CN209946632U - Digital projection direct photosensitive imaging device - Google Patents
Digital projection direct photosensitive imaging device Download PDFInfo
- Publication number
- CN209946632U CN209946632U CN201920646466.7U CN201920646466U CN209946632U CN 209946632 U CN209946632 U CN 209946632U CN 201920646466 U CN201920646466 U CN 201920646466U CN 209946632 U CN209946632 U CN 209946632U
- Authority
- CN
- China
- Prior art keywords
- projector
- photosensitive
- image
- adjusting mechanism
- carrier
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Abstract
A digital projection direct photosensitive imaging device comprises a computer, a machine table, a projector, a photosensitive carrier and an adjusting mechanism, wherein a light source of the projector is an ultraviolet lamp light source, the projector, the photosensitive carrier and the adjusting mechanism are all arranged on the machine table, the projector and the photosensitive carrier are correspondingly arranged, the projector is movably connected with the adjusting mechanism through a base, the adjusting mechanism adjusts the distance between the projector and the photosensitive carrier, and the projector and the adjusting mechanism are both electrically connected with the computer; and (3) utilizing a computer to produce an image needing exposure, projecting the image onto the photosensitive carrier through a projector and exposing the photosensitive carrier. The whole photosensitive imaging operation process is simple and convenient, and the device has simple structure and low production and processing cost.
Description
Technical Field
The utility model relates to an exposure technology field, in particular to projection exposure device.
Background
A lithography machine (maskligner) is also known as a mask alignment exposure machine, an exposure system, a lithography system, etc. Photolithography (Photolithography) refers to the process of making a pattern by light, and a general Photolithography process includes the steps of cleaning and drying the surface of a silicon wafer, priming, spin-coating a photoresist, soft baking, alignment exposure, post-baking, developing, hard baking, etching, and the like.
The prior art discloses a multifunctional LED parallel exposure machine (application number: 201711154058.1), which comprises a shell, support legs, cushion blocks, a working frame structure, a heat dissipation device, a lamp bracket, a lamp source, an auxiliary lighting device and a control panel, wherein the support legs are welded from the left side and the right side of the lower part of the shell; the cushion block is arranged at the middle lower part of the supporting leg; the working frame structure is arranged on the right side of the upper part of the lamp holder. The longitudinal graduated scale is arranged on the slide rail through the adjusting block, so that the transverse position of the exposure part on the working frame body can be conveniently adjusted; the transverse positioning frame is sleeved on the right side of the longitudinal graduated scale, so that the longitudinal position of the exposure part on the working frame body can be conveniently adjusted; the dustproof net is arranged on the right side of the fixed frame, so that dust can be prevented from entering the fixed frame pair, and the heat dissipation effect on the lamp source is further improved by matching with the circulating pipe and the heat dissipation fan; the lamp tube adopts the telescopic plastic corrugated pipe, so that the illuminating angle of the illuminating lamp can be conveniently adjusted, and the using function is further increased.
The principle of such a physical original (film or mask, hereinafter referred to as original) optical transfer exposure imaging device is as follows: the image on the original manuscript is obtained on a carrier coated with the photosensitive material by exposing the original manuscript (a film or a mask plate with black and white patterns) after the original manuscript is in close contact with the photosensitive material, and the image designed on a computer needs to be made into the original manuscript in advance. However, in this way, the following disadvantages exist: 1. the original manuscript is manufactured by using complex process technology and equipment, the process flow required for completing the order is relatively complex, the efficiency is low, and the delivery period is long; 2. the process of making film original has the use of chemical agents (such as developing solution and fixing solution) and the discharge of sewage (the film needs washing after development and fixation); 3. the original and the photosensitive carrier need to be completely attached in the process of transferring the original to the photosensitive carrier, the attaching mode is that the original and the photosensitive carrier are extruded and wrapped by a soft rubber and air in the original and the photosensitive carrier is pumped out to form vacuum, and the original or an exposed object may be deformed in the process of extruding the original and the exposed object to be completely attached by the rubber, so that the size of a pattern on the photosensitive carrier and the size of the original are deviated.
