CN210065901U - Multilayer titanium film - Google Patents
Multilayer titanium film Download PDFInfo
- Publication number
- CN210065901U CN210065901U CN201920798909.4U CN201920798909U CN210065901U CN 210065901 U CN210065901 U CN 210065901U CN 201920798909 U CN201920798909 U CN 201920798909U CN 210065901 U CN210065901 U CN 210065901U
- Authority
- CN
- China
- Prior art keywords
- metal layer
- film
- thickness
- titanium
- plastic film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 title claims abstract description 82
- 239000010936 titanium Substances 0.000 title claims abstract description 82
- 229910052719 titanium Inorganic materials 0.000 title claims abstract description 82
- 229910052751 metal Inorganic materials 0.000 claims abstract description 107
- 239000002184 metal Substances 0.000 claims abstract description 107
- 239000002985 plastic film Substances 0.000 claims abstract description 41
- 229920006255 plastic film Polymers 0.000 claims abstract description 41
- 239000000463 material Substances 0.000 claims abstract description 35
- 229920000139 polyethylene terephthalate Polymers 0.000 claims description 12
- 239000004433 Thermoplastic polyurethane Substances 0.000 claims description 8
- 229920002803 thermoplastic polyurethane Polymers 0.000 claims description 8
- 239000004698 Polyethylene Substances 0.000 claims description 6
- 239000004743 Polypropylene Substances 0.000 claims description 6
- -1 polypropylene Polymers 0.000 claims description 6
- 239000004814 polyurethane Substances 0.000 claims description 6
- 239000004800 polyvinyl chloride Substances 0.000 claims description 6
- 229920000915 polyvinyl chloride Polymers 0.000 claims description 6
- 239000002253 acid Substances 0.000 claims description 5
- 229920000573 polyethylene Polymers 0.000 claims description 3
- 229920001155 polypropylene Polymers 0.000 claims description 3
- 229920002635 polyurethane Polymers 0.000 claims description 3
- 239000012528 membrane Substances 0.000 abstract description 10
- 238000004544 sputter deposition Methods 0.000 abstract description 8
- 239000010408 film Substances 0.000 description 98
- 239000010410 layer Substances 0.000 description 70
- 238000001755 magnetron sputter deposition Methods 0.000 description 51
- 239000000758 substrate Substances 0.000 description 29
- 238000004804 winding Methods 0.000 description 28
- 238000000034 method Methods 0.000 description 21
- 238000000137 annealing Methods 0.000 description 14
- 238000000576 coating method Methods 0.000 description 12
- 238000001816 cooling Methods 0.000 description 12
- 239000011248 coating agent Substances 0.000 description 10
- 239000002356 single layer Substances 0.000 description 9
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 8
- 230000008569 process Effects 0.000 description 7
- KKEYFWRCBNTPAC-UHFFFAOYSA-N Terephthalic acid Chemical compound OC(=O)C1=CC=C(C(O)=O)C=C1 KKEYFWRCBNTPAC-UHFFFAOYSA-N 0.000 description 6
- 239000007888 film coating Substances 0.000 description 5
- 238000009501 film coating Methods 0.000 description 5
- 238000010998 test method Methods 0.000 description 5
- 229910052786 argon Inorganic materials 0.000 description 4
- 238000004140 cleaning Methods 0.000 description 4
- 238000012360 testing method Methods 0.000 description 4
- 230000005540 biological transmission Effects 0.000 description 3
- 239000007789 gas Substances 0.000 description 3
- 238000002360 preparation method Methods 0.000 description 3
- 238000009864 tensile test Methods 0.000 description 3
- 229920002799 BoPET Polymers 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 239000002131 composite material Substances 0.000 description 2
- 238000005520 cutting process Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 238000013329 compounding Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000009713 electroplating Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000009776 industrial production Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000007735 ion beam assisted deposition Methods 0.000 description 1
- 238000007733 ion plating Methods 0.000 description 1
- 239000008204 material by function Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 238000003303 reheating Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Images
Landscapes
- Physical Vapour Deposition (AREA)
- Laminated Bodies (AREA)
Abstract
The utility model provides a multilayer titanium membrane, multilayer titanium membrane includes: the metal layer is attached to the base material, the base material is an insulating plastic film, and the thickness of the base material is 0.5-15 microns; the metal layers comprise a first metal layer, a second metal layer and a third metal layer, and the first metal layer, the second metal layer and the third metal layer are all realized by adopting metal titanium; the thickness of the first metal layer is 30-50 nm, and the first metal layer is attached to the base material insulating plastic film; the thickness of the second metal layer is 70-120 nm, and the second metal layer is attached to the first metal layer; the thickness of the third metal layer is 30-50 nm, and the third metal layer is attached to the second metal layer. The pure titanium multilayer film formed by three times of sputtering has the mechanical properties of high toughness, high tolerance and high stability of the common multilayer film.
Description
Technical Field
The utility model belongs to the technical field of novel material, especially, relate to a multilayer titanium membrane.
Background
With the rapid development of composite material technology, novel functional materials and devices are also developed towards miniaturization, integration and compounding, and the research and development of multilayer films are also the key direction of scientific research of novel materials. The multilayer film is a thin film material with alternately changed components or structures, which is formed by alternately depositing different materials. At present, multilayer films with high strength, high toughness, high resistance and high stability are prepared by methods such as ion plating, magnetron sputtering, ion beam assisted deposition, chemical vapor deposition, plasma enhanced chemical vapor deposition, electroplating and the like. The composite film with the multilayer structure shows a series of unique physical, chemical and mechanical properties due to the size, the quality and the particularity of an internal interface, can obviously improve the hardness, the toughness, the wear resistance and the high-temperature oxidation resistance of the surface of a material, effectively reduces the friction and the wear of the surface of the material, and prolongs the service life. Meanwhile, the mutual alternation of the multiple layers of films ensures that the films have a certain hole sealing effect, thereby improving the corrosion resistance of the multiple layers of films. The multi-layer film obviously improves the hardness and toughness of the film, and compared with a single-layer film, the stability and the wear resistance of the multi-layer film are obviously improved.
