during tube replacement maintenance. As shown in fig. 2, the polarized light irradiation apparatus for light orientation includes a lamp 10, a reflection member 20, a wavelength selective filter 30, a polarizer 40, and a support guide 50, wherein the reflection member 20 has an arc shape and covers the lamp 10. In actual operation, the polarized light irradiation device for light orientation has a scanning position P1 and a maintenance position P2, where the scanning position P1 is the position of the lamp 10 in normal use, and the light irradiation direction of the lamp 10 is vertical. When the lamp tube 10 is located at the scanning position P1, a part of the light emitted by the lamp tube 10 directly passes through the wavelength selective filter 30 and the polarizer 40 and then enters a substrate (not shown) on which an alignment film is formed to scan the substrate, and another part of the light is reflected by the reflection assembly 20 and then passes through the wavelength selective filter 30 and the polarizer 40 to scan the substrate. When it is actually necessary to replace the lamp 10, the lamp 10 together with the reflection assembly 20 is moved along the support guide 50 to the maintenance position P2 along the scanning direction, and the light irradiation direction of the lamp 10 is changed to the horizontal direction at the maintenance position P2, and then the maintenance person can remove and replace the lamp 10 along the scanning direction at the maintenance position P2. Although the polarized light irradiation device for photoalignment can reduce the maintenance space without drawing the lamp 10 from the side direction (i.e. the axial direction of the lamp) when irradiating the light source, the lamp 10 is very likely to be broken by collision with the reflection member 20 during the assembling and disassembling process because the lamp 10 is longer, especially the lamp 10 used for the advanced liquid crystal panel is longer.
Therefore, the embodiment of the utility model provides a can reduce the fluorescent tube and change required maintenance space when maintaining, can avoid the broken polarisation irradiation device for the optical orientation of fluorescent tube again. The following description is made with reference to the accompanying drawings.
Referring to fig. 3 and 4, the polarized light irradiation device has a scanning position and a maintenance position, and includes: a light source assembly 100, including a bar-shaped light tube 110, wherein the light tube 110 is used for scanning a substrate in a horizontal first direction (i.e. y direction in the figure), and the light tube 110 extends along a horizontal second direction, and the second direction (i.e. x direction in the figure) is preferably perpendicular to the first direction; a reflection assembly 200 disposed at one side of the lamp tube 110 for reflecting light emitted from the lamp tube 110; and a position adjusting mechanism 300 for connecting with the reflection assembly 200 to drive the reflection assembly 200 to move.
When the light source assembly 100 is located at the scanning position, the position adjusting mechanism 100 is configured to drive the reflection assembly 200 to approach the lamp tube 110 until the reflection assembly 200 can reflect the light generated by the lamp tube 110 to the substrate, and fix the reflection assembly 200; when maintenance of the light source assembly 100 is required, the position adjustment mechanism 300 first drives the reflection assembly 200 to move in a non-horizontal third direction (preferably, a vertical direction (i.e., a z direction in the drawing)) away from the lamp tube 110, and then the light source assembly 100 moves to the maintenance position. And the displacement of the light source assembly 100 in the second direction during the movement is zero, while the displacement of the reflective assembly 200 in the second direction during the movement is also zero. In practice, the polarized light irradiation device is mounted on a stage 1000, such as the stage 1000 of the photo-alignment processing apparatus.
Therefore, when the lamp tube 110 is replaced and maintained, the lamp tube does not need to be horizontally drawn from one side of the light orientation processing equipment (namely, the axial direction of the lamp tube), so that the space required by the maintenance of the lamp tube is reduced, and meanwhile, only the light source component moves to the maintenance position, and the lamp tube is prevented from colliding with the reflection component to be damaged when the lamp tube is disassembled and assembled.
Further, the light source assembly 100 further includes a bracket 120, the lamp 110 is mounted on the working platform 1000 through the bracket 120, and the bracket 120 is movably disposed on the working platform 1000 and can drive the lamp 110 to move relative to the working platform 1000 under the driving of a driving mechanism. The drive mechanism here may be a person or a device such as a motor. Further, the reflecting member 200 may have an arc shape, an axis thereof preferably extends along the second direction, and the reflecting member 200 has a downward opening.
