CN209935102U - Spin coater capable of automatically dropping liquid - Google Patents

Spin coater capable of automatically dropping liquid Download PDF

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Publication number
CN209935102U
CN209935102U CN201920309240.8U CN201920309240U CN209935102U CN 209935102 U CN209935102 U CN 209935102U CN 201920309240 U CN201920309240 U CN 201920309240U CN 209935102 U CN209935102 U CN 209935102U
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CN
China
Prior art keywords
steel basin
rigid coupling
dome
pipe
bull stick
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201920309240.8U
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Chinese (zh)
Inventor
不公告发明人
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Chengdu Ruiou Optical Electronics Co Ltd
Original Assignee
Chengdu Ruiou Optical Electronics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Chengdu Ruiou Optical Electronics Co Ltd filed Critical Chengdu Ruiou Optical Electronics Co Ltd
Priority to CN201920309240.8U priority Critical patent/CN209935102U/en
Application granted granted Critical
Publication of CN209935102U publication Critical patent/CN209935102U/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Abstract

The utility model discloses a glue homogenizing machine of dropping liquid automatically, which comprises a bod, the upper surface rigid coupling of organism has the steel basin, the bull stick has been inserted to the inside bottom of steel basin, the bull stick runs through the steel basin and links to each other with the organism is fixed, the bull stick passes through sealed bearing and steel basin rotates and links to each other, the top screw thread of bull stick links to each other there is the screw rod, the top rigid coupling of screw rod has the piece to hold in the palm, the round lid has been placed on the top of steel basin, the lower surface of round lid is opened there is the circular slot. This even machine of gluing of automatic dropping liquid through the cooperation between dome, pipe, water dropper, double-screw bolt, rubber buffer, the lantern ring, curved bar, spout and the slider, can replace and carry out the dropping liquid with the hand extrusion, rotates the specific angle of the lantern ring through control, can be accurate carry out the operation of dripping glue, has ensured the homogeneity on film surface, has prevented the waste that the misoperation caused the sample, has prevented the possibility that solution and user's finger contacted, can not cause the injury to the user.

