CN209906878U - Heating sensing device in coating equipment and coating equipment - Google Patents
Heating sensing device in coating equipment and coating equipment Download PDFInfo
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- CN209906878U CN209906878U CN201920522140.3U CN201920522140U CN209906878U CN 209906878 U CN209906878 U CN 209906878U CN 201920522140 U CN201920522140 U CN 201920522140U CN 209906878 U CN209906878 U CN 209906878U
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Abstract
The utility model discloses a heating sensing device and coating equipment among coating equipment. The apparatus includes a temperature sensing part, a control part, and a heating sensing substrate, wherein the heating sensing substrate includes a first magnetic field generating part, a second magnetic field generating part, a first heat generating part, and a second heat generating part, the first heat generating part is disposed corresponding to the first magnetic field generating part, a magnetic flux passing through the first heat generating part varies based on a variation in a magnetic field of the first magnetic field generating part, and the second heat generating part is disposed corresponding to the second magnetic field generating part, a magnetic flux passing through the second heat generating part varies based on a variation in a magnetic field of the second magnetic field generating part. The technical scheme of the utility model can accurate control heating temperature to treat coating film base plate even heating, and then avoid appearing the unusual problem of membranous nature in the film of depositing on treating the coating film base plate.
Description
Technical Field
The embodiment of the utility model provides a relate to coating equipment technical field, especially relate to a heating sensing device and coating equipment among coating equipment.
Background
In the manufacturing process of the semiconductor device, a deposition or coating process can be completed on the substrate by physical vapor deposition or chemical vapor deposition. Furthermore, for most coating equipment based on physical vapor deposition or chemical vapor deposition, a heating sensing device is required to provide the required heat for the coating process.
In the case of a coating apparatus based on chemical vapor deposition, the substrate to be coated is usually placed on a heating sensor device so that the gaseous thin film raw material reacts and deposits on the substrate to be coated. In the prior art, a heating mode of a heating sensing device is generally a resistance type, but due to defects of resistance type heating (such as easy oxidation and resistance value change along with temperature change) and distribution reasons of resistance wires, the problem of inaccurate heating temperature control is easily caused, so that a substrate to be coated is heated unevenly, and a phenomenon of local film quality abnormity of a coated film occurs.
Fig. 1 is a top view of a resistive heating sensing substrate provided in the prior art. Referring to fig. 1, the resistive heating sensing substrate includes inner and outer resistive wires disposed along the center to edge of the substrate. The heat that resistance-type heating sensing base plate produced and the resistance value through the current value of resistance wire and resistance wire itself have the relation, however, on the one hand, the resistance value of resistance wire changes along with the temperature variation, on the other hand, when the oxidation takes place for the resistance wire, its resistance value also changes, the resistance value of resistance wire is constantly changing in resistance-type heating sensing device's course of work promptly, and the resistance value change volume also can not the accurate calculation, therefore, resistance-type heating sensing device's heating control is coarser, can not the accurate control heating temperature, the phenomenon that the heating temperature of resistance-type heating sensing base plate center and edge is different appears easily, and then lead to can not treating the coating film base plate even heating, it is unusual to produce the membranous.
SUMMERY OF THE UTILITY MODEL
The utility model provides a heating sensing device and coating equipment in coating equipment to the realization is treated the even heating of coating substrate.
In a first aspect, an embodiment of the present invention provides a heating sensing device in a coating apparatus, including:
the temperature sensing part is electrically connected with the control part so as to send the acquired heating temperature of the heating sensing substrate to the control part, wherein the heating sensing substrate comprises a first magnetic field generating part and a second magnetic field generating part which are sequentially arranged from the center to the edge of the substrate; a first heat generating part and a second heat generating part sequentially arranged from the center to the edge of the substrate;
the control component is respectively connected with the first magnetic field generating component and the second magnetic field generating component so as to control the first magnetic field generating component to generate a changing magnetic field and control the second magnetic field generating component to generate a changing magnetic field;
the first heat generating part is provided corresponding to the first magnetic field generating part, and a magnetic flux passing through the first heat generating part is changed based on a change in a magnetic field of the first magnetic field generating part, and the second heat generating part is provided corresponding to the second magnetic field generating part, and a magnetic flux passing through the second heat generating part is changed based on a change in a magnetic field of the second magnetic field generating part.
