CN209934282U - MOCVD machine table tail gas recovery device - Google Patents

Abstract

The utility model belongs to the semiconductor manufacturing field especially relates to a MOCVD board tail gas recovery device, the utility model discloses be provided with a MO source recovery device between filter unit and heat exchanger unit, not only can be to MO source recycle, the jam problem to heat exchanger unit and pipeline that appears when can also effectively solving the system operation improves aqueous ammonia recovery system's operating efficiency simultaneously, reduces the influence of MO source to the environment.

Description

MOCVD machine table tail gas recovery device

Technical Field

The utility model belongs to the semiconductor manufacturing field especially relates to a MOCVD board tail gas recovery device.

Background

There is the MO source to react with corresponding gas in the inside reaction chamber of current MOVCD board, and its residue and partial MO source that does not react completely get into ammonia water recovery system through the pump drainage fan and handle, owing to installed 30 um's filter at the rear end of pump drainage fan, this filter can only block the granule that the particle diameter is greater than 30um, and the granule of the MO source that does not react completely is less than 30um far away, therefore the filter does not almost work to this material. If the pore size of the filter is further reduced, frequent clogging of the filter will be caused, with a great risk to plant equipment, and therefore it is not preferable to install a filter having a smaller pore size.

After part of MO source enters a cooling plate type heat exchanger and is cooled, a large amount of white crystals are deposited and adhered on the inner sheets of the plate type heat exchanger and the inner wall of an outlet pipeline, so that the plate type heat exchanger and the outlet pipeline are blocked, and the negative pressure requirement of a workshop on tail gas emission is seriously influenced; part of crystals enter the ammonia recovery module under the driving of airflow, and crystals are formed on the surface of the membrane wire, so that the contact area of ammonia molecules passing through the membrane wire and pure water is directly influenced, and the recovery efficiency of the system is reduced; meanwhile, the system increases the operation energy consumption and the workload of the fault and the daily maintenance and repair of equipment, and forms greater environmental protection pressure on the standard-reaching emission of tail gas.

Disclosure of Invention

In order to solve the problem, the utility model provides a MOCVD board tail gas recovery device, including pump drainage fan group, filter unit, heat exchanger unit, aqueous ammonia recovery system, pump drainage fan group one end is connected in the tail gas discharge mouth of MOCVD reacting chamber, and the other end is connected in filter unit, through pipeline UNICOM between filter unit, heat exchanger unit and the aqueous ammonia recovery system, board tail gas is discharged after pump drainage fan group, filter unit, heat exchanger unit and aqueous ammonia recovery system handle, its characterized in that: the filter unit with be provided with an MO source recovery unit between the heat exchanger unit, MO source recovery unit includes lower part box structure and upper portion apron subassembly, and upper portion apron subassembly includes sealed lid, sets up in tail gas admission pipe and the tail gas discharge pipe on sealed lid upper portion, sets up in the filter screen of the interval arrangement of sealed lid lower part.

Preferably, the lower box body comprises an outer shell, a middle isolation layer and an inner container layer, and a plurality of annular freezing pipes are arranged on the inner wall between the middle isolation layer and the inner container layer.

Preferably, one end of the annular freezing pipe is connected with a cooling liquid shunt pipe, and the other end of the annular freezing pipe is connected with a cooling liquid collecting pipe.

Preferably, a heat insulation layer is arranged in an interlayer between the outer shell and the intermediate isolation layer.

Preferably, the tail gas inlet pipe is provided with a nitrogen inlet pipe, and the tail gas discharge pipe is provided with a nitrogen discharge pipe.

Preferably, a sealing ring is arranged at the contact position of the lower box body and the upper cover plate assembly.

Preferably, the exhaust gas discharge pipe further comprises an air inlet flow equalizing pipe arranged inside the lower box body.

Preferably, the air inlet flow equalizing pipe is provided with a plurality of through holes.

Preferably, the nitrogen gas discharge pipe is provided with a pressure gauge and a pressure sensor.

Preferably, the coolant flow dividing pipe and the coolant collecting pipe are respectively connected to a coolant storage tank.

The utility model discloses possess following beneficial effect at least:

be provided with an MO source recovery unit between filter unit and heat exchanger unit, not only can be to MO source recycle, the jam problem to heat exchanger unit and pipeline that appears when can also effectively solving the system operation improves aqueous ammonia recovery system's operating efficiency simultaneously, reduces the influence of MO source to the environment.

Drawings

Fig. 1 is a schematic structural view of an MOCVD equipment tail gas recovery device according to an embodiment of the present invention.

Fig. 2 is a schematic structural view of an MO source recycling device according to an embodiment of the present invention.

Fig. 3 is a schematic structural view of an upper cover plate assembly according to an embodiment of the present invention.

