CN210001925U - optical coating clamp loading device - Google Patents

Abstract

The utility model provides an kind load utensil of optics coating fixture, including the umbelliform planet pot that is used for being located the evaporation source top, the circular shape anchor clamps through-hole has been laid along the circumferencial direction on the planet pot, utensil upper portion has the second ring in the ring that puts up on anchor clamps through-hole upper portion and by the deep anchor clamps through-hole that contracts in the extension of ring lower part, the lower part of second ring contracts in and extends there is the third ring, the th step that ring and second ring junction formed is used for supporting the utensil, the second step that third ring and second ring junction formed is used for bearing anchor clamps, and this scheme can conveniently be fixed with the support of anchor clamps through adopting the ring structure of syllogic, and in addition ring and second ring are as the bearing wall that snatchs, are convenient for taking out anchor clamps and turn-over.

Description

optical coating clamp loading device

Technical Field

The utility model relates to an kinds of utensil for loading optical coating clamp.

Background

In order to improve the efficiency of the coating operation, the vacuum coating equipment is a large machine cavity, so that the coating jig also takes a large jig as a design purpose, at present, except for a small coating jig or a special-shaped coating jig, the common large coating jig is an umbrella-shaped planetary pan, the area of the umbrella-shaped planetary pan is larger than that of a planar coating jig, the amount of coated products distributed on the surface of the jig is correspondingly increased, but the umbrella-shaped planetary pan has a constant inclination angle of , the semiconductor optical coating needs to be carried out at high temperature, and anti-reflection films and high-reflection films need to be coated on two cavity surfaces, so the jig needs to be turned over after the anti-reflection films are coated, the temperature is higher after the coating is carried out, the jig is easily scalded in the cavity, the jig needs to be taken out from holes of the pan, the side wall of the jig needs to be taken out, but the side wall of the jig can not be taken out as a large-section-type clamp for taking out, and a large claw ring can be taken out to bear a smooth ring loading clamp.

Disclosure of Invention

The utility model discloses improve above-mentioned problem, promptly the to-be-solved technical problem of the utility model is that the thick homogeneity of current planet pot need utilize the arc baffle of the different width of the thick difference preparation of outer membrane in the interior to carry out ten minutes troubles repeatedly when adjusting.

kind load optical coating anchor clamps's utensil, including being used for being located the umbelliform planet pot of evaporation source top, the circular shape anchor clamps through-hole has been laid along the circumferencial direction on the planet pot, utensil upper portion has the ring shape coating anchor clamps including the ring of putting up on anchor clamps through-hole upper portion and by the ring lower part extend the second ring in the deep anchor clamps through-hole that contracts in, the lower part of second ring contracts in and extends there is the third ring, the th step face that ring and second ring junction formed is used for supporting the utensil, the second step face that third ring and second ring junction formed is used for bearing the anchor clamps.

step, ring external diameter is 55mm internal diameter and is 2mm for 50mm high, the height of second ring is 50mm for the internal diameter, and the external diameter is 52mm, highly is 9.5 mm, third ring internal diameter is 48mm, and the external diameter is 50mm, highly is 4mm, the aperture of anchor clamps through-hole is 52mm for the external diameter.

steps are carried out, still be provided with the utensil that is used for improving optics coating film planet pot homogeneity between evaporation source and the umbelliform planet pot, kinds of utensils that load optics coating film anchor clamps include the bracing piece, bracing piece upper end lateral part fixedly connected with nose bar, the connecting plate of the vertical setting of nose bar lateral part fixedly connected with, the connecting plate top is fixed with the horizontal baffle fixed plate, be fixed with the baffle on the baffle fixed plate, the connecting plate have on with nose bar complex shaft hole, and use the shaft hole as the centre of a circle along the spacing hole of the multirow of circular-arc arranging, still run through on the bracing piece can with spacing hole complex fixed pin.

, a convex column perpendicular to the baffle fixing plate is fixed on the baffle fixing plate, and the baffle is provided with a plurality of insertion holes for the convex column to be inserted into.

, the baffle plate is multiple and is arranged along the length direction of the baffle fixing plate.

, the support rod has a pin hole for a fixing pin to pass through.

Further , the baffle has multiple layers.

Compared with the prior art, the utility model has the following beneficial effects that the utility model discloses a bracing piece and the fixed mode of connecting plate make the connecting plate be connected with the bracing piece and can easily adjust through the nimble dismouting of spacing hole with the fixed pin, the baffle is connected fixedly with the baffle fixed plate, but adjusting bottom plate and dead lever angle adjusting plate and evaporation source angle, the baffle comprises a cowl, and per two baffles pass through bolted connection into , adjust the homogeneity of outer lane in the planet pot through adjusting the area of coincidence.

Drawings

FIG. 1 is a schematic view of the structure of the optical coating fixture of the present invention.

FIG. 2 is a schematic diagram of a side view of the optical coating fixture-equipped tool of the present invention.

Fig. 3 is a schematic view of the baffle structure of the present invention.

