CN210012601U - Ultra-high purity nitric acid production line for very large scale integrated circuit - Google Patents
Ultra-high purity nitric acid production line for very large scale integrated circuit Download PDFInfo
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- CN210012601U CN210012601U CN201920267271.1U CN201920267271U CN210012601U CN 210012601 U CN210012601 U CN 210012601U CN 201920267271 U CN201920267271 U CN 201920267271U CN 210012601 U CN210012601 U CN 210012601U
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Abstract
The utility model relates to an ultra-high purity nitric acid production line for a very large scale integrated circuit, which mainly comprises a raw material tank, a rectifying tower, a waste liquid tank, a preheating tower, a first condensing tower, a microfilter, a superheater, a second condensing tower, an ultrafilter, a finished product tank and a waste absorbing tower; the raw material tank is communicated with the rectifying tower, an outlet at the bottom of the rectifying tower is communicated with the waste liquid tank, and an outlet at the top of the rectifying tower is communicated with the preheating tower; an outlet at the top of the preheating tower is sequentially connected in series with a first condensing tower, a micro filter, a superheater, a second condensing tower, an ultrafilter and a finished product tank through pipelines; the waste gas outlets at the tops of the first condensing tower and the second condensing tower are respectively communicated with a waste gas absorbing tower; this production line advances through preheating tower and takes out remaining high temperature solution liquid in the tower to the rectifying column in and carry out the heat exchange with the normal atmospheric temperature raw materials that just got into, preheats the raw materials, reduces the energy consumption of heater, has practiced thrift the cost, carries out twice filtration to nitric acid solution through micro-filter and ultra-filter, makes the nitric acid of output reach super high-purity standard, and simple structure is compact, and the energy consumption reduces, and finished product purity is high, and production efficiency is high.
Description
Technical Field
The utility model relates to an ultra-high purity nitric acid production line for very large scale integrated circuit, which belongs to the technical field of electronic chemical production equipment.
Background
The ultra-clean high-purity chemical reagent is also called microelectronic chemical, is one of the indispensable key chemical materials in the micro-processing and manufacturing process of electronic technology, is mainly used for cleaning and corroding chips, and has significant influence on the finished product rate, the electrical property and the reliability of integrated circuits due to the purity and the cleanliness. Ultra-high purity nitric acid is an important microelectronic chemical reagent, and is usually prepared by purifying and refining industrial nitric acid which has various metal and non-metal impurities. At present, the preparation process of ultra-high purity nitric acid mainly comprises a sub-boiling distillation method, a rectification method and the like, wherein a continuous rectification method is mainly adopted for producing nitric acid in a large scale, nitric acid with the concentration of more than 95% has high volatility and stability, most of impurities contained in the nitric acid are nitrate and have high boiling point, the nitric acid can be separated out in a tower kettle in the rectification process, but the individual impurities with the volatility similar to that of the nitric acid are difficult to remove, so that the impurity content of the general industrial nitric acid can not reach the standard of the ultra-high purity nitric acid after the rectification. Traditional extensive nitric acid is produced line, and the structure is complicated, and the required firing equipment of rectification is more, and the energy consumption is big, and a large amount of waste water waste gas of production are difficult to be handled, also can produce certain influence to the environment.
Disclosure of Invention
The utility model aims to overcome the defects, and provides a super-high-purity nitric acid production line for a very large scale integrated circuit, which has the advantages of simple structure, low energy consumption, high product purity, high production efficiency and cyclic utilization of waste liquid and waste gas.