Fig. 4 is a schematic view of a lower case structure according to an embodiment of the present invention.

FIG. 5 is a schematic view of an exhaust gas discharge pipe according to an embodiment of the present invention.

The attached drawings are marked as follows: 100: the exhaust fan set comprises 200: a filter unit; 300: a heat exchanger unit; 400: an ammonia water recovery system; 500: an MO source recovery device; 510: a lower box structure; 511: a seal ring; 512: an outer housing; 513: an inner container layer; 514: a middle interlayer; 515: an annular freezing pipe; 516: a coolant flow dividing tube; 517: a coolant manifold; 520: an upper cover plate assembly; 521: a sealing cover; 522: tail gas inlet pipe; 523: a tail gas discharge pipe; 524: filtering with a screen; 525: a nitrogen inlet pipe; 526: a nitrogen gas discharge pipe; 700: an MOCVD reaction chamber; 800: a pipeline.

Detailed Description

The invention is described in more detail in the following paragraphs by way of example with reference to the accompanying drawings. The advantages and features of the present invention will become more fully apparent from the following description and appended claims. It should be noted that the drawings are in simplified form and are not to precise scale, and are provided for convenience and clarity in order to facilitate the description of the embodiments of the present invention.

Fig. 1 is a schematic structural diagram of an MOCVD machine tail gas recovery device provided in this embodiment, as can be seen from fig. 1, the tail gas recovery device sequentially includes an exhaust fan unit 100, a filter unit 200, a heat exchanger unit 300, an ammonia water recovery system 400, and an MO source recovery device 500 disposed between the filter unit and the heat exchanger unit 300, one end of the exhaust fan unit is connected to a tail gas exhaust port of the MOCVD reaction chamber 700, the other end of the exhaust fan unit 100, the filter unit 200, the heat exchanger unit 300 and the ammonia water recovery system 400 are communicated through a pipeline 800, and tail gas is exhausted after being processed by the exhaust fan unit 100, the filter unit 200, the heat exchanger unit 300 and the ammonia water recovery system 400.

Fig. 2 is a schematic structural diagram of the MO source recycling apparatus 500, and as can be seen from fig. 2, the MO source recycling apparatus 500 includes a lower tank structure 510 and an upper cover plate assembly 520, a sealing ring 511 is disposed at a contact position of the lower tank and the upper cover plate assembly 520, the upper cover plate assembly 520 includes a sealing cover 521, the sealing cover 521 and the sealing ring 511 are engaged with each other to form a closed MO source recycling apparatus 500, an exhaust gas inlet pipe 522 and an exhaust gas outlet pipe 523 which are disposed at an upper portion of the sealing cover 521, and filtering screens 524 which are disposed at lower portions of the sealing cover 521 and are arranged at intervals. Wherein, lower part box includes shell 512, intermediate insulation layer 514 and inner bag layer 513, is equipped with a plurality of annular cryovial 515 on the inner wall between intermediate insulation layer and inner bag layer 513, and annular cryovial 515 one end is linked there is coolant liquid shunt tubes 516, and the other end is connected with coolant liquid collecting pipe 517. The coolant flow dividing pipe 516 is provided with a plurality of outlets, each outlet is connected with one end of one annular freezing pipe 515, the coolant flow collecting pipe 517 is provided with a plurality of inlets, and each inlet is connected with the other end of one annular freezing pipe 515. The coolant liquid gets into annular freezing pipe 515 respectively through coolant liquid shunt tubes 516 in, then assembles to coolant liquid collecting pipe 517 and flows out, and then plays the lower part box and plays circulative cooling's effect, and coolant liquid shunt tubes 516 and coolant liquid collecting pipe 517 connect respectively in the coolant liquid storage tank.

An intermediate isolation layer is arranged between the outer shell 512 and the inner container layer 513, and an insulating layer is clamped in an interlayer between the outer shell 512 and the intermediate isolation layer to ensure the operating temperature of the equipment, and the insulating layer is made of a foaming type insulating material.

The exhaust gas inlet pipe 522 is provided with a nitrogen inlet pipe 525, the exhaust gas outlet pipe 523 is also provided with a nitrogen outlet pipe 526, and the nitrogen outlet pipe 526 is also provided with a pressure gauge and a pressure sensor. In addition, the tail gas exhaust pipe 523 is further provided with an air inlet flow equalizing pipe arranged inside the lower box body, and a plurality of through holes are formed in the air inlet flow equalizing pipe. The nitrogen inlet pipe 525, the nitrogen discharge pipe 526, the pressure gauge and the pressure sensor form a pressure maintaining test purging system of the tail gas recovery device, when the box body needs to perform an air tightness test, nitrogen is introduced from the nitrogen inlet pipe 525, the nitrogen discharge pipe 526 is closed, when the pressure gauge reaches a certain value, the nitrogen inlet pipe 525 is related, after standing for a certain time, the difference change of the pressure gauge is observed, if the pressure gauge is not changed, the air tightness is good, otherwise, the leakage exists. The pressure sensor is used for monitoring the deposition blockage condition of the filter screen 524, and if the pressure difference between the front and the back of the pressure sensor is greater than 5KPa, the MO source recycling box needs to be replaced. When the filter screen 524 needs to be replaced, the nitrogen can be used for purging, and when the MO source recovery device 500 is replaced, the nitrogen can be introduced into the box body, so that a certain protection effect is achieved.