Description

Spin coater capable of automatically dropping liquid
Technical Field
The utility model relates to a spin coater technical field specifically is a spin coater of liquid dropping automatically.
Background
The glue spreader is a device which drips various glue solutions on a substrate rotating at a high speed, the glue solutions dripped on the substrate are uniformly coated on the substrate by using centrifugal force, the thickness of a film depends on the rotating speed of the glue spreader and the viscosity of the glue solutions, the development trend in recent years is to add a cold plate and a hot plate process module which are pre-coated with a tackifier (HMDS) into the glue spreader in an automatic working mode so as to enhance the adhesive force of a photoresist and a wafer and improve the production efficiency, the existing glue spreader needs to manually drip the liquid, the working efficiency is low, the glue dripping accuracy is poor, the unevenness of the surface of a film is easily caused, even the waste of samples is caused by improper operation of workers, and the solution can contact with fingers of users to cause injury to the users.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide a spin coater of liquid dropping automatically to solve the problem that proposes among the above-mentioned background art.
In order to achieve the above object, the utility model provides a following technical scheme: the utility model provides a glue homogenizing machine of automatic dropping liquid, includes the organism, the upper surface rigid coupling of organism has the steel basin, the bull stick has been inserted to the inside bottom of steel basin, the bull stick runs through the steel basin and links to each other with the organism is fixed, the bull stick passes through sealed bearing and rotates with the steel basin and link to each other, the top screw thread of bull stick links to each other there is the screw rod, the top rigid coupling of screw rod has the piece to hold in the palm, the dome has been placed on the top of steel basin, open the lower surface of dome has the circular slot, the inside top rigid coupling of circular slot has sealed the pad, sealed pad and steel basin are balanced tightly, the equal rigid coupling in both sides of steel basin has the extension board about, the upper surface rigid coupling of extension board has the cylinder, the cylinder is fixed continuous with the dome, the upper surface of dome has inserted the pipe, the pipe runs through the dome, the pipe is fixed with the dome and is linked to each other, the bottom rigid coupling of pipe, the inside of pipe is equipped with the rubber buffer, the rubber buffer offsets tightly with the pipe, the double-screw bolt has been inserted on the top of pipe, the double-screw bolt links to each other with the rubber buffer is fixed, the lantern ring has been cup jointed to the outer wall of double-screw bolt, the lantern ring links to each other with the double-screw bolt screw thread, the equal rigid coupling in the left and right sides of the lantern ring has the knee, open all around the upper surface center of dome has the spout, the knee is fixed continuous with the slider, the upper surface right side rigid coupling of dome has the air cock, the air cock is each other for the.
Preferably, the outer wall top of double-screw bolt has cup jointed the ring, the ring passes through the bearing and links to each other with the double-screw bolt rotation, the outer wall left side rigid coupling of ring has the pointer, the upper surface left side rigid coupling of dome has the cylinder, cylindrical outer wall spraying has the scale, the cylinder is laminated with the pointer mutually.
Preferably, the top end of the cylinder is fixedly connected with a ball.
Preferably, a pull ring is fixedly connected to the top end of the bent rod.
Preferably, the four corners of the lower surface of the machine body are fixedly connected with bases.
Preferably, a rubber pad is fixedly connected to the bottom end of the base.
Compared with the prior art, the beneficial effects of the utility model are that: this even machine of gluing of automatic dropping liquid, when using, through the dome, the pipe, the water dropper, the double-screw bolt, the rubber buffer, the lantern ring, the knee, cooperation between spout and the slider, can make the lantern ring rotate through rotating the knee, the slider can slide in the inside of spout, and then the double-screw bolt can remove downwards, the rubber buffer can extrude the inside solution of round pipe from the water dropper, can replace and carry out the dropping liquid with the hand extrusion, rotate the specific angle of the lantern ring through control, can be accurate carry out the operation of dripping, the homogeneity on film surface has been ensured, the improper waste that causes the sample has been prevented, the possibility that solution and user's finger contacted has been prevented, can not cause the injury to the user.
Drawings
FIG. 1 is a schematic structural view of the present invention;
FIG. 2 is a schematic view showing a connection structure of the dome, the circular tube and the screw of FIG. 1;
FIG. 3 is a schematic view of the connection structure of the stud, the ring and the pointer of FIG. 2;
fig. 4 is a schematic view of a connection structure of the steel basin, the dome and the sealing gasket in fig. 1.
In the figure: 1. the device comprises a machine body, 2, a steel basin, 3, a rotating rod, 4, a sealing bearing, 5, a screw rod, 6, a sheet support, 7, a round cover, 8, a round groove, 9, a sealing gasket, 10, a support plate, 11, a cylinder, 12, a round pipe, 13, a water dropper, 14, a rubber plug, 15, a stud, 16, a lantern ring, 17, a bent rod, 18, a sliding groove, 19, a sliding block, 20, a round ring, 21, a bearing, 22, a pointer, 23, a cylinder, 24, scales, 25, a round ball, 26, a pull ring, 27, a base, 28, a rubber gasket, 29 and an air tap.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
