CN210100401U

CN210100401U - Wafer cutting equipment

Info

Publication number: CN210100401U
Application number: CN201821427667.XU
Authority: CN
Inventors: 王昌华
Original assignee: Jiangsu Ying Rui Semiconductor Co Ltd
Current assignee: Jiangsu Ying Rui Semiconductor Co Ltd
Priority date: 2018-08-31
Filing date: 2018-08-31
Publication date: 2020-02-21
Anticipated expiration: 2028-08-31

Abstract

The utility model relates to the technical field of semiconductor manufacturing accessories, in particular to a wafer cutting device which can enhance the powder cleaning effect; the operation is convenient for users; the operation speed is improved; the device comprises a cutting table, a clamping mechanism, an exhaust fan and an operating mechanism, wherein a first exhaust pipe is arranged above the cutting table; the device also comprises a conical collecting cover, a gravity dust removal box, a spoiler, an aggregation groove, a second exhaust pipe, a transition pipe, a third exhaust pipe, an upper fixing ring, a lower fixing ring, a group of upper supporting rods, a group of lower supporting rods, a filtering cloth bag, a drawing rod, a first connecting rod and a second connecting rod; the device also comprises an upper base, a lower base, a group of upper sliding blocks, a group of lower sliding blocks, a group of upper rolling balls, a group of lower rolling balls, an upper threaded rod, a lower threaded rod and a group of handles; still include gag lever post, rotary rod, left threaded rod and extension bar.

Description

Wafer cutting equipment

Technical Field

The utility model relates to a semiconductor manufacturing auxiliary device's technical field especially relates to a wafer cutting equipment.

Background

As is well known, a wafer dicing apparatus is an auxiliary apparatus for performing different-sized dicing on a wafer, and is widely used in the field of semiconductor manufacturing; the existing wafer cutting equipment comprises a cutting table, a clamping mechanism, an exhaust fan and an operating mechanism, wherein the clamping mechanism and the operating mechanism are both arranged on the side wall of the top of the cutting table; when the existing wafer cutting equipment is used, a user places the input end of a first exhaust pipe above a cutting table, clamps a wafer to be cut by using a clamping mechanism, then controls the cutting equipment to cut by using an operating mechanism, and enables an exhaust fan to be connected with an external power supply, and powder generated during cutting is extracted along the first exhaust pipe under the action of the suction force of the exhaust fan; the existing wafer cutting equipment is found to have poor powder cleaning effect during cutting and lower recycling rate; the clamping mechanism can not rotate along with the movement of a user, so that the use limitation is high; the operation mechanism is difficult to rotate, the operation speed is low, and the work efficiency is low.

SUMMERY OF THE UTILITY MODEL

In order to solve the technical problems, the utility model provides a powder cleaning effect is enhanced, and the recycling rate is improved; the operation of a user is convenient, and the use limitation is reduced; improve the operating speed, improve the wafer cutting equipment of work efficiency.

