CN210010066U

CN210010066U - Liquid spraying pipe

Info

Publication number: CN210010066U
Application number: CN201920463271.9U
Authority: CN
Inventors: 张添添; 刘世振; 陈伏宏; 刘家桦; 叶日铨
Original assignee: Huaian Imaging Device Manufacturer Corp
Current assignee: Huaian Imaging Device Manufacturer Corp
Priority date: 2019-04-08
Filing date: 2019-04-08
Publication date: 2020-02-04
Anticipated expiration: 2029-04-08

Abstract

The utility model provides a liquid spraying pipe, which comprises a vacuum outer pipe and a liquid spraying inner pipe, wherein the liquid spraying inner pipe is sleeved in the inner cavity of the vacuum outer pipe, so that a liquid spraying port arranged at one end of the liquid spraying inner pipe is positioned in the inner cavity of the vacuum outer pipe; the vacuum outer tube is provided with a tail end opening, so that the inner cavity of the liquid spraying inner tube is communicated with the outside through the liquid spraying port and the tail end opening, the tail end opening is in an inverted horn shape, and the horn opening faces to a first cavity between the inner wall of the vacuum outer tube and the outer wall of the liquid spraying inner tube. The liquid spraying inner tube in the liquid spraying tube is normally communicated with liquid medicine, the first cavity is connected with vacuum, the vacuum of the first cavity is opened when the liquid spraying process is about to finish, the liquid medicine remained on the side wall of the liquid spraying inner tube flows to the liquid spraying port and can be sucked into the first cavity, the liquid medicine dripping phenomenon caused by the fact that the liquid medicine is remained on the wall of the liquid spraying tube when the liquid medicine does not need to be sprayed is solved, and meanwhile, the process is influenced by the fact that the liquid medicine splashes everywhere when the liquid is sprayed.

Description

Liquid spraying pipe

Technical Field

The utility model relates to a semiconductor technology manufacturing field especially relates to a liquid spray pipe of remaining liquid medicine in elimination inner chamber.

Background

The liquid spraying tube is widely applied to the processes of wet cleaning, photoresist spraying and the like. When the liquid spraying is finished, the liquid medicine is remained in the liquid spraying pipe, and the remained liquid medicine has the possibility of abnormal dripping. In the conventional liquid ejecting tube structure, as shown in fig. 1, a liquid ejecting tube 100 is connected to a vacuum at the end of liquid ejection to suck back the residual liquid medicine, thereby preventing the residual liquid medicine. However, this method has a phenomenon of delayed vacuum response, and cannot suck back the residual liquid medicine immediately, and there still exists a liquid medicine dripping abnormality. Therefore, a better method for sucking back the liquid medicine is designed, the response delay time is eliminated, and the liquid medicine dripping phenomenon is solved.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a spray tube, this spray tube is used for solving and remains the liquid medicine drippage problem that leads to at the spray tube wall because of the liquid medicine.

In order to achieve the above and other related objects, the present invention provides a liquid spraying tube, which comprises an outer vacuum tube and an inner liquid spraying tube, wherein the inner liquid spraying tube is sleeved in an inner cavity of the outer vacuum tube, wherein the inner liquid spraying tube is provided with a liquid spraying port, and the liquid spraying port is located in the inner cavity of the outer vacuum tube; the vacuum outer tube is provided with a tail end opening, so that the inner cavity of the liquid spraying inner tube is communicated with the outside through the liquid spraying port and the tail end opening, and a first cavity between the inner wall of the vacuum outer tube and the outer wall of the liquid spraying inner tube can be in a vacuum state.

Preferably, the shape of the end opening of the vacuum outer tube is an inverted trumpet shape, and the trumpet shape opening faces the first cavity.

Preferably, the tube wall of the vacuum outer tube and the tube wall of the liquid spraying inner tube are sealed.

Preferably, all or a part containing the liquid spraying opening of the liquid spraying inner pipe is positioned in the inner cavity of the vacuum outer pipe.

Preferably, a gap exists between the liquid ejecting opening of the liquid ejecting inner tube and the end opening of the vacuum outer tube.

Preferably, the liquid ejection opening of the liquid ejection inner tube is circular.

Preferably, the inner diameter of the end opening is greater than or equal to the inner diameter of the spray inner tube.

Preferably, the axis of the vacuum outer tube coincides with the axis of the liquid spray inner tube.

Preferably, one end of the first cavity body, which is far away from the end opening, is connected with a vacuum pump body, so that the first cavity body is in a vacuum state.