Referring to fig. 1-4, the present invention provides a technical solution: a glue homogenizing machine capable of automatically dropping liquid comprises a machine body 1, wherein a steel basin 2 is fixedly connected to the upper surface of the machine body 1, a rotating rod 3 is inserted into the bottom end inside the steel basin 2, the rotating rod 3 penetrates through the steel basin 2 to be fixedly connected with the machine body 1, the rotating rod 3 is rotatably connected with the steel basin 2 through a sealing bearing 4, an inner ring of the sealing bearing 4 is fixedly connected with the rotating rod 3, an outer ring of the sealing bearing 4 is fixedly connected with the steel basin 2, a screw rod 5 is connected with a top end thread of the rotating rod 3, a sheet support 6 is fixedly connected to the top end of the screw rod 5, a round cover 7 is placed at the top end of the steel basin 2, a round groove 8 is formed in the lower surface of the round cover 7, a sealing gasket 9 is fixedly connected to the top end inside the round groove 8, the sealing gasket 9 is made of rubber and has certain toughness at normal temperature, the sealing gasket 9 is tightly abutted against the steel basin 2, support plates 10 are fixedly connected to the left side and the right, a round tube 12 is inserted into the upper surface of the round cover 7, the round tube 12 penetrates through the round cover 7, the round tube 12 is fixedly connected with the round cover 7, a dropper 13 is fixedly connected with the bottom end of the round tube 12, the dropper 13 is communicated with the round tube 12, a rubber plug 14 is arranged inside the round tube 12, the rubber plug 14 is made of rubber materials and has certain toughness at normal temperature, the rubber plug 14 is abutted against the round tube 12, a stud 15 is inserted into the top end of the round tube 12, the stud 15 is fixedly connected with the rubber plug 14, a lantern ring 16 is sleeved on the outer wall of the stud 15, the lantern ring 16 is in threaded connection with the stud 15, bent rods 17 are fixedly connected to the left side and the right side of the lantern ring 16, sliding grooves 18 are formed around the center of the upper surface of the round cover 7, the bent rods 17 are fixedly connected with a sliding block 19, an air tap 29 is fixedly connected to the right side of the upper surface of the round cover 7, the air tap 29 is communicated with the round cover, then, the air tap 29 is moved with the vacuum, a workpiece needing glue dripping is placed on the upper surface of the sheet support 6, then the pipeline of the control cylinder is butted, the inside of the steel basin 2 is vacuumized, then the bent rod 17 is rotated clockwise, the lantern ring 16 is rotated clockwise, the sliding block 19 can slide inside the sliding groove 18, and then the stud 15 can move downwards, the rubber plug 14 can extrude the solution inside the circular pipe 12 from the dripper, the top end of the outer wall of the stud 15 is sleeved with the circular ring 20, the circular ring 20 is rotatably connected with the stud 15 through the bearing 21, the inner ring of the bearing 21 is fixedly connected with the stud 15, the outer ring of the bearing 21 is fixedly connected with the circular ring 20, the left side of the outer wall of the circular ring 20 is fixedly connected with the pointer 22, the left side of the upper surface of the round cover 7 is fixedly connected with the cylinder 23, the outer wall of the cylinder 23 is sprayed with the scale 24, the cylinder 23 is attached with the pointer 22, ring 20 can use double-screw bolt 15 to rotate as the center, ring 20 can be along with double-screw bolt 15 downstream together, then the user is through observing the relative distance between pointer 22 and the scale 24, be convenient for control drips and glues the volume, the top rigid coupling of cylinder 23 has ball 25, ball 25 can increase the aesthetic property on cylinder 23 top, the top rigid coupling of knee lever 17 has pull ring 26, pull ring 26 is convenient for the removal of knee lever 17, the equal rigid coupling in lower surface four corners of organism 1 has base 27, base 27 can increase the height of organism 1, prevent that the uncleanness of horizontal plane from leading to the fact the pollution to organism 1 lower surface, base 27's bottom rigid coupling has rubber pad 28, rubber pad 28 is made for the rubber material, certain toughness has under the normal atmospheric temperature.
When the glue homogenizing machine capable of automatically dripping liquid is used, firstly, the glue homogenizing machine capable of automatically dripping liquid is placed above a proper horizontal plane, then the round cover 7 is moved downwards by controlling the cylinder 11, the round cover 7 is pressed against the steel basin 3 tightly, then the air nozzle 29 is moved on vacuum, a workpiece needing glue dripping is placed on the upper surface of the sheet support 6, then the pipelines of the cylinder are controlled to be in butt joint, the inside of the steel basin 2 is vacuumized, then the bent rod 17 is rotated clockwise, the lantern ring 16 is rotated clockwise, the sliding block 19 can slide in the sliding groove 18, further the stud 15 can move downwards, the rubber plug 14 can extrude the solution in the round pipe 12 from the dripper, then the machine body 1 is operated, in the process that the stud 15 moves downwards, the round ring 20 can rotate by taking the stud 15 as the center, the round ring 20 can move downwards along with the stud 15, the user then facilitates control of the amount of dispensed glue by observing the relative distance between the pointer 22 and the scale 24.
In the description of the present invention, it is to be understood that the terms "coaxial", "bottom", "one end", "top", "middle", "other end", "upper", "one side", "top", "inner", "front", "center", "both ends", and the like, indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplicity of description, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore, should not be construed as limiting the present invention.
Furthermore, the terms "first", "second", "third", "fourth" are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated, whereby the features defined as "first", "second", "third", "fourth" may explicitly or implicitly include at least one such feature.
In the present invention, unless otherwise expressly stated or limited, the terms "mounted," "disposed," "connected," "fixed," "screwed" and the like are to be construed broadly, e.g., as meaning fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; they may be directly connected or indirectly connected through an intermediate medium, and may be connected through the inside of two elements or in an interaction relationship between two elements, unless otherwise specifically defined, and the specific meaning of the above terms in the present invention will be understood by those skilled in the art according to specific situations.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.