Titanium is a rare element, has good mechanical properties and strength, is widely applied to the fields of aviation, aerospace, vehicle engineering, biomedical engineering and the like, and a titanium film is mainly applied to the fields of vehicle engineering and biomedicine at present as an ultrathin titanium material. The existing titanium film generally adopts a normal-temperature direct-current magnetron sputtering method to deposit a pure titanium film on the surface of nickel-free stainless steel or other base materials, and a single-layer film is formed at one time; however, in some specific fields, if the thickness of the metallic titanium layer on the surface of the titanium film is in the nanometer level, the surface brittleness of the metallic film layer is increased, and the conductive stability of the metallic film layer is further affected. .
SUMMERY OF THE UTILITY MODEL
One of the purposes of the present invention is to overcome the problems of the prior art by providing a multi-layer titanium film with stronger toughness and more stable surface conductivity.
In order to achieve the above object, the present invention adopts a technical solution including the following aspects.
A multilayer titanium film comprising: the metal layer is attached to the base material, the base material is an insulating plastic film, and the thickness of the base material is 0.5-15 microns; the metal layers comprise a first metal layer, a second metal layer and a third metal layer, and the first metal layer, the second metal layer and the third metal layer are all realized by adopting metal titanium; the thickness of the first metal layer is 30-50 nm, and the first metal layer is attached to the base material insulating plastic film; the thickness of the second metal layer is 70-120 nm, and the second metal layer is attached to the first metal layer; the thickness of the third metal layer is 30-50 nm, and the third metal layer is attached to the second metal layer.
Furthermore, the thickness of the first metal layer is 40nm, the thickness of the second metal layer is 100nm, and the thickness of the third metal layer is 40 nm.
Furthermore, the insulating plastic film comprises a PP polypropylene plastic film, a PET polyterephthalic acid plastic film, a PVC polyvinyl chloride plastic film, a PE polyethylene plastic film, a PU polyurethane plastic film and a TPU thermoplastic polyurethane plastic film.
Furthermore, the insulating plastic layer adopts 1~6 um's PET to make the terephthalic acid plastic film realize, specifically, like 1.5 um's PET film, 4.55 um's PET film.
In conclusion, owing to adopted above-mentioned technical scheme, the utility model discloses following beneficial effect has at least:
the pure titanium multilayer film formed by three times of sputtering has the mechanical properties of high toughness, high tolerance and high stability of the common multilayer film, and the film has stronger toughness compared with a single-layer film with the same thickness through a thin-thick-thin structural form; when the material is applied to the field of biomedicine, the material not only has flexibility and toughness, but also has more stable conductivity.
Drawings
Fig. 1 is a schematic cross-sectional view of a multilayer titanium film according to an embodiment of the present invention.
Fig. 2 is a schematic flow chart of a method for preparing a multilayer titanium film according to an embodiment of the present invention.
Fig. 3 is a schematic cross-sectional view of a multilayer titanium film after an annealing process according to an embodiment of the present invention.
Fig. 4 is a schematic drawing of a tensile curve of a multilayer titanium film according to an embodiment of the present invention.
Fig. 5 is a schematic drawing of a tensile curve of a multilayer titanium film according to another embodiment of the present invention.
Fig. 6 is a schematic drawing of a tensile curve of a multilayer titanium film according to another embodiment of the present invention.
Detailed Description
The present invention will be described in further detail with reference to the accompanying drawings and embodiments, so that the objects, technical solutions and advantages of the present invention will be more clearly understood. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not intended to limit the invention.
The utility model relates to a multilayer titanium membrane, as shown in figure 1, include: the metal-clad plate comprises a base material 1 and a metal layer attached to the base material 1, wherein the base material is an insulating plastic film, and the thickness of the base material is 0.5-15 microns; the metal layers comprise a first metal layer 21, a second metal layer 22 and a third metal layer 23, and the first metal layer 21, the second metal layer 22 and the third metal layer 23 are all realized by adopting metal titanium; the thickness of the first metal layer 21 is 30-50 nm, and the first metal layer is attached to the base material insulating plastic film 1; the thickness of the second metal layer 22 is 70-120 nm, and the second metal layer 22 is attached to the first metal layer 21; the thickness of the third metal layer 23 is 30-50 nm, and the third metal layer 23 is attached to the second metal layer 22. The utility model discloses form the three-layer metal titanium layer of thin-thick-thin structural style on substrate 1 to form the density for dredging-dense-sparse gradual change formula multilayer film, compare in the same with current substrate, its toughness of the same individual layer titanium membrane of thickness is stronger, stability is higher, can stretch many times and convert into the combination that keeps between the metal titanium layer in the use, guarantee rete surface conductivity.