The purpose of the utility model is realized like this:
an ultra-high purity nitric acid production line for a very large scale integrated circuit is mainly composed of a raw material tank, a rectifying tower, a waste liquid tank, a preheating tower, a first condensing tower, a micro filter, a superheater, a second condensing tower, an ultra filter, a finished product tank and a waste absorption tower; the raw material tank is communicated with the rectifying tower through a pipeline, and a metering valve is arranged on the pipeline between the raw material tank and the rectifying tower; a tower kettle heater is arranged at the bottom of the rectifying tower and communicated with the rectifying tower; a liquid outlet at the bottom of the tower kettle heater is communicated with a waste liquid tank through a pipeline, and a one-way valve is arranged on the pipeline between the tower kettle heater and the waste liquid tank; a liquid outlet of the waste liquid tank is communicated with the rectifying tower through a pipeline, and a circulating pump is arranged on the pipeline between the waste liquid tank and the rectifying tower; the top outlet of the rectifying tower is communicated with the preheating tower through a pipeline, and the bottom liquid outlet of the preheating tower is communicated with the rectifying tower through a pipeline; the top outlet of the preheating tower is communicated with the first condensing tower through a pipeline; the top outlet of the first condensing tower is communicated with the waste absorbing tower through a pipeline; the bottom outlet of the first condensing tower is communicated with the micro filter through a pipeline; the bottom outlet of the micro filter is communicated with the superheater through a pipeline; the top outlet of the superheater is communicated with a second condensation tower through a pipeline, and the top outlet of the second condensation tower is communicated with a waste absorption tower through a pipeline; the bottom outlet of the second condensing tower is communicated with an ultrafilter through a pipeline; the bottom outlet of the ultrafilter is communicated with the finished product tank through a pipeline;
the utility model relates to an ultra-high purity nitric acid production line for a very large scale integrated circuit, a spraying device is arranged at the top of an inner cavity of a waste absorbing tower, and a pure oxygen inlet is arranged on the side wall of the waste absorbing tower; the bottom outlet of the waste absorbing tower is communicated with the rectifying tower through a pipeline, and circulating pumps are arranged on the pipelines of the waste absorbing tower and the rectifying tower;
the utility model relates to an ultra-high purity nitric acid production line for a very large scale integrated circuit, the inner cavity of a waste absorbing tower is provided with glass filler, and the glass filler is positioned below a spraying device;
the utility model relates to an ultra-high purity nitric acid production line for a very large scale integrated circuit, wherein a filter element of a micro-filter adopts a micron-sized PP material filter element;
the utility model relates to an ultra-high purity nitric acid production line for a very large scale integrated circuit, a filter element of an ultra-filter is made of a perfluorinated material, and the precision of the filter element is in a submicron level;
compared with the prior art, the beneficial effects of the utility model are that:
the utility model discloses a set up the preheating tower, the partial gas-liquid after the rectification enters the condensing tower and condenses, another part of remaining high temperature solution in the preheating tower continues the rectification circulation through bottom return line flow in the rectifying tower, the high temperature solution of backward flow enters the rectifying tower and carries out the heat exchange to the normal atmospheric temperature raw materials that just entered and accomplish preheating, has reduced the energy consumption of heater, has practiced thrift the cost; after entering a condensing tower for condensation, gas and liquid are filtered twice through a micro filter and an ultrafilter in sequence, so that the produced nitric acid reaches the ultra-high purity standard; by arranging the waste absorption tower, a small amount of waste gas discharged from the condenser reacts with introduced pure oxygen to generate HNO3, the generated HNO3 is absorbed into nitric acid solution by directly spraying pure water, the nitric acid solution formed by absorbing the waste gas is injected into the rectifying tower through the tower bottom circulating pump to continue circular rectification, no waste liquid and waste gas are generated in the whole production process, and the requirement of environmental protection is met; the production line has the advantages of simple structure, low energy consumption, high product purity and high production efficiency.
Drawings
FIG. 1 is a schematic structural diagram of an ultra-high purity nitric acid production line for a very large scale integrated circuit of the present invention.
Wherein:
the device comprises a raw material tank 1, a rectifying tower 2, a tower kettle heater 3, a waste liquid tank 4, a preheating tower 5, a first condensing tower 6, a micro filter 7, a superheater 8, a second condensing tower 9, an ultra filter 10, a finished product tank 11, a waste absorbing tower 12 and a pure oxygen inlet 13.