Fig. 4 is a schematic view of the three-dimensional structure of the device for improving the uniformity of the optical coating planetary pot of the present invention.

Fig. 5 is the schematic structural diagram of the appliance connecting plate and the baffle fixing plate for improving the uniformity of the optical coating planetary pot of the utility model.

Fig. 6 is a schematic view of the baffle structure of the apparatus for improving the uniformity of the optical coating planetary pot of the present invention.

Fig. 7 is a schematic side view of the apparatus connection state for improving the uniformity of the optical coating planetary pot of the present invention.

Fig. 8 is the structural diagram of the arrangement of the baffle plates of the apparatus for improving the uniformity of the optical coating planetary pot of the present invention.

Fig. 9 is a schematic diagram of a side view structure of the apparatus for improving the uniformity of the optical coating planetary pot according to the present invention.

Fig. 10 is a structural diagram of the using state of the device for improving the uniformity of the optical coating planetary pot of the present invention.

Detailed Description

The present invention will be described in further detail at with reference to the accompanying drawings and detailed description.

As shown in fig. 1 to 3, an apparatus for loading an optical coating fixture comprises an umbrella-shaped planetary pot 102 disposed above an evaporation source 101, wherein circular fixture through holes 103 are arranged on the planetary pot along a circumferential direction, the upper portion of the apparatus is provided with an th circular ring 10 mounted on the upper portion of the fixture through hole and a th circular ring 20 extending and retracting from the lower portion of the th circular ring and extending into the fixture through hole, the lower portion of the second circular ring extends to form a third circular ring 30 in a retracting manner, a th step surface 110 formed at the joint of the th circular ring 10 and the second circular ring 20 is used for supporting the apparatus, and a second step surface 210 formed at the joint of the third circular ring 30 and the second circular ring 20 is used for carrying the fixture.

In this embodiment, ring external diameter is 55mm internal diameter and is 2mm for 50mm high, the height of second ring is 50mm for the internal diameter, and the external diameter is 52mm, and is 9.5 mm high, third ring internal diameter is 48mm, and the external diameter is 50mm, highly is 4mm, the aperture of anchor clamps through-hole is 52mm for the external diameter.

The size of specific ring, second ring and third ring can be designed according to the size of anchor clamps, and the design can be evenly distributed to the number of anchor clamps through-hole, and the utensil of loading optics coating fixture can carry out the design position according to the demand of anchor clamps position.

When the clamp is used, the instrument is supported on the upper surface of the umbrella-shaped planetary pot 102 by utilizing the -th step surface 110 formed at the joint of the -th ring 10 and the second ring 20, the second step surface 210 formed at the joint of the third ring 30 and the second ring 20 is positioned at the bottom of the second ring 20 at this time so as to form a supporting surface for the clamp, and the clamp is provided with a supporting seat which can be inserted into the pipe diameter of the second ring 20 and is larger than the inner diameter of the third ring 30.

In the second embodiment, as shown in fig. 4 to 9, since the positions of the plated products on the surface of the umbrella-shaped planetary pot are different, the thicknesses of the coated films are different, which affects the uniformity of the films, and also causes that the films cannot be completely deposited at the edges and corners of the plated products, which directly affects the plating effect, since the thicknesses of the films of the inner, middle and outer rings of the planetary pot are not , correction plates are required to correct the thicknesses of the films, so that the thicknesses of the films of the inner, middle and outer rings are , the conventional apparatus can only manufacture arc-shaped baffles with different widths according to the difference between the thicknesses of the inner, middle and outer films, and repeatedly perform experimental confirmation, and the angles between the baffles and the evaporation sources can only be adjusted by manufacturing new connecting rods, which is time consuming and the adjustment direction cannot be repaired, on the basis of embodiment , apparatuses for improving the uniformity of the optical plating planetary pot are provided between the planetary pot and the inner ring, including a supporting rod 40, a protruding rod 410 is fixedly connected to the side of the protruding rod 50 longitudinally provided, a transverse fixing plate 60 is fixed to the top of the connecting plate 60, the connecting plate 70 is provided with a plurality of protruding rods 510, and a plurality of through holes 510, which are matched with the limiting holes 510, and a plurality of through holes which are arranged.

In this embodiment, the protruding rod 410 is fixedly connected to the supporting rod 40, the shaft hole 510 is used as a hinge point with the connecting plate 50, the plurality of rows of limiting holes 520 on the connecting plate 50 use the shaft hole 510 as an axis to adjust the angle between the connecting plate and the supporting rod 40 by adaptation, and then the fixing pin 420 is used for auxiliary fixation.

The fixing pin 420 passes through the pin hole 401 and the limiting hole 420 to fix the connecting plate and the support rod 10, and in actual design, the fixing pin 120 may be replaced by a bolt and fastened and fixed by a nut.

In this embodiment, the two rows of the limiting holes 220 are provided, and the two rows of the limiting holes corresponding to the fixing pins 420 of the supporting rod 10 are longitudinally disposed along the supporting rod 40.

In this embodiment, the baffle fixing plate 60 and the connecting plate are bodies, and the protruding columns and the baffle fixing plate are bodies.

