CN210022408U - Device and system for crushing polycrystalline silicon rod - Google Patents

Device and system for crushing polycrystalline silicon rod Download PDF

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Publication number
CN210022408U
CN210022408U CN201821970101.1U CN201821970101U CN210022408U CN 210022408 U CN210022408 U CN 210022408U CN 201821970101 U CN201821970101 U CN 201821970101U CN 210022408 U CN210022408 U CN 210022408U
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polycrystalline silicon
silicon rod
rod
heating
polysilicon
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刘逸枫
李力
陈其国
付绪光
沈峰
阮继政
郭磊
田野
徐浩
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Jiangsu Zhongneng Polysilicon Technology Development Co Ltd
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Jiangsu Zhongneng Polysilicon Technology Development Co Ltd
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Abstract

The utility model discloses a broken device of polycrystalline silicon rod and system. The utility model provides a broken device of polycrystalline silicon rod and system, includes and adopts electromagnetic heating polycrystalline silicon rod, cools off the polycrystalline silicon rod after will heating fast to make polycrystalline silicon rod inside produce stress, make polycrystalline silicon rod breakage. Compared with the prior art, the scheme solves the problems of low impurity pollution and low radiant heating speed and high energy consumption caused by the existing mechanical crushing, improves the production efficiency and reduces the energy consumption.