When tail gas containing an MO source with certain temperature and pressure enters the MO source recovery device 500 from the tail gas inlet pipe 522, the tail gas uniformly distributes gas through the holes in the flow equalizing pipe in different directions, turbulence is formed locally to stir the movement of MO source particles, and because the molecular weight of MO source substances is larger than the waste mass of ammonia gas and the like, after the gas flows out from the outlet of the flow equalizing pipe, the gas flow rate is instantly reduced, so that the deposition of the MO source particles is facilitated, meanwhile, the temperature of the gas is continuously taken away by the circulating cooling liquid, the temperature of the gas is kept at about 3-5 degrees, and the deposition of the MO source on the filter screen 524 is further accelerated.

On the other hand, in order to facilitate the detachment and replacement of the MO source recovery device 500, the sealing cover 521 of the upper cover plate assembly 520 and the periphery of the outer shell 512 are respectively provided with a hanging ring, meanwhile, the bottom of the outer shell 512 is further provided with a supporting leg capable of adjusting the height of the recovery device, and the supporting leg is provided with a roller above sea so as to facilitate the movement of the MO source recovery device 500.

It should be understood that the above embodiments are preferred embodiments of the present invention, and that the inlet end and the position described herein are not limited to this embodiment, and that the outlet end and inlet end positions may be selected according to the embodiments, as long as the order of connection with the inner and outer chambers of each assembly described herein is ensured; in addition, the scope of the present invention is not limited to this embodiment, and any changes made according to the present invention all belong to the protection scope of the present invention.

Claims (10)

1. The utility model provides a MOCVD board tail gas recovery device, includes pump drainage fan set, filter unit, heat exchanger unit, aqueous ammonia recovery system, pump drainage fan set one end is connected in the tail gas discharge port of MOCVD reacting chamber, and the other end is connected with filter unit, through pipeline UNICOM between filter unit, heat exchanger unit and the aqueous ammonia recovery system, and board tail gas is discharged after pump drainage fan set, filter unit, heat exchanger unit and aqueous ammonia recovery system handle, its characterized in that: the filter unit with be provided with an MO source recovery unit between the heat exchanger unit, MO source recovery unit includes lower part box structure and upper portion apron subassembly, and upper portion apron subassembly includes sealed lid, sets up in tail gas admission pipe and the tail gas discharge pipe on sealed lid upper portion, sets up in the filter screen of the interval arrangement of sealed lid lower part.

2. The MOCVD machine table tail gas recovery device according to claim 1, wherein: the lower box body comprises an outer shell, a middle isolation layer and an inner container layer, and a plurality of annular freezing pipes are arranged on the inner wall between the middle isolation layer and the inner container layer.

3. The MOCVD machine table tail gas recovery device according to claim 2, wherein: and one end of the annular freezing pipe is connected with a cooling liquid shunt pipe, and the other end of the annular freezing pipe is connected with a cooling liquid collecting pipe.

4. The MOCVD machine table tail gas recovery device according to claim 2, wherein: and heat insulation layers are arranged in interlayers of the outer shell and the intermediate isolation layer.

5. The MOCVD machine table tail gas recovery device according to claim 1, wherein: the tail gas inlet pipe is provided with a nitrogen inlet pipe, and the tail gas discharge pipe is provided with a nitrogen discharge pipe.

6. The MOCVD machine table tail gas recovery device according to claim 1, wherein: and a sealing ring is arranged at the contact position of the lower box body and the upper cover plate component.

7. The MOCVD machine table tail gas recovery device according to claim 1, wherein: the tail gas discharge pipe also comprises an air inlet flow equalizing pipe arranged in the lower box body.

8. The MOCVD machine table tail gas recovery device according to claim 7, wherein: the air inlet flow equalizing pipe is provided with a plurality of through holes.

9. The MOCVD machine table tail gas recovery device of claim 5, wherein: and a pressure gauge and a pressure sensor are arranged on the nitrogen discharge pipe.

10. The MOCVD machine table tail gas recovery device of claim 3, wherein: and the cooling liquid flow dividing pipe and the cooling liquid collecting pipe are respectively connected to the cooling liquid storage tank.

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