The utility model relates to a wafer cutting device, which comprises a cutting table, a clamping mechanism, an exhaust fan and an operating mechanism, wherein a first exhaust pipe is arranged above the cutting table; the device also comprises a conical collection cover, a gravity dust removal box, a spoiler, an aggregation groove, a second exhaust pipe, a transition pipe, a third exhaust pipe, an upper fixing ring, a lower fixing ring, a group of upper supporting rods, a group of lower supporting rods, a filtering cloth bag, a pull rod, a first connecting rod and a second connecting rod, wherein the central area of the conical collection cover is transversely provided with a collection hole, the bottom side wall of the conical collection cover is in contact with the top side wall of a cutting table, a pull cavity is arranged inside the cutting table, the right side wall of the cutting table is provided with a pull opening which is communicated with the pull cavity, the left side wall and the right side wall of the first connecting rod are respectively connected with the lower half area of the right side wall of the conical collection cover and the top of the left side wall of the second connecting rod, the bottom side wall of the second connecting rod is connected with the right end of the top side wall of the pull rod, the pull rod, the gravity dust removal box is internally provided with a dust removal cavity, the central areas of the left half area, the right half area and the bottom side wall of the top side wall of the gravity dust removal box are respectively provided with an air inlet, an air outlet and a transition port, the air inlet, the air outlet and the transition port are communicated with the dust removal cavity, the output end of the first exhaust pipe is hermetically arranged at the air inlet, the internal part of the aggregation groove is provided with an aggregation cavity, the central area of the top of the aggregation groove is provided with an aggregation port, the aggregation port is communicated with the aggregation cavity, the transition port is communicated with the aggregation port, the top side wall of the flow blocking plate is connected with the central area of the top side wall of the gravity dust removal box, the input end of the second exhaust pipe is hermetically arranged at the air outlet, the output end of the second exhaust pipe is communicated with the input end of the transition pipe, and the outer side walls of the upper fixing ring and, the top side wall and the bottom side wall of the group of upper supporting rods are respectively connected with the bottom side wall of the upper fixing ring and the top side wall of the lower fixing ring, the group of upper supporting rods are separated from the inner side wall of the transition pipe, a filter cavity is arranged in the filter cloth bag, a filter opening is formed in the top of the filter cloth bag and communicated with the filter cavity, the top of the outer side wall of the filter cloth bag is hermetically connected with the inner side wall of the upper fixing ring, the outer side wall of the group of upper supporting rods is connected with the outer side wall part of the filter cloth bag, the bottom of the outer side wall of the filter cloth bag is connected with the inner side wall part of the lower fixing ring, the input end and the output end of a third exhaust pipe are respectively communicated with the; the cutting table is characterized by further comprising an upper base, a lower base, a group of upper sliders, a group of lower sliders, a group of upper balls, a group of lower balls, an upper threaded rod, a lower threaded rod and a group of handles, wherein the bottom side walls of the group of lower sliders are respectively connected with the front half area and the rear half area of the top side wall of the cutting table, the central areas of the top side wall, the front side wall and the rear side wall of the group of lower sliders are respectively provided with a group of lower arc-shaped accommodating grooves, the bottom side wall of the upper base is respectively provided with a group of lower clamping grooves, the top side wall, the front side wall and the rear side wall of the group of lower clamping grooves are respectively provided with a group of upper arc-shaped accommodating grooves, the upper half areas of the upper slider are respectively inserted into the lower clamping grooves, the lower balls are respectively positioned in the lower arc-shaped accommodating grooves and the upper arc-shaped accommodating grooves, the right side wall and the top side wall are respectively provided with a group of lower arc-shaped containing grooves, the bottom side wall of the upper base is respectively provided with a group of upper clamping grooves, the upper half areas of the upper sliding blocks are respectively inserted into the upper clamping grooves, the central areas of the top side wall, the left side wall and the right side wall of the upper clamping grooves are respectively provided with a group of upper arc-shaped containing grooves, the group of upper balls are respectively positioned in the group of lower arc-shaped containing grooves and the group of upper arc-shaped containing grooves, the clamping mechanism is arranged on the top side wall of the upper base, a lower fixing hole is arranged in the central area of the lower base, an upper fixing hole is transversely arranged in the central area of the upper base, inner threads corresponding to the outer threads of the lower threaded rod and the upper threaded rod are respectively arranged on the inner side walls of the lower fixing hole and the upper fixing hole, the upper threaded rod and the lower threaded rod are respectively screwed through the upper fixing hole and the lower fixing hole, and the group of handles are respectively arranged on the left side wall of the upper threaded rod and the front side wall of the lower threaded rod; still include gag lever post, rotary rod, left threaded rod and extension bar, the lateral wall is connected with cutting bed top lateral wall left end at the bottom of the gag lever post, the inside rotatory chamber that is provided with of gag lever post, and gag lever post top lateral wall is provided with rotatory mouthful, and rotatory mouthful and rotatory chamber intercommunication, rotatory chamber top and bottom are provided with ball bearing and lower ball bearing respectively, ball bearing and lower ball bearing are passed to the rotary rod bottom to last ball bearing and lower ball bearing all with rotary rod key-type connection, gag lever post left side wall is provided with the locating hole, the inside internal thread corresponding with left threaded rod external screw thread that is provided with of locating hole, left side threaded rod spiral shell dress passes the locating hole, left side threaded rod left side wall is connected with extension bar right side wall bottom, and the lateral wall is connected at the bottom of rotary rod top lateral wall and operating device, and the lateral wall is connected at the bottom of.

The utility model discloses a wafer cutting equipment still includes the transparent plate, be provided with the viewing aperture on the gravity dust removal case left side wall, viewing aperture and dust removal chamber intercommunication, transparent plate sealing installation is in viewing aperture department.

The utility model discloses a wafer cutting equipment, transition pipe input end and output respectively with second exhaust column output and third exhaust column input flange joint.

The utility model discloses a wafer cutting equipment still includes the slipmat, the slipmat is installed on the extension bar lateral wall.

The utility model discloses a wafer cutting equipment still includes the visor, visor central zone vertically is provided with the protection hole, the rotary rod passes the visor, lateral wall and the contact of gag lever post top lateral wall at the bottom of the visor.

The utility model discloses a wafer cutting equipment still includes a set of anticreep limit baffle, a set of anticreep limit baffle is installed respectively under on the base a set of clamp groove top lateral wall and go up the base a set of clamp groove top lateral wall on.

The utility model discloses a wafer cutting equipment, the cover bottom lateral wall is the platykurtic is collected to the toper.