The prior art also discloses an inkjet image forming apparatus and an ink cartridge (application No. 201220666605.0) used for the inkjet image forming apparatus, the ink cartridge of the utility model has a frame body defining an ink storage chamber, the ink storage chamber is internally provided with: a restricting unit, a float member and a first detection member which can be interlocked with the float member; be equipped with the leaded light post in the ink horn framework, the leaded light post forms the recess in detection position department. When the ink in the ink box is sufficient, the first detected part is embedded in the groove, and the light path of the light guide column is conducted; when the ink amount is insufficient, the floater part descends to drive the optical part to move out of the groove, and the light path of the light guide column is cut off; therefore, whether the ink quantity in the ink box is sufficient or not can be judged only by detecting whether the light guide column has or not the light path, the ink box is relatively simple in structure, and reliable ink quantity detection can be realized.
The principle of the inkjet imaging system is: the ink-jet system is used to spray light-blocking ink on photosensitive layer, after the ink is dried, the whole exposure is carried out by ultraviolet ray, at this time the photosensitive layer at the position where the ink is not sprayed is hardened by light, the ink-sprayed position and ink can be washed away by water, so that the picture and text portion can be formed. However, this approach has the disadvantage that 1, the light-blocking ink must have sufficient density to block the uv light upon blanket exposure, requiring the ink layer to have a density greater than 3.0; 2. the ink should have sufficient fluidity to ensure that it does not clog the nozzles; 3. the ink drops can splash to influence the precision; 4. the nozzle can be completed without moving, only a small part can be completed at one time, and the speed is low; 5. the cost of the consumable materials (ink and nozzles) of the system is high; 6. the printing ink is a chemical product, has certain pollution, and needs to be dried and then subjected to post-exposure treatment.
The prior art also discloses a laser multipoint linear mechanical scanning imaging device and a using method thereof (application number: 201811303507.9), the device comprises an exposure platform, a beam and a photosensitive resist bearing platform are arranged on the exposure platform, lasers distributed in an array manner are arranged on the beam, and a driving motor and a rack slide rail are arranged on the exposure platform in a matching manner with the beam; on an exposure platform, a laser and a beam can perform mechanical reciprocating scanning along the X direction and the Y direction by using a driving motor and a rack slide rail; the final image can be carved on a photosensitive glue bearing table coated with photosensitive glue; after the computer analyzes the image, the opening and closing of the laser are controlled according to the specific image, and the scanning exposure of the photosensitive resist is completed; the unexposed colloids were washed away to obtain the final image.
The laser scanning exposure imaging system designs an image by using a computer, and the image is photosensitive-scanned on a carrier coated with a photosensitive material line by line through laser rays, so that the advantage that the designed image on the computer does not need to be made into an original in advance; but the disadvantages are: 1. the exposure is completed by the continuous movement of the exposure head, and each exposure action can only complete a small part of an image, so that the speed is low; 2. The laser only has a narrow wave band of a few nanometers; 3. the laser scanning exposure imaging system is high in price and high in later maintenance cost.
Disclosure of Invention
To the weak point that exists in the above-mentioned technique, the utility model aims at providing a direct sensitization image device of digital projection, utilize the device's projecting apparatus will need the image projection that exposes to the sensitization carrier on, can once accomplish the exposure formation of image of whole pattern, and can adjust the distance between projecting apparatus and the sensitization carrier according to the actual demand, the operation process of whole sensitization formation of image is simple and convenient, and this device simple structure, production and processing cost hang down.
To achieve the above object, the present invention is implemented as follows:
a digital projection direct photosensitive imaging device is characterized by comprising a computer, a machine table, a projector, a photosensitive carrier and an adjusting mechanism, wherein a light source of the projector is an ultraviolet lamp light source, the projector, the photosensitive carrier and the adjusting mechanism are all arranged on the machine table, the projector and the photosensitive carrier are correspondingly arranged, the projector is movably connected with the adjusting mechanism through a base, the adjusting mechanism adjusts the distance between the projector and the photosensitive carrier, and the projector and the adjusting mechanism are both electrically connected with the computer; and (3) utilizing a computer to produce an image needing exposure, projecting the image onto the photosensitive carrier through a projector and exposing the photosensitive carrier. Utilize high definition digital projector's principle, with its application to in the exposure technology field, promoted the production preparation efficiency of exposure formation of image greatly, and can adjust the size of the image that the projecting apparatus projects on the sensitization carrier according to the demand of reality.
