CN210108025U - Electrode plate coating sintering furnace hearth with strong convection function - Google Patents
Electrode plate coating sintering furnace hearth with strong convection function Download PDFInfo
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- CN210108025U CN210108025U CN201920390695.7U CN201920390695U CN210108025U CN 210108025 U CN210108025 U CN 210108025U CN 201920390695 U CN201920390695 U CN 201920390695U CN 210108025 U CN210108025 U CN 210108025U
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Abstract
The utility model provides a plate electrode coating sintering furnace hearth with strong convection function, which comprises a hearth body, wherein a hearth channel penetrating through the hearth body is arranged on the hearth body; a wind wheel, a motor and an air outlet are arranged at the top of the hearth body, and the wind wheel and the air outlet are both positioned in the air return area; furnace body inner wall, furnace passageway outer wall, return air board outer wall form the zone of heating, and furnace passageway top is equipped with a plurality of through-holes and makes furnace passageway and return air district intercommunication, and furnace passageway both sides wall below is equipped with a plurality of No. two through-holes and makes furnace passageway and the zone of heating intercommunication, is equipped with a plurality of No. three through-holes on the return air board and makes the return air district and the zone of heating intercommunication. Set up return air district and zone of heating between furnace passageway and furnace body in this practicality and make external cold air send into the zone of heating and divide into about the heating back and get into the furnace passageway, outside this external with waste gas discharge furnace through the convection current.
Description
Technical Field
The utility model belongs to electrode plate fritting furnace field especially relates to an electrode plate coating fritting furnace with strong convection current function.
Background
The hot air circulation sintering furnace is a key device for producing the electrode plate, and the performance index of the hot air circulation sintering furnace is directly related to the yield of the electrode plate and the production efficiency. In the whole production process flow of the electrode plate, three processes of slurry coating, drying and sintering are the most important, wherein sintering is a crucial step. Therefore, the quality of the sintering equipment directly affects the quality of the electrode plate.
And the sintering furnace among the prior art is opened the door and is closed the time thermal shock nature big, and the air current convection current is little, temperature distribution inhomogeneous leads to sintering speed slow and the waste gas that produces in the sintering process is detained in the sintering furnace, and is big to the pollution of electrode plate substrate.
SUMMERY OF THE UTILITY MODEL
Utility model purpose: an object of the utility model is to provide a plate electrode coating fritting furnace with strong convection current function.
The utility model discloses an innovation point lies in the utility model discloses in make external cold air send into the zone of heating by the wind wheel through set up the return air district and the zone of heating between furnace passageway and furnace body, divide into about by the heating back two strands and get into the furnace passageway, carry the waste gas that sintering process produced to the return air district through the convection current outside the air exit discharge furnace body. Through the forced hot air convection circulation, the waste gas in the hearth body is discharged in a directional and orderly manner, and the pollution to the substrate is reduced. The hot air entering from the two sides of the hearth channel ingeniously utilizes the convection stirring effect to make the temperature distribution more uniform.
The technical scheme is as follows: in order to achieve the above object, the present invention specifically provides a method for manufacturing a semiconductor device, comprising: the electrode plate coating sintering furnace hearth with the strong convection function comprises a hearth body, wherein the hearth body is of a cuboid structure, a hearth channel penetrating through the length direction of the hearth body is arranged on the hearth body, and doors are arranged at two ends of the hearth channel; two return air plates parallel to the length direction of the hearth body are arranged between the top of the hearth channel and the top of the hearth body, a return air area is formed by the top of the hearth body, the return air plates and the top of the hearth channel, a wind wheel, a motor for driving the wind wheel and an air outlet are arranged at the top of the hearth body, and the wind wheel and the air outlet are both positioned in the return air area; furnace body inner wall, furnace passageway outer wall, return air board outer wall form the zone of heating, are equipped with a plurality of heating pipes in the zone of heating, and furnace passageway top is equipped with a plurality of through-holes and makes furnace passageway and return air district intercommunication, and furnace passageway both sides wall below is equipped with a plurality of No. two through-holes and makes furnace passageway and zone of heating intercommunication, is equipped with a plurality of No. three through-holes on the return air board and makes return air district and zone of heating intercommunication. Set up the return air district and the zone of heating between furnace passageway and furnace body and make external cold air send into the zone of heating by the wind wheel, divide into about by the heating back two strands and get into the furnace passageway, carry the waste gas that produces the sintering process to the return air district through the air exit discharge furnace body internal through the convection current. Through the forced hot air convection circulation, the waste gas in the hearth body is discharged in a directional and orderly manner, and the pollution to the substrate is reduced. Hot air entering from two sides of the hearth channel ingeniously utilizes the convection stirring effect to enable the temperature distribution to be more uniform; because the heat in the heating pipe heating area is little after the doors on the two sides of the hearth channel are opened.