Description

Device and system for crushing polycrystalline silicon rod
Technical Field
The utility model relates to a preparation field of high-purity polycrystalline silicon, in particular to breaker and system of polycrystalline silicon rod.
Background
Polycrystalline silicon is a main raw material for manufacturing products such as photovoltaic solar cells, and in the method for manufacturing high-purity polycrystalline silicon, the improved siemens method is the mainstream polycrystalline silicon production method at present, and rod-shaped polycrystalline silicon can be harvested by the improved siemens method.
The polycrystalline silicon rod produced from the reducing furnace needs to be crushed into block materials for packaging and storage, and the block materials are also the requirements of ingot casting or czochralski single crystal. At present, the polycrystalline silicon blocks which are crushed to be about 3-200mm by manpower are generally used, and are packaged and sold, so that the waste of human resources is caused, and the pollution is easily caused.
In this respect, patent US2003/0159467a1 discloses crushing of polycrystalline silicon using a jaw crusher comprising tungsten carbide in a cobalt matrix, and patent US7950600B2 discloses a roller crusher, both of which use tungsten carbide as a direct contact with the polycrystalline silicon to reduce contamination, but which, although reduced, has a negative effect on the polycrystalline silicon and, moreover, the life of the components used in the crushing device is unsatisfactory.
The above mechanical crushing method has a risk of metal impurity contamination caused by contact between the polysilicon and the metal surface, so patent CN102836765A discloses a method for crushing polysilicon by using hydroelectric effect, which comprises placing polysilicon in a water pool, wherein the water in the water pool just submerges the polysilicon; the method breaks through the traditional polycrystalline silicon crushing idea, utilizes the hydroelectric effect to crush polycrystalline silicon, can realize large-scale crushing production, has simple process, but easily consumes electrodes, and the consumed electrodes agree to cause impurity pollution.
In order to reduce the metal impurity pollution, the patent CN101508151B adopts a thermodynamic method to break up the polysilicon rod, which adopts a thermodynamic method to obtain an extremely large intercrystalline stress in the polysilicon rod, and the destructive property of the stress is utilized to easily break up the polysilicon rod. The crushing plant comprises: a heating device for heating the polysilicon rod by adopting a thermodynamic method and a quenching device for rapidly cooling the hot silicon rod by adopting a quenching medium. The process and the equipment do not generate fine ions when crushing the polycrystalline silicon rod prepared by any method. The pollution of metal ions such as iron, chromium, nickel and the like cannot be caused in the crushing process, but the electric heating furnace is adopted for heating, so that the energy loss is large, the heating speed is low, the production efficiency is influenced, and meanwhile, a refrigerant is sprayed to the surface of the polycrystalline silicon rod to enable the polycrystalline silicon rod to be quenched, so that the crushed polycrystalline silicon blocks are easy to splash, and equipment failure or potential safety hazards are caused.
Patent CN103816973A discloses a method for breaking polycrystalline silicon without contact, which uses a laser beam to irradiate the polycrystalline silicon rod or the polycrystalline silicon block to heat the local area of the polycrystalline silicon rod or the polycrystalline silicon block instantaneously, the heated local area of the polycrystalline silicon rod or the polycrystalline silicon block expands to generate thermal expansion stress on the surface or in the body of the polycrystalline silicon column or the polycrystalline silicon block, so as to break the polycrystalline silicon rod or the polycrystalline silicon block, in which the laser device providing such high energy is complicated, resulting in high cost. In contrast, patent CN102489372A uses microwave as a heating source to heat the silicon rod and rapidly cool the heated polysilicon rod to break the silicon rod, and although the heating method is changed compared with the prior art, the complexity of the device is reduced, but the cost is still high and the heating speed is slow.
The prior art shows, can't realize best crushing effect through current known technique, the utility model discloses an electromagnetic heating polycrystalline silicon rod produces stress through rapid cooling, realizes polycrystalline silicon rod's breakage, has that rate of heating is fast, implementation device is simple, avoid polluting, productivity gain and reduce cost's advantage.
Disclosure of Invention
The utility model aims to solve the technical problem that a simple and effectual polycrystalline silicon rod breaker and system is provided with impurity pollution and the lower problem of efficiency of solving the broken mode of current mechanical breakage and high-pressure water pressure and leading to.
Based on the utility model discloses, a polycrystalline silicon breaker and system are provided, include: a heating system (5) using an electromagnetic heating device as a heat source; a cooling system for cooling the heated polysilicon rod;
the polycrystalline silicon rod cooling system comprises a first water tank (6), a first pipeline (7), a first valve (8), a second water tank (9), a second pipeline (10), a partition plate (11), a second valve (12) and a circulating water pump (13).
Based on the utility model discloses, can have the silicon rod to preheat the system before heating device, preheat before the preferred silicon rod and adopt resistance heating furnace device to preheat.
Preferably, the polysilicon rod is preheated to 150-350 ℃ by a resistance heating furnace before being heated by electromagnetism; preferably, the polycrystalline silicon rod will be heated to 350 ℃ to 850 ℃ by the silicon rod heating system.
Based on the utility model discloses, the electromagnetic heating coil that heating device adopted comprises 2-10 coils, and preferred electromagnetic heating coil is 2-4.
Based on the utility model discloses, have the strutting arrangement by one of them preparation of quartzy or silicon nitride, carborundum, aluminium oxide between the solenoid.
The contact surface of the supporting device between the heating coils and the polycrystalline silicon rod can be semicircular or square, or has no special shape, so that the polycrystalline silicon rod can be stably supported. The height of the supporting device has no special requirement, and a gap of 1-50mm is reserved between the heating electromagnetic coil and the polycrystalline silicon rod, so that the polycrystalline silicon rod can be conveniently placed in the gap by moving the electromagnetic coil.
After the polycrystalline silicon rod is preheated by the preheating zone, the polycrystalline silicon rod is moved from the preheating zone to the heating zone by using the polycrystalline silicon rod supporting device, and the battery heating coils are sleeved on the polycrystalline silicon rod from two sides for further heating. When a plurality of electromagnetic coils are used, the supporting device and the heating coil can be taken out and mounted alternately to complete the use of the plurality of coils.
During the heating process and the moving process before the instantaneous cooling, the polycrystalline silicon rod may be placed in an air atmosphere or an inert atmosphere, preferably in an inert atmosphere, to protect the polycrystalline silicon rod from contamination.
In the moving process before the polycrystalline silicon rod is instantly cooled, a closed non-metal protective liner is adopted for protection, so that the polycrystalline silicon rod is prevented from being polluted;
based on the utility model, the medium for instantly cooling the polysilicon rod adopts liquid nitrogen or high-purity water;
based on the utility model, the temperature of the medium high purity water for instantly cooling the polysilicon is controlled at 0-80 ℃, and the optimal temperature is controlled at 5-40 ℃.
Preferably, the medium for instantaneously cooling the polycrystalline silicon rod is high-purity water.
Use above-mentioned polycrystalline silicon rod breaker and system, at first adopt the electromagnetic heating mode with the polycrystalline silicon rod heating, secondly, the polycrystalline silicon rod after will heating cools off fast to make polycrystalline silicon inside produce stress in the twinkling of an eye and make polycrystalline silicon rod self broken in the twinkling of an eye, avoid producing a large amount of pieces and little silica flour, compare with prior art, the condition of easy pollution that current mechanical breakage leads to and current temperature difference breakage mode rate of heating are slow, implement the device complicacy or expensive, productivity ratio is lower and reduce higher shortcoming.
Drawings
Fig. 1 is a flow chart of a polysilicon breaking device and system according to the present invention, which includes a resistance heating preheating step 1, a step 2 of heating a polysilicon rod by using an electromagnetic heating device as a heat source, and a step 3 of instantly cooling the heated polysilicon rod to obtain an intercrystalline stress in the polysilicon rod.
Fig. 2 is a flowchart of the polysilicon breaking apparatus and system according to the present invention, which does not include the step 1 of preheating the polysilicon rod by resistance heating, and includes only the step 2 of heating the polysilicon rod by using the electromagnetic heating apparatus as a heat source and the step 3 of cooling the heated polysilicon rod in the instant to obtain the intercrystalline stress in the polysilicon rod.
Fig. 3 is a schematic diagram of an embodiment of a polysilicon breaking apparatus and system according to the present invention.
Fig. 4 shows an embodiment of the arrangement of the electromagnetic coil and the silicon rod supporting device during electromagnetic heating of polysilicon.
Detailed Description
In the following, the technical solutions in the embodiments of the present invention are clearly and completely described with reference to the accompanying drawings of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, those skilled in the art can implement all other embodiments without creative changes, and all other embodiments belong to the protection scope of the present invention.
FIG. 3 shows an embodiment of the invention in which the polysilicon rod (19) is preheated to 300 ℃ in the preheating system 4 by the first support device (15) and the second support device (17), and is moved to the heating zone (5) by the first support device (15) and the second support device (17) after preheating, heating the polycrystalline silicon rod to 650 ℃ in the heating zone 5 by using a first electromagnetic coil (14), a second electromagnetic coil (16) and a third electromagnetic coil (18), heating the polycrystalline silicon rod to 650 ℃, then placing the polycrystalline silicon rod into a first water tank (6) filled with 10 ℃ high-purity water for instant cooling, generating internal stress breakage due to instant cooling of the polycrystalline silicon rod in the first water tank (6), scattering the broken polycrystalline silicon on a partition plate 11, opening a first valve (8), placing water in the first water tank (6) into a second water tank (9) through a first pipeline (7), and (4) removing the crushed polycrystalline silicon in the first water tank (6) and drying to obtain a dried polycrystalline silicon block. And after the polycrystalline silicon block in the first water tank (6) is removed, opening a second valve (12), and returning the water in the second water tank (9) to the first water tank (6) for reuse by using a circulating water pump (13) through a second pipeline (10). When the temperature of the water in the water tank is higher than 40-50 ℃, high-purity water can be supplemented for cooling, and the temperature of the water can be reduced by a refrigerating device.
The utility model discloses in, the material that supports the heating silicon rod can be ceramic materials such as quartzy or silicon nitride, carborundum, aluminium oxide to avoid polycrystalline silicon rod not polluted by metallic impurity.
In the utility model, when the silicon rod is not required to be preheated, the preheating zone is not required to be set up.
In the present invention, when the medium for cooling the polysilicon rod is liquid nitrogen, additional nitrogen recovery and liquefaction equipment may be provided, but not included in the solution of the present invention.
Although the embodiments of the present invention have been described and illustrated in detail with reference to the accompanying drawings, it is to be understood that various equivalent changes and modifications can be made therein by those skilled in the art according to the concept of the present invention, and that the functional effects thereof are within the scope of the present invention without departing from the spirit of the present invention.

