CN209945280U - Concentricity detects instrument - Google Patents
Concentricity detects instrument Download PDFInfo
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- CN209945280U CN209945280U CN201921174108.7U CN201921174108U CN209945280U CN 209945280 U CN209945280 U CN 209945280U CN 201921174108 U CN201921174108 U CN 201921174108U CN 209945280 U CN209945280 U CN 209945280U
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- 238000001514 detection method Methods 0.000 claims abstract description 58
- 239000013078 crystal Substances 0.000 claims abstract description 14
- 238000012360 testing method Methods 0.000 claims description 24
- 238000006073 displacement reaction Methods 0.000 claims description 10
- 238000009434 installation Methods 0.000 abstract description 6
- 238000010586 diagram Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 238000005259 measurement Methods 0.000 description 3
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 239000011261 inert gas Substances 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 238000004321 preservation Methods 0.000 description 1
- 239000002210 silicon-based material Substances 0.000 description 1
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Abstract
The utility model discloses a concentricity detection tool, which is used for detecting the concentricity of a thermal field device in a single crystal furnace and comprises a support shaft which is arranged at the top end of a crucible shaft and extends along the vertical direction; the detection rod is arranged at the top end of the support shaft and used for pointing to the inner wall surface of the thermal field device; the supporting shaft is fixedly connected with the first end of the detection rod; the extending direction of the supporting shaft is perpendicular to the extending direction of the detection rod. The concentricity detection tool is convenient to use, can accurately judge the concentricity of the thermal field device, and solves the problem of low installation efficiency of the thermal field device.
Description
Technical Field
The utility model relates to a single crystal growing furnace makes technical field, especially relates to a concentricity detection instrument.
Background
A single crystal furnace is an apparatus capable of melting a polycrystalline silicon material in an inert gas atmosphere and growing a single crystal silicon by the czochralski method. As shown in fig. 1, the single crystal furnace mainly includes a furnace chamber 01, a crucible shaft 02, a heater 03, a heat-insulating cylinder 04, and a driving device (not shown), wherein the heater 03 and the heat-insulating cylinder 04 are both designed in a cylindrical shape and are coaxially arranged in the furnace chamber 01, the crucible shaft 02 is located at the above-mentioned axial position, and the crucible shaft 02 passes through the bottom of the furnace chamber 01 and is connected with the driving device to realize the lifting and rotation of the crucible.
In the process of installing a single crystal furnace, the concentricity of a thermal field device such as a heater 03 and a heat-insulating cylinder 04 relative to a crucible shaft 02 needs to be detected, at present, a worker often needs to use a scale to measure whether the radial distance between the inner wall surface of the thermal field device and the axis of the crucible shaft 02 is consistent or not to judge the concentricity, and the scale is inconvenient to use and complex to measure and operate and is difficult to ensure that the extending direction of the scale is the axial direction of the crucible shaft 02, so that the measured data is not accurate and the concentricity of the thermal field device is not convenient to judge.
SUMMERY OF THE UTILITY MODEL
The utility model aims at providing a concentricity detects instrument, this concentricity detects instrument convenient to use, can accurately judge the concentricity of thermal field device, has solved the problem that thermal field device installation effectiveness is low.
In order to achieve the above object, the present invention provides a concentricity detection tool for detecting the concentricity of a thermal field device in a single crystal furnace, comprising: the supporting shaft is arranged at the top end of the crucible shaft and extends along the vertical direction; the detection rod is arranged at the top end of the support shaft and used for pointing to the inner wall surface of the thermal field device; the supporting shaft is fixedly connected with the first end of the detection rod; the extending direction of the supporting shaft is perpendicular to the extending direction of the detection rod.
Preferably, the second end of the detection rod has a pointed pointer.
Preferably, the number of the detection rods is two.
Preferably, an angle of 180 degrees is formed between the two detection rods.
Preferably, a laser displacement sensor is arranged at the second end of the detection rod; the display screen is connected with the laser displacement sensor and used for displaying detection data of the laser displacement sensor.
Preferably, the detection rod is a telescopic rod.
Preferably, the detection lever includes: the first end of the adjusting rod is connected with the top end of the supporting shaft, the second end of the adjusting rod is provided with a sliding chute, and a strip-shaped hole is formed in the sliding chute; the extension rod is connected with the sliding groove in a sliding mode.
Preferably, the crucible device further comprises a heightening shaft arranged between the crucible shaft and the supporting shaft, wherein the heightening shaft is detachably connected with the supporting shaft.
