CN210085622U - Heat recovery equipment for heating system of single crystal furnace - Google Patents
Heat recovery equipment for heating system of single crystal furnace Download PDFInfo
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- CN210085622U CN210085622U CN201920569760.2U CN201920569760U CN210085622U CN 210085622 U CN210085622 U CN 210085622U CN 201920569760 U CN201920569760 U CN 201920569760U CN 210085622 U CN210085622 U CN 210085622U
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Abstract
The utility model discloses a heat recovery device of a heating system of a single crystal furnace, which comprises a frame, wherein the upper surface of the frame is provided with a mounting plate, the upper surface of the mounting plate is provided with a gas filter box, the front side surface of the gas filter box is provided with a first outlet pipe, the first outlet pipe is connected with a conduit, the outer side surface of the first outlet pipe is provided with a third automatic exhaust valve, the conduit is connected with an air inlet connecting pipe through a bent pipe joint, the air inlet connecting pipe is connected with an air inlet arranged at the lower end of the outer side surface of a furnace body through a first clamp, the left side surface of the gas filter box is connected with an air outlet arranged at the outer side surface of the furnace body through a first air inlet pipe, the utility model collects heat in the working process of preparing crystals by the single crystal furnace, and re-conveys the collected heat into the device in the cooling process of the single crystal furnace, the utilization efficiency of energy is improved, the energy is saved, and the operation cost is reduced.
Description
Technical Field
The utility model relates to a heat recovery technical field specifically is a single crystal growing furnace heating system heat recovery equipment.
Background
In the process of preparing the monocrystalline silicon by adopting the single crystal furnace, a large amount of electric energy is consumed and converted into high temperature, a large amount of heat generated in the process of preparing the monocrystalline silicon by adopting the single crystal furnace is discharged by an exhaust system under most conditions, so that the loss of the large amount of heat is caused, and the heat cannot be effectively utilized, so that the great resource waste is caused, in the process of blowing out the single crystal furnace and cooling, the cooling temperature needs to be controlled, the heating system still needs to work in the process, and in the process, the heat loss is caused.
Disclosure of Invention
In order to solve the technical problem, the utility model provides a heat recovery device of single crystal growing furnace heating system carries through the hot air current in the pipeline to the furnace body, filters the hot air current in the filter box, and the hot air current after will filtering through the pipeline again carries into the furnace body.
In order to achieve the purpose, the utility model relates to a single crystal growing furnace heating system heat recovery equipment, which comprises a frame, the frame upper surface is provided with the mounting panel, the upper surface of mounting panel is provided with gas filter box, gas filter box's leading flank is provided with first outlet duct, first outlet duct and pipe connection, the lateral surface of first outlet duct is provided with third automatic exhaust valve, the pipe passes through the elbow fitting and takes over continuously with admitting air, the admission is taken over the pipe and is connected with the air inlet that sets up at the lateral surface lower extreme of furnace body through first clamp, gas filter box's left surface is connected with the gas outlet that sets up at the furnace body lateral surface through first intake pipe.
Furthermore, the upper surface of frame is provided with the mounting panel, and the lower surface of mounting panel is provided with first evacuation pump, and near first evacuation pump is provided with the second evacuation pump, and first evacuation pump passes through first evacuation pipe and links to each other with gas filter box.
Furthermore, the upper surface of the gas filtering box is provided with support columns which are uniformly distributed on the periphery, the upper surface of each support column is fixedly connected with the gas collecting box, the upper surface of the gas filtering box is provided with a vent pipe and is connected with the gas collecting box, and the outer side surface of the vent pipe is provided with a first automatic exhaust valve.
Furthermore, the gas collection box is connected with a second vacuum pump through a second vacuum tube, the front side surface of the gas collection box is connected with a guide tube, one side near the guide tube is provided with a second automatic exhaust valve, and the outer side surface of the gas collection box is provided with a pressure gauge.
Furthermore, the inner side surface of the gas filtering box is provided with three high-temperature-resistant filters, and the three high-temperature-resistant filters are uniformly arranged on the inner side surface of the gas filtering box.
Furthermore, the output ends of the first vacuum pump and the second vacuum pump are respectively and electrically connected with the input end of the external power supply.