The polarized light irradiation apparatus further includes a wavelength selective filter 400 and a polarizer 500 fixed at the scanning position, and the wavelength selective filter 400 and the polarizer 500 are sequentially disposed right below the reflection assembly 200. When the light source assembly 100 is in the scanning position, the lamp tube 110 is located between the reflection assembly 200 and the wavelength selective filter 400, and the reflection assembly 200 is fixed by the position adjustment mechanism 300 and covered on the lamp tube 110. When a substrate (not shown) having an alignment film formed thereon is disposed below the lamp tube 110, light generated from the lamp tube 110 passes through the wavelength selective filter 400 and the polarizer 500 and then scans the substrate to complete photo-alignment.
In general, the substrate has a rectangular shape, a length extending along the first direction, a width extending along the second direction, and a width not greater than the length of the lamp tube 110. In the first direction, a relative motion is generated between the substrate and the lamp tube 110, so that the lamp tube 110 scans the entire substrate, thereby completing the photo-alignment process. In the photo-alignment process, a part of the light generated by the lamp tube 110 directly passes through the wavelength selective filter 400 and the polarizer 500 from the opening of the reflection assembly 200 and then enters the substrate, and another part of the light passes through the wavelength selective filter 400 and the polarizer 500 after being reflected by the reflection assembly 200 and then enters the substrate.
The position adjusting mechanism 300 is disposed at the scanning position and preferably is a lifting mechanism to drive the reflection assembly 200 to move linearly in a vertical direction, so that the reflection assembly 200 is close to or far away from the lamp tube 110. The lifting mechanism can be manually operated to lift, and the lifting function can be realized through telescopic components such as an air cylinder, a hydraulic cylinder or an electric push rod.
The position adjustment mechanism 300 and the movement of the light source assembly 100 can be configured to be operated manually or can be configured to be operated in a fully automatic manner. When the position adjustment mechanism 300 and the movement of the light source assembly 100 are set to be automated, the polarized light irradiation apparatus may further include a driving mechanism and a control mechanism (not shown in the drawings), the control mechanism being configured to control the position adjustment mechanism 300 to drive the reflection assembly 200 to move and also being configured to control the driving mechanism to drive the light source assembly 100 to move. In detail, after the control mechanism can record the service life of the lamp tube 110 to a predetermined value (for example, 2000 hours) through an automatic timer, the control mechanism sends a signal to make the position adjustment mechanism 300 drive the reflection assembly 200 to ascend, and the ascending height of the reflection assembly 200 can be set and preset in the control mechanism by a person skilled in the art according to experience; the control mechanism then controls the driving mechanism to drive the light source assembly 100 to move to the maintenance position.
Next, the replacement and maintenance process of the lamp tube 110 of the polarized light irradiation device of the photo-alignment processing apparatus according to the present invention will be described in detail.
When the working time of the lamp tube 110 reaches a predetermined value, the lamp tube 110 is maintained and replaced.
Fig. 5a to 5c are schematic views illustrating the maintenance and replacement of the lamp tube 110 in a preferred embodiment. Firstly, the position adjusting mechanism 300 drives the reflection assembly 200 to rise until the reflection assembly 200 does not interfere with the movement of the lamp tube 110; subsequently, the driving mechanism drives the bracket 120 to drive the lamp tube 110 to move from the scanning position to the maintenance position on the workbench 1000 along a first direction; finally, a maintainer can disassemble and assemble the lamp tube 110 above the maintenance position, and at this time, the reflection assembly 200 is far away from the light source assembly 100, so that the light source assembly 100 is not easily damaged when being disassembled and assembled.
In this embodiment, the drive mechanism may include a first drive mechanism (not shown). The support 120 may be mounted on the worktable 1000 by a sliding rail (not labeled), and is driven by the first driving mechanism to move along a first direction (i.e. a scanning direction), where the first driving mechanism may be a driving member such as an electric push rod or a pneumatic cylinder; the support 120 may also be mounted on the working handle 1000 through a matching sleeve and a lead screw, and the first driving mechanism drives the support 120 to move along the lead screw, and in this case, the first driving mechanism is a motor.
In this embodiment, the reflecting assembly 200 moves in the third direction, the light source assembly 100 moves in the first direction, and the maintenance space required for performing maintenance and replacement on the lamp tubes 110 only depends on the number of the lamp tubes 110, and is independent of the length of the lamp tubes 110, so that the space required for the maintenance position can be effectively saved. Moreover, only the light source assembly 100 moves to the maintenance position, and when the lamp tube 110 is disassembled and assembled, the lamp tube 110 is prevented from colliding with the reflection assembly 200 to cause damage.