Detailed Description
Referring to fig. 1, the utility model relates to an ultra-high purity nitric acid production line for very large scale integrated circuit, which mainly comprises a raw material tank 1, a rectifying tower 2, a waste liquid tank 4, a preheating tower 5, a first condensing tower 6, a micro-filter 7, a superheater 8, a second condensing tower 9, an ultra-filter 10, a finished product tank 11 and a waste absorbing tower 12; the raw material tank 1 is communicated with the rectifying tower 2 through a pipeline, and a metering valve is arranged on the pipeline between the raw material tank 1 and the rectifying tower 2; a tower kettle heater 3 is arranged at the bottom of the rectifying tower 2, and the tower kettle heater 3 is communicated with the rectifying tower 2; a liquid outlet at the bottom of the tower kettle heater 3 is communicated with the waste liquid tank 4 through a pipeline, a one-way valve is arranged on the pipeline between the tower kettle heater 3 and the waste liquid tank 4, and the rectified waste liquid flows into the waste liquid tank 4 through the pipeline; a liquid outlet of the waste liquid tank 4 is communicated with the rectifying tower 2 through a pipeline, and a circulating pump is arranged on the pipeline between the waste liquid tank 4 and the rectifying tower 2; the top outlet of the rectifying tower is communicated with the preheating tower 5 through a pipeline, and the bottom liquid outlet of the preheating tower 5 is communicated with the rectifying tower 2 through a pipeline; the top outlet of the preheating tower 5 is communicated with the first condensing tower 6 through a pipeline; the top outlet of the first condensing tower 6 is communicated with the waste absorbing tower 12 through a pipeline, and NO2 waste gas generated in the condensing process enters the waste absorbing tower 12 through the pipeline; the bottom outlet of the first condensing tower 6 is communicated with a micro filter 7 through a pipeline, and the micro filter 7 is used for carrying out primary filtration on metal ions and granular impurities in gas and liquid; the bottom outlet of the micro filter 7 is communicated with a superheater 8 through a pipeline, and the superheater 8 further heats the saturated steam-water mixture after primary filtration into steam; the top outlet of the superheater 8 is communicated with a second condensing tower 9 through a pipeline, the top outlet of the second condensing tower 9 is communicated with a waste absorbing tower 12 through a pipeline, and NO2 waste gas generated in the condensing process enters the waste absorbing tower 12 through a pipeline; the bottom outlet of the second condensing tower 9 is communicated with an ultra-filter 10 through a pipeline, and the ultra-filter 10 is used for carrying out secondary filtration on metal ions and granular impurities in the condensed gas-liquid; the bottom outlet of the ultrafilter 10 is communicated with the finished product tank 11 through a pipeline, and the high-purity nitric acid which reaches the index after being filtered by the ultrafilter 10 enters the finished product tank 11 for storage;
further, a spraying device is arranged at the top of the inner cavity of the waste absorbing tower 12, a pure oxygen inlet 13 is arranged on the side wall of the waste absorbing tower 12, the pure oxygen reacts with the waste gas NO2 to generate HNO3, and the generated HNO3 is absorbed into a nitric acid solution by directly spraying pure water; the bottom outlet of the waste absorption tower 12 is communicated with the rectifying tower 2 through a pipeline, circulating pumps are arranged on the pipelines of the waste absorption tower 12 and the rectifying tower 2, and nitric acid solution formed by absorbing waste gas is pumped into the rectifying tower 2 for continuous rectification;
preferably, the inner cavity of the waste absorption tower 12 is provided with a glass filler, and the glass filler is positioned below the spraying device, so that the gas-liquid contact area is increased, and the absorption is more sufficient;
preferably, the filter element of the micro-filter 7 is a micron-sized PP filter element, and the filter element filters out impurity metal ions and particulate matters contained in the solution;
preferably, the filter element of the ultrafilter 10 is made of a perfluorinated material, and the precision of the filter element is submicron;
this production line theory of operation:
nitric acid raw materials enter a rectifying tower 2 from a raw material tank 1 through a metering valve according to a specified amount, the raw materials are heated by a tower kettle heater 3 at the bottom of the rectifying tower 2 for rectification and purification, a rectified gas-liquid mixture enters a preheating tower 5, a one-way valve is opened to enable the residual impurity liquid mixture to enter a waste storage tank 4 after the residual impurity liquid mixture is filled with a certain amount, a circulating pump is opened after the waste storage tank 4 is filled with the residual impurity liquid mixture, and waste liquid is conveyed into the rectifying tower 2 for circular rectification; one part of gas and liquid entering the preheating tower 5 enters the condensation tower 6 through a pipeline, the other part of residual high-temperature solution flows back to the rectifying tower 2 through the bottom outlet of the preheating tower 5 to continue rectification circulation, and the high-temperature solution enters the rectifying tower 2 to perform heat exchange on the just-entering normal-temperature raw material to complete preheating, so that the energy consumption of the tower kettle heater 3 is reduced, and the production cost is reduced; the gas-liquid entering the condensation tower I6 is condensed and then enters a micro-filter 7 for primary filtration, impurity metal ions and particles in the solution are primarily filtered, saturated gas-liquid substances after primary filtration enter a superheater 8 for further heating to form steam, then enter a condensation tower II 9 for condensation, the condensed gas-liquid enters an ultrafilter 10 for secondary filtration, the impurity metal ions and the particles contained in the solution are further filtered, the high-purity nitric acid standard is reached, and finally the gas-liquid enters a finished product storage tank 8 for storage; waste gas discharged from the tops of the first condensation tower 6 and the second condensation tower 9 enters the waste absorption tower 12, pure oxygen is introduced for purging, the pure oxygen and the waste gas NO2 react to generate HNO3, generated HNO3 is absorbed into nitric acid solution by directly spraying pure water, a circulating pump at the bottom of the tower is opened, and the nitric acid solution formed by absorbing the waste gas is injected into the rectifying tower 2 for continuous rectification.