Further, adjustment mechanism includes drive assembly, linear guide and an at least lead screw, drive assembly is connected with the lead screw, linear guide and lead screw all set up on the board, just linear guide and lead screw parallel arrangement, be provided with linear bearing and screw-nut on the base, the linear bearing cover is established on linear guide, screw-nut cover is established on the lead screw. The driving assembly drives the screw rod to rotate, drives the screw rod nut to move on the screw rod, further drives the projector on the base to do linear motion along the linear guide rail and the screw rod, and finally achieves adjustment of the distance between the projector and the photosensitive carrier.
Further, the driving assembly comprises a motor, a coupler and a locking nut, the motor is connected with the coupler, and the coupler is connected with the lead screw through the locking nut.
Further, the board includes installation department and supporting part, the installation department links up with the supporting part mutually, adjustment mechanism and projecting apparatus all set up on the installation department, the sensitization carrier sets up on the supporting part.
Further, the light source is an ultraviolet lamp light source with the wavelength of 350-420nm emitted by an LED, a metal halogen lamp or an excimer laser.
Further, the image is a black-and-white image, a white portion of the black-and-white image is a non-pattern portion, and a black portion of the black-and-white image is a pattern portion. Specifically, when the projector outputs an image, light emitted from a position (white) to be exposed is light with a wavelength capable of exposing a photosensitive material on the photosensitive carrier, and the position (black) not to be exposed does not emit light, so that the photosensitive carrier can be completely exposed at one time without exposure.
Further, the image is a color image, the color of the color image is automatically separated by a computer, and the color-separated image is projected and correspondingly marked. When the image is a color image, the computer automatically separates colors of the manufactured color image, then projects the color-separated color images to manufacture different mother plates respectively, and makes alignment marks, and finishes accurate overprinting through the alignment marks. The color separation operation of the computer mentioned here can be realized by computer software, and belongs to the prior art, which is not within the protection scope of the present application.
The device comprises the following specific use steps:
s1: designing and manufacturing an image needing light sensing by using a computer, wherein the image comprises a pattern part and a non-pattern part;
s2: inputting the size parameters of the image on a computer, and adjusting the distance between the projector and the photosensitive carrier by the computer by using an adjusting mechanism to finish focusing;
s3: projecting an image onto a photosensitive carrier by using a projector, wherein a light source of the projector is an ultraviolet lamp light source;
s4: the photosensitive material corresponding to the non-pattern part on the photosensitive carrier is subjected to photopolymerization to form a firm entity, and the photosensitive material corresponding to the pattern part cannot receive light rays and is washed away by water during development, so that photosensitive imaging can be completed.
When the image is a black-and-white image, the white part is a non-pattern part needing exposure, and the black part is a pattern part needing no exposure. When the projector outputs an image, light emitted from a position (white) needing exposure is light with a wavelength capable of exposing a photosensitive material on the photosensitive carrier, and the position (black) not needing exposure does not emit light, so that the photosensitive carrier can be completely exposed at one time without exposure.
When the image is a color image, the color image is automatically separated by the computer, then the color images with different colors are respectively projected to manufacture different mother plates, alignment marks are made, and accurate overprinting is finished through the alignment marks.
The utility model has the advantages that:
1. the image to be exposed is projected onto the photosensitive carrier by using the projector, the whole pattern can be directly exposed and imaged, the photosensitive material of the non-pattern part is subjected to photopolymerization to form a firm entity, and the photosensitive material of the pattern part cannot receive light rays and is washed away by water during development;
2. compared with the optical transfer exposure imaging device of the original manuscript and the production process thereof, the utility model discloses need not pass through the process flow of making the original manuscript, need not use the equipment (such as original manuscript output machine, the automatic developing and developing machine of original manuscript), the material (such as film or mask version), the chemical agent (such as developing solution, fixation solution, original manuscript cleaning solution) and the water (such as original manuscript preparation process development, need the washing after the fixation), avoided the pollution emission in the process of making the original manuscript, reached energy saving and emission reduction's purpose and be favorable to environmental protection promptly;
3. the whole production process of the utility model reduces the large link of the process flow for making the original manuscript, and greatly improves the production delivery speed;
4. the utility model has simple structure, and the manufacturing cost of the whole device is far lower than that of the laser scanning exposure imaging system;
5. the utility model can complete the exposure imaging of the whole pattern at one time, and the imaging speed is far faster than the imaging speed of the laser scanning exposure imaging system and the ink-jet imaging system;
6. compared with an ink-jet imaging system, the utility model has the advantages that one post-exposure technological process is omitted, and the exposure system and the exposure time in the post-exposure technology are saved;
7. the utility model discloses avoided the influence that the tensile influence of vacuum (the size that the tensile influence of vacuum can influence film image and photosensitive material carrier) and printing ink splashes, the image size that obtains with this image device and imaging technology and the image size that the computer designed can be more accurate, effectively reduces its error.