Compared with the prior art, the utility model discloses a to thermal collection in the working process of single crystal growing furnace preparation crystal, after single crystal growing furnace preparation crystal, the device is carried into again to the heat of collecting in the cooling process of single crystal growing furnace, reduces the loss of energy, realizes the reuse of energy again, improves the utilization efficiency of energy, and the energy saving reduces the operation cost.
Drawings
FIG. 1 is a schematic structural view of the present invention;
fig. 2 is a front view of the present invention;
fig. 3 is a right side view of the present invention.
In the figure: the gas filter comprises a furnace body 1, a gas outlet 2, a first gas inlet pipe 3, a pressure gauge 4, a gas collection box 5, a support 6, a gas filter box 7, an installation plate 8, a frame 9, a second vacuumizing pipe 10, a bent pipe joint 11, a first gas outlet pipe 12, a third automatic exhaust valve 13, a guide pipe 14, a second automatic exhaust valve 15, a gas inlet connecting pipe 16, a first clamp 17, a first vacuumizing pipe 18, a first automatic exhaust valve 19, a first vacuumizing pump 20, a second vacuumizing pump 21 and a high-temperature-resistant filter 22.
Detailed Description
The present invention will be further described with reference to the following examples.
As shown in figures 1 to 3, the utility model provides a heat recovery device of a heating system of a single crystal furnace, which comprises a frame 9, wherein the upper surface of the frame 9 is provided with a mounting plate 8, the upper surface of the frame 9 is provided with the mounting plate 8, the lower surface of the mounting plate 8 is provided with a first vacuum pump 20, a second vacuum pump 21 is arranged near the first vacuum pump 20, the first vacuum pump 20 is connected with a gas filter box 7 through a first vacuum pump 18, the first vacuum pump 20 and the second vacuum pump 21 generate negative pressure to the gas collection box 5 and the gas filter box 7 in the working process, so that hot gas can rapidly enter the box body, the upper surface of the mounting plate 8 is provided with the gas filter box 7, the upper surface of the gas filter box 7 is provided with support columns 6 which are uniformly distributed on the periphery, the upper surface of the support columns 6 is fixedly connected with the gas collection box 5, the upper surface of the gas filter box 7 is provided with a, the outer side surface of the vent pipe is provided with a first automatic exhaust valve 19, hot air flow is controlled to enter the gas collecting box 5 through the first automatic exhaust valve 19, the gas collecting box 5 is connected with a second vacuum-pumping pump 21 through a second vacuum-pumping pipe 10, the front side surface of the gas collecting box 5 is connected with a guide pipe 14, one side near the guide pipe 14 is provided with a second automatic exhaust valve 15, the outer side surface of the gas collecting box 5 is provided with a pressure gauge 4 for detecting the pressure of the hot air flow in the gas collecting box 5, the inner side surface of the gas filtering box 7 is provided with three high temperature resistant filters 22, the three high temperature resistant filters 22 are uniformly arranged on the inner side surface of the gas filtering box 7 for filtering the hot air flow and eliminating impurities in the gas filtering box, the front side surface of the gas filtering box 7 is provided with a first hot air outlet pipe 12, the first air outlet pipe 12 is connected with the guide pipe, the pipe 14 passes through elbow fitting 11 and links to each other with the takeover 16 that admits air, and the takeover 16 that admits air is connected with the air inlet that sets up at the lateral surface lower extreme of furnace body 1 through first clamp 17, and the left surface of gas filter box 7 is connected with the gas outlet 2 that sets up at the lateral surface of furnace body 1 through first intake pipe 3, the output of first evacuation pump 20 and second evacuation pump 21 is connected with external power supply's input electricity respectively.
When in use: the external power supply is switched on, the first vacuum pump 20 and the second vacuum pump 21 start to work, the gas filter box 7 causes negative pressure, hot air flows into the gas filter box 7 through the first air inlet pipe 3, at the moment, the third automatic exhaust valve 13 and the second automatic exhaust valve 15 are closed, the first automatic exhaust valve 19 is opened, the gas collection box 5 is pumped into negative pressure due to the work of the second vacuum pump 21, the purified hot air flows automatically enter the gas collection box 5 due to the pressure effect, after the single crystal furnace is used for preparing crystals, and after the furnace is shut down and in a cold area, the second automatic exhaust valve 15 is opened, and the pressure is high due to the fact that more hot air flows are introduced into the gas collection box 5, the hot air flows enter the furnace body through a pipeline.
