CN210046549U - Microporous ceramic adsorption carrying platform - Google Patents

Microporous ceramic adsorption carrying platform Download PDF

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Publication number
CN210046549U
CN210046549U CN201920370015.5U CN201920370015U CN210046549U CN 210046549 U CN210046549 U CN 210046549U CN 201920370015 U CN201920370015 U CN 201920370015U CN 210046549 U CN210046549 U CN 210046549U
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adsorption
microporous ceramic
base
ceramic adsorption
carrier
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CN201920370015.5U
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Inventor
谢圣君
王昌焱
徐新峰
房用桥
李士杰
范吉鹏
孙左峰
万柯
汤治飞
汤华斌
范祥鑫
刘振强
谢飞
张董洁
吕启涛
高云峰
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Han s Laser Technology Industry Group Co Ltd
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Han s Laser Technology Industry Group Co Ltd
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Abstract

The utility model is suitable for a liquid crystal display panel processing field provides a microporous ceramic adsorbs microscope carrier, and this microporous ceramic adsorbs microscope carrier comprises the concatenation of a N microporous ceramic adsorption microscope carrier unit, and N is for being greater than 1 positive integer, and every microporous ceramic adsorbs microscope carrier unit and includes microscope carrier base, microporous ceramic adsorption piece and filling block, and wherein, microporous ceramic adsorption piece installs on the top surface of microscope carrier base with the interval, and the filling block is installed in the clearance between the microporous ceramic adsorption piece. Every micropore ceramic adsorbs microscope carrier unit can be used to adsorb the machined part alone, and the micropore ceramic that is spliced into by a plurality of micropore ceramic adsorbs the microscope carrier, and its adsorption area increases, is applicable to adsorbing the machined part of different dimensions.

Description

Microporous ceramic adsorption carrying platform
Technical Field
The utility model belongs to liquid crystal display panel processing field especially relates to a microporous ceramic adsorbs microscope carrier.
Background
Generally, in the process of fabricating the liquid crystal display panel, a carrier is used to support and fix the liquid crystal display panel for the convenience of the process. The carrier structure for carrying the liquid crystal display panel in the early stage is made of metal, the top surface of the carrier structure is provided with a plurality of negative pressure air holes, one side surface of the carrier structure is provided with an air port communicated with the negative pressure air holes for connecting with a negative pressure device, and then the negative pressure device can be utilized to enable the negative pressure air holes to generate suction force for adsorbing and fixing the liquid crystal display panel on the carrier so as to facilitate the operation of each process of the liquid crystal display panel. However, since the metal carrier has thermal and electrical conductivity, when it carries the liquid crystal display panel to perform Rubbing (Rubbing) process, large temperature variation is generated, which affects the liquid crystal alignment, and thus the quality and density of the Rubbing are not easy to control. Moreover, when the metal stage carries the liquid crystal display panel to perform a process operation such as Rubbing, a large friction force is generated, which is likely to cause abrasion of the liquid crystal display panel.
As an improvement, at present, in various semiconductor production processes, a microporous ceramic plate is commonly used as a special tool for adsorption and bearing, and the microporous ceramic is a ceramic body containing a large number of openings or micro pores in the ceramic or on the surface of the ceramic, and the pore diameter of the microporous ceramic plate is generally in the micron or submicron order. The adsorption property of the microporous ceramic plate is applied to the processes of thinning, scribing, cleaning, carrying and the like, and the microporous ceramic plate has the advantages of good planeness and parallelism, compact and uniform tissue, high strength, good permeability, uniform adsorption force and easy trimming. With the development of science and technology, the size range of workpieces such as liquid crystal display panels is larger and larger, and the traditional adsorption platform deck device cannot be suitable for workpieces of various sizes and specifications due to fixed size.
SUMMERY OF THE UTILITY MODEL
The utility model provides a micropore ceramic adsorbs microscope carrier aims at solving the technical problem that the absorption microscope carrier device that prior art provided can't be applicable to the machined part of various dimensions.
The utility model discloses a realize like this: a microporous ceramic adsorption carrying platform is formed by splicing N microporous ceramic adsorption carrying platform units, wherein N is an integer greater than 1;
each microporous ceramic adsorption carrier unit comprises a carrier base, a microporous ceramic adsorption block and a filling block;
the micropore ceramic adsorption blocks are arranged on the top surface of the carrier base at intervals, and the filling blocks are arranged in gaps among the micropore ceramic adsorption blocks.
Furthermore, a bolt hole is formed in a stage base of each microporous ceramic adsorption stage unit, and after the plurality of microporous ceramic adsorption stage units are spliced into an integral stage structure, the microporous ceramic adsorption stage units are connected with the adjacent microporous ceramic adsorption stage units through bolt connection plates.
Furthermore, through holes penetrating through the top surface and the bottom surface of the carrier base are formed between the filling blocks on the carrier base.
Furthermore, the microporous ceramic adsorption block comprises an adsorption bottom plate and a microporous ceramic adsorption plate;
the bottom surface of the adsorption bottom plate is connected with the top surface of the carrier base, and the top surface of the adsorption bottom plate is connected with the microporous ceramic adsorption plate;
the top surface of the adsorption bottom plate is a groove surface.
Furthermore, the adsorption bottom plate is provided with an air guide hole penetrating from the groove surface to the bottom surface, and the bottom surface of the adsorption bottom plate is provided with an air guide groove with one end communicated with the air guide hole;
the carrying platform base is also provided with an air guide hole which runs through the top surface and the bottom surface of the carrying platform base and is communicated with the other end of the air guide groove.
Compared with the prior art, the utility model, beneficial effect lies in: the utility model provides an every microporous ceramic adsorbs microscope carrier unit can be used to adsorb the machined part alone, adsorbs the microscope carrier by the microporous ceramic that a plurality of microporous ceramic adsorbed microscope carrier units splice, and its adsorption area increases, is applicable to the machined part to different dimensions and specifications and adsorbs.
Drawings
In order to more clearly illustrate the technical solutions provided by the embodiments of the present invention, the drawings required to be used in the present invention will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without creative efforts.
Fig. 1 is a plan view of a microporous ceramic adsorption carrier according to a first embodiment of the present invention;
fig. 2 is a schematic structural view of a microporous ceramic adsorption stage unit in a microporous ceramic adsorption stage according to a first embodiment of the present invention;
fig. 3 is a rear view of a stage base in a microporous ceramic adsorption stage unit according to a first embodiment of the present invention;
fig. 4 is a front view of a stage base in a microporous ceramic adsorption stage unit according to a first embodiment of the present invention;
fig. 5 is a front view of an adsorption base plate in a microporous ceramic adsorption block according to a second embodiment of the present invention;
fig. 6 is a rear view of an adsorption base plate in a microporous ceramic adsorption block according to a second embodiment of the present invention;
fig. 7 is an isometric view of a microporous ceramic adsorption plate in a microporous ceramic adsorption block according to a second embodiment of the present invention.
Description of the main component symbols:
a stage base 1; a microporous ceramic adsorption block 2; a filling block 3; a bolt hole 4; an adsorption block positioning sinking platform 5; a filling block positioning sinking platform 6; a first air guide hole 7; an adsorption base plate 8; a microporous ceramic adsorption plate 9; a groove surface 10; a second gas-guide hole 11; and a gas guide groove 12.
Detailed Description
To make the objects, features and advantages of the present invention more obvious and understandable, the embodiments of the present invention are clearly and completely described with reference to the accompanying drawings in the embodiments of the present invention, and obviously, the described embodiments are only some embodiments, not all embodiments of the present invention. Based on the embodiments in the present invention, all other embodiments obtained by the skilled in the art without creative work belong to the protection scope of the present invention.
Referring to fig. 1, fig. 1 is a plan view of a microporous ceramic adsorption platform provided by a first embodiment of the present invention, the embodiment of the present invention provides a microporous ceramic adsorption platform composed of N microporous ceramic adsorption platform units, where N is an integer greater than 1. For example, fig. 1 shows an integrated stage structure formed by splicing four microporous ceramic adsorption stage units.
Referring to fig. 2, fig. 2 is a schematic structural diagram of a microporous ceramic adsorption stage unit in a microporous ceramic adsorption stage according to a first embodiment of the present invention.