Drawings
Fig. 1 is a front view of a digital projection direct photosensitive imaging device according to an embodiment of the present invention.
Fig. 2 is a top view of a digital projection direct photosensitive imaging device according to an embodiment of the present invention.
Fig. 3 is a partial enlarged view of the drive assembly of fig. 2.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more clearly understood, the present invention is further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
Reference is made to fig. 1-3.
A digital projection direct photosensitive imaging device is characterized by comprising a computer (not shown), a machine table 1, a projector 2, a photosensitive carrier 3 and an adjusting mechanism 4, wherein a light source of the projector 2 is an ultraviolet lamp light source, the projector 2, the photosensitive carrier 3 and the adjusting mechanism 4 are all arranged on the machine table 1, the projector 2 and the photosensitive carrier 3 are correspondingly arranged, the projector 2 is movably connected with the adjusting mechanism 4 through a base 5, the adjusting mechanism 4 adjusts the distance between the projector 2 and the photosensitive carrier 3, and the projector 2 and the adjusting mechanism 4 are both electrically connected with the computer; an image required to be exposed is produced by a computer, and the image is projected to a photosensitive carrier 3 through a projector 2 and is exposed. Utilize high definition digital projector's principle, with its application to in the exposure technology field, promoted the production preparation efficiency of exposure formation of image greatly, and can adjust the size of the image that the projecting apparatus projects on the sensitization carrier according to the demand of reality.
Further, the adjusting mechanism 4 includes a driving assembly 6, a linear guide 7 and at least one lead screw 8, the driving assembly 6 is connected with the lead screw 8, the linear guide 7 and the lead screw 8 are both disposed on the machine platform 1, the linear guide 7 is disposed in parallel with the lead screw 8, a linear bearing 51 and a lead screw nut (not shown) are disposed on the base 5, the linear bearing 51 is sleeved on the linear guide 7, and the lead screw nut is sleeved on the lead screw 8. The driving assembly 6 drives the screw rod 8 to rotate, drives the screw rod nut to move on the screw rod 8, further drives the projector 2 on the base 5 to do linear motion along the linear guide rail 7 and the screw rod 8, and finally realizes the adjustment of the distance between the projector 2 and the photosensitive carrier 3.
Further, the driving assembly 6 comprises a motor 61, a coupler 62 and a locking nut 63, wherein the motor 61 is connected with the coupler 62, and the coupler 62 is connected with the screw 8 through the locking nut 63.
Further, board 1 includes installation department 11 and supporting part 12, and installation department 11 links up with supporting part 12 mutually, and adjustment mechanism 4 and projecting apparatus 2 all set up on installation department 11, and photosensitive carrier 3 sets up on supporting part 12.
Further, the light source is an ultraviolet lamp light source with the wavelength of 350-420nm emitted by an LED, a metal halogen lamp or an excimer laser.
Further, the image is a black-and-white image, a white portion of the black-and-white image is a non-pattern portion, and a black portion of the black-and-white image is a pattern portion. Specifically, when the projector outputs an image, light emitted from a position (white) to be exposed is light with a wavelength capable of exposing a photosensitive material on the photosensitive carrier, and the position (black) not to be exposed does not emit light, so that the photosensitive carrier can be completely exposed at one time without exposure.
Further, the image is a color image, the color of the color image is automatically separated by a computer, and the color-separated image is projected and correspondingly marked. When the image is a color image, the computer automatically separates colors of the manufactured color image, then projects the color-separated color images to manufacture different mother plates respectively, and makes alignment marks, and finishes accurate overprinting through the alignment marks. The color separation operation of the computer mentioned here can be realized by computer software, and belongs to the prior art, which is not within the protection scope of the present application.