In an alternative embodiment, the driving mechanism includes a second driving mechanism for driving the light source assembly 100 to rotate.
Fig. 6 is a schematic view showing the maintenance and replacement of the lamp tube 110 in another embodiment. As shown in fig. 6, the bracket 120 may be hinged to the working platform 1000, and when the position adjustment mechanism 300 drives the reflection assembly 200 to ascend, the second driving mechanism drives the bracket 120 to drive the lamp tube 110 to rotate in the vertical direction to move from the scanning position to the maintenance position, for example, the bracket 120 may rotate 90 degrees, so as to facilitate the operation of the maintenance personnel. In this way, when the lamp tube 110 is replaced for maintenance, only the space in the vertical direction is required for maintenance, and a wide horizontal space is not required. Preferably, the rotation axis of the bracket 120 is parallel to the second direction, so that the maximum height of the lamps 110 in the maintenance position is determined by the number of the lamps 110 regardless of the length of the lamps 110, and the operation height of a maintenance worker can be effectively reduced for the lamps 110 with large size, thereby reducing the operation difficulty. In this embodiment, the support 120 can be driven to rotate by a second driving mechanism (not shown), which can be a motor.
Further, the present invention also provides a photo-alignment processing apparatus for photo-alignment processing a substrate formed with an alignment film in a first direction, the photo-alignment processing apparatus comprising: a work table 1000; a stage 2000 disposed on the stage 1000 and configured to support the substrate; and the polarized light irradiation device described above, which is provided on the table 1000. When the light source assembly 100 is located at the scanning position, the carrier 2000 drives the substrate and the light source assembly 100 to move relatively, so that the light source assembly 100 scans the substrate. In some embodiments, in the scan position, only the substrate moves in the y-direction while light source assembly 100 remains stationary; in other embodiments, both the substrate and the light source assembly move in the y-direction; in other embodiments, the substrate is stationary and light source assembly 100 is moved in the y-direction.
Preferably, when the light source assembly 100 is located at the scanning position, the light source assembly 100 is kept stationary relative to the work stage 1000, and the carrier 2000 moves on the work stage 1000 in a first direction, so that the substrate is scanned by the light source assembly 100.
Although the present invention is disclosed above, it is not limited thereto. Various modifications and alterations of this invention may be made by those skilled in the art without departing from the spirit and scope of this invention. Thus, if such modifications and variations of the present invention fall within the scope of the claims and their equivalents, the present invention is also intended to include such modifications and variations.
Claims (10)
1. A polarized light irradiation apparatus for scanning a substrate having an alignment film formed thereon in a first direction to perform a photo-alignment process, comprising:
the light source assembly comprises a lamp tube extending in a second direction, the lamp tube is used for emitting light to scan the substrate, and the first direction and the second direction are both horizontal directions and are arranged in an intersecting manner;
a reflection assembly disposed at one side of the light source assembly; and the number of the first and second groups,
the position adjusting mechanism is connected with the reflecting assembly to drive the reflecting assembly to move;
wherein: the polarized light irradiation device is provided with a scanning position and a maintenance position;
the position adjusting mechanism is configured to drive the reflecting component to be close to the light source component when the light source component is located at the scanning position so as to reflect the light rays emitted by the lamp tube to the substrate;
the position adjustment mechanism is further configured to drive the reflection assembly to move in a third direction away from the light source assembly before the light source assembly moves from the scanning position to the maintenance position, the third direction forming an included angle with a horizontal plane;
the light source assembly and the reflective assembly are configured such that the displacement in the second direction is always zero during the movement.
2. A polarized light irradiation apparatus according to claim 1, further comprising a driving mechanism connected to the light source module for driving the light source module to move.
3. A polarized light irradiation apparatus according to claim 2, wherein said driving mechanism comprises a first driving mechanism; the first drive mechanism is configured to drive the light source assembly to move in the first direction from the scanning position to the maintenance position.
4. A polarized light irradiation apparatus according to claim 3, wherein said first driving mechanism is configured to drive said light source module to move linearly along said first direction.