The utility model discloses a wafer cutting equipment still includes a set of outer limit baffle and interior limit baffle, a set of outer limit baffle is installed at cutting bed inside wall right-hand member, interior limit baffle right side wall and pull pole left side wall connection.

Compared with the prior art, the beneficial effects of the utility model are that: the conical collection cover is in contact with the top side wall of the cutting table, the pull rod is inserted into the cutting table and can move in the pull cavity, the first connecting rod and the pull rod are connected through the second connecting rod, the first connecting rod is connected with the conical collection cover, the first exhaust pipe is a hose, so that the position of the conical collection cover can be moved through the movement of the pull rod to adapt to the position change of a clamping mechanism, under the action of an exhaust fan, powder and massive waste generated by cutting move to a gravity dust removal box along the conical dust collection groove and the first exhaust pipe, the flow rate of the powder and the massive waste can be suddenly reduced and the flow direction of the powder and the massive waste can be changed under the action of a baffle and the gravity dust removal box, the massive waste and a part of the powder can pass through a transition port and an aggregation port to enter an aggregation groove due to heavier separation movement gas, the purpose of preliminary filtration is achieved, and a user regularly, the filtering effect is improved, the primarily filtered gas contains a small amount of powder and moves to the second exhaust pipe along the gas outlet and then moves to the transition pipe, the upper fixing ring is installed inside the transition pipe, and the top of the outer side wall of the filter cloth bag is hermetically installed on the inner side wall of the upper fixing ring, so that the gas can only enter the filter cavity along the filter opening of the filter cloth bag, the bottom of the filter cloth bag is partially connected with the lower fixing ring, and meanwhile, a group of support rods are connected with the outer side wall part of the filter cloth bag to effectively prevent the filter cloth bag from deforming, so that the gas can pass through the filter cloth bag from the side wall of the filter cloth bag, the filtering efficiency is improved, the powder is filtered out under the action of; the cutting bed rigidity, a set of lower slider is all installed on the cutting bed, and inside a set of lower slider inserted the lower base, a set of ball is located respectively under a set of between slider and the lower base down, a set of ball reduces the frictional force between a set of slider and the lower base down, the user can be convenient carry out left right direction with clamping mechanism and remove, a set of top shoe all is installed under on the base lateral wall, a set of top shoe is located respectively between a set of top shoe and the last base, a set of top shoe reduces the frictional force between a set of top shoe and the last base, the user can be convenient carry out fore-and-aft direction with clamping mechanism and remove, after the position control finishes, the user rotates the handle and makes threaded rod spiral shell dress pass down base half region before and threaded rod rear side wall and lateral wall front and lateral wall in front of lower slider, thereby the position threaded rod of base can be fixed down, the user rotates the handle and makes threaded rod dress pass base half region and right side wall and top The upper base is tightly contacted, so that the position of the upper base is fixed, the operation of a user is facilitated, and the use limitation is reduced; the gag lever post is installed on the cutting bed, be provided with ball bearing and lower roller bearing in the gag lever post rotatory intracavity, and go up ball bearing and ball bearing lateral wall down and all be connected with the gag lever post inside wall, the rotary rod is connected with last ball bearing and ball bearing key-type down, and the bottom of the rotary rod lateral wall is not connected with gag lever post inner bottom lateral wall, thereby the rotary rod is under last ball bearing and lower ball bearing's effect, the rotary rod can use self central line to rotate as the center pin, after angle modulation finishes, the user grasps extension rod rotation left threaded rod, make left threaded rod and rotary rod lateral wall decryption contact, thereby the angle of rotary rod is fixed, and the operation speed is increased, and the work efficiency is improved.

Drawings

Fig. 1 is a schematic structural diagram of the present invention;

FIG. 2 is an enlarged view of a portion A of FIG. 1;

FIG. 3 is a schematic bottom view of the attachment of the lower retaining ring to the set of lower support rods;

FIG. 4 is a right side view of the connection of the cutting table, the lower base, the set of lower balls, the set of lower sliders, the set of anti-drop limit plates, the lower threaded rod and the handle;

FIG. 5 is a partial enlarged view of portion B of FIG. 1;

in the drawings, the reference numbers: 1. cutting table; 2. a clamping mechanism; 3. an exhaust fan; 4. an operating mechanism; 5. a first exhaust pipe; 6. a conical collection hood; 7. a gravity dust removal box; 8. a spoiler; 9. An accumulation tank; 10. a second exhaust pipe; 11. a transition duct; 12. a third exhaust pipe; 13. an upper fixing ring; 14. a lower fixing ring; 15. an upper support rod; 16. a lower support bar; 17. a filter cloth bag; 18. a pull rod; 19. a first connecting rod; 20. a second connecting rod; 21. an upper base; 22. A lower base; 23. an upper slide block; 24. a lower slide block; 25. upper rolling balls; 26. a lower ball; 27. An upper threaded rod; 28. a lower threaded rod; 29. a handle; 30. a limiting rod; 31. rotating the rod; 32. A left threaded rod; 33. lengthening a rod; 34. an upper ball bearing; 35. a lower ball bearing; 36. a transparent plate; 37. a non-slip mat; 38. a protective cover; 39. an anti-drop limit baffle; 40. an outer limit baffle; 41. an inner limit baffle.