The device comprises the following specific use steps:
s1: designing and manufacturing an image needing light sensing by using a computer, wherein the image comprises a pattern part and a non-pattern part;
s2: inputting the size parameters of the image on a computer, and adjusting the distance between the projector and the photosensitive carrier by the computer by using an adjusting mechanism to finish focusing;
s3: projecting an image onto a photosensitive carrier by using a projector, wherein a light source of the projector is an ultraviolet lamp light source;
s4: the photosensitive material corresponding to the non-pattern part on the photosensitive carrier is subjected to photopolymerization to form a firm entity, and the photosensitive material corresponding to the pattern part cannot receive light rays and is washed away by water during development, so that photosensitive imaging can be completed.
When the image is a black-and-white image, the white part is a non-pattern part needing exposure, and the black part is a pattern part needing no exposure. When the projector outputs an image, light emitted from a position (white) needing exposure is light with a wavelength capable of exposing a photosensitive material on the photosensitive carrier, and the position (black) not needing exposure does not emit light, so that the photosensitive carrier can be completely exposed at one time without exposure.
When the image is a color image, the color image is automatically separated by the computer, then the color images with different colors are respectively projected to manufacture different mother plates, alignment marks are made, and accurate overprinting is finished through the alignment marks.
The utility model has the advantages that:
1. the image to be exposed is projected onto the photosensitive carrier by using the projector, the whole pattern can be directly exposed and imaged, the photosensitive material of the non-pattern part is subjected to photopolymerization to form a firm entity, and the photosensitive material of the pattern part cannot receive light rays and is washed away by water during development;
2. compared with the optical transfer exposure imaging device of the original manuscript and the production process thereof, the utility model discloses need not pass through the process flow of making the original manuscript, need not use the equipment (such as original manuscript output machine, the automatic developing and developing machine of original manuscript), the material (such as film or mask version), the chemical agent (such as developing solution, fixation solution, original manuscript cleaning solution) and the water (such as original manuscript preparation process development, need the washing after the fixation), avoided the pollution emission in the process of making the original manuscript, reached energy saving and emission reduction's purpose and be favorable to environmental protection promptly;
3. the whole production process of the utility model reduces the large link of the process flow for making the original manuscript, and greatly improves the production delivery speed;
4. the utility model has simple structure, and the manufacturing cost of the whole device is far lower than that of the laser scanning exposure imaging system;
5. the utility model can complete the exposure imaging of the whole pattern at one time, and the imaging speed is far faster than the imaging speed of the laser scanning exposure imaging system and the ink-jet imaging system;
6. compared with an ink-jet imaging system, the utility model has the advantages that one post-exposure technological process is omitted, and the exposure system and the exposure time in the post-exposure technology are saved;
7. the utility model discloses avoided the influence that the tensile influence of vacuum (the size that the tensile influence of vacuum can influence film image and photosensitive material carrier) and printing ink splashes, the image size that obtains with this image device and imaging technology and the image size that the computer designed can be more accurate, effectively reduces its error.
The above is only a preferred embodiment of the present invention, but the present invention is not limited thereto, and any changes that can be considered by those skilled in the art shall fall within the protection scope of the present invention.
Claims (6)
1. A digital projection direct photosensitive imaging device is characterized by comprising a computer, a machine table, a projector, a photosensitive carrier and an adjusting mechanism, wherein a light source of the projector is an ultraviolet lamp light source, the projector, the photosensitive carrier and the adjusting mechanism are all arranged on the machine table, the projector and the photosensitive carrier are correspondingly arranged, the projector is movably connected with the adjusting mechanism through a base, the adjusting mechanism adjusts the distance between the projector and the photosensitive carrier, and the projector and the adjusting mechanism are both electrically connected with the computer; and (3) utilizing a computer to produce an image needing exposure, projecting the image onto the photosensitive carrier through a projector and exposing the photosensitive carrier.