Preferably, the vacuum outer tube and the liquid spraying inner tube are both made of materials which do not deform under the vacuum condition.

To sum up, the utility model provides an in the hydrojet pipe hydrojet inner tube cup joints in the inner chamber of vacuum outer tube to the hydrojet mouth that makes the hydrojet inner tube is located the inner chamber of vacuum outer tube. The liquid spraying inner tube is normally communicated with liquid medicine, the first cavity between the inner wall of the vacuum outer tube and the outer wall of the liquid spraying inner tube is connected with vacuum, when liquid spraying is about to be finished, the vacuum of the first cavity is opened, and the residual liquid medicine sliding to the liquid spraying opening can be sucked back into the first cavity. Furthermore, the tail end of the vacuum outer tube is in an inverted horn shape, and the horn-shaped opening faces the first cavity, so that liquid medicine can be effectively prevented from being splashed everywhere. Furthermore, the pipe wall of the vacuum outer pipe and the pipe wall of the liquid spraying inner pipe are sealed, so that the liquid medicine is separated from the vacuum pipeline, the pipelines are not affected with each other, the first cavity can be changed into vacuum in advance, and the defect that the vacuum cannot be opened when the liquid medicine is sprayed by the traditional suck-back pipeline is overcome.

Drawings

FIG. 1 is an axial cross-sectional view of a prior art spray tube;

fig. 2 is an axial sectional view of the liquid ejection tube of embodiment 1;

FIG. 1, 100-the wall of the spray tube;

in FIG. 2, 110-vacuum outer tube, 111-open end, 120-inner liquid-ejecting tube, 121-liquid-ejecting port.

Detailed Description

The core thought of the utility model lies in providing a can eliminate the hydrojet pipe that remains liquid medicine drippage, especially when the hydrojet is about to end, can open the vacuum pipe in advance, can eliminate vacuum response delay time like this to avoid leading to remaining liquid medicine drippage's problem because of vacuum response delay time.

In order to realize the idea, the utility model provides a liquid spraying pipe, which comprises a vacuum outer pipe and a liquid spraying inner pipe, wherein the liquid spraying inner pipe is sleeved in the inner cavity of the vacuum outer pipe, the liquid spraying inner pipe is provided with a liquid spraying port, and the liquid spraying port is positioned in the inner cavity of the vacuum outer pipe; the vacuum outer tube is provided with a tail end opening, so that the inner cavity of the liquid spraying inner tube is communicated with the outside through the liquid spraying port and the tail end opening. The liquid spraying inner tube is normally communicated with liquid medicine, the first cavity between the inner wall of the vacuum outer tube and the outer wall of the liquid spraying inner tube is connected with vacuum, when liquid spraying is about to be finished, the vacuum of the first cavity is started, and when liquid spraying is finished, the vacuum of the first cavity can suck the residual liquid medicine which slides to the liquid spraying opening back.

To make the objects, advantages and features of the present invention clearer, the liquid spraying tube of the present invention will be described in further detail with reference to fig. 2. It should be noted that the drawings are in simplified form and are not to precise scale, and are provided for convenience and clarity in order to facilitate the description of the embodiments of the present invention.

Example one

Referring to fig. 2, an axial cross-sectional view of a liquid spraying tube according to a first embodiment of the present invention is shown. The liquid spraying tube of the embodiment comprises an outer vacuum tube 110 and an inner liquid spraying tube 120, wherein the inner liquid spraying tube 120 is sleeved in the inner cavity of the outer vacuum tube 110, the inner liquid spraying tube 120 is provided with a liquid spraying port 121, and the liquid spraying port 121 is located in the inner cavity of the outer vacuum tube; the vacuum outer tube 110 is provided with a terminal opening 111, so that the inner cavity of the spray inner tube 120 is communicated with the outside through the spray opening 121 and the terminal opening 111, and a first cavity between the inner wall of the vacuum outer tube 110 and the outer wall of the spray inner tube 120 can be in a vacuum state.

The liquid medicine is normally circulated in the inner cavity of the inner liquid spraying tube 120, the first cavity between the inner wall of the vacuum outer tube 110 and the outer wall of the inner liquid spraying tube 120 is connected with a vacuum pump, when the liquid spraying process is about to be finished, the vacuum pump is started to enable the first cavity to be vacuum, and the residual liquid medicine sliding to the liquid spraying port 121 can be sucked back into the first cavity when the liquid spraying process is finished, so that the influence on the process quality caused by dripping can be avoided. And because can open the vacuum in advance, avoid appearing the condition that vacuum response delays to avoid remaining liquid medicine drippage.