In this embodiment, the baffle fixing plate 60 is fixed with the protruding columns 610 perpendicular to the baffle fixing plate 60, the baffle 70 has insertion holes 710 for the protruding columns 610 to be inserted into, and the insertion holes 710 on the baffle have a plurality of insertion holes, so that the area covered by the baffle on the baffle fixing plate 60 can be satisfied according to the replacement of the positions of the insertion holes 710.

In this embodiment, the baffle 70 has 6 pieces, and the baffle has a plurality of pieces and is arranged along the length direction of the baffle fixing plate.

The baffle 70 has multiple layers and can be overlapped with each other, the insertion holes 710 of each baffle are hung on the convex columns 610, and the shielding area of the baffle on the baffle fixing plate 630 is controlled by adjusting the positions of the insertion holes of the baffle corresponding to the convex columns 610.

As shown in fig. 10, the plate 70 is disposed between the planetary pot 102 and the plating evaporation source 101 by a support rod through which the plating material is evaporated from the planetary pot 102 above the evaporation source 101, thereby facilitating the adjustment of the plating thickness.

In addition to other claims, any technical solution disclosed herein is not limited to any specific technical solution, if it discloses a numerical range, then the disclosed numerical range is a preferred numerical range, and any skilled in the art should understand that the preferred numerical range is only a numerical value with obvious or representative technical effect among a plurality of implementable numerical values.

If the terms , second, etc. are used herein to describe components, it should be understood by those skilled in the art that the terms , second, etc. are used merely to distinguish one component from another in a descriptive sense and are not intended to have a special meaning unless otherwise indicated.

Meanwhile, if the present invention discloses or relates to parts or structures fixedly connected with each other, the fixed connection can be understood as a detachable fixed connection (for example, a connection by bolts or screws), a non-detachable fixed connection (for example, riveting or welding), or an -type structure (for example, manufactured by using a casting process ) unless otherwise stated (except that a -type forming process is obviously impossible).

In addition, the terms used in any technical solutions of the present disclosure as described above for indicating the positional relationship or the shape include the state or the shape similar, analogous or approaching thereto unless otherwise stated.

The utility model provides a anyn part both can be assembled by a plurality of solitary component parts and form, also can be the independent part that body forming process made.

Finally, it should be noted that the above embodiments are only used for illustrating the technical solutions of the present invention and not for limiting the same; although the present invention has been described in detail with reference to preferred embodiments, it should be understood by those skilled in the art that: the invention can be modified or equivalent substituted for some technical features; without departing from the spirit of the present invention, it should be understood that the scope of the claims is intended to cover all such modifications and variations.

Claims (6)

1. The apparatus for loading the optical coating fixture is characterized by comprising an umbrella-shaped planetary pot which is used for being positioned above an evaporation source, wherein circular fixture through holes are distributed in the planetary pot along the circumferential direction, the upper portion of the apparatus is provided with a circular ring which is erected on the upper portion of the fixture through holes and a second circular ring which extends and retracts from the lower portion of a circular ring and extends into the fixture through holes, the lower portion of the second circular ring retracts to extend to form a third circular ring, a step surface formed at the joint of the circular ring and the second circular ring is used for supporting the apparatus, and a second step surface formed at the joint of the third circular ring and the second circular ring is used for bearing the fixture.
2. 2. The optical coating fixture-carrying tool of claim 1, wherein the ring has an outer diameter of 55mm, an inner diameter of 50mm and a height of 2mm, the second ring has a height of 50mm, an outer diameter of 52mm and a height of 9.5 mm, the third ring has an inner diameter of 48mm, an outer diameter of 50mm and a height of 4mm, and the fixture through-hole has an outer diameter of 52 mm.
3. 3. The apparatus for loading an optical coating fixture, according to claim 1, wherein an apparatus for improving the uniformity of the optical coating planetary pot is further disposed between the evaporation source and the umbrella-shaped planetary pot, the apparatus for improving the uniformity of the optical coating planetary pot comprises a support rod, a protruding rod is fixedly connected to a lateral portion of an upper end of the support rod, a longitudinally disposed connecting plate is fixedly connected to a lateral portion of the protruding rod, a transverse baffle fixing plate is fixed to a top portion of the connecting plate, a baffle is fixed to the baffle fixing plate, the connecting plate has a shaft hole matched with the protruding rod and a plurality of rows of limiting holes arranged along an arc shape with the shaft hole as a center, and a fixing pin capable of being matched with the limiting holes penetrates through the support rod.
4. 4. The apparatus for loading an optical coating fixture of claim 3, wherein the baffle fixing plate has a plurality of posts perpendicular to the baffle fixing plate, the baffle has a plurality of holes for receiving the posts.
5. 5. The optical coating fixture-carrying tool of claim 4, wherein the baffle has a plurality of baffles and is arranged along the length direction of the baffle fixing plate.
6. 6. The optical coating fixture-carrying tool as set forth in claim 3, wherein the supporting rod has a pin hole for a fixing pin to pass through.

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