The utility model discloses a to thermal collection in the working process of single crystal growing furnace preparation crystal, after single crystal growing furnace preparation crystal, in the cooling process of single crystal growing furnace, with the heat of collecting re-transport feed in the device, reduce the loss of energy, realize the recycling of energy again, improve the utilization efficiency of energy, the energy saving reduces the operation cost.
Claims (6)
1. The utility model provides a single crystal growing furnace heating system heat recovery plant, which comprises a frame (9), a serial communication port, frame (9) upper surface is provided with mounting panel (8), the upper surface of mounting panel (8) is provided with gas filter box (7), the leading flank of gas filter box (7) is provided with first outlet duct (12), first outlet duct (12) are connected with pipe (14), the lateral surface of first outlet duct (12) is provided with third automatic exhaust valve (13), pipe (14) are passed through elbow fitting (11) and are connected with intake pipe (16), intake pipe (16) are connected with the air inlet that sets up at the lateral surface lower extreme of furnace body (1) through first clamp (17), the left surface of gas filter box (7) is connected with gas outlet (2) that set up at the lateral surface of furnace body (1) through first intake pipe (3).
2. The single crystal furnace heating system heat recovery equipment according to claim 1, characterized in that the upper surface of the frame (9) is provided with a mounting plate (8), the lower surface of the mounting plate (8) is provided with a first evacuation pump (20), a second evacuation pump (21) is arranged near the first evacuation pump (20), and the first evacuation pump (20) is connected with the gas filter box (7) through a first evacuation pipe (18).
3. The single crystal furnace heating system heat recovery device according to claim 1, wherein the upper surface of the gas filtering box (7) is provided with struts (6) which are uniformly distributed on the periphery, the upper surface of the strut (6) is fixedly connected with the gas collecting box (5), the upper surface of the gas filtering box (7) is provided with a vent pipe and is connected with the gas collecting box (5), and the outer side surface of the vent pipe is provided with a first automatic exhaust valve (19).
4. The single crystal furnace heating system heat recovery device according to claim 3, wherein the gas collection box (5) is connected with a second vacuum pump (21) through a second vacuum pump (10), the front side surface of the gas collection box (5) is connected with a guide pipe (14), a second automatic exhaust valve (15) is arranged on one side near the guide pipe (14), and the outer side surface of the gas collection box (5) is provided with a pressure gauge (4).
5. The single crystal furnace heating system heat recovery equipment according to claim 1, characterized in that the inner side surface of the gas filtering box (7) is provided with three high temperature resistant filters (22), and the three high temperature resistant filters (22) are uniformly arranged on the inner side surface of the gas filtering box (7).
6. The single crystal furnace heating system heat recovery equipment according to claim 2, wherein the output ends of the first evacuation pump (20) and the second evacuation pump (21) are respectively electrically connected with the input end of an external power supply.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920569760.2U CN210085622U (en) | 2019-04-24 | 2019-04-24 | Heat recovery equipment for heating system of single crystal furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920569760.2U CN210085622U (en) | 2019-04-24 | 2019-04-24 | Heat recovery equipment for heating system of single crystal furnace |
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| Publication Number | Publication Date |
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| CN210085622U true CN210085622U (en) | 2020-02-18 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201920569760.2U Active CN210085622U (en) | 2019-04-24 | 2019-04-24 | Heat recovery equipment for heating system of single crystal furnace |
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| CN (1) | CN210085622U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111663176A (en) * | 2020-06-18 | 2020-09-15 | 眉山博雅新材料有限公司 | Crystal growth method and device |
-
2019
- 2019-04-24 CN CN201920569760.2U patent/CN210085622U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111663176A (en) * | 2020-06-18 | 2020-09-15 | 眉山博雅新材料有限公司 | Crystal growth method and device |
| CN111663176B (en) * | 2020-06-18 | 2022-03-15 | 眉山博雅新材料股份有限公司 | Crystal growth method and device |
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