5. A polarized light irradiation apparatus according to claim 2, wherein said driving mechanism comprises a second driving mechanism; the second driving mechanism is configured to drive the light source assembly to rotate in a vertical direction to move from the scanning position to the maintenance position.
6. A polarized light irradiation apparatus according to claim 5, wherein the rotation axis of said light source module is parallel to said second direction.
7. A polarized light irradiation apparatus according to any one of claims 1 to 6, further comprising a driving mechanism connected to the light source module to drive the light source module to move;
the polarized light irradiation device further comprises a control mechanism which is respectively connected with the position adjusting mechanism and the driving mechanism and used for controlling the position adjusting mechanism to drive the reflecting assembly to be close to or far away from the light source assembly and also used for controlling the driving mechanism to drive the light source assembly to move between the scanning position and the maintenance position.
8. A polarized light irradiation apparatus according to any one of claims 1-6, wherein the first direction, the second direction and the third direction are perpendicular to each other, and the position adjustment mechanism is a lifting mechanism for driving the reflection assembly to move linearly in a vertical manner to approach or separate from the light source assembly.
9. A photo-alignment treatment apparatus for performing a photo-alignment treatment on a substrate on which an alignment film is formed, comprising:
a work table;
the bearing table is arranged on the workbench and used for bearing the substrate; and the number of the first and second groups,
a polarized light illumination device as claimed in any one of claims 1 to 8, disposed on said stage;
when the light source assembly of the polarized light irradiation device is located at the scanning position, the bearing table and the light source assembly generate relative motion so that the light source assembly scans the substrate.
10. The apparatus of claim 9, wherein the light source assembly is configured to remain stationary relative to the stage while the carrier stage moves in the first direction over the stage when the light source assembly is in the scanning position, such that the substrate is scanned by the light source assembly.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921188658.4U CN210109529U (en) | 2019-07-25 | 2019-07-25 | Polarized light irradiation device and optical orientation processing equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921188658.4U CN210109529U (en) | 2019-07-25 | 2019-07-25 | Polarized light irradiation device and optical orientation processing equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN210109529U true CN210109529U (en) | 2020-02-21 |
Family
ID=69566881
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201921188658.4U Active CN210109529U (en) | 2019-07-25 | 2019-07-25 | Polarized light irradiation device and optical orientation processing equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN210109529U (en) |
-
2019
- 2019-07-25 CN CN201921188658.4U patent/CN210109529U/en active Active
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP4469813B2 (en) | Laser repair apparatus and method | |
| US7728255B2 (en) | Spinning-type pattern-fabrication system and a method thereof | |
| KR101841183B1 (en) | Apparatus for machining light-guide plate using lazer | |
| CN112285957B (en) | Display panel detection device | |
| JP3500466B2 (en) | V cutter for LCD light guide plate | |
| CN101733549A (en) | Laser repairing device | |
| CN216286128U (en) | Laser projection device | |
| CN210109529U (en) | Polarized light irradiation device and optical orientation processing equipment | |
| CN211669102U (en) | Substrate inspection device | |
| KR101169240B1 (en) | Light irradiation apparatus for exposure apparatus, exposure apparatus, and exposure method | |
| CN111897153B (en) | Shading equipment for panel detection | |
| KR100883969B1 (en) | Laser manufacturing device with airfloating stage | |
| CN113579484A (en) | Wafer laser engraving machine and use method thereof | |
| CN209849200U (en) | Optical lens presses solidification all-in-one | |
| CN218470526U (en) | Automatic detection device for lighting picture of LCD | |
| KR101138681B1 (en) | Light irradiation apparatus for exposure apparatus, exposure apparatus, and exposure method | |
| CN216286129U (en) | Laser projection device | |
| KR20030088519A (en) | Pattern forming apparatus for light guide panel | |
| KR20050076732A (en) | Fine pattern observation apparatus and fine pattern correction apparatus using the same | |
| KR20090078520A (en) | Device for supporting substrate and apparatus for inspecting substrate with it | |
| JP2006258697A (en) | Substrate inspection device | |
| JP6575292B2 (en) | Light irradiation device | |
| CN110658653B (en) | Optical alignment device and method | |
| CN211785180U (en) | Automatic optical detection equipment for backlight source | |
| CN212540943U (en) | Light source maintenance device, polarized light irradiation system and optical alignment equipment |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |