CN210030871U - Physical vapor deposition device convenient to move - Google Patents
Physical vapor deposition device convenient to move Download PDFInfo
- Publication number
- CN210030871U CN210030871U CN201920602098.6U CN201920602098U CN210030871U CN 210030871 U CN210030871 U CN 210030871U CN 201920602098 U CN201920602098 U CN 201920602098U CN 210030871 U CN210030871 U CN 210030871U
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- vapor deposition
- observation
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Abstract
The utility model provides a physics vapor deposition device convenient to remove, including the vapor deposition case, power control box rotates the case lid, and the sealing washer, joint board can deposit and articulate the moving plate structure, and rotatable joint adsorbs the observation plate structure, can peg graft anti-skidding regulation seat structure, and first connecting pipe, connecting seat, magnetron, second connecting pipe, hoist and mount seat, connecting rod and hoist and mount ring. The arrangement of the movable plate, the directional wheels and the universal wheels of the utility model is beneficial to moving the vapor deposition box, and the vapor deposition box can work at different positions conveniently, thereby increasing the moving function; the arrangement of the observation box door, the observation sheet and the vapor deposition box is beneficial to observing the processing process of the materials in the vapor deposition box, and the observation function is added; the supporting rod, the adjusting pipe, the wing-shaped bolt and the placing plate are arranged, so that the height of the placing plate can be adjusted, and the adjusting work can be conveniently carried out according to the processing requirements of materials.
Description
Technical Field
The utility model belongs to the technical field of the physical vapor deposition, especially, relate to a physical vapor deposition device convenient to remove.
Background
Physical Vapor Deposition (PVD) or Sputtering (Sputtering) deposition techniques are the most widely used thin film fabrication techniques in the semiconductor industry, and generally refer to thin film fabrication processes that employ physical methods to fabricate thin films. The ionization rate of metal atoms is a key indicator of the technology.
However, the existing physical vapor deposition device has the problems of inconvenient movement, observation work in the using process and adjustment work according to the requirements of materials.
Therefore, it is necessary to develop a physical vapor deposition apparatus that is easy to move.
SUMMERY OF THE UTILITY MODEL
In order to solve the technical problem, the utility model provides a physical vapor deposition device convenient to remove to there is inconvenient the removing in solving current physical vapor deposition device, and inconvenient in-process of using is observed work and is inconvenient to adjust the problem of work according to the needs of material. A physical vapor deposition device convenient to move comprises a vapor deposition box, a power supply control box, a rotating box cover, a sealing ring, a clamping plate, a storable hanging moving plate structure, a rotatable clamping adsorption observation plate structure, a pluggable anti-skidding adjusting seat structure, a first connecting pipe, a connecting seat, a magnetron, a second connecting pipe, a hoisting seat, a connecting rod and a hoisting ring, wherein the power supply control box is connected to the upper part of the left side of the vapor deposition box through a bolt; the rotary box cover is connected to the left side of the power supply control box through a hinge; the sealing ring is glued to the right side of the vapor deposition box; the clamping plate is connected to the right side of the upper end of the vapor deposition box through a screw; the structure capable of storing the hanging movable plate is arranged at the lower end of the vapor deposition box; the rotatable clamping adsorption observation plate structure is arranged on the right side of the vapor deposition box; the pluggable anti-skid adjusting seat structure is arranged in the middle of the bottom end in the vapor deposition box; the first connecting pipe is connected to the middle position of the upper end of the connecting seat through a bolt; the magnetron is connected to the lower end of the connecting seat through a bolt; the upper end of the first connecting pipe is welded on the second connecting pipe; the hoisting seats are welded on the left side and the right side of the upper end of the vapor deposition box; the lower ends of the connecting rods are respectively in threaded connection with the middle position inside the upper end of the hoisting seat; the hoisting rings are respectively welded at the upper ends of the connecting rods; the structure capable of storing and hanging the movable plate comprises a movable plate, directional wheels, universal wheels, a traction rod, a hanging ring and a storage barrel, wherein the directional wheels are respectively connected to the left side of the lower end of the movable plate through bolts; the universal wheels are respectively connected to the left side of the lower end of the moving plate through bolts; the draw bar is connected to the middle position of the left side of the upper end of the movable plate through a bolt; the hanging ring penetrates through the middle position inside the upper end of the traction rod; the storage barrel is connected to the left side of the upper end of the moving plate through a bolt.