Each microporous ceramic adsorption carrier unit comprises a carrier base 1, a microporous ceramic adsorption block 2 and a filling block 3. Wherein, the micropore ceramic adsorption blocks 2 are arranged on the top surface of the carrier base 1 at intervals, and the filling blocks 3 are arranged in the gaps among the micropore ceramic adsorption blocks 2. In the embodiment of the present invention, the surface of the stage base 1 on which the microporous ceramic adsorption block 2 and the filling block 3 are mounted is defined as the top surface of the stage base 1, and the surface opposite to the top surface of the stage base 1 is the bottom surface.
It should be noted that the microporous ceramic adsorption block 2 has a porous characteristic, a plane formed by the surface of the microporous ceramic adsorption block 2 is an adsorption surface of the microporous ceramic adsorption platform unit, the filling block 3 is made of common ceramic, and the filling block 3 is installed between the microporous ceramic adsorption blocks 2 and is used for dispersing the negative pressure on the adsorption surface of the microporous ceramic adsorption platform unit, so that the negative pressure on the adsorption surface can be relatively uniform and not be too concentrated, and thus, the situation that the negative pressure generates too much suction force on the local position of the workpiece to damage the workpiece can be avoided. Therefore, the actual position of the filling block 3 may not be limited to the gap installed between each column of the microporous ceramic adsorption blocks 2 as shown in fig. 2, but may be installed in the gap between each row of the microporous ceramic adsorption blocks 2, or between any two adjacent microporous ceramic adsorption blocks 2.
Referring to fig. 3 and 4, fig. 3 and 4 are a rear view and a front view of a stage base in a microporous ceramic adsorption stage unit according to a first embodiment of the present invention, respectively.
As shown in fig. 1 and 3, bolt holes 4 are formed in a stage base 1 of each microporous ceramic adsorption stage unit, after a plurality of microporous ceramic adsorption stage units are spliced into a whole stage structure, the microporous ceramic adsorption stage units are connected with adjacent microporous ceramic adsorption stage units through bolt connecting plates, specifically, after bolts sequentially pass through the bolt holes 4 in the bolt connecting plates and the stage base, the adjacent microporous ceramic adsorption stage units are connected together, and the installation process is convenient and easy to detach. The utility model discloses in can also adsorb the quantity of microscope carrier unit through the micropore ceramic that the adjustment was used to change the adsorption area of micropore ceramic adsorption microscope carrier, thereby firmly adsorb the machined part of different size specifications and be located micropore ceramic adsorption microscope carrier, in order to do benefit to the operation of implementing the machined part.
Furthermore, a through hole penetrating through the top surface and the bottom surface of the stage base 1 is arranged between the filling blocks 3 on the stage base 1. Specifically, as shown in fig. 4, an adsorption block positioning sinking platform 5 for installing the microporous ceramic adsorption block 2 and a filling block positioning sinking platform 6 for installing the filling block 3 are provided on the top surface of the stage base 1, wherein a first air guide hole 7 is provided at an edge in the adsorption block positioning sinking platform 5, a plurality of first air guide holes 7 are uniformly distributed between adjacent adsorption block positioning sinking platforms 5, between adjacent filling block positioning sinking platforms 6 and in each filling block positioning sinking platform 6, and the first air guide holes 7 are through holes vertically penetrating through the top surface and the bottom surface of the stage base 1 and are used for air path installation. The stage base 1 can be connected to a negative pressure device (not shown in the figure) which is communicated with the adsorption surface of the microporous ceramic adsorption stage unit through a plurality of first air vents 7 on the stage base 1 and is used for providing suction force to generate negative pressure on the adsorption surface of the microporous ceramic adsorption stage, so as to achieve the purpose of adsorbing the workpiece.
It should be noted that the shapes, sizes, etc. of the adsorption block positioning platform 5 and the microporous ceramic adsorption block 2 matched therewith are not limited in a unified manner, for example, the microporous ceramic adsorption block 2 installed on the carrier base 1 in fig. 2 has two different specifications, and in practical application, the arrangement mode shown in the figure may not be limited, so as to provide uniform adsorption force to the workpiece loaded thereon.
Further, every micropore ceramic adsorbs piece 2 includes the adsorption bottom plate 8 of being connected with microscope carrier base 1, sets up micropore ceramic adsorption plate 9 on adsorption bottom plate 8, and the top surface and the bottom surface of adsorption bottom plate 8 are two ascending opposite faces of its direction of height respectively, and wherein, the bottom surface of adsorption bottom plate 8 is connected with microscope carrier base 1's top surface, and the top surface and the micropore ceramic adsorption plate 9 of adsorption bottom plate 8 are connected. As shown in fig. 5-7, fig. 5 and fig. 6 are respectively a front view and a rear view of an adsorption bottom plate in a microporous ceramic adsorption block provided by the second embodiment of the present invention, and fig. 7 is an axonometric view of a microporous ceramic adsorption plate in a microporous ceramic adsorption block provided by the second embodiment of the present invention.
Wherein, the top surface of the adsorption bottom plate 8, that is, the surface connected with the microporous ceramic adsorption plate 9 is a groove surface 10. Preferably, the top surface of the adsorption base plate 8 is a groove surface provided with an annular groove or a rectangular groove, for example, fig. 5 shows an annular groove surface 10 of the adsorption base plate 8, and the annular groove surface 10 is beneficial to uniformly distribute the received pressure. The microporous ceramic adsorption plate 9 is made of microporous ceramic, has a porous characteristic, and can be used for dispersing negative pressure suction.
Further, referring to fig. 5 and 6, a second air vent 11 penetrating from the groove surface 10 to the bottom surface is provided at the center of the adsorption base plate 8, and an air vent groove 12 having one end communicating with the second air vent 11 is provided on the bottom surface of the adsorption base plate 8, and correspondingly, a first air vent 7 penetrating through the top surface and the bottom surface of the stage base 1 and communicating with the other end of the air vent groove 12 is provided in the stage base 1, specifically, the adsorption block positioning stage 5. Therefore, when the adsorption base plate 8 of the microporous ceramic adsorption block 2 is connected to the stage base 1, the air guide grooves 12 in the adsorption base plate 8 communicate the first air guide holes 7 in the stage base 1 with the second air guide holes 12 in the adsorption base plate 8, thereby forming air passages.
In practical application, a platform provided on the top surface of the microporous ceramic adsorption stage unit is used for receiving a workpiece transmitted from a previous process, and then a negative pressure device can be used to sequentially penetrate through the first air guide hole 7 on the stage base 1, the air guide groove 11 on the adsorption bottom plate 8 and the second air guide hole 12 on the adsorption bottom plate 8, so that the top surface of the microporous ceramic adsorption stage unit forms a negative pressure state, and the workpiece is firmly adsorbed and positioned on the top surface platform, so as to perform a process operation on the workpiece.
Above be right the description of the micropore ceramic adsorbs microscope carrier that the embodiment of the utility model provides, to the technical personnel in this field, according to the utility model discloses the thought of embodiment all has the change part on concrete implementation and range of application, to sum up, this description content should not be understood as right the utility model discloses a restriction.