Further, the rate of change of the magnetic flux passing through the second heat generating part is larger than the rate of change of the magnetic flux passing through the first heat generating part;
and/or the time for which the second magnetic field generating means generates the magnetic field is longer than the time for which the first magnetic field generating means generates the magnetic field.
Furthermore, the first magnetic field generating component and the second magnetic field generating component are two inductance coils which are independent from each other, and the current in the inductance coil close to the edge of the substrate is larger than the current in the inductance coil close to the center of the substrate;
and/or the time for leading the current into the inductance coil close to the edge of the substrate is longer than the time for leading the current into the inductance coil close to the center of the substrate.
Further, the first magnetic field generating component and the second magnetic field generating component are two electromagnetic coils which are electrically connected, and the winding density of a section of the inductance coil close to the edge of the substrate is greater than that of a section of the inductance coil close to the center of the substrate.
Furthermore, the control part also comprises a turntable, the first magnetic field generating part and the first magnetic field generating part both comprise a plurality of permanent magnet irons, and the arrangement density of the permanent magnets close to the edge of the substrate is greater than that of the permanent magnets close to the center of the substrate;
the permanent magnets are arranged in the turntable, and the spatial distribution of the magnetic field generated by the permanent magnets changes along with the rotation of the turntable;
wherein the N pole of at least part of the permanent magnets in the first magnetic field generating component faces the heating surface of the heating sensing substrate, and the S pole of at least part of the permanent magnets faces the heating surface of the heating sensing substrate; the N pole of at least part of the permanent magnets in the second magnetic field generating component faces the heating surface of the heating sensing substrate, and the S pole of at least part of the permanent magnets faces the heating surface of the heating sensing substrate.
Furthermore, the first heat generating component and the second heat generating component are two mutually independent conductive shells, and the two conductive shells are respectively insulated and coated outside the first magnetic field generating component and the second magnetic field generating component.
Furthermore, the first heat generating component and the second heat generating component are connected into a whole to form a conductive shell, and the conductive shell is insulated and coated outside the first magnetic field generating component and the second magnetic field generating component.
Furthermore, an insulating material is filled between the first heat generating component and the inductance coil, and an insulating material is filled between the second heat generating component and the inductance coil;
or, the cable for winding the inductance coil is coated with an insulating layer.
Further, a third magnetic field generating part and a third heat generating part are included,
the third magnetic field generating component is arranged between the first magnetic field generating component and the second magnetic field generating component;
a third heat generating member disposed between the first heat generating member and the second heat generating member, the third heat generating member being disposed to correspond to the third magnetic field generating member, a magnetic flux passing through the third heat generating member being varied based on a variation in a magnetic field of the third magnetic field generating member;
wherein a rate of change of a magnetic flux passing through the third heat generating part is between a rate of change of a magnetic flux passing through the first heat generating part and a rate of change of a magnetic flux passing through the second heat generating part, and/or a time of generation of a magnetic field by the third magnetic field part is between a time of generation of a magnetic field by the first magnetic field generating part and a time of generation of a magnetic field by the second magnetic field generating part.
Furthermore, the heat-generating device also comprises a conductive component which is covered outside the first heat-generating component and the second heat-generating component.
In a second aspect, an embodiment of the present invention further provides a coating apparatus, which includes the heating sensing device of the coating apparatus according to any embodiment of the present application.
The embodiment of the utility model provides a produce the heat through heating sensing base plate based on the electromagnetic induction heating principle, it is concrete, arrange first heat production part in the magnetic field of the high-frequency variation that first magnetic field production part produced and arrange second heat production part in the magnetic field of the high-frequency variation that second magnetic field production part produced, make first heat production part and second heat production part produce the heat based on electromagnetic induction, solve among the prior art heating sensing base plate based on the heating temperature control inaccuracy that the resistance-type heating principle brought and then heat inhomogeneous problem, realize accurate control heating temperature, treat coating film base plate even heating, and then avoid the unusual effect of membranous substance.