Furthermore, a plurality of partition plates parallel to the air return plate are arranged in the air return area to partition the air return area into four areas, the four areas are respectively a hot air circulating pressurization area, a hot air backflow gathering area and two hot air uniform distribution areas, the hot air circulating pressurization area is located above the hot air backflow gathering area, the two hot air uniform distribution areas are respectively located on two sides of the hot air circulating pressurization area, the third through hole is located at the hot air uniform distribution area, and a plurality of air flow through holes are formed in the partition plates. The cold air enters the hot air circulation pressurizing area and then enters the hot air uniform distribution area under the action of the wind wheel, enters the hot air uniform distribution area and then is heated in the heating area, the heated hot air enters the hearth channel, after the electrode plate is sintered in the hearth channel, the heated hot air enters the hot air backflow gathering area and then flows into the hot air circulation pressurizing area to be gathered, and then the gathered hot air is discharged through the air outlet to form a hot air circulation channel.
Furthermore, the air return plates at the two hot air distribution areas are folded plates bent towards the heating area, and the third through hole is formed in the lower bending plate of the folded plate. The air in the hot air uniform distribution area can flow into the heating area more favorably.
Further, the wind wheel is a titanium alloy wind wheel, and the heating pipe is a titanium alloy heating pipe.
Furthermore, a chain conveying device is arranged at the bottom of the hearth channel and comprises two chain wheel shafts which are arranged in parallel, chain conveying chain wheels are arranged at two ends of each chain wheel shaft, the chain conveying chain wheels at the same side ends of the two chain wheel shafts are connected through an annular conveying chain, and the two chain wheel shafts are respectively arranged at two ends of the hearth channel; the hearth channel and the hearth body are provided with bearing holes, the bearing holes in the hearth body are provided with bearing supports, the chain wheel shaft is fixed in the bearing supports through bearings, and the chain wheel shaft at one end is driven by a motor. The electrode plate is conveniently conveyed to the inside of the hearth.
Further, the annular conveying chain is divided into an upper layer chain and a lower layer chain; the lower sides of the upper-layer chain and the lower-layer chain are provided with uniform chain supporting rails, and U-shaped supporting plates are arranged between the upper-layer chains on two sides. The use of the U-shaped supporting plate ensures that the temperature in the hearth channel is not easy to overflow from the chain conveying device.
Further, the door is the overhead door, and overhead door top both ends are equipped with the lift gate chain, and lift gate chain one end and overhead door top both ends are connected, and the other end is connected with the cylinder, and the overhead door bottom is equipped with 2U type notches that supply chain transmission device to pass.
Furthermore, a plurality of convex blocks are arranged on two sides of the lifting door, a channel parallel to the height direction of the hearth body is arranged on the hearth body, and the convex blocks slide in the channel.
Furthermore, the heating pipe stretches out of the top of the hearth body, and a heating pipe protection cover is arranged at the top of the heating pipe.
Further, a heat insulation layer is arranged in the wall body of the hearth body.
The utility model has the advantages that: compared with the prior art, the utility model has the advantages of as follows:
1. the utility model discloses in set up the return air district and the zone of heating between furnace passageway and furnace body and make external cold air send into the zone of heating by the wind wheel, divide into about by the heating back two strands and get into the furnace passageway, carry the waste gas that sintering process produced to the return air district through the convection current outside the air exit discharge furnace body. Through the forced hot air convection circulation, the waste gas in the hearth body is discharged in a directional and orderly manner, and the pollution to the substrate is reduced.
2. The utility model discloses the hot-air that well furnace passageway both sides got into utilizes the convection stirring effect ingeniously, makes temperature distribution more even.
3. The utility model discloses in because the zone of heating separates with the furnace passageway, the heating pipe is located the zone of heating, and the door of furnace passageway both sides is opened the inside heat of back furnace body and is swung for a short time.
Drawings
Fig. 1 is a schematic structural view of embodiment 1.
