CN209974869U - Evaporation coating equipment - Google Patents
Evaporation coating equipment Download PDFInfo
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- CN209974869U CN209974869U CN201822229932.XU CN201822229932U CN209974869U CN 209974869 U CN209974869 U CN 209974869U CN 201822229932 U CN201822229932 U CN 201822229932U CN 209974869 U CN209974869 U CN 209974869U
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Abstract
The utility model discloses an evaporation coating equipment, include: the evaporation crucible is internally provided with an evaporation source for evaporation; the evaporation crucible is placed above the bracket; a heater layer disposed at an outer periphery of the evaporation crucible; and the weighing device is arranged at the bottom of the bracket and is used for measuring the current weight of the evaporation source in the evaporation crucible. The evaporation coating equipment is provided with the weighing device, so that the residual quantity of raw materials in the evaporation source can be obtained at any time in the working process, and data support is provided for evaporation of the evaporation source; meanwhile, a cooling structure is additionally arranged in the equipment so as to improve the precision of the weighing device.
Description
Technical Field
The utility model relates to a new forms of energy technical field especially relates to an evaporation coating equipment.
Background
In the present day, the energy crisis and the environmental pollution problem are increasingly aggravated, clean energy has become one of the most popular development subjects at present. The utilization of solar power generation is undoubtedly a very promising mode, and the thin-film solar power generation brings great imagination to the development of solar products by the characteristics of lightness, thinness and flexibility. In the process of manufacturing the thin film solar cell, the characteristics of stability, high efficiency and the like of the film made by a metal co-evaporation method are favored by top thin film photovoltaic manufacturing enterprises in the world.
The existing evaporation source evaporation equipment mainly adopts an instrument to detect the percentage of the content of various metal vapors in a cavity and empirical parameters to control the evaporation of an evaporation source. This method has the following disadvantages:
1) only measuring the percentage of the content, and estimating the total amount of evaporation by means of a flux system, wherein the current real-time evaporation rate and the thickness of a formed film cannot be calculated;
2) under the condition that the consumption of the evaporation source is unknown, the residual quantity of raw materials of each evaporation source cannot be accurately known, so that when new evaporation source raw materials need to be replaced cannot be known, the evaporation source can be replaced in advance only through experience, and raw materials are wasted;
3) when the evaporation source residual amount is different, the required evaporation power is also different, at present, a process engineer estimates a residual amount by using the production running time, and manually adjusts the heating power of a source, the result obtained by the estimation method is often inaccurate, the quality of a final product is influenced, and higher requirements are provided for the experience of operators;
4) the process temperatures required by evaporation sources of different manufacturers or batches are different, so that a large amount of time and raw materials are required to search parameters of each batch of raw materials in actual production, and the reduction of the production cost is not facilitated.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide an evaporation coating equipment to solve or at least partially solve above-mentioned at least one problem.
In order to achieve the above object, the present invention provides the following technical solutions:
an evaporation coating apparatus comprising:
the evaporation crucible is internally provided with an evaporation source for evaporation;
the evaporation crucible is placed above the support, and the support comprises at least two support legs;
a heater layer disposed at an outer periphery of the evaporation crucible;
and the weighing device is arranged at the bottom of the support and is used for measuring the current weight of the evaporation source in the evaporation crucible, and the supporting legs are respectively used as weighing sampling points of the weighing device.
Further, the device also comprises a heat insulation plate, wherein the heat insulation plate is arranged between the weighing device and the bottom of the evaporation crucible.
Furthermore, the heating device also comprises a cooling layer, wherein the cooling layer is arranged on the periphery of the heater layer, one end of the cooling layer is communicated with the refrigerant, and the other end of the cooling layer is communicated with the inner cavity of the heat insulation plate.
Further, still include the heat preservation, the heat preservation sets up in between cooling layer and the heater layer.
Furthermore, the number of the supporting legs is three, and the three supporting legs are arranged at the bottom of the evaporation crucible in parallel.
Further, the number of the heat insulation plates is at least two, and each heat insulation plate is arranged along the height direction of the evaporation crucible.
Further, a preset gap is formed between every two adjacent heat insulation plates.
Further, the heat insulation plates are uniformly arranged along the height direction of the evaporation crucible.
Further, the number of the weighing devices is equal to that of the supporting legs, and the weighing devices are correspondingly arranged at the bottoms of the supporting legs one by one.
The utility model provides an evaporation coating equipment can detect the surplus through weighing device's setting, realizes the management that the raw materials is more meticulous, and reduce cost weighs to the evaporation source, realizes carrying out accurate quantization display to remaining raw materials under vacuum environment, carries out automatically regulated as a setting value with the evaporation capacity, improves technological parameter's reproducibility.