Detailed Description

The following detailed description of the embodiments of the present invention is provided with reference to the accompanying drawings and examples. The following examples are intended to illustrate the invention, but are not intended to limit the scope of the invention.

As shown in fig. 1 to 5, the wafer cutting apparatus of the present invention comprises a cutting table 1, a clamping mechanism 2, an exhaust fan 3 and an operating mechanism 4, wherein a first exhaust pipe 5 is arranged above the cutting table; the device also comprises a conical collection cover 6, a gravity dust removal box 7, a spoiler 8, an aggregation groove 9, a second exhaust pipe 10, a transition pipe 11, a third exhaust pipe 12, an upper fixing ring 13, a lower fixing ring 14, a group of upper support rods 15, a group of lower support rods 16, a filter cloth bag 17, a pull rod 18, a first connecting rod 19 and a second connecting rod 20, wherein the central area of the conical collection cover is transversely provided with a collection hole, the bottom side wall of the conical collection cover is in contact with the top side wall of the cutting table, a pull cavity is arranged inside the cutting table, the right side wall of the cutting table is provided with a pull opening, the pull opening is communicated with the pull cavity, the left side wall and the right side wall of the first connecting rod are respectively connected with the lower half area of the right side wall of the conical collection cover and the top of the left side wall of the second connecting rod, the bottom side wall of the second connecting rod is connected with the top right side wall of, the gravity dust removal box is internally provided with a dust removal cavity, the central areas of the left half area, the right side wall top and the bottom side wall of the top side wall of the gravity dust removal box are respectively provided with an air inlet, an air outlet and a transition port, the air inlet, the air outlet and the transition port are communicated with the dust removal cavity, the output end of a first exhaust pipe is hermetically arranged at the air inlet, the central area of the top of an aggregation groove is provided with an aggregation port which is communicated with the aggregation cavity, the aggregation groove is screwed to the bottom of the gravity dust removal box and is communicated with the aggregation port, the top side wall of a choke plate is connected with the central area of the top side wall of the gravity dust removal box, the input end of a second exhaust pipe is hermetically arranged at the air outlet, the output end of the second exhaust pipe is communicated with the input end of a transition pipe, the outer side walls of an upper fixing ring and a lower fixing ring are respectively connected with the upper half area and the lower half area of the inner side, the group of upper support rods are separated from the inner side wall of the transition pipe, a filter cavity is arranged in the filter cloth bag, a filter opening is formed in the top of the filter cloth bag and communicated with the filter cavity, the top of the outer side wall of the filter cloth bag is hermetically connected with the inner side wall of the upper fixing ring, the group of outer side walls of the upper support rods are connected with the outer side wall of the filter cloth bag, the bottom of the outer side wall of the filter cloth bag is connected with the inner side wall of the lower fixing ring, the input end and the output end of a third exhaust pipe are respectively communicated with the output end of a second exhaust pipe and the input end of an exhaust fan; the cutting table further comprises an upper base 21, a lower base 22, a group of upper sliders 23, a group of lower sliders 24, a group of upper balls 25, a group of lower balls 26, an upper threaded rod 27, a lower threaded rod 28 and a group of handles 29, wherein the bottom side walls of the group of lower sliders are respectively connected with the front half area and the rear half area of the top side wall of the cutting table, the central areas of the top side wall, the front side wall and the rear side wall of the group of lower sliders are respectively provided with a group of lower arc-shaped accommodating grooves, the bottom side wall of the upper base is respectively provided with a group of lower clamping grooves, the top side wall, the front side wall and the rear side wall of the group of lower clamping grooves are respectively provided with a group of upper arc-shaped accommodating grooves, the upper half area of the group of lower sliders is respectively inserted into the group of lower clamping grooves, the group of lower balls are respectively positioned in the group of lower arc, The right side wall and the top side wall are respectively provided with a group of lower arc-shaped containing grooves, the bottom side wall of the upper base is respectively provided with a group of upper clamping grooves, the upper half areas of the group of upper sliding blocks are respectively inserted into the group of upper clamping grooves, the top side wall of the group of upper clamping grooves, a group of upper arc-shaped containing grooves are respectively arranged in the central areas of the left side wall and the right side wall, a group of upper balls are respectively positioned in a group of lower arc-shaped containing grooves and a group of upper arc-shaped containing grooves, the clamping mechanism is arranged on the top side wall of the upper base, a lower fixing hole is arranged in the central area of the lower base, an upper fixing hole is transversely arranged in the