Drawings
FIG. 1 is a top view of a resistive heating sensing substrate provided in the prior art;
fig. 2 is a schematic structural diagram of a heating sensing device in a coating apparatus according to an embodiment of the present invention;
fig. 3 is a top view of a heating sensor substrate according to an embodiment of the present invention;
FIG. 4 is a cross-sectional view of the heated sensing substrate of FIG. 3 taken along the direction A-A';
fig. 5 is a top view of another heating sensor substrate provided by an embodiment of the present invention;
FIG. 6 is a cross-sectional view of the heated sensing substrate of FIG. 5 taken along the direction B-B';
fig. 7 is a top view of another heating sensor substrate according to an embodiment of the present invention;
fig. 8 is a top view of another heating sensor substrate according to an embodiment of the present invention;
fig. 9 is a cross-sectional view of the heated sensor substrate shown in fig. 8 taken along the direction C-C'.
Wherein, the reference numbers and the corresponding feature names:
1-temperature sensing part, 2-control part, 3-heating sensing substrate, 31-first heat generating part, 32-first magnetic field generating part, 33-second heat generating part, 34-second magnetic field generating part, 35-insulating material, 36-conductive part, 37-turntable, 321-permanent magnet.
Detailed Description
The present invention will be described in further detail with reference to the accompanying drawings and examples. It is to be understood that the specific embodiments described herein are merely illustrative of the invention and are not limiting of the invention. It should be further noted that, for the convenience of description, only some of the structures related to the present invention are shown in the drawings, not all of the structures.
Fig. 2 is a schematic structural diagram of a heating sensing device in a coating apparatus according to an embodiment of the present invention. Fig. 3 is a top view of a heating sensor substrate according to an embodiment of the present invention. Referring to fig. 2 and 3, the apparatus includes a temperature sensing part 1, a heating sensing substrate 3, and a control part 2, the temperature sensing part 1 being electrically connected to the control part 2 to transmit a collected heating temperature of the heating sensing substrate 3 to the control part 2, wherein the heating sensing substrate 3 includes a first magnetic field generating part 32 and a second magnetic field generating part 34 sequentially disposed along a center to an edge of the substrate, a first heat generating part 31 and a second heat generating part 33 sequentially disposed along the center to the edge of the substrate, the control part 2 being respectively connected to the first magnetic field generating part 32 and the second magnetic field generating part 34 to control the first magnetic field generating part 32 to generate a varying magnetic field and to control the second magnetic field generating part 34 to generate a varying magnetic field, the first heat generating part 31 being disposed corresponding to the first magnetic field generating part 32, a magnetic flux passing through the first heat generating part 31 varying based on a variation of the magnetic field of the first magnetic field generating part 32, and a second heat generating member 33 provided corresponding to the second magnetic field generating member 34, a magnetic flux passing through the second heat generating member 33 being changed based on a change in the magnetic field of the second magnetic field generating member 34.
The heating sensing substrate 3 is based on the electromagnetic induction heating principle, and specifically, the first heat generating component 31 and the second heat generating component 33 are placed in a changing magnetic field, so that eddy currents are generated inside the first heat generating component 31 and the second heat generating component 33, and the heating purpose is achieved by means of the energy of the eddy currents. Therefore, the heating sensing device has the advantages that the heating principle is completely different from that of a resistance type heating sensing device, the defects of the resistance type heating sensing device are avoided, the heating temperature is controlled more easily and accurately, and the substrate to be coated is heated uniformly.
The working process of the heating sensing device is as follows: the temperature sensing part 1 sends the collected heating temperature T1 of the first heat generating part 31 and the collected heating temperature T2 of the second heat generating part 33 to the control part 2, the control part 2 determines the magnitude between the heating temperature T1 of the first heat generating part 31 and the preset heating temperature, and if the heating temperature T1 of the first heat generating part 31 is not equal to the preset heating temperature, the control part 2 controls the first magnetic field generating part 32 to adjust the condition of the generated and changed magnetic field, so that the heating temperature T1 of the first heat generating part 31 continuously approaches to the preset heating temperature. The control of the second magnetic field generating means 34 by the control means 2 is the same as above and will not be described here.