Claims (4)

1. An apparatus and a system for breaking a polycrystalline silicon rod, characterized by comprising:
a preheating system (4) which adopts a resistance heating furnace device as a heat source;
a heating system (5) using an electromagnetic heating device as a heat source;
a cooling system for cooling the heated polysilicon rod;
and the polycrystalline silicon rod cooling system comprises a first water tank (6), a first pipeline (7), a first valve (8), a second water tank (9), a second pipeline (10), a partition plate (11), a second valve (12) and a circulating water pump (13).
2. The apparatus and system for comminuting a rod of polycrystalline silicon as set forth in claim 1, wherein said means for heating the rod of polycrystalline silicon is an electromagnetic heating device.
3. The device and the system for breaking the polycrystalline silicon rod according to claim 1, wherein the preheating device of the polycrystalline silicon rod is a resistance heating device before electromagnetic heating of the silicon rod.
4. The apparatus and system for breaking the polycrystalline silicon rod as set forth in claim 2, wherein the electromagnetic heating coil is comprised of 2 to 10 coils.
CN201821970101.1U 2018-11-28 2018-11-28 Device and system for crushing polycrystalline silicon rod Active CN210022408U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201821970101.1U CN210022408U (en) 2018-11-28 2018-11-28 Device and system for crushing polycrystalline silicon rod

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201821970101.1U CN210022408U (en) 2018-11-28 2018-11-28 Device and system for crushing polycrystalline silicon rod

Publications (1)

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CN210022408U true CN210022408U (en) 2020-02-07

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111229421A (en) * 2018-11-28 2020-06-05 江苏中能硅业科技发展有限公司 Device and method for crushing polycrystalline silicon rod
CN114308317A (en) * 2021-12-22 2022-04-12 亚洲硅业(青海)股份有限公司 Polycrystalline silicon rod crushing system and crushing method

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111229421A (en) * 2018-11-28 2020-06-05 江苏中能硅业科技发展有限公司 Device and method for crushing polycrystalline silicon rod
CN114308317A (en) * 2021-12-22 2022-04-12 亚洲硅业(青海)股份有限公司 Polycrystalline silicon rod crushing system and crushing method

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