central area of the upper base, internal threads corresponding to external threads of a lower threaded rod and an upper threaded rod are respectively arranged on the inner side walls of the lower fixing hole and the upper fixing hole, the upper threaded rod and the lower threaded rod respectively penetrate through the upper fixing hole and the lower fixing hole in a threaded manner, and a group of handles; the cutting table is characterized by further comprising a limiting rod 30, a rotating rod 31, a left threaded rod 32 and an extension rod 33, wherein the bottom side wall of the limiting rod is connected with the left end of the top side wall of the cutting table, a rotating cavity is formed in the limiting rod, a rotating port is formed in the top side wall of the limiting rod and is communicated with the rotating cavity, an upper ball bearing 34 and a lower ball bearing 35 are respectively arranged at the top and the bottom of the rotating cavity, the bottom end of the rotating rod penetrates through the upper ball bearing and the lower ball bearing, the upper ball bearing and the lower ball bearing are both in key connection with the rotating rod, a positioning hole is formed in the left side wall of the limiting rod, internal threads corresponding to external threads of the left threaded rod are formed in the positioning hole, a left threaded rod penetrates; the conical collecting cover is in contact with the top side wall of the cutting table, the pulling rod is inserted into the cutting table and can move in the pulling cavity, the first connecting rod and the pulling rod are connected through the second connecting rod, the first connecting rod is connected with the conical collecting cover, the first exhaust pipe is a hose, so that the position of the conical collecting cover can be moved through the pulling rod to adapt to the position change of the clamping mechanism, under the action of an exhaust fan, powder and massive waste generated by cutting move to the gravity dust box along the conical dust collecting groove and the first exhaust pipe, the flow rate of the powder and the massive waste can be suddenly reduced and the flow direction of the powder and the massive waste can be changed under the action of the flow baffle and the gravity dust box, the massive waste and a part of the powder pass through the transition port and the gathering port due to heavy separation motion gas to enter the gathering groove, the purpose of preliminary filtering is achieved, and a user regularly opens the conical collecting cover to, the filtering effect is improved, the primarily filtered gas contains a small amount of powder and moves to the second exhaust pipe along the gas outlet and then moves to the transition pipe, the upper fixing ring is installed inside the transition pipe, and the top of the outer side wall of the filter cloth bag is hermetically installed on the inner side wall of the upper fixing ring, so that the gas can only enter the filter cavity along the filter opening of the filter cloth bag, the bottom of the filter cloth bag is partially connected with the lower fixing ring, and meanwhile, a group of support rods are connected with the outer side wall part of the filter cloth bag to effectively prevent the filter cloth bag from deforming, so that the gas can pass through the filter cloth bag from the side wall of the filter cloth bag, the filtering efficiency is improved, the powder is filtered out under the action of; the cutting bed rigidity, a set of lower slider is all installed on the cutting bed, and inside a set of lower slider inserted the lower base, a set of ball is located respectively under a set of between slider and the lower base down, a set of ball reduces the frictional force between a set of slider and the lower base down, the user can be convenient carry out left right direction with clamping mechanism and remove, a set of top shoe all is installed under on the base lateral wall, a set of top shoe is located respectively between a set of top shoe and the last base, a set of top shoe reduces the frictional force between a set of top shoe and the last base, the user can be convenient carry out fore-and-aft direction with clamping mechanism and remove, after the position control finishes, the user rotates the handle and makes threaded rod spiral shell dress pass down base half region before and threaded rod rear side wall and lateral wall front and lateral wall in front of lower slider, thereby the position threaded rod of base can be fixed down, the user rotates the handle and makes threaded rod dress pass base half region and right side wall and top The upper base is tightly contacted, so that the position of the upper base is fixed, the operation of a user is facilitated, and the use limitation is reduced; the gag lever post is installed on the cutting bed, be provided with ball bearing and lower roller bearing in the gag lever post rotatory intracavity, and go up ball bearing and ball bearing lateral wall down and all be connected with the gag lever post inside wall, the rotary rod is connected with last ball bearing and ball bearing key-type down, and the bottom of the rotary rod lateral wall is not connected with gag lever post inner bottom lateral wall, thereby the rotary rod is under last ball bearing and lower ball bearing's effect, the rotary rod can use self central line to rotate as the center pin, after angle modulation finishes, the user grasps extension rod rotation left threaded rod, make left threaded rod and rotary rod lateral wall decryption contact, thereby the angle of rotary rod is fixed, and the operation speed is increased, and the work efficiency is improved.