Preferably, the rotatable clamping adsorption observation plate structure comprises an observation box door, an observation piece, an adsorption block, a T-shaped clamping rod, a U-shaped handle rod and an anti-skidding sleeve, wherein the observation piece is embedded in the middle of the inside of the observation box door; the adsorption blocks are respectively embedded in the middle position inside the upper end and the middle position inside the lower end of the observation box door; the lower end of the T-shaped clamping rod is coupled to the front position of the upper part of the right side of the observation box door; the U-shaped handle is welded in the middle position of the front of the right side of the observation box door; the anti-slip sleeve is sleeved in the middle of the outer wall of the U-shaped handlebar.
Preferably, the pluggable anti-skid adjusting seat structure comprises a supporting rod, an adjusting pipe, a wing-shaped bolt, a placing plate, an anti-skid pad and an anti-falling plate, wherein the upper end of the supporting rod is plugged in the middle of the inner part of the lower end of the adjusting pipe; the wing-shaped bolt is in threaded connection with the lower part of the right side of the adjusting pipe; the upper end of the adjusting pipe is welded in the middle of the lower end of the placing plate; the anti-skid pad is glued at the upper end of the placing plate; the anti-falling plates are respectively welded at the left side and the right side of the upper end of the placing plate.
Preferably, the storage barrel is a stainless steel barrel; the storage barrel is arranged on the right side of the traction rod.
Preferably, the connecting rod is a stainless steel threaded rod; the hoisting ring is a stainless steel ring; the sealing ring is a silica gel ring; the clamping plate is a stainless steel plate with a groove formed in the right side of the front surface.
Preferably, the vapor deposition box is bolted to the middle position of the right side of the moving plate.
Preferably, the anti-skid sleeve is a rubber sleeve with cross-shaped anti-skid lines on the outer wall; the observation sheet is a toughened glass sheet; the adsorption block adopts a magnet block.
Preferably, the observation box door is connected to the right side of the vapor deposition box through a hinge; the observation box door is arranged on the right side of the sealing ring.
Preferably, the anti-dropping plate is a stainless steel plate; the anti-slip mat adopts a rubber mat with straight anti-slip lines at the upper end.
Preferably, the lower end of the support rod is welded at the middle position of the bottom end in the vapor deposition box.
Preferably, the magnetron is a magnetron with the model number M24 FB-610A.
Compared with the prior art, the beneficial effects of the utility model are that:
1. the utility model discloses in, the movable plate, the setting of directional wheel and universal wheel is favorable to removing the vapor deposition case, makes things convenient for the vapor deposition case to carry out work in the position of difference, increases the removal function.
2. The utility model discloses in, the observation chamber door, the setting of observation piece and vapor deposition case is favorable to observing the course of working of vapor deposition incasement portion material, increases and observes the function.
3. The utility model discloses in, bracing piece, control tube, wing bolt and the setting of placing the board are favorable to adjusting the height of placing the board, the work is adjusted according to the processing needs of material to the convenience.
4. The utility model discloses in, the movable plate, the traction lever and articulate the setting of ring, be favorable to using the external equipment pulling movable plate to drive the vapor deposition case and remove the work of conveniently removing.
5. The utility model discloses in, the movable plate with deposit the setting of bucket, be favorable to depositing the instrument at the in-process that removes, conveniently carry the instrument at the in-process that removes.
6. The utility model discloses in, observation chamber door and the setting of adsorbing the piece, be favorable to placing the material rear and just closing the observation chamber door and prevent to observe the chamber door and rotate the influence work at the in-process of work.
7. The utility model discloses in, the board of placing, the setting of slipmat and anticreep board is favorable to preventing that the material from droing in work and influencing material processing.
8. The utility model discloses in, vapor deposition case, joint board, the setting of observing chamber door and T type joint pole is favorable to at the fixed observation chamber door of in-process of work, prevents to observe the chamber door and rotates.
Drawings
Fig. 1 is a schematic structural diagram of the present invention.
Fig. 2 is a schematic structural view of the present invention, which can store and hang the movable plate structure.
Fig. 3 is a schematic structural view of the rotatable clamping adsorption observation plate structure of the present invention.
Fig. 4 is a schematic structural view of the pluggable anti-slip adjusting seat structure of the present invention.
In the figure:
1. a vapor deposition chamber; 2. a power supply control box; 3. rotating the box cover; 4. a seal ring; 5. a clamping and connecting plate; 6. the hanging movable plate structure can be stored; 61. moving the plate; 62. a directional wheel; 63. a universal wheel; 64. a draw bar; 65. hanging and connecting rings; 66. a storage bucket; 7. the adsorption observation plate structure can be rotationally clamped; 71. an observation box door; 72. an observation sheet; 73. an adsorption block; 74. a T-shaped clamping rod; 75. a U-shaped handle bar; 76. an anti-slip sleeve; 8. the anti-skid adjusting seat structure can be inserted; 81. a support bar; 82. an adjusting tube; 83. a wing bolt; 84. placing the plate; 85. a non-slip mat; 86. an anti-drop plate; 9. a first connecting pipe; 10. a connecting seat; 11. a magnetron; 12. a second connecting pipe; 13. hoisting a seat; 14. a connecting rod; 15. and (6) hoisting a ring.
Detailed Description
The utility model is described in detail with reference to the accompanying drawings, as shown in fig. 1 and fig. 2, a physical vapor deposition device convenient to move comprises a vapor deposition box 1, a power control box 2, a rotary box cover 3, a sealing ring 4, a clamping plate 5, a hanging movable plate structure 6, a rotatable clamping adsorption observation plate structure 7, a pluggable anti-skid adjusting seat structure 8, a first connecting pipe 9, a connecting seat 10, a magnetron 11, a second connecting pipe 12, a hoisting seat 13, a connecting rod 14 and a hoisting ring 15, wherein the power control box 2 is connected with the upper part of the left side of the vapor deposition box 1 through a bolt; the rotary box cover 3 is hinged to the left side of the power supply control box 2; the sealing ring 4 is glued to the right side of the vapor deposition box 1; the clamping plate 5 is connected to the right side of the upper end of the vapor deposition box 1 through screws; the storable hanging movable plate structure 6 is arranged at the lower end of the vapor deposition box 1; the rotatable clamping adsorption observation plate structure 7 is arranged on the right side of the vapor deposition box 1; the pluggable anti-skid adjusting seat structure 8 is arranged in the middle of the bottom end in the vapor deposition box 1; the first connecting pipe 9 is connected to the middle position of the upper end of the connecting seat 10 through a bolt; the magnetron 11 is connected with the lower end of the connecting seat 10 through a bolt; the upper end of the first connecting pipe 9 is welded on the second connecting pipe 12; the hoisting seats 13 are respectively welded at the left side and the right side of the upper end of the vapor deposition box 1; the lower ends of the connecting rods 14 are respectively in threaded connection with the middle position inside the upper end of the hoisting seat 13; the hoisting rings 15 are respectively welded at the upper ends of the connecting rods 14; the structure 6 capable of storing the hanging moving plate comprises a moving plate 61, a directional wheel 62, a universal wheel 63, a draw bar 64, a hanging ring 65 and a storage barrel 66, wherein the directional wheel 62 is respectively connected to the left side of the lower end of the moving plate 61 through bolts; the universal wheels 63 are respectively bolted on the left side of the lower end of the moving plate 61; the draw bar 64 is in bolted connection with the middle position of the left side of the upper end of the moving plate 61; the hitching ring 65 penetrates through the middle position inside the upper end of the traction rod 64; the storage barrel 66 is connected to the left side of the upper end of the moving plate 61 through a bolt; before the work, use outside equipment to articulate the outer wall at articulate ring 65, carry out pulling work to vapor deposition case 1, make vapor deposition case 1 move to suitable position, increase and remove the function, make things convenient for vapor deposition case 1 to carry out work in the position of difference, put into the inside of depositing bucket 66 with the instrument that work needs used, conveniently carry the instrument at the in-process that removes.