Drawings
FIG. 1 is a schematic structural diagram of an embodiment of an evaporation coating apparatus provided by the present invention;
fig. 2 is a block diagram of an embodiment of an evaporation coating control system according to the present invention.
Description of reference numerals:
1-evaporation crucible 2-support 3-heater layer 4-weighing device 5-heat insulation plate
6-cooling layer 7 heat insulation layer
100-weight detecting unit 200-evaporation amount obtaining unit 300-power control unit
400-temperature detection unit
Detailed Description
The principles and features of the present invention are described below in conjunction with the following drawings, the examples given are only intended to illustrate the present invention and are not intended to limit the scope of the present invention.
Referring to fig. 1, fig. 1 is a schematic structural diagram of an embodiment of an evaporation coating apparatus provided in the present invention.
In a specific embodiment, the evaporation coating equipment provided by the utility model comprises an evaporation crucible 1, a bracket 2, a heater layer 3 and a weighing device 4; an evaporation source for evaporation is arranged in the evaporation crucible 1, the evaporation crucible 1 is placed above the support 2, the heater layer 3 is arranged on the periphery of the evaporation crucible 1, the weighing device 4 is arranged at the bottom of the support 2, and the current weight of the evaporation source in the evaporation crucible 1 is measured. In the working process, the current weight of the evaporation source can be obtained at any time through the weighing device 4 arranged at the bottom, the weighing device 4 can be specifically an electronic scale or a platform scale and the like, and the weighed weight data can be displayed through a display screen or can be displayed through a mobile phone, a computer and other terminals.
The support comprises at least two support legs, preferably three support legs, each support leg is correspondingly provided with a weighing device, each support leg is respectively used as a weighing sampling point of the weighing device, and the weighing devices respectively measure the weight value of each support leg, the inclination angle of the evaporation crucible and the gravity center position of the evaporation crucible; the corresponding inclination angle and the gravity center position are set with the preset weight value which is prestored, and under the current inclination angle and the gravity center position state, if the detected weight value is not within the range of the preset weight value and the multiple measurements are not within the range of the preset weight value, the prompt measurement is inaccurate, and faults possibly exist, so that timely early warning of the faults is realized.
Because the weighing device 4 is internally provided with electronic components, when the temperature changes, especially under the high temperature condition, the measurement precision of the weighing device 4 is influenced, therefore, in order to reduce the influence of the high temperature during the reaction on the precision of the weighing device 4, the evaporation coating equipment also comprises a heat insulation plate 5, and the heat insulation plate 5 is arranged between the weighing device 4 and the bottom of the evaporation crucible 1.
The evaporation crucible is characterized in that the number of the heat insulation plates is at least two, the heat insulation plates are arranged along the height direction of the evaporation crucible, a preset gap is reserved between every two adjacent heat insulation plates, and the heat insulation plates are uniformly arranged along the height direction of the evaporation crucible.
Further, this weighing device 4 still includes cooling layer 6, cooling layer 6 set up in the periphery of heater layer 3, just one end and the refrigerant intercommunication of cooling layer 6, the other end with the inner chamber of heat insulating board 5 is linked together to utilize the refrigerant to cool down heat insulating board 5, thereby guarantee weighing device 4's normal atmospheric temperature operation. The number of the weighing devices is equal to that of the supporting legs, and each weighing device is installed at the bottom of each supporting leg in a one-to-one correspondence mode. Specifically, the refrigerant is preferably water, and may be other media capable of performing a cooling heat exchange function, such as air.
After the cooling layer 6 is arranged, in order to avoid the influence of cooling on the heating temperature, heat preservation treatment needs to be carried out on the heater layer 3, namely, the evaporation coating equipment further comprises a heat preservation layer 7, and the heat preservation layer 7 is arranged between the cooling layer 6 and the heater layer 3.
The evaporation coating equipment provided by the utility model is provided with the weighing device 4, so that the residual quantity of the raw materials in the evaporation source can be obtained at any time in the working process, and data support is provided for evaporation of the evaporation source; meanwhile, a cooling structure is additionally arranged in the equipment so as to improve the precision of the weighing device 4.