The utility model discloses a wafer cutting equipment, still include the transparent plate 36, the left side wall of the gravity dust removal box is provided with the viewing aperture, the viewing aperture is communicated with the dust removal cavity, the transparent plate is sealed and installed at the viewing aperture; the user can observe the working state in the gravity dust removal box through the transparent plate.

The utility model discloses a wafer cutting equipment, transition pipe input end and output end respectively with second exhaust column output end and third exhaust column input end flange joint; the input end and the output end of the transition pipe are respectively in flange connection with the output end of the second exhaust pipe and the input end of the third exhaust pipe, and a user can conveniently detach the filter cloth bag.

The utility model discloses a wafer cutting device, which also comprises a non-slip mat 37, wherein the non-slip mat is arranged on the outer side wall of the extension bar; the non-slip mat increases the frictional force between the user and the extension bar, and the user can rotate the extension bar conveniently.

The utility model discloses a wafer cutting equipment, still include visor 38, the central zone of visor has protecting holes longitudinally, the rotating rod passes the visor, the sidewall of visor bottom contacts with sidewall of the top of the stop lever; the visor can hinder external impurity and get into ball bearing, improves stability in use.

The utility model discloses a wafer cutting equipment, still include a set of anticreep limit baffle 39, a set of anticreep limit baffle is installed respectively on a set of lower clamping groove top lateral wall of lower base and a set of upper base clamp groove top lateral wall; a set of anticreep limit baffle hinders a set of ball and a set of ball drop down.

The utility model relates to a wafer cutting device, the side wall of the bottom of a conical collecting cover is flat; the side wall of the bottom of the conical collecting cover is flat, so that powder and large waste materials can enter the first exhaust pipe conveniently.

The utility model discloses a wafer cutting equipment, still include a set of outer limit baffle 40 and interior limit baffle 41, a set of outer limit baffle is installed at the cutting bed inside wall right-hand member, interior limit baffle right side wall and pull pole left side wall connection; a set of outer limit baffle and interior limit baffle hinder the pull pole and break away from the cutting bed, improve stability in use.

The utility model discloses a wafer cutting equipment, the cover is collected to the toper contacts with cutting bed topside wall, the pull pole inserts in the cutting bed, the pull pole can move in the pull intracavity, a set of outer limit baffle and interior limit baffle hinder the pull pole to break away from the cutting bed, the second connecting rod connects first connecting rod and pull pole, first connecting rod and toper are collected the cover and are connected, first exhaust column is the hose, thereby can move the position of toper collection cover through moving the pull pole, so adapt to clamping mechanism position change, under the effect of air exhauster, the powder and the bold waste material that produce in the cutting move to gravity dust removal case along toper dust collecting tank, first exhaust column, toper collection cover bottom side wall is the platykurtic and makes things convenient for powder and bold waste material to get into first exhaust column, powder and bold waste material can reduce the velocity of flow suddenly and change the flow direction under spoiler and gravity dust removal case's effect, the user can observe the working state in the gravity dust removal box through the transparent plate, massive waste and part of powder pass through the transition port and the gathering port to enter the gathering tank due to heavier movement-free gas, the purpose of primary filtration is achieved, the user regularly opens the conical collection cover to clean the powder and the massive waste in the box, the filtering effect is improved, the gas subjected to primary filtration contains a small amount of powder and moves to the second exhaust pipe along the gas outlet, then the gas moves to the transition pipe, the upper fixing ring is installed in the transition pipe, the top of the outer side wall of the filter cloth bag is hermetically installed on the inner side wall of the upper fixing ring, so that the gas can only enter the filter cavity along the filter cloth bag filter port, the bottom of the filter cloth bag is partially connected with the lower fixing ring, meanwhile, a group of support rods is connected with the outer side wall of the filter cloth bag, the filtering efficiency is improved, powder is filtered out under the action of the filtering cloth bag, clean gas is discharged through a third exhaust pipe and an exhaust fan, the input end and the output end of a transition pipe are respectively connected with the output end of the second exhaust pipe and the input end of the third exhaust pipe in a flange mode, a user can conveniently detach the filtering cloth bag, the position of a cutting table is fixed, a group of lower sliding blocks are all installed on the cutting table, a group of lower sliding blocks are inserted into the lower base, a group of lower rolling balls are respectively located between a group of lower sliding blocks and the lower base, a group of lower rolling balls reduce the friction force between a group of lower sliding blocks and the lower base, the user can conveniently move a clamping mechanism in the left-right direction, a group of upper sliding blocks are all installed on the bottom side wall of the lower base, a group of upper rolling balls are respectively located between a group of upper sliding blocks and the upper base, a group of upper rolling balls reduce the friction force between, the user can conveniently move the clamping mechanism in the front-back direction, after the position adjustment is finished, the user rotates the handle to enable the lower threaded rod to penetrate through the front half area of the lower base and the rear side wall of the lower threaded rod to be in close contact with the front side wall of the lower sliding block, so that the position of the lower base can be fixed, the user rotates the handle to enable the upper threaded rod to penetrate through the left half area of the upper base and the right side wall of the lower threaded rod to be in close contact with the left side wall of the upper sliding block, so that the position of the upper base is fixed, the limiting rod is installed on the cutting table, the upper ball bearing and the lower roller bearing are arranged in the rotating cavity of the limiting rod, the outer side walls of the upper ball bearing and the lower ball bearing are both connected with the inner side wall of the limiting rod, the protective cover can prevent external impurities from entering the upper ball, thereby the rotary rod is under last ball bearing and lower ball bearing's effect, and the rotary rod can use self central line to rotate as the center pin, finishes the back when angle modulation, and the user grasps extension rod rotation left threaded rod, and the slipmat increases the frictional force between user and the extension rod, makes left threaded rod and rotary rod lateral wall decryption contact to the angle of rotary rod is fixed.