In this embodiment, referring to fig. 3, the rotatable clamping adsorption observation plate structure 7 includes an observation box door 71, an observation plate 72, an adsorption block 73, a T-shaped clamping rod 74, a U-shaped handle bar 75 and an anti-slip sleeve 76, wherein the observation plate 72 is embedded in the middle of the inside of the observation box door 71; the adsorption blocks 73 are respectively embedded in the middle position inside the upper end and the middle position inside the lower end of the observation box door 71; the lower end of the T-shaped clamping rod 74 is axially connected with the front position of the upper part of the right side of the observation box door 71; the U-shaped handle 75 is welded at the middle position of the front of the right side of the observation box door 71; the anti-skid sleeve 76 is sleeved in the middle of the outer wall of the U-shaped handle bar 75; when the device is used, the U-shaped handle 75 is grasped to open the observation box door 71, materials are placed in the vapor deposition box 1, then the observation box door 71 is closed to work, the processing progress of the materials is observed and wiped through the observation piece 72, and the observation function is increased.
In this embodiment, referring to fig. 4, the insertable anti-skid adjusting seat structure 8 includes a supporting rod 81, an adjusting tube 82, a wing bolt 83, a placing plate 84, an anti-skid pad 85 and an anti-skid plate 86, wherein the upper end of the supporting rod 81 is inserted into the middle position inside the lower end of the adjusting tube 82; the wing bolt 83 is in threaded connection with the lower part of the right side of the adjusting pipe 82; the upper end of the adjusting pipe 82 is welded at the middle position of the lower end of the placing plate 84; the antiskid pad 85 is glued to the upper end of the placing plate 84; the anti-falling plates 86 are respectively welded at the left side and the right side of the upper end of the placing plate 84; the material is placed at the upper end of the placing plate 84, the lower end of the material is inserted between the anti-falling plates 86, the material is prevented from falling off in the working process, the processing work of the material is influenced, the wing-shaped bolt 83 is loosened if necessary, the height of the placing plate 84 is adjusted according to the processing requirement of the material, and the processing work is convenient to carry out.
In this embodiment, specifically, the storage barrel 66 is a stainless steel barrel; the storage bucket 66 is disposed on the right side of the tow bar 64.
In this embodiment, specifically, the connecting rod 14 is a stainless steel threaded rod; the hoisting ring 15 is a stainless steel ring; the sealing ring 4 is a silica gel ring; the clamping plate 5 is a stainless steel plate with a groove formed in the right side of the front surface.
In this embodiment, specifically, the vapor deposition chamber 1 is bolted to the middle position on the right side of the moving plate 61.
In this embodiment, specifically, the anti-slip sleeve 76 is a rubber sleeve with cross-shaped anti-slip lines on the outer wall; the observation sheet 72 is a toughened glass sheet; the adsorption block 73 is a magnet block.
In this embodiment, specifically, the observation box door 71 is hinged to the right side of the vapor deposition box 1; the observation box door 71 is arranged at the right side of the sealing ring 4.
In this embodiment, specifically, the anti-dropping plate 86 is a stainless steel plate; the anti-slip pad 85 is a rubber pad with linear anti-slip lines at the upper end.