Claims (5)

1. A microporous ceramic adsorption carrying platform is characterized in that the microporous ceramic adsorption carrying platform is formed by splicing N microporous ceramic adsorption carrying platform units, wherein N is an integer greater than 1;
each microporous ceramic adsorption carrier unit comprises a carrier base, a microporous ceramic adsorption block and a filling block;
the micropore ceramic adsorption blocks are arranged on the top surface of the carrier base at intervals, and the filling blocks are arranged in gaps among the micropore ceramic adsorption blocks.
2. The microporous ceramic adsorption carrier of claim 1, wherein bolt holes are formed in the carrier base of each microporous ceramic adsorption carrier unit, and after a plurality of microporous ceramic adsorption carrier units are spliced into an integral carrier structure, the microporous ceramic adsorption carrier units are connected with the adjacent microporous ceramic adsorption carrier units through bolt connection plates.
3. The microporous ceramic adsorption stage of claim 1, wherein through holes are provided between the fillers on the stage base to pass through the top and bottom surfaces of the stage base.
4. The microporous ceramic adsorption carrier of claim 1, wherein the microporous ceramic adsorption block comprises an adsorption base plate and a microporous ceramic adsorption plate;
the bottom surface of the adsorption bottom plate is connected with the top surface of the carrier base, and the top surface of the adsorption bottom plate is connected with the microporous ceramic adsorption plate;
the top surface of the adsorption bottom plate is a groove surface.
5. The microporous ceramic adsorption carrier of claim 4, wherein the adsorption base plate is provided with air holes penetrating from the groove surface to the bottom surface, and the bottom surface of the adsorption base plate is provided with air guide grooves having one ends communicated with the air holes;
the carrying platform base is also provided with an air guide hole which runs through the top surface and the bottom surface of the carrying platform base and is communicated with the other end of the air guide groove.
CN201920370015.5U 2019-03-21 2019-03-21 Microporous ceramic adsorption carrying platform Active CN210046549U (en)

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Application Number Priority Date Filing Date Title
CN201920370015.5U CN210046549U (en) 2019-03-21 2019-03-21 Microporous ceramic adsorption carrying platform

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201920370015.5U CN210046549U (en) 2019-03-21 2019-03-21 Microporous ceramic adsorption carrying platform

Publications (1)

Publication Number Publication Date
CN210046549U true CN210046549U (en) 2020-02-11

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN117124261A (en) * 2023-10-23 2023-11-28 苏州天准科技股份有限公司 Adsorption plate, bellows and compound partition ballast sucking table

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN117124261A (en) * 2023-10-23 2023-11-28 苏州天准科技股份有限公司 Adsorption plate, bellows and compound partition ballast sucking table
CN117124261B (en) * 2023-10-23 2024-01-30 苏州天准科技股份有限公司 Adsorption plate and compound partition adsorption ballast table

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