In addition to the evaporation coating apparatus, the present invention further provides an evaporation source evaporation control system for the evaporation coating apparatus, as shown in fig. 2, the control system includes a weight detecting unit 100, an evaporation amount obtaining unit 200, and a power control unit 300; the weight detection unit 100 is configured to detect the weight of the remaining raw material in the evaporation source in real time, the evaporation amount acquisition unit 200 is configured to acquire the current evaporation amount according to the weight of the remaining raw material detected by the weight detection unit 100 and the working time of the interception source of the start-stop signal for controlling heating, the power control unit 300 is configured to divide the evaporation amount of the evaporation source into at least two percentile positions, determine that the current evaporation amount acquired by the evaporation amount acquisition unit 200 is located at the percentile position, and adjust the heating power according to an adjustment parameter corresponding to the percentile position where the current evaporation amount is located.
The measured values include a weight value at each of the weighing sampling points, an inclination angle of the evaporation crucible, and a position of a center of gravity of the evaporation crucible. The evaporation source evaporation control system further comprises a fault prompting unit, wherein the fault prompting unit is used for comparing a preset weight value of the evaporation crucible in a current inclination angle and gravity center position state with a detected weight value, and if the preset weight value is compared for multiple times, the detected weight value exceeds a threshold range of the preset weight value, and then the fault prompting unit sends an early warning instruction.
The weighing device respectively measures the weight value of each supporting leg, the inclination angle of the evaporation crucible and the gravity center position of the evaporation crucible; the inclination angle and the gravity center position that correspond are set for and have the weight value of predetermineeing in advance, under current inclination angle and gravity center position state, if the weight value that detects is not within the scope of predetermineeing the weight value, and when measuring many times all not within the scope of predetermineeing the weight value, then the trouble suggestion unit is inaccurate through mode suggestion such as output audible and visual alarm signal or send the propelling movement to intelligent terminal, probably has the trouble to the timely early warning of trouble has been realized.
Specifically, in order to improve the adjustment accuracy, the adjustment parameter is the sum of a basic heating given value and an adjustment parameter corresponding to each percentile position, the basic heating given value and the adjustment parameter are different in different percentile positions, and the types of the adopted evaporation sources can be copper, indium, gallium, sodium fluoride, potassium fluoride and the like. When the evaporation capacity is 80-100%, the basic heating is 20%, the maximum heating power is adjusted to be within 10%, the maximum output power is limited, and the large-amplitude oscillation of the evaporation capacity is avoided. By adopting the sectional position adjustment mode, the surplus of the evaporation source can be divided into a plurality of gears, and different adjusting parameters are adopted in different gears to adjust the heating power in a targeted manner, so that the adjusting precision of the heating power is improved.
The above-mentioned percentile bits may be divided into a plurality of percentile bits as needed, theoretically, the greater the number of percentile bit separations, the higher the precision, in this specific embodiment, the problems of precision and operation difficulty are considered comprehensively, and the percentile bit is divided into five percentile bits, that is, the percentile bit includes 0-20% section, 20-40% section, 40-60% section, 60-80% section, and 80-100% section, and when the percentile bit where the current evaporation amount is located is judged, the power control unit 300 compares the percentile bit from the low percentile bit to the high percentile bit in sequence.
Further, in addition to detecting the remaining amount of the evaporation source, in order to distinguish the operation state, a temperature detecting unit 400 is further included, the temperature detecting unit 400 is configured to detect the current temperature of the evaporation source, and the evaporation amount obtaining unit 200 is further configured to compare the current temperature with the basic set temperature, and obtain the current evaporation amount when the current temperature is greater than or equal to the basic set temperature. The working state of the equipment can be judged according to the detected current temperature, if the working state is the initial starting state, the heating power does not need to be adjusted, and if the working state of the equipment is judged to be the normal working state through the detected current temperature, the heating power is adjusted according to the residual weight of the evaporation source.
In the above embodiment, the utility model provides an evaporation source evaporation control system uses the raw materials surplus quantity in the current evaporation source as the basis, feeds back the evaporation rate of evaporation source in real time to carry out filtering and operation in the controller, calculate current evaporation rate, through the mode of segmentation comparison, adjust output more accurately, with the realization with the evaporation rate control of metal evaporation source to the mesh of settlement evaporation rate; meanwhile, the balance can be detected, more refined management of raw materials is realized, the cost is reduced, the evaporation source is weighed, accurate quantitative display of the residual raw materials in a vacuum environment is realized, the evaporation capacity is used as a set value to be automatically adjusted, and the reproducibility of process parameters is improved.
In the description of the present invention, it should be understood that the terms "upper", "lower", "left", "right", "inner", "outer", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplification of description, but do not indicate or imply that the device referred to must have a specific orientation, be constructed and operated in a specific orientation, and should not be construed as limiting the present invention.
Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless specifically limited otherwise.