In addition: it should be noted that the above-mentioned embodiment is only a preferred embodiment of the present patent, and any modification or improvement made by those skilled in the art based on the above-mentioned conception is within the protection scope of the present patent.
Claims (5)
1. An ultra-high purity nitric acid production line for a very large scale integrated circuit is characterized in that: the device mainly comprises a raw material tank (1), a rectifying tower (2), a waste liquid tank (4), a preheating tower (5), a first condensing tower (6), a micro filter (7), a superheater (8), a second condensing tower (9), an ultra filter (10), a finished product tank (11) and a waste absorbing tower (12); the raw material tank (1) is communicated with the rectifying tower (2) through a pipeline, and a metering valve is arranged on the pipeline between the raw material tank (1) and the rectifying tower (2); a tower kettle heater (3) is arranged at the bottom of the rectifying tower (2), and the tower kettle heater (3) is communicated with the rectifying tower (2); a liquid outlet at the bottom of the tower kettle heater (3) is communicated with the waste liquid tank (4) through a pipeline, and a one-way valve is arranged on the pipeline between the tower kettle heater (3) and the waste liquid tank (4); a liquid outlet of the waste liquid tank (4) is communicated with the rectifying tower (2) through a pipeline, and a circulating pump is arranged on the pipeline between the waste liquid tank (4) and the rectifying tower (2); the top outlet of the rectifying tower is communicated with the preheating tower (5) through a pipeline, and the bottom liquid outlet of the preheating tower (5) is communicated with the rectifying tower (2) through a pipeline; the top outlet of the preheating tower (5) is communicated with the first condensing tower (6) through a pipeline; the top outlet of the first condensing tower (6) is communicated with the waste absorbing tower (12) through a pipeline; the bottom outlet of the first condensing tower (6) is communicated with the micro filter (7) through a pipeline; the bottom outlet of the micro filter (7) is communicated with the superheater (8) through a pipeline; the top outlet of the superheater (8) is communicated with a second condensing tower (9) through a pipeline, and the top outlet of the second condensing tower (9) is communicated with a waste absorbing tower (12) through a pipeline; the bottom outlet of the second condensing tower (9) is communicated with an ultrafilter (10) through a pipeline; the bottom outlet of the ultrafilter (10) is communicated with the finished product tank (11) through a pipeline.
2. The ultra-high purity nitric acid production line for very large scale integrated circuits according to claim 1, wherein: a spraying device is arranged at the top of the inner cavity of the waste absorbing tower (12), and a pure oxygen inlet (13) is arranged on the side wall of the waste absorbing tower (12); and the bottom outlet of the waste absorbing tower (12) is communicated with the rectifying tower (2) through a pipeline, and the pipelines of the waste absorbing tower (12) and the rectifying tower (2) are provided with circulating pumps.
3. The ultra-high purity nitric acid production line for very large scale integrated circuits according to claim 2, wherein: and a glass filler is arranged in the inner cavity of the waste absorbing tower (12) and is positioned below the spraying device.
4. The ultra-high purity nitric acid production line for very large scale integrated circuits according to claim 1, wherein: the filter element of the micro-filter (7) is a micron PP filter element.
5. The ultra-high purity nitric acid production line for very large scale integrated circuits according to claim 1, wherein: the filter element of the ultrafilter (10) is made of perfluoro material, and the precision of the filter element is submicron.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920267271.1U CN210012601U (en) | 2019-03-01 | 2019-03-01 | Ultra-high purity nitric acid production line for very large scale integrated circuit |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920267271.1U CN210012601U (en) | 2019-03-01 | 2019-03-01 | Ultra-high purity nitric acid production line for very large scale integrated circuit |
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| CN210012601U true CN210012601U (en) | 2020-02-04 |
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| CN201920267271.1U Active CN210012601U (en) | 2019-03-01 | 2019-03-01 | Ultra-high purity nitric acid production line for very large scale integrated circuit |
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| CN (1) | CN210012601U (en) |
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Effective date of registration: 20230207 Address after: No. 505, Changjiang East Road, Jiangsu Yangtze River International Chemical Industry Park, Suzhou, Jiangsu 215635 Patentee after: Jiangsu Meiyang Electronic Materials Co.,Ltd. Address before: 214420 Xiangyang Qiaotu, Huashi Town, Jiangyin City, Wuxi City, Jiangsu Province Patentee before: JIANGYIN CHEMICAL REAGENT FACTORY CO.,LTD. |