In this embodiment, specifically, the lower end of the support rod 81 is welded at the middle position of the bottom end inside the vapor deposition chamber 1.
In this embodiment, the magnetron 11 is a magnetron of model M24 FB-610A.
Principle of operation
In the utility model, before working, use the outer wall of external equipment articulate in articulate ring 65, carry out pulling work to vapor deposition case 1, make vapor deposition case 1 move to suitable position, increase the removal function, make things convenient for vapor deposition case 1 to carry out work in different positions, put into the inside of depositing bucket 66 with the instrument that work needs used, conveniently carry the instrument in the in-process that removes, during the use, grasp U type barre 75 and open observation chamber door 71, put into the inside of vapor deposition case 1 with the material, then close observation chamber door 71, work, observe the processing progress of wiping the material through observation piece 72, increase the observation function, place the material in the upper end of placing board 84, make the lower extreme of material peg graft between anticreep board 86, prevent that the material from droing in the in-process of work, influence the processing work of material, when necessary, loosen wing bolt 83, the height of the placing plate 84 is adjusted according to the processing requirements of the materials, so that the processing work is convenient.
Utilize technical scheme, or technical personnel in the field are in the utility model discloses under technical scheme's the inspiration, design similar technical scheme, and reach above-mentioned technological effect, all fall into the utility model discloses a protection scope.
Claims (10)
1. The physical vapor deposition device convenient to move is characterized by comprising a vapor deposition box (1), a power supply control box (2), a rotary box cover (3), a sealing ring (4), a clamping plate (5), a storable and hooked movable plate structure (6), a rotatable clamping adsorption observation plate structure (7), a pluggable anti-skidding adjusting seat structure (8), a first connecting pipe (9), a connecting seat (10), a magnetron (11), a second connecting pipe (12), a hoisting seat (13), a connecting rod (14) and a hoisting ring (15), wherein the power supply control box (2) is in bolted connection with the upper part of the left side of the vapor deposition box (1); the rotary box cover (3) is hinged to the left side of the power supply control box (2); the sealing ring (4) is glued to the right side of the vapor deposition box (1); the clamping plate (5) is connected to the right side of the upper end of the vapor deposition box (1) through screws; the structure (6) of the hanging movable plate capable of being stored is arranged at the lower end of the vapor deposition box (1); the rotatable clamping adsorption observation plate structure (7) is arranged on the right side of the vapor deposition box (1); the pluggable anti-skid adjusting seat structure (8) is arranged in the middle of the bottom end in the vapor deposition box (1); the first connecting pipe (9) is connected to the middle position of the upper end of the connecting seat (10) through a bolt; the magnetron (11) is connected to the lower end of the connecting seat (10) through bolts; the upper end of the first connecting pipe (9) is welded on the second connecting pipe (12); the hoisting seats (13) are respectively welded at the left side and the right side of the upper end of the vapor deposition box (1); the lower ends of the connecting rods (14) are respectively in threaded connection with the middle position inside the upper end of the hoisting seat (13); the hoisting rings (15) are respectively welded at the upper ends of the connecting rods (14); the structure (6) capable of storing and hanging the movable plate comprises a movable plate (61), a directional wheel (62), a universal wheel (63), a traction rod (64), a hanging ring (65) and a storage barrel (66), wherein the directional wheel (62) is respectively connected to the left side of the lower end of the movable plate (61) through bolts; the universal wheels (63) are respectively connected to the left side of the lower end of the moving plate (61) through bolts; the draw bar (64) is connected to the middle position of the left side of the upper end of the moving plate (61) through a bolt; the hanging ring (65) penetrates through the middle position inside the upper end of the traction rod (64); the storage barrel (66) is connected to the left side of the upper end of the moving plate (61) through bolts.