Compared with the prior art, the utility model provides a concentricity detects instrument through locating the back shaft the crucible axle in order to supply the measuring staff accurately to detect the concentricity of thermal field device. Particularly, the supporting shaft and the crucible shaft are mutually perpendicular in space, the crucible shaft is used as a center, the supporting shaft is arranged on the crucible shaft, the extending direction of the supporting shaft is consistent with the extending direction of the crucible shaft, the extending direction of the detection rod is the radial direction of the crucible shaft, the rotation of the crucible shaft is further controlled to enable the concentricity detection tool to rotate along with the rotation, and then whether the center of the thermal field device is vertically overlapped with the center of the crucible shaft or not is judged by detecting the distance between the inner wall surface of the thermal field device and the end part of the detection rod for multiple times.
It can be seen that this concentricity detects instrument can guarantee throughout that the extending direction of test rod passes through the preset center of thermal field device, need not the staff and utilizes the scale to carry out the centering step by step and then detect the concentricity of thermal field device again, and then has improved the installation effectiveness of thermal field device.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required to be used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the provided drawings without creative efforts.
FIG. 1 is a schematic view of a concentricity testing tool used in conjunction with a single crystal furnace;
FIG. 2 is a cross-sectional view of the crucible shaft of FIG. 1;
fig. 3 is a schematic structural diagram of a first concentricity testing tool according to an embodiment of the present invention;
FIG. 4 is an exploded view of FIG. 3;
fig. 5 is a schematic structural diagram of a second concentricity testing tool according to an embodiment of the present invention;
wherein,
01-furnace chamber, 02-crucible shaft, 021-through hole, 03-heater, 04-heat preservation cylinder, 1-concentricity detection tool, 2-support shaft, 3-detection rod, 31-adjusting rod, 32-chute, 321-strip hole, 33-extension rod, 331-fixing bolt, 4-heightening shaft, 41-limit shaft shoulder and 42-threaded rod.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
In order to make the technical field of the present invention better understand, the present invention will be described in detail with reference to the accompanying drawings and the detailed description.
Referring to fig. 1 to 5, fig. 1 is a schematic view illustrating a concentricity testing tool according to the present invention used with a single crystal furnace; FIG. 2 is a cross-sectional view of the crucible shaft of FIG. 1; fig. 3 is a schematic structural diagram of a first concentricity testing tool according to an embodiment of the present invention; FIG. 4 is an exploded view of FIG. 3; fig. 5 is a schematic structural diagram of a second concentricity detection tool according to an embodiment of the present invention.
The utility model provides a concentricity detects instrument 1, as 1, 3 to 5 show, this concentricity detects instrument 1 mainly includes back shaft 2 and test bar 3.
The support shaft 2 is provided at the top end of the crucible shaft 02 and keeps the extending direction thereof in conformity with the extending direction of the crucible shaft 02, that is, the support shaft 2 is provided in the vertical direction.
The sensing rod 3 is disposed at the top end of the supporting shaft 2 and extends in a direction perpendicular to the extending direction of the supporting shaft 2, in other words, if the supporting shaft 2 is vertically disposed and connected to the crucible shaft 02, the sensing rod 3 extends in a horizontal direction.
As is clear from the structure of the single crystal furnace in the background art, when the driving device can rotate the crucible shaft 02, the crucible shaft 02 is set as a preset center of the thermal field device, and when the concentricity detection tool 1 is provided to the crucible shaft 02, the detection rod 3 can be rotated about the support shaft 2 as a rotation center. In the process that the crucible shaft 02 drives the concentricity detection tool 1 to rotate, whether the center of the thermal field device is overlapped with the crucible shaft 02 or not is judged by measuring the distance between the detection rod 3 and the inner wall surface of the thermal field device for multiple times. Specifically, if the detected distances are not equal, it indicates that the center of the thermal field device is vertically deviated from the center of the crucible shaft 02, and further, the installation position of the thermal field device needs to be adjusted according to the detected distances to ensure that the axis of the thermal field device is overlapped with the axis of the crucible shaft 02; if the detected distances are equal, the thermal field device is installed in place, and concentricity detection can be performed on other thermal field devices to ensure that the centers of all the thermal field devices in the single crystal furnace are superposed on the axis of the crucible shaft 02, namely, the concentric arrangement of all the thermal field devices is realized.
Preferably, the first end of the detection rod 3 is fixedly connected to the top end of the support shaft 2, and the second end of the detection rod 3 is used to obtain the distance between the detection rod 3 and the inner wall surface of the thermal field device.
The following embodiments are given here for the way in which the support shaft 2 is fixedly connected to the crucible shaft 02:
at present, as shown in fig. 2, a through hole 021 for a connecting bolt to pass through is provided in the crucible shaft 02, the connecting bolt enters the crucible shaft 02 from the top end of the crucible shaft 02 through the through hole 021 and penetrates out from the bottom of the crucible shaft 02 to be fixedly connected with the driving device, so that the crucible shaft 02 is fixedly connected with the driving device, and when the connecting bolt is located at the bottom of the crucible shaft 02, no part is provided in the upper part of the through hole 021, that is, the upper part of the through hole 021 is empty.