In the present invention, unless otherwise expressly specified or limited, the terms "mounted," "connected," and the like are to be construed broadly and can include, for example, fixed connections, removable connections, or integral connections. The specific meaning of the above terms in the present invention can be understood according to specific situations by those skilled in the art.
Although embodiments of the present invention have been shown and described, it is understood that the above embodiments are exemplary and should not be construed as limiting the present invention, and that variations, modifications, substitutions and alterations can be made to the above embodiments by those of ordinary skill in the art without departing from the scope of the present invention.
Claims (9)
1. An evaporation coating apparatus, comprising:
the evaporation device comprises an evaporation crucible (1), wherein an evaporation source for evaporation is arranged in the evaporation crucible (1);
a support (2), the evaporation crucible (1) being placed above the support (2), the support comprising at least two support legs;
a heater layer (3), the heater layer (3) being disposed on the outer periphery of the evaporation crucible (1);
the weighing device (4) is arranged at the bottom of the support (2), the current weight of the evaporation source in the evaporation crucible (1) is measured, and each support leg is used as a weighing sampling point of the weighing device.
2. The evaporation coating apparatus according to claim 1, further comprising a heat shield (5), said heat shield (5) being arranged between the weighing device (4) and the bottom of the evaporation crucible (1).
3. The evaporation coating equipment according to claim 2, further comprising a cooling layer (6), wherein the cooling layer (6) is arranged on the periphery of the heater layer (3), and one end of the cooling layer (6) is communicated with the refrigerant and the other end is communicated with the inner cavity of the heat insulation plate (5).
4. The evaporation coating apparatus according to claim 3, further comprising an insulating layer (7), wherein the insulating layer (7) is disposed between the cooling layer (6) and the heater layer (3).
5. The evaporation coating apparatus according to claim 1, wherein the number of the support legs is three, and three support legs are juxtaposed on the bottom of the evaporation crucible.
6. The evaporation coating apparatus according to claim 2, wherein said heat insulating plates (5) are provided in at least two sets, and each of said heat insulating plates (5) is provided in a height direction of said evaporation crucible.
7. The evaporation coating apparatus according to claim 6, wherein a predetermined gap is provided between two adjacent heat insulating plates (5).
8. The evaporation coating apparatus according to claim 6, wherein each of said heat insulating plates (5) is uniformly arranged in a height direction of said evaporation crucible.
9. The evaporation coating apparatus according to any one of claims 1 to 8, wherein the number of the weighing devices (4) is equal to the number of the support legs, and each weighing device is installed at the bottom of each support leg in a one-to-one correspondence.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201822229932.XU CN209974869U (en) | 2018-12-27 | 2018-12-27 | Evaporation coating equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201822229932.XU CN209974869U (en) | 2018-12-27 | 2018-12-27 | Evaporation coating equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209974869U true CN209974869U (en) | 2020-01-21 |
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ID=69250833
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201822229932.XU Active CN209974869U (en) | 2018-12-27 | 2018-12-27 | Evaporation coating equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209974869U (en) |
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2018
- 2018-12-27 CN CN201822229932.XU patent/CN209974869U/en active Active
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| CP03 | Change of name, title or address |
Address after: 100076 6015, 6th floor, building 8, 9 Yingshun Road, Yinghai Town, Daxing District, Beijing Patentee after: Beijing Dingrong Photovoltaic Technology Co.,Ltd. Address before: 3001, room 6, building No. 7, Rongchang East Street, Beijing economic and Technological Development Zone, Beijing, Daxing District 100176, China Patentee before: BEIJING APOLLO DING RONG SOLAR TECHNOLOGY Co.,Ltd. |
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| TR01 | Transfer of patent right |
Effective date of registration: 20210416 Address after: 518054 Guangdong city of Shenzhen province Qianhai Shenzhen Hong Kong cooperation zone before Bay Road No. 1 building 201 room A Patentee after: Shenzhen Zhengyue development and Construction Co.,Ltd. Address before: 100076 6015, 6th floor, building 8, 9 Yingshun Road, Yinghai Town, Daxing District, Beijing Patentee before: Beijing Dingrong Photovoltaic Technology Co.,Ltd. |
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Effective date of registration: 20210914 Address after: 201203 3rd floor, no.665 Zhangjiang Road, China (Shanghai) pilot Free Trade Zone, Pudong New Area, Shanghai Patentee after: Shanghai zuqiang Energy Co.,Ltd. Address before: 518054 Room 201, building A, 1 front Bay Road, Shenzhen Qianhai cooperation zone, Shenzhen, Guangdong Patentee before: Shenzhen Zhengyue development and Construction Co.,Ltd. |
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