FIG. 2 is a sectional view of example 1.
Fig. 3 is a schematic view of the lift gate of embodiment 1.
Detailed Description
Example 1: the electrode plate coating sintering furnace hearth with the strong convection function comprises a hearth body 1, wherein a heat insulation layer is arranged in the wall body of the hearth body 1, the hearth body 1 is of a cuboid structure, a hearth channel 2 penetrating through the length direction of the hearth body 1 is arranged on the hearth body, and doors 3 are arranged at two ends of the hearth channel 2; the door 3 is a lifting door, two return air plates 4 parallel to the length direction of the hearth body are arranged between the top of the hearth channel 2 and the top of the hearth body 1, a return air area 5 is formed by the top of the hearth body 1, the return air plates 4 and the top of the hearth channel 2, a wind wheel 6, a motor 7 for driving the wind wheel and an air outlet 8 are arranged at the top of the hearth body 1, the wind wheel 6 and the air outlet 8 are both positioned in the return air area 5, and the wind wheel 6 is a titanium alloy wind wheel; the heating zone 9 is formed by the inner wall of the hearth body 1, the outer wall of the hearth channel 2 and the outer wall of the return air plate 4, a plurality of heating pipes 10 are arranged in the heating zone 9, the heating pipes 10 are titanium alloy heating pipes, the heating pipes 10 extend out of the top of the hearth body 1, and a heating pipe protection cover 23 is arranged at the top of each heating pipe 10. The top of the hearth channel 2 is provided with a plurality of through holes for communicating the hearth channel 2 with the air return area 5, a plurality of through holes for communicating the hearth channel 2 with the heating area 9 are arranged below the two side walls of the hearth channel 2, and a plurality of through holes for communicating the air return area 5 with the heating area 9 are arranged on the air return plate 4. The air return area 5 is internally provided with a plurality of division plates parallel to the air return plate 4 to divide the air return area into four areas, the four areas are respectively a hot air circulation pressurizing area 11, a hot air backflow gathering area 12 and two hot air uniform distribution areas 13, the hot air circulation pressurizing area 11 is positioned above the hot air backflow gathering area 12, the two hot air uniform distribution areas 13 are respectively positioned at two sides of the hot air circulation pressurizing area 11, three through holes are positioned at the hot air uniform distribution areas 13, the division plates are provided with a plurality of air flow through holes, the air return plate 4 at the two hot air uniform distribution areas 13 is a folded plate bent towards the heating area 9, and the three through holes are positioned on a lower bending plate of the folded plate. The bottom of furnace passageway 2 is equipped with chain conveyor 14, chain conveyor 14 includes two parallel arrangement's sprocket shaft 15, the sprocket shaft both ends all are provided with chain conveying sprocket, the chain conveying sprocket of two sprocket shafts with the side all connects through annular conveying chain 16, annular conveying chain 16 divide into upper chain 16.1 and lower floor's chain 16.2, upper chain 16.1, lower floor's chain 16.2 below is equipped with equal chain and holds in the palm rail 17, still be equipped with U type layer board 18 between the upper chain 16.1 of both sides.
Two chain wheel shafts 15 are respectively arranged at two ends of the hearth channel 2; the hearth channel 2 and the hearth body 1 are provided with bearing holes, the bearing holes in the hearth body 1 are provided with bearing supports, the chain wheel shaft 15 is fixed in the bearing supports through bearings, and the chain wheel shaft 15 at one end is driven by a motor. 3 top both ends of overhead door are equipped with lifting door chain 19, and lifting door chain 19 one end and 3 top both ends of overhead door are connected, and the other end and cylinder 20 are connected, and 3 bottoms of overhead door are equipped with 2U type notches 21 that supply chain transmission device to pass, and 3 both sides of overhead door are equipped with a plurality of lugs 22, are equipped with the channel parallel with 1 direction of height of furnace body on the furnace body 1, and lug 22 slides in the channel.