2. The digital projection direct photosensitive imaging device of claim 1, wherein said adjusting mechanism comprises a driving assembly, a linear guide and at least one lead screw, said driving assembly is connected to the lead screw, said linear guide and the lead screw are both disposed on the machine platform, and said linear guide and the lead screw are disposed in parallel, said base is disposed with a linear bearing and a lead screw nut, said linear bearing is sleeved on the linear guide, and said lead screw nut is sleeved on the lead screw.
3. The digital projection direct photosensitive imaging device of claim 2, wherein said driving assembly comprises a motor, a coupling and a locking nut, said motor is connected with said coupling, said coupling is connected with a lead screw through said locking nut.
4. The digital projection direct photosensitive imaging device of claim 1, wherein the machine comprises a mounting portion and a supporting portion, the mounting portion is connected to the supporting portion, the adjusting mechanism and the projector are both disposed on the mounting portion, and the photosensitive carrier is disposed on the supporting portion.
5. The digital projection direct photosensitive imaging device as claimed in claim 1, wherein the light source is an ultraviolet light source with a wavelength of 350-420nm emitted by an LED, a metal halogen lamp or an excimer laser.
6. The digital projection direct photosensitive imaging device of claim 1, wherein said image is a black and white image, the white portion of said black and white image is a non-pattern portion, and the black portion of said black and white image is a pattern portion.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920646466.7U CN209946632U (en) | 2019-05-07 | 2019-05-07 | Digital projection direct photosensitive imaging device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920646466.7U CN209946632U (en) | 2019-05-07 | 2019-05-07 | Digital projection direct photosensitive imaging device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209946632U true CN209946632U (en) | 2020-01-14 |
Family
ID=69132090
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201920646466.7U Active CN209946632U (en) | 2019-05-07 | 2019-05-07 | Digital projection direct photosensitive imaging device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209946632U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110095949A (en) * | 2019-05-07 | 2019-08-06 | 深圳市博宇佳瑞光电科技有限公司 | A kind of digital projection direct exposure imaging device and its technique |
-
2019
- 2019-05-07 CN CN201920646466.7U patent/CN209946632U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110095949A (en) * | 2019-05-07 | 2019-08-06 | 深圳市博宇佳瑞光电科技有限公司 | A kind of digital projection direct exposure imaging device and its technique |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| TWI672568B (en) | Exposure device | |
| US20090098479A1 (en) | Exposure method and tool | |
| WO2017219618A1 (en) | Forming method | |
| CN1647249A (en) | Exposure apparatus and device fabrication method using the same | |
| CN105954974A (en) | Silkscreen plate laser plate-making equipment and plate-making method thereof | |
| CN1690862A (en) | Method of generating writing pattern, method of forming resist pattern, method of controlling exposure tool | |
| CN209946632U (en) | Digital projection direct photosensitive imaging device | |
| US7948607B2 (en) | Immersion lithography apparatus and method of performing immersion lithography | |
| US5386268A (en) | Exposure unit and method for exposing photosensitive materials | |
| JP4472560B2 (en) | MASKLESS EXPOSURE APPARATUS, ITS EXPOSURE METHOD, AND WIRING BOARD MANUFACTURING METHOD | |
| EP3470210B1 (en) | Three-dimensional printing apparatus | |
| CN205958923U (en) | Silk screen version laser platemaking device | |
| CN110095949A (en) | A kind of digital projection direct exposure imaging device and its technique | |
| CN210348189U (en) | Direct-writing photoetching mechanism | |
| CN114506073A (en) | Surface projection system with auxiliary focusing function and DLP-3D photocuring printing system | |
| TW201636738A (en) | Exposure device and exposure method | |
| JPH0697635A (en) | Method of forming solder resist pattern and mark of printed wiring board | |
| CN212647263U (en) | Exposure equipment | |
| CN112026174B (en) | Device and method for improving 3D printing precision by using DMD dynamic exposure | |
| US20080197294A1 (en) | Manufacturing method of circuit board | |
| CN218585170U (en) | Low-power-consumption high-resolution maskless exposure imaging system | |
| CN219706090U (en) | Movable light source structure and photocuring 3D printer | |
| JP3996794B2 (en) | Exposure method and apparatus | |
| CN115268235A (en) | Double-light-source exposure system of photoetching machine | |
| CN117784534A (en) | Photoetching implementation method and photoetching device of structured light projector |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |