CN210004954U

CN210004954U - laser displacement detector based on CCD

Info

Publication number: CN210004954U
Application number: CN201920268000.8U
Authority: CN
Inventors: 何晓业; 陈佳鑫; 王巍; 张海艇; 汪昭义
Original assignee: University of Science and Technology of China USTC
Current assignee: University of Science and Technology of China USTC
Priority date: 2019-03-04
Filing date: 2019-03-04
Publication date: 2020-01-31
Anticipated expiration: 2029-03-04

Abstract

The utility model discloses an kind laser displacement detector based on CCD, belong to position monitoring technical field, can be applied to different relevant engineering monitoring fields this detector includes the laser instrument, the beam reducer, the CCD detector, multiaxis location adjustment platform, laser instrument mount and detector mount, the laser instrument is fixed in the laser instrument mount and wholly installs on the multiaxis location platform of location benchmark, the beam reducer is fixed on the detector mount and wholly installs on the multiaxis location platform of surveyed the benchmark with the CCD detector, the laser instrument realizes the center alignment through adjusting multiaxis location platform with the detector, the reference position light distribution in the CCD detector through surveying the laser beam for the first time, if location benchmark and surveyed the benchmark emergence offset, acquire the light distribution of laser beam in the CCD detector once more through the detector, can measure the relative deviation of surveyed benchmark and laser alignment benchmark with high accuracy.

Description

laser displacement detector based on CCD

Technical Field

The utility model relates to a position monitoring technology field, in particular to kind of laser displacement detector based on CCD, its monitoring system who is applicable to the change of particle accelerator key component relative position.

Background

The existing laser displacement sensor is measured by using laser technology, and consists of a laser, a laser detector and a measuring circuit, according to the measuring principle, the laser displacement sensor principle is divided into a laser triangulation method and a laser echo analysis method, the laser triangulation method is generally applicable to high-precision, short-distance measurement, and the laser echo analysis method is used for long-distance measurement, the laser triangulation method works in such a way that a laser transmitter emits visible red laser light to the surface of an object to be measured through a lens, the laser light reflected by the object passes through a receiver lens and is received by an internal CCD linear camera, the CCD linear camera can "see" the light spot at different angles according to different distances, a digital signal processor calculates the distance between the sensor and the object to be measured according to the angle and the known distance between the laser and the camera, meanwhile, the light beam is processed by analog and digital circuits at the position of a receiving element, and is analyzed by a microprocessor, corresponding output values are calculated, and standard data signals are proportionally output in an analog window set by a laser beam processing unit, if a switching value output is used, a switching value is conducted in a window set, a laser pulse processing unit is set to reach a distance detection accuracy of a thousand seconds, and a laser beam detection time is obtained by a laser transmitter, a laser beam detector, a receiver is set to detect a laser beam, a laser displacement sensor, a laser beam is directly processed by a laser beam, a laser beam is returned to reach a laser displacement detection unit, a sensor, a laser displacement detection unit is set distance detection unit is set to detect a laser displacement detection unit, a laser displacement detection unit is used, a laser displacement detection unit, a laser displacement detection.

Disclosure of Invention

The utility model aims at providing new CCD based laser displacement detectors.

The utility model adopts the following technical scheme:

the utility model discloses an laser displacement detector based on CCD, including laser instrument 1, beam reducer 3, CCD detector 4, multiaxis location adjustment platform 51, second multiaxis location adjustment platform 52, laser instrument mount and detector mount, laser instrument 1 is fixed in laser instrument mount 7 and wholly installs on multiaxis location adjustment platform 51 of location benchmark, beam reducer 3 and CCD detector 4 are fixed on detector mount 6 and wholly install on the second multiaxis location adjustment platform 52 of being surveyed the benchmark, laser instrument 1 and beam reducer 3, CCD detector 4 realizes the center alignment through adjusting multiaxis location platform.

The utility model discloses a device uses the beam reducer to reduce the processing to the laser beam, and beam reducer 3 guarantees that the center is aimed at with CCD detector 4 through the mechanical structure of detector mount 6.

It should be noted that, by first measuring the light intensity distribution of the reference position of the laser beam in the CCD detector, and when the positioning reference and the measured reference have a positional deviation, the detector acquires the light intensity distribution of the laser beam in the CCD detector again, and the relative deviation between the measured reference and the laser alignment reference can be measured.

It should be noted that, a beam expanding system is integrated inside the laser, and the laser beam emitted from the laser has undergone internal beam expanding processing. The dimensions of the laser are not limited to the scale shown.

It should be noted that: the CCD detector may also be replaced with a CMOS detector.

It should be noted that: the alignment of the CCD detector 4 and the beam reducer 3 can be realized by other mechanical structures, not limited to the mechanical structures mentioned in the present application.

It should be noted that: the beam reducer can be replaced by a beam reducing device with different beam reducing ratios.

It should be noted that: the laser in the invention can be transmitted in a vacuum environment or an atmospheric environment.

It should be noted that th multi-axis positioning table 51 and second multi-axis positioning table 52 may be used only or none at all in a specific situation.

The beneficial effects of the utility model reside in that:

the utility model discloses a laser displacement detector adopts relative displacement detection method, has effectively improved the detection precision adopt relevant algorithm to calculate the light distribution of laser beam in the CCD detector and can obtain the measurement precision of CCD detector quartering pixel size the most.

Drawings

Fig. 1 is the embodiment of the present invention provides a schematic structural diagram of a long-distance laser displacement detection device.

In the figure, 1 is a laser, 2 is a laser beam emitted by the laser, 3 is a beam reducer, 4 is a CCD detector, 51 is an th multi-axis positioning adjusting table, 52 is a second multi-axis positioning adjusting table, 7 is a laser fixing frame, 6 is a detector fixing frame, and 8 is a laser beam after passing through the beam reducer.

Detailed Description

The present invention will be described in further detail in with reference to the accompanying drawings and examples.

In fig. 1, the utility model discloses kinds of laser displacement detector based on CCD include laser instrument 1, beam reducer 3, CCD detector 4, multiaxis location adjustment platform 51, second multiaxis location adjustment platform 52, laser instrument mount and detector mount laser instrument 1 is fixed in laser instrument mount 7 and wholly installs on multiaxis location adjustment platform 51 of location benchmark, beam reducer 3 and CCD detector 4 are fixed on detector mount 6 and wholly install on being surveyed the second multiaxis location adjustment platform 52 of benchmark, laser instrument 1 and beam reducer 3, CCD detector 4 realize the center alignment through multiaxis location platform.

The beam reducer 3 and the CCD detector 4 are ensured to be aligned in the center through the mechanical structure of the detector fixing frame 6. The laser 1 has a beam expanding system integrated therein, and the laser beam 2 emitted from the laser has undergone internal beam expanding processing. The reference position of the laser beam is measured through the CCD detector for the first time, and if the positioning reference and the measured reference are subjected to position deviation, the transverse light spot deviation of the laser beam is obtained through the detector again, and then the relative deviation between the measured reference and the laser alignment reference can be measured.

Claims

The laser displacement detector based on the CCD is characterized by comprising a laser (1), a beam reducer (3), a CCD detector (4), a th multi-axis positioning adjusting table (51), a second multi-axis positioning adjusting table (52), a laser fixing frame (7) and a detector fixing frame (6), wherein the laser (1) is fixed on the laser fixing frame (7) and integrally installed on the th multi-axis positioning adjusting table (51) of a positioning reference, the beam reducer (3) and the CCD detector (4) are fixed on the detector fixing frame (6) and integrally installed on the second multi-axis positioning adjusting table (52) of a measured reference, and the laser (1), the beam reducer (3) and the CCD detector (4) are aligned in a center mode through adjusting the multi-axis positioning tables.
2. The CCD-based laser displacement detector of claim 1, wherein: and a beam reducer is used for reducing the laser beam, and the beam reducer (3) and the CCD detector (4) are ensured to be aligned in the center through a mechanical structure of a detector fixing frame (6).