Claims (10)
1. The electrode plate coating sintering furnace hearth with the strong convection function is characterized by comprising a hearth body, wherein the hearth body is of a cuboid structure, a hearth channel penetrating through the length direction of the hearth body is arranged on the hearth body, and doors are arranged at two ends of the hearth channel; two return air plates parallel to the length direction of the hearth body are arranged between the top of the hearth channel and the top of the hearth body, a return air area is formed by the top of the hearth body, the return air plates and the top of the hearth channel, a wind wheel, a motor for driving the wind wheel and an air outlet are arranged at the top of the hearth body, and the wind wheel and the air outlet are both positioned in the return air area; furnace body inner wall, furnace passageway outer wall, return air board outer wall form the zone of heating, are equipped with a plurality of heating pipes in the zone of heating, and furnace passageway top is equipped with a plurality of through-holes and makes furnace passageway and return air district intercommunication, and furnace passageway both sides wall below is equipped with a plurality of No. two through-holes and makes furnace passageway and zone of heating intercommunication, is equipped with a plurality of No. three through-holes on the return air board and makes return air district and zone of heating intercommunication.
2. The electrode plate coating sintering furnace hearth with strong convection function according to claim 1, wherein the return air zone is divided into four zones by a plurality of partition plates parallel to the return air plate, the four zones are respectively a hot air circulation pressurizing zone, a hot air reflux gathering zone and two hot air uniform distribution zones, the hot air circulation pressurizing zone is positioned above the hot air reflux gathering zone, the two hot air uniform distribution zones are respectively positioned at two sides of the hot air circulation pressurizing zone, the third through hole is positioned at the hot air uniform distribution zone, and the partition plates are provided with a plurality of air through holes.
3. The electrode plate coating sintering furnace hearth with the strong convection function according to claim 2, wherein the air return plates at the two hot air distribution areas are folded plates bent towards the heating area, and the third through holes are formed in the lower bent plates of the folded plates.
4. The electrode plate coating sintering furnace hearth with the strong convection function according to claim 1, wherein the wind wheel is a titanium alloy wind wheel, and the heating pipe is a titanium alloy heating pipe.
5. The electrode plate coating sintering furnace hearth with the strong convection function according to claim 1, wherein the bottom of the hearth channel is provided with a chain conveying device, the chain conveying device comprises two chain wheel shafts arranged in parallel, chain conveying chain wheels are arranged at two ends of each chain wheel shaft, the chain conveying chain wheels at the same side ends of the two chain wheel shafts are connected through an annular conveying chain, and the two chain wheel shafts are respectively arranged at two ends of the hearth channel; the hearth channel and the hearth body are provided with bearing holes, the bearing holes in the hearth body are provided with bearing supports, the chain wheel shaft is fixed in the bearing supports through bearings, and the chain wheel shaft at one end is driven by a motor.
6. The electrode plate coating sintering furnace hearth with strong convection function according to claim 5, wherein the endless conveyor chain is divided into an upper layer chain and a lower layer chain; the lower sides of the upper-layer chain and the lower-layer chain are provided with uniform chain supporting rails, and U-shaped supporting plates are arranged between the upper-layer chains on two sides.
7. The electrode plate coating sintering furnace hearth with strong convection function according to claim 5, wherein the door is a lift door, the top of the lift door is provided with lift door chains at both ends, one end of each lift door chain is connected with both ends of the top of the lift door, the other end of each lift door chain is connected with a cylinder, and the bottom of the lift door is provided with 2U-shaped notches for the chain transmission device to pass through.
8. The hearth of claim 7, wherein the elevating door has a plurality of protrusions on both sides thereof, and the hearth body has a groove parallel to the height direction of the hearth body, and the protrusions slide in the groove.
9. The electrode plate coating sintering furnace hearth with strong convection function according to claim 1, wherein the heating pipe extends out of the top of the hearth body, and the top of the heating pipe is provided with a heating pipe protecting cover.
10. The electrode plate coating sintering furnace hearth with strong convection function according to claim 1, wherein the hearth body wall is provided with an insulating layer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920390695.7U CN210108025U (en) | 2019-03-26 | 2019-03-26 | Electrode plate coating sintering furnace hearth with strong convection function |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201920390695.7U CN210108025U (en) | 2019-03-26 | 2019-03-26 | Electrode plate coating sintering furnace hearth with strong convection function |
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| CN210108025U true CN210108025U (en) | 2020-02-21 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109827434A (en) * | 2019-03-26 | 2019-05-31 | 宜兴市恩创环保有限公司 | Electrode plate coating sintering furnace burner hearth with strong convection function |
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- 2019-03-26 CN CN201920390695.7U patent/CN210108025U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109827434A (en) * | 2019-03-26 | 2019-05-31 | 宜兴市恩创环保有限公司 | Electrode plate coating sintering furnace burner hearth with strong convection function |
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