In the present invention, the thickness of the three metal titanium layers of the multi-layer titanium film is set to be thin-thick-thin, for example, the thickness of the first metal layer is 40nm, the thickness of the second metal layer is 100nm, and the thickness of the third metal layer is 40 nm. Or the thickness of the first metal layer is 30nm, the thickness of the second metal layer is 70nm, and the thickness of the third metal layer is 30 nm. Work as the thickness of first metal level is 40nm, and the thickness of second metal level is 100nm, and the thickness of third metal level is during 40 nm's structural style, and the substrate adopts the PET of 4.55um thickness to make up the terephthalic acid plastic film, and toughness and stability on multilayer titanium membrane surface are optimal, consequently the utility model discloses the preferred thickness that adopts first metal level is 40nm, and the thickness of second metal level is 100nm, and the thickness of third metal level is 40 nm's structural style to and 1~6um PET makes up terephthalic acid plastic film as the substrate.
The insulating plastic film comprises a PP polypropylene plastic film, a PET polyterephthalic acid plastic film, a PVC polyvinyl chloride plastic film, a PE polyethylene plastic film, a PU polyurethane plastic film, a TPU thermoplastic polyurethane plastic film and the like. In order to extensively be applicable to the biomedical field, the utility model discloses in preferably adopt PET to make the base material of PET polyterephthalic acid plastic film as multilayer titanium membrane, thickness is preferably 1~6 um.
Another objective of the present invention is to provide a method for preparing the multilayer titanium film, which combines the simple apparatus diagram shown in fig. 2, and comprises the following steps:
s1, putting the substrate film into the unwinding roller 11 of the winding system, and setting each parameter value of the winding system;
s2, cleaning the substrate film by plasma before the substrate 1 enters the coating functional area, and conveying the substrate film into a coating vacuum chamber after the substrate film is cleaned and attached to the cooling roller 12;
s3, filling argon into the coating vacuum chamber 2, adjusting the vacuum degree, and setting the power of the first magnetron sputtering target 3, the power of the second magnetron sputtering target 4 and the power of the third magnetron sputtering target 5; the first magnetron sputtering target 3, the second magnetron sputtering target 4 and the third magnetron sputtering target 5 all adopt titanium with the purity not lower than 99 percent as target sources;
s4, forming metal titanium layers with the thicknesses of 30-50 nm, 70-120 nm and 30-50 nm on the film of the substrate 1 through the first magnetron sputtering target 3, the second magnetron sputtering target 4 and the third magnetron sputtering target 5 respectively;
s5, the film after the sputtering of the three metal titanium layers enters an annealing operation area along with the cooling roller 12;
s6, winding the annealed titanium film to a winding roller 13 of a winding system;
and S7, closing the target source, recovering the vacuum chamber 2 to the atmospheric pressure, and taking out the finished multilayer titanium film from the winding system.
The method sets three targets to complete three-layer coating by adopting a winding type coating process, has simple process and can realize large-scale industrial production and application. And forming metal titanium layers with different thicknesses by adjusting the power of each target, thereby completing the multilayer titanium films with different thicknesses. The roll-to-roll process is a well-established process in the prior art, and in the present invention, because the thickness of the substrate is relatively thin, in the embodiment of the present invention, all substrates need to be subjected to a film coating operation before step S1 to ensure that the substrate film is not damaged in the film coating operation.
Magnetron sputtering is a mature coating process, the sputtering rate is improved by applying a magnetic field on the surface of a target to restrict the motion track of charged particles, and the magnetron sputtering method has the advantages of simplicity, high efficiency, high speed, low temperature, low damage and the like. In the utility model, in order to improve the sputtering rate, the first magnetron sputtering target, the second magnetron sputtering target and the third magnetron sputtering target all adopt plane magnetron sputtering targets.
The step S4 can be completed by one of methods of dc magnetron sputtering, intermediate frequency magnetron sputtering, radio frequency magnetron sputtering, and pulse magnetron sputtering.
In order to form a metal titanium layer with a thickness of 30-50 nm, 70-120 nm, 30-50 nm, the power of the first magnetron sputtering target is set to 0.3 kw-0.6 kw, the power of the second magnetron sputtering target is set to 0.8 kw-1.4 kw, and the power of the third magnetron sputtering target is set to 0.3 kw-0.6 kw.
In the steps S5 and S6, the annealing operation is a metal heat treatment process of reheating the cooled film to a predetermined temperature, keeping the temperature for a certain time, and then slowly cooling, which is a common process in the prior art; apply annealing process in the utility model discloses in the preparation method, obvious interface between the three-layer membrane structure can effectively be eliminated to control annealing temperature and time, as shown in fig. 3, improves the contact surface stress between the three-layer metal titanium layer, makes it fuse to overall structure to form the density for sparse-dense-sparse gradual change formula multilayer film, improve the toughness of film and the stability of surface conductivity.
Example 1
S1, adopting a TPU plastic film with the thickness of 12.5um as a base material 1, putting the base material film into an unwinding roller 11 in a winding system, setting various parameter values of the winding system, wherein the transmission speed is set to be 3m/min, and the tension among the unwinding roller 11, a cooling roller 12, a winding roller 13 and a passing roller 14 is controlled to be about 280N;
s2, cleaning the substrate film by plasma before the substrate 1 enters the coating functional area, and conveying the substrate film attached to the cooling roller 12 into the coating vacuum chamber 2 after the substrate film is cleaned;
s3, filling 30sccm argon gas into the film coating vacuum chamber 2, adjusting the vacuum degree to be 0.15Pa, and setting the power of the first magnetron sputtering target 3 to be 0.5kw, the power of the second magnetron sputtering target 4 to be 1kw, and the power of the third magnetron sputtering target 5 to be 0.5 kw; the first magnetron sputtering target 3, the second magnetron sputtering target 4 and the third magnetron sputtering target 5 all adopt titanium with the purity not lower than 99 percent as a plane target source;
s4, forming metal titanium layers with the thicknesses of 50nm, 90nm and 50nm on the substrate 1 through the first magnetron sputtering target 3, the second magnetron sputtering target 4 and the third magnetron sputtering target 5 respectively;
s5, enabling the film after the three-layer metal titanium sputtering is finished to enter an annealing operation area along with the cooling roller 12, setting the annealing temperature to be 120 ℃ and the annealing time to be 5 h;
s6, winding the annealed titanium film to a winding roller 13 of a winding system;
and S7, closing the target source, recovering the vacuum chamber to the atmospheric pressure, and taking out the finished multilayer titanium film from the winding system.