Claims (6)

1. The utility model provides a spin coater of automatic dropping liquid, includes organism (1), its characterized in that: the upper surface rigid coupling of organism (1) has steel basin (2), bull stick (3) has been inserted to the inside bottom of steel basin (2), bull stick (3) run through steel basin (2) and organism (1) fixed the linking to each other, bull stick (3) rotate with steel basin (2) through sealed bearing (4) and link to each other, the top screw thread of bull stick (3) links to each other has screw rod (5), the top rigid coupling of screw rod (5) has piece support (6), dome (7) have been placed to the top of steel basin (2), open the lower surface of dome (7) has circular slot (8), the inside top rigid coupling of circular slot (8) has sealed pad (9), sealed pad (9) offsets tightly with steel basin (2), the equal rigid coupling in both sides of steel basin (2) has extension board (10), the upper surface rigid coupling of extension board (10) has cylinder (11), cylinder (11) and dome (7) fixed the linking to each other, the last surface insertion of dome (7) has pipe (12), dome (7) are run through to pipe (12), pipe (12) link to each other with dome (7) are fixed, the bottom rigid coupling of pipe (12) has dripper (13), dripper (13) each other communicates with pipe (12), the inside of pipe (12) is equipped with rubber buffer (14), rubber buffer (14) offsets tightly with pipe (12), double-screw bolt (15) have been inserted on the top of pipe (12), double-screw bolt (15) link to each other with rubber buffer (14) are fixed, the outer wall of double-screw bolt (15) has cup jointed lantern ring (16), lantern ring (16) link to each other with double-screw bolt (15) screw thread, the equal rigid coupling in the left and right sides of lantern ring (16) has curved bar (17), open all around the upper surface center of dome (7) has spout (18), curved bar (17) are fixed continuous with slider (19), an air nozzle (29) is fixedly connected to the right side of the upper surface of the round cover (7), and the air nozzle (29) is communicated with the round cover (7).
2. An automatic dripping glue homogenizer according to claim 1, characterized in that: ring (20) have been cup jointed on the outer wall top of double-screw bolt (15), ring (20) rotate with double-screw bolt (15) through bearing (21) and link to each other, the outer wall left side rigid coupling of ring (20) has pointer (22), the upper surface left side rigid coupling of dome (7) has cylinder (23), the outer wall spraying of cylinder (23) has scale (24), cylinder (23) are laminated with pointer (22) mutually.
3. An automatic dripping glue spreader according to claim 2, wherein: the top end of the column (23) is fixedly connected with a round ball (25).
4. An automatic dripping glue homogenizer according to claim 1, characterized in that: the top end of the bent rod (17) is fixedly connected with a pull ring (26).
5. An automatic dripping glue homogenizer according to claim 1, characterized in that: the four corners of the lower surface of the machine body (1) are fixedly connected with bases (27).
6. An automatic dripping glue spreader as claimed in claim 5, wherein: the bottom end of the base (27) is fixedly connected with a rubber pad (28).
CN201920309240.8U 2019-03-12 2019-03-12 Spin coater capable of automatically dropping liquid Expired - Fee Related CN209935102U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201920309240.8U CN209935102U (en) 2019-03-12 2019-03-12 Spin coater capable of automatically dropping liquid

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201920309240.8U CN209935102U (en) 2019-03-12 2019-03-12 Spin coater capable of automatically dropping liquid

Publications (1)

Publication Number Publication Date
CN209935102U true CN209935102U (en) 2020-01-14

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN201920309240.8U Expired - Fee Related CN209935102U (en) 2019-03-12 2019-03-12 Spin coater capable of automatically dropping liquid

Country Status (1)

Country Link
CN (1) CN209935102U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114904692A (en) * 2022-05-27 2022-08-16 苏州光宝科技股份有限公司 High accuracy wafer spraying equipment with self-discriminant self-detection effect

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114904692A (en) * 2022-05-27 2022-08-16 苏州光宝科技股份有限公司 High accuracy wafer spraying equipment with self-discriminant self-detection effect

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CF01 Termination of patent right due to non-payment of annual fee
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Granted publication date: 20200114