Therefore, in the first embodiment, the supporting shaft 2 is inserted into the through hole 021, and preferably, the supporting shaft 2 and the through hole 021 are in interference fit to realize the tight connection between the supporting shaft 2 and the crucible shaft 02, so that the concentricity testing tool 1 can synchronously rotate along with the crucible shaft 02.
To facilitate the measurement of the distance between the second end of the sensing rod 3 and the arc-shaped inner wall surface of the thermal field device, the following two specific embodiments are given here:
in a second embodiment, as shown in fig. 5, the second end of the detection rod 3 is provided with a sharp-angled pointer, preferably, the sharp-angled pointer is in the shape of an isosceles triangle, so that a worker can precisely obtain the distance between the detection rod 3 and the inner wall surface of the thermal field device by using a point (viewed from the vertical direction) at the outer tip of the sharp-angled pointer as a reference, thereby facilitating the worker to precisely adjust the installation position of the thermal field device according to the distance.
It should be noted that two detection rods 3 can be arranged, so that a worker can obtain the distance between the inner wall surfaces of the two thermal field devices and the detection rods 3 at one time. Of course, only one detection rod 3, or three or more detection rods may be provided.
Preferably, the two detection rods 3 are arranged at an angle of 180 °, that is, the two detection rods 3 are arranged in the same straight line direction, and further, the crucible shaft 02 can be rotated by 90 ° to obtain the position deviation of the inner wall surface of the thermal field device relative to the crucible shaft 02 in two perpendicular directions, so that the installation position of the thermal field device can be conveniently and quickly adjusted by a worker. Of course, the two detection rods 3 may form a 90 ° angle or other angles therebetween.
In a third embodiment, the second end of the detection rod 3 is provided with a laser displacement sensor to replace manual measurement of the distance between the second end of the detection rod 3 and the inner wall surface of the thermal field device through the laser displacement sensor, and the concentricity detection device further comprises a display screen connected with the laser displacement sensor, wherein the display screen is used for displaying the measurement data of the laser sensor.
It is preferable that the detection direction of the laser displacement sensor coincides with the extending direction of the detection rod 3; the display screen can be held by a worker or fixed on the detection rod 3.
It can be understood that the models of the single crystal furnace are different, and the radial dimensions of all the thermal field devices in the single crystal furnace are different, and in order to enable a worker to accurately measure the distance between the second end of the detection rod 3 and the inner wall surface of the thermal field device, the detection rod 3 is preferably provided as a telescopic rod.
The following embodiments are given here for the telescopic structure of the detection rod 3:
in a fourth embodiment, as shown in fig. 5, the detecting rod 3 includes an adjusting rod 31 and an extending rod 33. The first end of the adjusting rod 31 is fixedly connected with the top end of the supporting shaft 2, the second end of the adjusting rod 31 is provided with a sliding chute 32, and a strip-shaped hole 321 is formed in the sliding chute 32; extension rod 33 is connected with above-mentioned spout 32 cooperation, and on the one hand, extension rod 33 can move along spout 32, and on the other hand, extension rod 33 can run through extension rod 33 end and above-mentioned bar hole 321 with the position fixing with extension rod 33 on spout 32 through fixing bolt 331, and then realizes that extension rod 33 is connected with spout 32 slidable.
It should be noted that the slide groove 32 extends in a direction away from the support shaft 2, and when the radial dimension of the thermal field device is small, the extension rod 33 is moved toward the support shaft 2 on the slide groove 32 to shorten the length of the entire detection rod 3, and when the radial dimension of the thermal field device is large, the extension rod 33 is moved away from the support shaft 2 on the slide groove 32 to lengthen the length of the entire detection rod 3.
It can be understood that the heights of different thermal field components in the single crystal furnace are different, as shown in fig. 1 by the heater 03 and the heat-preserving cylinder 04, and in order to detect the concentricity of the heat-preserving cylinder 04, the crucible shaft 02 needs to be controlled to move upwards by the driving device, and when the crucible shaft 02 moves to the highest position, the second end of the detection rod 3 is still probably located at a lower height than the top end of the heater 03.
For this purpose, as shown in fig. 3 and 4, the concentricity testing tool 1 further includes a height increasing shaft 4 disposed between the crucible shaft 02 and the supporting shaft 2, and the height increasing shaft 4 is detachably coupled to the supporting shaft 2 so that a worker can adjust the height position of the testing rod 3 according to whether the height increasing shaft 4 is fitted to the supporting shaft 2.