2. The PVD device with easy moving of claim 1, wherein the rotatable clamping adsorption observation plate structure (7) comprises an observation box door (71), an observation piece (72), an adsorption block (73), a T-shaped clamping rod (74), a U-shaped handle bar (75) and an anti-slip sleeve (76), the observation piece (72) is embedded in the middle position inside the observation box door (71); the adsorption blocks (73) are respectively embedded in the middle position inside the upper end and the middle position inside the lower end of the observation box door (71); the lower end of the T-shaped clamping rod (74) is axially connected with the front position of the upper part of the right side of the observation box door (71); the U-shaped handle bar (75) is welded at the middle position of the front of the right side of the observation box door (71); the anti-skid sleeve (76) is sleeved in the middle of the outer wall of the U-shaped handle bar (75).
3. The physical vapor deposition device convenient for moving as claimed in claim 1, wherein the pluggable anti-skid adjustment seat structure (8) comprises a support rod (81), an adjustment tube (82), a wing bolt (83), a placing plate (84), an anti-skid pad (85) and an anti-skid plate (86), wherein the upper end of the support rod (81) is plugged in the middle position inside the lower end of the adjustment tube (82); the wing bolt (83) is in threaded connection with the lower part of the right side of the adjusting pipe (82); the upper end of the adjusting pipe (82) is welded at the middle position of the lower end of the placing plate (84); the antiskid pad (85) is glued to the upper end of the placing plate (84); the anti-dropping plates (86) are respectively welded at the left side and the right side of the upper end of the placing plate (84).
4. The physical vapor deposition apparatus for facilitating movement of the apparatus as claimed in claim 1, wherein the storage tub (66) is a stainless steel tub; the storage barrel (66) is arranged on the right side of the traction rod (64).
5. The physical vapor deposition apparatus facilitating movement of the apparatus as claimed in claim 1, wherein the connecting rod (14) is a stainless steel threaded rod; the hoisting ring (15) is a stainless steel ring; the sealing ring (4) is a silica gel ring; the clamping and connecting plate (5) is a stainless steel plate with a groove formed in the right side of the front surface.
6. The physical vapor deposition apparatus facilitating movement according to claim 1, wherein the vapor deposition chamber (1) is bolted to a right middle position of the moving plate (61).
7. The physical vapor deposition apparatus for facilitating movement according to claim 2, wherein the anti-slip cover (76) is a rubber cover with cross-shaped anti-slip lines on the outer wall; the observation sheet (72) is a toughened glass sheet; the adsorption block (73) adopts a magnet block.
8. The PVD equipment with easy movement as recited in claim 2, wherein the observation box door (71) is hinge-connected to the right side of the PVD box (1); the observation box door (71) is arranged on the right side of the sealing ring (4).
9. The physical vapor deposition apparatus facilitating movement according to claim 3, wherein the anti-slip plate (86) is made of a stainless steel plate; the anti-skid pad (85) is a rubber pad with linear anti-skid lines at the upper end.
10. The physical vapor deposition apparatus for facilitating movement according to claim 3, wherein the lower end of the support rod (81) is welded to the middle of the inner bottom end of the vapor deposition chamber (1).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920602098.6U CN210030871U (en) | 2019-04-29 | 2019-04-29 | Physical vapor deposition device convenient to move |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920602098.6U CN210030871U (en) | 2019-04-29 | 2019-04-29 | Physical vapor deposition device convenient to move |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN210030871U true CN210030871U (en) | 2020-02-07 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201920602098.6U Expired - Fee Related CN210030871U (en) | 2019-04-29 | 2019-04-29 | Physical vapor deposition device convenient to move |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN210030871U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111969440A (en) * | 2020-08-23 | 2020-11-20 | 侯广珍 | Multifunctional switch cabinet convenient to maintain |
-
2019
- 2019-04-29 CN CN201920602098.6U patent/CN210030871U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111969440A (en) * | 2020-08-23 | 2020-11-20 | 侯广珍 | Multifunctional switch cabinet convenient to maintain |
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| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20200207 Termination date: 20210429 |
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| CF01 | Termination of patent right due to non-payment of annual fee |