The end opening of the vacuum outer tube 110 is in an inverted trumpet shape, and the trumpet shape opens towards the first cavity.

The tube wall of the vacuum outer tube 110 and the tube wall of the spray inner tube 120 are sealed. Preferably, the vacuum outer tube 110 and the inner liquid spraying tube 120 do not deform under vacuum, so as to prevent the residual liquid medicine from being blocked due to deformation.

Meanwhile, a gap exists between the liquid ejecting opening 121 of the inner liquid ejecting tube 120 and the end opening 111 of the vacuum outer tube 110, so that residual liquid medicine is sucked into the first cavity from the gap between the liquid ejecting opening 121 and the end opening 111 after flowing out of the liquid ejecting opening 121.

The liquid spraying opening 121 of the inner liquid spraying pipe 120 is circular.

The axis of the vacuum outer tube 110 coincides with the axis of the spray inner tube 120.

It should be noted that all or a portion of the inner liquid spraying tube 120 including the liquid spraying port 121 is located in the inner cavity of the vacuum outer tube 110, and the inner diameter of the end opening 111 is equal to or larger than the inner diameter of the inner liquid spraying tube 120, so that the end opening 111 does not affect the liquid spraying effect of the inner liquid spraying tube 120.

To sum up, in the liquid spraying pipe of the utility model, the whole or the part that contains the hydrojet mouth of hydrojet inner tube cup joints in the inner chamber of vacuum outer tube, the inner chamber of hydrojet inner tube passes through the hydrojet mouth with end opening intercommunication is outside, end opening with there is the gap between the hydrojet mouth, and the liquid medicine is just led to the inner chamber of hydrojet inner tube, and first cavity between the inner wall of vacuum outer tube and the outer wall of hydrojet inner tube connects the vacuum, opens first cavity vacuum when the hydrojet will end, and the landing is to the remaining liquid medicine resorption of hydrojet mouth to first cavity when the hydrojet ends. Meanwhile, the inner diameter of the tail end opening of the vacuum outer tube is equal to that of the vacuum outer tube, and the tail end opening is in an inverted horn shape, so that liquid medicine can be effectively prevented from being splashed everywhere. And the pipe wall of the vacuum outer pipe and the pipe wall of the liquid spraying inner pipe are sealed, so that the liquid medicine and the vacuum pipeline are separated, the pipelines are not influenced with each other, a user can open the vacuum pipeline in advance, and the problem of vacuum response delay in liquid medicine spraying of the traditional resorption pipeline is solved.

The above description is only for the preferred embodiment of the present invention and is not intended to limit the scope of the present invention, and any modification and modification made by those skilled in the art according to the above disclosure are all within the scope of the claims.

Claims

1. A liquid spraying pipe is characterized by comprising a vacuum outer pipe and a liquid spraying inner pipe, wherein the liquid spraying inner pipe is sleeved in an inner cavity of the vacuum outer pipe, the liquid spraying inner pipe is provided with a liquid spraying port, and the liquid spraying port is positioned in the inner cavity of the vacuum outer pipe; the vacuum outer tube is provided with a tail end opening, so that the inner cavity of the liquid spraying inner tube is communicated with the outside through the liquid spraying port and the tail end opening, and a first cavity between the inner wall of the vacuum outer tube and the outer wall of the liquid spraying inner tube can be in a vacuum state.

2. The spray tube of claim 1 wherein the distal opening of the outer vacuum tube is in the shape of an inverted flare with the flare opening facing the first chamber.

3. The spray tube of claim 1, wherein the walls of said outer vacuum tube and said inner spray tube are sealed.

4. The spray tube of claim 1, wherein all or a portion of said spray inner tube containing said spray orifice is located within said vacuum outer tube lumen.

5. The spray tube of claim 1, wherein a gap exists between the spray orifice of the inner tube and the distal opening of the outer vacuum tube.

6. The spray tube of claim 1, wherein said spray opening of said spray tube is circular.

7. The spray tube of claim 1, wherein the distal opening has an inner diameter greater than or equal to an inner diameter of the spray tube.

8. The spray tube of claim 1, wherein the axis of said outer vacuum tube is coincident with the axis of said inner spray tube.

9. The spray tube of claim 1 wherein an end of said first chamber remote from said distal opening is connected to a vacuum pump to place said first chamber under vacuum.

10. The spray tube of any of claims 1-9, wherein said outer vacuum tube and said inner spray tube are made of a material that does not deform under vacuum conditions.