The following specific examples are given here for the structural configuration of the booster shaft 4:
in the fifth embodiment, as shown in fig. 3 and 4, the bottom of the heightening shaft 4 is used to be inserted into the through hole 021, and preferably, the bottom of the heightening shaft 4 and the through hole 021 are in interference fit to realize the fastening connection of the heightening shaft 4 and the crucible shaft 02, and the bottom of the heightening shaft 4 is further provided with a limiting shoulder 41, the size of the limiting shoulder 41 is larger than that of the through hole 021, so that the heightening shaft 4 is prevented from completely entering the through hole 021 by the limiting shoulder 41 abutting against the upper surface of the crucible shaft 02, and further, the part of the heightening shaft 4 above the limiting shoulder 41 plays a role in increasing the horizontal height of the detection rod 3.
Preferably, the top of the heightening shaft 4 is detachably connected with the bottom of the supporting shaft 2 through screw-thread engagement, specifically, as shown in fig. 4, a threaded rod 42 may be disposed on the top of the heightening shaft 4, a threaded hole may be disposed on the bottom of the supporting shaft 2, and the detachable connection between the heightening shaft 4 and the supporting shaft 2 may be realized through engagement of the threaded rod 42 with the threaded hole.
It should be noted that, in the description of the present invention, the directions or positional relationships indicated by "top", "bottom", "vertical" and "horizontal direction" are used based on the directions or positional relationships shown in the drawings, and are only for convenience of description and simplification of description, but not for limiting the designated elements or parts to have specific directions, and therefore, the present invention should not be construed as being limited thereto.
It is right above that the utility model provides a concentricity detects instrument and has introduced in detail. The principles and embodiments of the present invention have been explained herein using specific examples, and the above descriptions of the embodiments are only used to help understand the method and its core ideas of the present invention. It should be noted that, for those skilled in the art, without departing from the principle of the present invention, the present invention can be further modified and modified, and such modifications and modifications also fall within the protection scope of the appended claims.
Claims (8)
1. A concentricity testing tool (1) for testing the concentricity of a thermal field device in a single crystal furnace, comprising:
a supporting shaft (2) which is arranged at the top end of the crucible shaft (02) and extends along the vertical direction;
the detection rod (3) is arranged at the top end of the support shaft (2) and used for pointing to the inner wall surface of the thermal field device;
wherein,
the supporting shaft (2) is fixedly connected with the first end of the detection rod (3);
the extending direction of the supporting shaft (2) is perpendicular to the extending direction of the detection rod (3).
2. Concentricity testing tool (1) according to claim 1, wherein the second end of the testing rod (3) has a pointed pointer.
3. The concentricity testing tool (1) according to claim 2, wherein there are two testing rods (3).
4. The concentricity testing tool (1) according to claim 3, wherein two testing rods (3) enclose an angle of 180 ° between them.
5. Concentricity testing tool (1) according to claim 1,
a laser displacement sensor is arranged at the second end of the detection rod (3);
the display screen is connected with the laser displacement sensor and used for displaying detection data of the laser displacement sensor.
6. The concentricity testing tool (1) according to any one of claims 1 to 5, wherein the testing rod (3) is a telescopic rod.
7. The concentricity testing tool (1) according to claim 6, wherein the testing rod (3) comprises:
the first end of the adjusting rod (31) is connected with the top end of the supporting shaft (2), the second end of the adjusting rod (31) is provided with a sliding groove (32), and a strip-shaped hole (321) is formed in the sliding groove (32);
an extension rod (33), the extension rod (33) being slidably connected with the chute (32).
8. The concentricity testing tool (1) according to claim 7, further comprising a heightening shaft (4) for being disposed between the crucible shaft (02) and the support shaft (2), wherein the heightening shaft (4) is detachably connected to the support shaft (2).
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921174108.7U CN209945280U (en) | 2019-07-24 | 2019-07-24 | Concentricity detects instrument |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921174108.7U CN209945280U (en) | 2019-07-24 | 2019-07-24 | Concentricity detects instrument |
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| CN209945280U true CN209945280U (en) | 2020-01-14 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110274555A (en) * | 2019-07-24 | 2019-09-24 | 晶科能源有限公司 | A kind of concentricity detection tool and method |
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2019
- 2019-07-24 CN CN201921174108.7U patent/CN209945280U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110274555A (en) * | 2019-07-24 | 2019-09-24 | 晶科能源有限公司 | A kind of concentricity detection tool and method |
| CN110274555B (en) * | 2019-07-24 | 2024-08-27 | 晶科能源股份有限公司 | Concentricity detection tool and method |
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