The total thickness of the multilayer titanium film formed by the method of the embodiment is about 12.7 um; randomly selecting any part of the film, cutting the film into dumbbell-shaped samples, and performing tensile test on the cut samples by adopting a film tensile property test method in the prior art, wherein the test data of one sample is shown in table 1, and a corresponding tensile curve diagram is shown in fig. 4:
watch 1
| Tension force | Strain of | Stress | Tension force | Strain of | Stress |
| （N） | （mm） | （Mpa） | （N） | （mm) | (Mpa) |
| 0.0032 | 0.7924 | 0.1283 | 3.1029 | 4.7329 | 123.6206 |
| 0.0101 | 0.7948 | 0.4007 | 3.1042 | 4.7346 | 123.6735 |
| 0.0737 | 1.0788 | 2.9357 | 3.1165 | 4.8148 | 124.1649 |
| 0.7391 | 1.2499 | 29.4464 | 3.1169 | 4.8193 | 124.1799 |
| 0.7588 | 1.2528 | 30.2303 | 3.1370 | 4.9393 | 124.9808 |
| 0.7801 | 1.2548 | 31.0802 | 3.1378 | 4.9425 | 125.0107 |
| 0.8023 | 1.2595 | 31.9656 | 3.1381 | 4.9444 | 125.0235 |
| 0.8411 | 1.2644 | 33.5097 | 3.1634 | 5.1044 | 126.0300 |
| 0.8569 | 1.2690 | 34.1414 | 3.1630 | 5.1089 | 126.0172 |
| 1.1928 | 1.3328 | 47.5220 | 3.2434 | 5.4223 | 129.2193 |
| 1.2066 | 1.3348 | 48.0719 | 3.2769 | 5.6100 | 130.5541 |
| 1.6585 | 1.4290 | 66.0747 | 3.3787 | 6.1089 | 134.6080 |
| 1.6882 | 1.4346 | 67.2602 | 3.3979 | 6.2146 | 135.3749 |
| 1.7740 | 1.4690 | 70.6768 | 3.4162 | 6.3249 | 136.1035 |
| 2.1210 | 1.5651 | 84.5035 | 3.4166 | 6.3298 | 136.1205 |
| 2.1334 | 1.5700 | 84.9973 | 3.4177 | 6.3330 | 136.1627 |
| 2.1448 | 1.5726 | 85.4495 | 3.4201 | 6.3393 | 136.2571 |
| 2.1548 | 1.5746 | 85.8475 | 3.4203 | 6.3548 | 136.2671 |
| 2.1650 | 1.5794 | 86.2530 | 3.4201 | 6.3588 | 136.2609 |
| 2.2327 | 1.6126 | 88.9531 | 3.4324 | 6.4450 | 136.7470 |
| 2.2408 | 1.6146 | 89.2766 | 3.4329 | 6.4499 | 136.7704 |
| 2.2701 | 1.6244 | 90.4436 | 3.4339 | 6.4530 | 136.8095 |
| 2.3304 | 1.6690 | 92.8427 | 3.4587 | 6.5793 | 137.7958 |
| 2.3566 | 1.7091 | 93.8873 | 3.4596 | 6.5844 | 137.8310 |
| 2.3910 | 1.7250 | 95.2575 | 3.4253 | 6.5924 | 136.4655 |
| 2.4398 | 1.7698 | 97.2038 | 3.2950 | 6.5949 | 131.2747 |
| 2.4555 | 1.8223 | 97.8298 | 3.0539 | 6.5988 | 121.6680 |
| 2.4603 | 1.8243 | 98.0202 | 2.8343 | 6.6030 | 112.9206 |
| 2.5005 | 1.9548 | 99.6205 | 2.7411 | 6.6050 | 109.2062 |
| 2.5007 | 1.9890 | 99.6279 | 2.6967 | 6.6098 | 107.4400 |
| 2.5009 | 2.0223 | 99.6356 | 2.6128 | 6.6130 | 104.0951 |
| 2.5643 | 2.3124 | 102.1647 | 2.5155 | 6.6146 | 100.2178 |
| 2.6050 | 2.4348 | 103.7836 | 2.4436 | 6.6193 | 97.3533 |
| 2.6047 | 2.4388 | 103.7726 | 2.3931 | 6.6225 | 95.3420 |
| 2.6373 | 2.6788 | 105.0722 | 2.3553 | 6.6244 | 93.8348 |
| 2.6383 | 2.6830 | 105.1122 | 2.3336 | 6.6286 | 92.9715 |
| 2.6980 | 2.9588 | 107.4891 | 2.4108 | 6.6430 | 96.0494 |
| 2.7597 | 3.1628 | 109.9495 | 2.4300 | 6.6449 | 96.8113 |
| 2.7734 | 3.2223 | 110.4922 | 2.4702 | 6.6548 | 98.4144 |
| 2.7737 | 3.2243 | 110.5051 | 2.4684 | 6.6896 | 98.3408 |
| 2.7854 | 3.2850 | 110.9736 | 2.5015 | 6.6948 | 99.6626 |
| 2.7861 | 3.2898 | 111.0008 | 2.5240 | 6.6993 | 100.5581 |
| 2.7872 | 3.2928 | 111.0429 | 2.5479 | 6.7026 | 101.5113 |
| 2.8636 | 3.7650 | 114.0890 | 2.5931 | 6.7089 | 103.3119 |
| 2.8675 | 3.7699 | 114.2433 | 2.2669 | 6.7630 | 90.3143 |
| 2.9106 | 3.8450 | 115.9594 | 2.2872 | 6.7649 | 91.1221 |
| 2.9128 | 3.8499 | 116.0472 | 2.3268 | 6.7730 | 92.7006 |
| 2.9705 | 4.1748 | 118.3473 | 2.3657 | 6.7793 | 94.2494 |
| 2.9694 | 4.1793 | 118.3030 | 2.4186 | 6.7889 | 96.3566 |
| 2.9677 | 4.1824 | 118.2338 | 2.4342 | 6.7925 | 96.9784 |
| 2.9594 | 4.2348 | 117.9027 | 2.4498 | 6.7949 | 97.6011 |
| 2.9968 | 4.4098 | 119.3961 | 2.4657 | 6.7989 | 98.2342 |
| 3.0201 | 4.5188 | 120.3220 | 2.4974 | 6.8050 | 99.4993 |
| 3.0216 | 4.5230 | 120.3835 | 2.5127 | 6.8098 | 100.1061 |
| 3.0643 | 4.5844 | 122.0829 | 2.5288 | 6.8130 | 100.7492 |
| 3.0646 | 4.5889 | 122.0964 | 2.3231 | 6.8786 | 92.5533 |
| 3.1014 | 4.7296 | 123.5615 | 2.2053 | 6.9086 | 87.8596 |
According to the experimental data, the average elastic modulus E of the sample is 110.4457MPa, the average breaking strength is 138.43MPa, and the average breaking elongation is 3.3059%.
A single-layer titanium film (a TPU plastic film with a base material of 12.5um and a titanium plating film with the specification of about 200 nm) with the same thickness in the prior art is selected to be subjected to a comparative test according to the test method, so that the sample has the average elastic modulus E of 125.1559MPa, the average breaking strength of 115.24MPa and the average breaking elongation of 2.447 percent. According to the above experimental data, the multilayer titanium film prepared by the method of the utility model not only has increased flexibility, but also has improved toughness of the film surface.
In addition, the number of samples with surface fracture of the multilayer titanium film after 20 parts of the multilayer titanium film with the same size of 15cm multiplied by 15cm and 20 parts of single-layer titanium film samples with the same thickness in the prior art are selected and folded at any position of 20 positions is as follows: 2, the number of samples of the single-layer titanium film with surface fracture is as follows: 9; if the fracture can seriously influence its electric conductive property in the metal film if the surperficial metal level appears, because of the utility model discloses the multilayer titanium membrane of method preparation can effectively guarantee the stability of metal film layer surface conductivity ability.
Example 2
S1, adopting a PET plastic film with the thickness of 4.55um as a base material, putting the base material film 1 into an unwinding roller 11 in a winding system, setting various parameter values of the winding system, wherein the transmission speed is set to be 3m/min, and the tension among the unwinding roller 11, a cooling roller 12, a winding roller 13 and a passing roller 14 is controlled to be about 300N;
s2, cleaning the substrate film by plasma before the substrate enters the coating functional area, and conveying the substrate film attached to the cooling roller 12 into the coating vacuum chamber 2 after the substrate film is cleaned;
s3, filling 30sccm argon gas into the film coating vacuum chamber, adjusting the vacuum degree to be 0.15Pa, and setting the power of the first magnetron sputtering target 3 to be 0.5kw, the power of the second magnetron sputtering target 4 to be 1.2kw and the power of the third magnetron sputtering target 5 to be 0.5 kw; the first magnetron sputtering target 3, the second magnetron sputtering target 4 and the third magnetron sputtering target 5 all adopt titanium with the purity not lower than 99 percent as a plane target source;
s4, forming metal titanium layers with the thicknesses of 40nm, 100nm and 40nm on the substrate 1 through the first magnetron sputtering target 3, the second magnetron sputtering target 4 and the third magnetron sputtering target 5 respectively;
s5, enabling the film after the three-layer metal titanium sputtering is finished to enter an annealing operation area along with the cooling roller 12, setting the annealing temperature to be 115 ℃ and the annealing time to be 5 h;
s6, winding the annealed titanium film to a winding roller 13 of a winding system;
and S7, closing the target source, recovering the vacuum chamber 2 to the atmospheric pressure, and taking out the finished multilayer titanium film from the winding system.
The total thickness of the multilayer titanium film formed by the method of the embodiment is about 4.7 um; randomly selecting any part of the film to be cut into dumbbell-shaped samples, and performing tensile test on the cut samples by adopting a film tensile property test method in the prior art, wherein the test data of one sample is shown in table 2, and a curve H in a graph 5 is a corresponding tensile curve:
watch two
| Tension force | Strain of | Stress | Tension force | Strain of | Stress |
| （N） | （mm） | （Mpa） | （N） | （mm） | （Mpa） |
| 0.0107 | 0.0124 | 1.1305 | 0.9909 | 0.4788 | 104.3010 |
| 0.0120 | 0.0140 | 1.2682 | 0.9959 | 0.4830 | 104.8311 |
| 0.0552 | 0.0721 | 5.8069 | 1.0005 | 0.4850 | 105.3198 |
| 0.0641 | 0.0829 | 6.7447 | 1.0119 | 0.4929 | 106.5205 |
| 0.0699 | 0.0850 | 7.3565 | 1.0175 | 0.4946 | 107.1015 |
| 0.0843 | 0.0929 | 8.8708 | 1.0226 | 0.4991 | 107.6424 |
| 0.0903 | 0.0946 | 9.5050 | 1.0274 | 0.5025 | 108.1511 |
| 0.0955 | 0.0994 | 10.0487 | 1.0795 | 0.5548 | 113.6343 |
| 0.1308 | 0.1230 | 13.7654 | 1.0821 | 0.5589 | 113.9100 |
| 0.1348 | 0.1250 | 14.1887 | 1.0882 | 0.5650 | 114.5448 |
| 0.1680 | 0.1489 | 17.6890 | 1.0907 | 0.5699 | 114.8115 |
| 0.1788 | 0.1548 | 18.8244 | 1.0936 | 0.5730 | 115.1191 |
| 0.1841 | 0.1589 | 19.3782 | 1.1034 | 0.5844 | 116.1463 |
| 0.1902 | 0.1629 | 20.0248 | 1.1255 | 0.6225 | 118.4707 |
| 0.2131 | 0.1729 | 22.4321 | 1.1386 | 0.6530 | 119.8478 |
| 0.2214 | 0.1748 | 23.3036 | 1.1401 | 0.6546 | 120.0100 |
| 0.2293 | 0.1794 | 24.1358 | 1.1419 | 0.6591 | 120.2041 |
| 0.2371 | 0.1825 | 24.9533 | 1.1483 | 0.6786 | 120.8757 |
| 0.2447 | 0.1844 | 25.7539 | 1.1498 | 0.6830 | 121.0337 |
| 0.2524 | 0.1889 | 26.5640 | 1.1574 | 0.6993 | 121.8319 |
| 0.2607 | 0.1924 | 27.4447 | 1.1591 | 0.7025 | 122.0077 |
| 0.2971 | 0.2050 | 31.2777 | 1.1599 | 0.7044 | 122.0944 |
| 0.3064 | 0.2098 | 32.2494 | 1.1767 | 0.7630 | 123.8588 |
| 0.3249 | 0.2146 | 34.1998 | 1.1777 | 0.7650 | 123.9703 |
| 0.3455 | 0.2225 | 36.3663 | 1.1784 | 0.7698 | 124.0458 |
| 0.3651 | 0.2288 | 38.4331 | 1.1798 | 0.7730 | 124.1892 |
| 0.3749 | 0.2323 | 39.4595 | 1.1945 | 0.8288 | 125.7329 |
| 0.3841 | 0.2346 | 40.4281 | 1.1964 | 0.8450 | 125.9411 |
| 0.4042 | 0.2430 | 42.5494 | 1.1976 | 0.8498 | 126.0623 |
| 0.4141 | 0.2450 | 43.5903 | 1.2130 | 0.9123 | 127.6878 |
| 0.4247 | 0.2499 | 44.7017 | 1.2244 | 0.9729 | 128.8887 |
| 0.4358 | 0.2529 | 45.8766 | 1.2255 | 0.9746 | 129.0023 |
| 0.4461 | 0.2548 | 46.9623 | 1.2672 | 1.2028 | 133.3899 |
| 0.4564 | 0.2593 | 48.0424 | 1.2731 | 1.2321 | 134.0154 |
| 0.4669 | 0.2625 | 49.1520 | 1.2832 | 1.3148 | 135.0784 |
| 0.4762 | 0.2644 | 50.1278 | 1.2990 | 1.4126 | 136.7320 |
| 0.4848 | 0.2688 | 51.0343 | 1.2996 | 1.4146 | 136.8038 |
| 0.4940 | 0.2724 | 51.9970 | 1.3000 | 1.4195 | 136.8444 |
| 0.5643 | 0.2948 | 59.3983 | 1.3009 | 1.4223 | 136.9324 |
| 0.5738 | 0.2993 | 60.4025 | 1.3017 | 1.5044 | 137.0202 |
| 0.5842 | 0.3025 | 61.4986 | 1.3017 | 1.5091 | 137.0249 |
| 0.5947 | 0.3044 | 62.5992 | 1.3126 | 1.5890 | 138.1728 |
| 0.6049 | 0.3089 | 63.6782 | 1.3134 | 1.5920 | 138.2548 |
| 0.6157 | 0.3124 | 64.8059 | 1.3279 | 1.6926 | 139.7784 |
| 0.6260 | 0.3148 | 65.8942 | 1.3576 | 1.9023 | 142.9021 |
| 0.6353 | 0.3188 | 66.8757 | 1.3579 | 1.9044 | 142.9417 |
| 0.6439 | 0.3230 | 67.7788 | 1.3666 | 1.9889 | 143.8546 |
| 0.6884 | 0.3393 | 72.4587 | 1.3668 | 1.9948 | 143.8745 |
| 0.6976 | 0.3425 | 73.4317 | 1.3679 | 2.0028 | 143.9849 |
| 0.7060 | 0.3444 | 74.3106 | 1.3679 | 2.0049 | 143.9932 |
| 0.7134 | 0.3488 | 75.0990 | 1.3685 | 2.0098 | 144.0518 |
| 0.7210 | 0.3523 | 75.8929 | 1.3693 | 2.0128 | 144.1412 |
| 0.7288 | 0.3548 | 76.7129 | 1.3865 | 2.2430 | 145.9472 |
| 0.7370 | 0.3588 | 77.5752 | 1.3779 | 2.2830 | 145.0463 |
| 0.7457 | 0.3630 | 78.4958 | 1.3759 | 2.2849 | 144.8342 |
| 0.7546 | 0.3650 | 79.4265 | 1.3734 | 2.2896 | 144.5686 |
| 0.7635 | 0.3698 | 80.3648 | 1.3678 | 2.2929 | 143.9751 |
| 0.8302 | 0.3949 | 87.3917 | 1.3404 | 2.2948 | 141.0906 |
| 0.8374 | 0.3988 | 88.1478 | 1.2444 | 2.2993 | 130.9883 |
| 0.8577 | 0.4098 | 90.2802 | 1.0216 | 2.3025 | 107.5377 |
| 0.8650 | 0.4129 | 91.0520 | 0.6793 | 2.3045 | 71.5001 |
| 0.8805 | 0.4193 | 92.6792 | 0.3415 | 2.3090 | 35.9447 |
| 0.8879 | 0.4225 | 93.4629 | 0.1352 | 2.3123 | 14.2265 |
| 0.8946 | 0.4244 | 94.1712 | 0.0601 | 2.3148 | 6.3294 |
| 0.9073 | 0.4324 | 95.5063 | 0.0455 | 2.3189 | 4.7866 |
| 0.9134 | 0.4348 | 96.1479 | 0.0413 | 2.3230 | 4.3447 |
| 0.9273 | 0.4430 | 97.6156 | 0.0332 | 2.3250 | 3.4915 |
| 0.9338 | 0.4449 | 98.2925 | 0.0275 | 2.3298 | 2.8910 |
| 0.9755 | 0.4688 | 102.6821 | 0.0247 | 2.3330 | 2.6002 |
According to the experimental data, the average elastic modulus E of the sample is 88.1925MPa, the average breaking strength is 144.81MPa, and the average breaking elongation is 1.1255%.
A single-layer titanium film (a PET plastic film with a base material of 4.55um serving as a plastic film and titanium plating with the specification of about 200 nm) with the same thickness in the prior art is selected to be subjected to a comparative test according to the test method, and a curve B in a graph in FIG. 5 is a corresponding tensile curve graph to obtain a sample with the average elastic modulus E of 110.6394MPa, the average breaking strength of 115.176MPa and the average breaking elongation of 0.815 percent. According to the above experimental data, the multilayer titanium film prepared by the method of the utility model not only has increased flexibility, but also has improved toughness of the film surface.
In addition, the number of samples with surface fracture of the multilayer titanium film after 20 parts of the multilayer titanium film with the same size of 15cm multiplied by 15cm and 20 parts of single-layer titanium film samples with the same thickness in the prior art are selected and folded at any position of 20 positions is as follows: 1, the number of samples of the single-layer titanium film with surface fracture is as follows: 7; if the fracture can seriously influence its electric conductive property in the metal film if the surperficial metal level appears, because of the utility model discloses the multilayer titanium membrane of method preparation can effectively guarantee the stability of metal film layer surface conductivity ability.
Example 3
S1, adopting a PET plastic film with the thickness of 1.6 um as a substrate 1, putting the substrate film into an unwinding roller 11 in a winding system, setting various parameter values of the winding system, wherein the transmission speed is set to be 3m/min, and the tension among the unwinding roller 11, a cooling roller 12, a winding roller 13 and a passing roller 14 is controlled to be about 300N;
s2, cleaning the substrate film by plasma before the substrate 1 enters the coating functional area, and conveying the substrate film attached to the cooling roller 12 into the coating vacuum chamber 2 after the substrate film is cleaned;
s3, filling 30sccm argon gas into the film coating vacuum chamber 2, adjusting the vacuum degree to be 0.15Pa, and setting the power of the first magnetron sputtering target 3 to be 0.3kw, the power of the second magnetron sputtering target 4 to be 0.9kw, and the power of the third magnetron sputtering target 5 to be 0.3 kw; the first magnetron sputtering target 3, the second magnetron sputtering target 4 and the third magnetron sputtering target 5 all adopt titanium with the purity not lower than 99 percent as a plane target source;
s4, forming metal titanium layers with the thicknesses of 30nm, 80nm and 30nm on the base material through the first magnetron sputtering target 3, the second magnetron sputtering target 4 and the third magnetron sputtering target 5 respectively;
s5, enabling the film after the three-layer metal titanium sputtering is finished to enter an annealing operation area along with the cooling roller 12, setting the annealing temperature to be 120 ℃ and the annealing time to be 5 h;
s6, winding the annealed titanium film to a winding roller 13 of a winding system;
and S7, closing the target source, recovering the vacuum chamber 2 to the atmospheric pressure, and taking out the finished multilayer titanium film from the winding system.
The total thickness of the multilayer titanium film formed by the method of the embodiment is about 1.7 um; randomly selecting any part of the film, cutting the film into dumbbell-shaped samples, and performing tensile test on the cut samples by adopting a film tensile property test method in the prior art, wherein FIG. 6 is a corresponding tensile curve chart; according to the experimental data, the average elastic modulus E of the sample is 83.9505MPa, the average breaking strength is 37.7618MPa, and the average breaking elongation is 0.253 percent.
The above description is only for the purpose of illustrating the embodiments of the present invention, and not for the purpose of limiting the same. Various substitutions, modifications and improvements may be made by those skilled in the relevant art without departing from the spirit and scope of the invention.