The utility model discloses a second connecting rod that wafer cutting equipment involved is flexible material, can stretch and buckle.

The foregoing is only a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, a plurality of modifications and variations can be made without departing from the technical principle of the present invention, and these modifications and variations should also be regarded as the protection scope of the present invention.

Claims

1. A wafer cutting device comprises a cutting table (1), a clamping mechanism (2), an exhaust fan (3) and an operating mechanism (4), wherein a first exhaust pipe (5) is arranged above the cutting table (1); the device is characterized by further comprising a conical collecting cover (6), a gravity dust removal box (7), a spoiler (8), an aggregation groove (9), a second exhaust pipe (10), a transition pipe (11), a third exhaust pipe (12), an upper fixing ring (13), a lower fixing ring (14), a group of upper support rods (15), a group of lower support rods (16), a filtering cloth bag (17), a pulling rod (18), a first connecting rod (19) and a second connecting rod (20), wherein the central area of the conical collecting cover (6) is transversely provided with a collecting hole, the bottom side wall of the conical collecting cover (6) is in contact with the top side wall of the cutting table (1), a pulling cavity is arranged inside the cutting table (1), the right side wall of the cutting table (1) is provided with a pulling opening which is communicated with the pulling cavity, the left side wall and the right side wall of the first connecting rod (19) are respectively connected with the lower half area of the right side wall of the conical collecting cover (6) and the top of the left side wall of the second, the bottom side wall of the second connecting rod (20) is connected with the right end of the top side wall of the drawing rod (18), the drawing rod (18) is inserted into a drawing cavity, the input end of the first exhaust pipe (5) is communicated with the right side wall of the conical collection cover (6), a dust removal cavity is arranged inside the gravity dust removal box (7), the left half area of the top side wall of the gravity dust removal box (7), the top of the right side wall and the central area of the bottom side wall are respectively provided with an air inlet, an air outlet and a transition port, the air inlet, the air outlet and the transition port are communicated with the dust removal cavity, the output end of the first exhaust pipe (5) is hermetically arranged at the air inlet, an aggregation cavity is arranged inside the aggregation groove (9), the central area of the top of the aggregation groove (9) is provided with an aggregation port, the aggregation port is communicated with the aggregation cavity, the aggregation groove (9) is screwed to the bottom of the gravity dust, the spoiler (8) top side wall is connected with the central area of the top side wall in the gravity dust removal box (7), the input end of the second exhaust pipe (10) is hermetically installed at the air outlet, the output end of the second exhaust pipe (10) is communicated with the input end of the transition pipe (11), the outer side walls of the upper fixing ring (13) and the lower fixing ring (14) are respectively connected with the upper half area and the lower half area of the inner side wall of the transition pipe (11), the top side wall and the bottom side wall of a group of upper supporting rods (15) are respectively connected with the bottom side wall and the top side wall of the lower fixing ring (14) of the upper fixing ring (13), a group of upper supporting rods (15) are separated from the inner side wall of the transition pipe (11), a filter cavity is arranged inside the filter bag (17), a filter opening is formed in the top of the filter bag (17), the filter opening is communicated with the filter cavity, and the top of the outer side, the outer side wall of the upper support rods (15) is connected with the outer side wall of the filtering cloth bag (17), the bottom of the outer side wall of the filtering cloth bag (17) is connected with the inner side wall of the lower fixing ring (14), the input end and the output end of the third exhaust pipe (12) are respectively communicated with the output end of the second exhaust pipe (10) and the input end of the exhaust fan (3), and the left end and the right end of the top side wall of the lower support rods (16) are connected with the inner side wall of the lower fixing ring (14); the cutting table further comprises an upper base (21), a lower base (22), a group of upper sliding blocks (23), a group of lower sliding blocks (24), a group of upper balls (25), a group of lower balls (26), an upper threaded rod (27), a lower threaded rod (28) and a group of handles (29), wherein the bottom side walls of the group of lower sliding blocks (24) are respectively connected with the front half area and the rear half area of the top side wall of the cutting table (1), the central areas of the top side wall, the front side wall and the rear side wall of the group of lower sliding blocks (24) are respectively provided with a group of lower arc-shaped placing grooves, the bottom side wall of the upper base (21) is respectively provided with a group of lower clamping grooves, the top side wall, the front side wall and the rear side wall of the group of lower clamping grooves are respectively provided with a group of upper arc-shaped placing grooves, the upper half areas of the group of lower sliding blocks (24) are respectively inserted into the group, the group of upper sliding blocks (23) are respectively arranged in a left half area and a right half area of a top side wall of a lower base (22), a group of lower arc-shaped containing grooves are respectively formed in the left side wall, the right side wall and the top side wall of the group of upper sliding blocks (23), a group of upper clamping grooves are respectively formed in the bottom side wall of the upper base (21), the upper half areas of the group of upper sliding blocks (23) are respectively inserted into the group of upper clamping grooves, a group of upper clamping grooves are respectively formed in the central areas of the top side wall, the left side wall and the right side wall of the group of upper clamping grooves, a group of upper balls (25) are respectively positioned in the group of lower arc-shaped containing grooves and the group of upper arc-shaped containing grooves, the clamping mechanism (2) is arranged on the top side wall of the upper base (21), a lower fixing hole is formed in the central area of the lower base (22), an upper fixing hole is transversely formed in the central area of the upper base (21), and a lower screw rod ( The upper threaded rod (27) and the lower threaded rod (28) are respectively screwed through the upper fixing hole and the lower fixing hole, and the group of handles (29) are respectively arranged on the left side wall of the upper threaded rod (27) and the front side wall of the lower threaded rod (28); the cutting table is characterized by further comprising a limiting rod (30), a rotating rod (31), a left threaded rod (32) and an extension rod (33), wherein the bottom side wall of the limiting rod (30) is connected with the left end of the top side wall of the cutting table (1), a rotating cavity is arranged inside the limiting rod (30), a rotating port is formed in the top side wall of the limiting rod (30), the rotating port is communicated with the rotating cavity, an upper ball bearing (34) and a lower ball bearing (35) are respectively arranged at the top and the bottom of the rotating cavity, the bottom end of the rotating rod (31) penetrates through the upper ball bearing (34) and the lower ball bearing (35), the upper ball bearing (34) and the lower ball bearing (35) are connected with the rotating rod (31) in a key mode, a positioning hole is formed in the left side wall of the limiting rod (30), an internal thread corresponding to the external thread of the left threaded rod (32) is arranged, the left side wall of the left threaded rod (32) is connected with the bottom of the right side wall of the extension rod (33), and the top side wall of the rotary rod (31) is connected with the bottom side wall of the operating mechanism (4).