Claims (4)
1. A multilayer titanium film, comprising: the metal layer is attached to the base material, the base material is an insulating plastic film, and the thickness of the base material is 0.5-15 microns; the metal layers comprise a first metal layer, a second metal layer and a third metal layer, and the first metal layer, the second metal layer and the third metal layer are all realized by adopting metal titanium; the thickness of the first metal layer is 30-50 nm, and the first metal layer is attached to the base material insulating plastic film; the thickness of the second metal layer is 70-120 nm, and the second metal layer is attached to the first metal layer; the thickness of the third metal layer is 30-50 nm, and the third metal layer is attached to the second metal layer.
2. The multilayer titanium film according to claim 1, wherein the thickness of said first metal layer is 40nm, the thickness of said second metal layer is 100nm, and the thickness of said third metal layer is 40 nm.
3. The titanium multilayer film according to claim 1, wherein said insulating plastic film comprises a PP polypropylene plastic film, a PET polyterephthalic acid plastic film, a PVC polyvinyl chloride plastic film, a PE polyethylene plastic film, a PU polyurethane plastic film, a TPU thermoplastic polyurethane plastic film.
4. The multilayer titanium film according to claim 1, wherein the insulating plastic film is made of 1-6 um PET polyterephthalic acid plastic film.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920798909.4U CN210065901U8 (en) | 2019-05-31 | 2019-05-31 | Multilayer titanium film |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920798909.4U CN210065901U8 (en) | 2019-05-31 | 2019-05-31 | Multilayer titanium film |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN210065901U true CN210065901U (en) | 2020-02-14 |
| CN210065901U8 CN210065901U8 (en) | 2020-04-14 |
Family
ID=69455251
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201920798909.4U Active CN210065901U8 (en) | 2019-05-31 | 2019-05-31 | Multilayer titanium film |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN210065901U8 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110055505A (en) * | 2019-05-31 | 2019-07-26 | 成都柔电云科科技有限公司 | A kind of multilayer titanium film and preparation method thereof |
| WO2021208541A1 (en) * | 2020-04-13 | 2021-10-21 | 深圳市海瀚新能源技术有限公司 | Conductive film and preparation method therefor |
-
2019
- 2019-05-31 CN CN201920798909.4U patent/CN210065901U8/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110055505A (en) * | 2019-05-31 | 2019-07-26 | 成都柔电云科科技有限公司 | A kind of multilayer titanium film and preparation method thereof |
| WO2021208541A1 (en) * | 2020-04-13 | 2021-10-21 | 深圳市海瀚新能源技术有限公司 | Conductive film and preparation method therefor |
Also Published As
| Publication number | Publication date |
|---|---|
| CN210065901U8 (en) | 2020-04-14 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP7492498B2 (en) | Method for producing LCP-based flexible copper-clad laminate and LCP-based flexible copper-clad laminate produced by the method | |
| CN210065901U (en) | Multilayer titanium film | |
| CN109137035B (en) | Preparation method of aluminum-based copper-clad plate | |
| KR101446411B1 (en) | Method for manufacturing corrosion resistant and conductive nano carbon coating and fuel cell bipolar plate thereby | |
| JP3641632B1 (en) | Conductive sheet, product using the same, and manufacturing method thereof | |
| TW201443925A (en) | Transparent conductive film and production method therefor | |
| US20120141820A1 (en) | Porous metal article and about method for manufacturing same | |
| KR102263024B1 (en) | Electrolytic copper foil, flexible circuit board and battery | |
| TWI503430B (en) | Coated article and method for making the same | |
| EP3876307B1 (en) | Film preparation process | |
| CN114959626A (en) | Preparation method and device of ultrathin flexible conductive composite film | |
| CN103668190A (en) | Magnesium alloy surface treatment method and product thereof | |
| CN105648484B (en) | A kind of bilayer gradient copper alloy material preparation method for material | |
| CN110055505A (en) | A kind of multilayer titanium film and preparation method thereof | |
| CN105568339B (en) | It is a kind of using magnesium/magnesium alloy as the multicoat composite material and preparation method of matrix | |
| JP2007311040A (en) | Film-forming method of crystalline ito thin film, crystalline ito thin film, and film, as well as resistance film type touch panel | |
| CN1794374A (en) | Nanometer crystal soft magnetic alloy film material and its preparation method | |
| CN114075652B (en) | Preparation method of conductive film, current collection and transmission material and energy storage device | |
| CN210163518U (en) | Copper alloy coating | |
| CN102965634A (en) | Method for preparing beryllium-copper alloy sheet by adopting continuous magnetron sputtering physical-vapor deposition method | |
| KR20140028581A (en) | Multi coating layer and method for producing the same | |
| CN113278934A (en) | Method for continuously depositing copper plating film by vacuum sputtering | |
| CN113862671B (en) | Method for preparing diamond-like film by PVD-CVD combination, diamond-like film, alloy material and automobile part | |
| CN218115567U (en) | Production device of ultrathin flexible conductive composite film | |
| Cordill et al. | Materials Engineering for Flexible Metallic Thin Film Applications. Materials 2022, 15, 926 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CU01 | Correction of utility model | ||
| CU01 | Correction of utility model |
Correction item: Inventor Correct: Wang Yunbing|Yang Zeyu|Liu Yuan|Guo Yi|Hu Xuefeng|Yang Baichao False: Wang Yunbing|Yang Baichao Number: 07-02 Volume: 36 Correction item: Inventor Correct: Wang Yunbing|Yang Zeyu|Liu Yuan|Guo Yi|Hu Xuefeng|Yang Baichao False: Wang Yunbing|Yang Baichao Number: 07-02 Page: The title page Volume: 36 |