2. The wafer cutting equipment as recited in claim 1, further comprising a transparent plate (36), wherein a viewing port is arranged on the left side wall of the gravity dust removal box (7), the viewing port is communicated with the dust removal cavity, and the transparent plate (36) is hermetically installed at the viewing port.

3. A wafer cutting apparatus as claimed in claim 2, characterized in that the input and output of the transition duct (11) are flanged to the output of the second exhaust duct (10) and to the input of the third exhaust duct (12), respectively.

4. A wafer cutting apparatus as claimed in claim 3, further comprising a non-slip pad (37), said non-slip pad (37) being mounted on an outer side wall of the extension bar (33).

5. The wafer cutting apparatus as set forth in claim 4, further comprising a protective cover (38), wherein a protective hole is longitudinally formed in a central region of the protective cover (38), the rotating rod (31) passes through the protective cover (38), and a bottom side wall of the protective cover (38) is in contact with a top side wall of the stopper rod (30).

6. The wafer cutting apparatus according to claim 5, further comprising a set of anti-slip limit baffles (39), wherein the set of anti-slip limit baffles (39) are respectively installed on a set of lower snap groove top side walls of the lower base (22) and a set of upper snap groove top side walls of the upper base (21).

7. Wafer cutting apparatus as in claim 6, characterized in that the bottom side wall of the conical collection hood (6) is flat.

8. Wafer cutting device according to claim 7, characterized in that it further comprises a set of outer limiting baffles (40) and inner limiting baffles (41), said set of outer limiting baffles (40) is mounted at the right end of the inner side wall of the cutting table (1), and the right side wall of the inner limiting baffles (41) is connected with the left side wall of the drawing rod (18).