The utility model discloses heating sensing base plate produces the heat based on the electromagnetic induction heating principle, and based on the easier accurate control of the heating temperature of the heating sensing device of this principle, the inhomogeneous problem of heating that solves among the prior art resistance-type heating sensing device because the heating temperature control inaccuracy brings realizes accurate control heating temperature, treats coating film base plate even heating, and then avoids the unusual effect of membranous substance.
On the basis of the above technical solution, optionally, the rate of change of the magnetic flux passing through the second heat generating part 33 is larger than the rate of change of the magnetic flux passing through the first heat generating part 31; and/or the time during which the second magnetic field generating part 34 generates the magnetic field is longer than the time during which the first magnetic field generating part 32 generates the magnetic field. This arrangement is advantageous in that the edge portion of the heating sensor substrate is thermally lost more than the central portion, and thus the average amount of heat generated by the second heat generating member 33 per unit time is larger than the average amount of heat generated by the first heat generating member 31 per unit time, thereby compensating for the larger amount of heat lost by the second heat generating member 33 than the first heat generating member 31 and ensuring uniform heating.
The specific setting methods of the above technical solutions are various, and those skilled in the art can refer to the resistive heating sensing device in the prior art for specific implementation manners of the temperature sensing component 1 and the control component 2, which is not described in detail herein. A specific arrangement of the heating sensor substrate 3 will be described in detail with reference to a typical example, but the present application is not limited thereto.
Fig. 4 is a cross-sectional view of the heated sensor substrate shown in fig. 3 taken along the direction a-a'. Referring to fig. 3 and 4, the first magnetic field generating member 32 and the second magnetic field generating member 34 are two inductance coils independent of each other, the first heat generating member 31 and the second heat generating member 33 are two conductive housings independent of each other, the first heat generating member 31 is insulated and covered outside the first magnetic field generating member 32, and the second heat generating member 33 is insulated and covered outside the second magnetic field generating member 34.
Specifically, alternating currents are supplied to the two inductance coils, different alternating currents are supplied to the two inductance coils, the current value of the alternating current in the inductance coil near the edge of the heating and sensing substrate is set to be larger than the current value of the alternating current in the inductance coil near the center of the substrate, and/or the frequency of the alternating current in the inductance coil near the edge of the heating and sensing substrate is set to be larger than the frequency of the alternating current in the inductance coil near the center of the substrate, and/or the facing area of the inductance coil near the edge of the heating and sensing substrate and the second heat generating part 33 is set to be larger than the facing area of the inductance coil near the center of the substrate and the first heat generating part 31, so that the change rate of the magnetic flux passing through the second heat generating part 33 is larger than the change rate of the magnetic flux passing through the first heat generating part 31.
Specifically, the two inductor coils are both supplied with alternating current, the same alternating current is supplied to the two inductor coils, and the time for supplying the alternating current to the inductor coil near the edge of the substrate is set to be longer than the time for supplying the current to the inductor coil near the center of the substrate, so that the average heat generated by the second heat generating part 33 per unit time is larger than the average heat generated by the first heat generating part 31 per unit time within a period of time.
The conductive shell serves as a heat generating component for generating eddy current, and is made of stainless steel for example, so that the conductive shell has good thermal conductivity.
It is understood that the first heat generating member 31 and the second heat generating member 33 may be a single conductive housing integrally connected to each other, and the single conductive housing is insulated from the first magnetic field generating member 32 and the second magnetic field generating member 34.
Fig. 5 is a top view of another heating sensor substrate according to an embodiment of the present invention. Fig. 6 is a cross-sectional view of the heated sensor substrate shown in fig. 5 taken along the direction B-B'. Referring to fig. 5 and 6, the first magnetic field generating member 32 and the second magnetic field generating member 34 are two electromagnetic coils electrically connected to each other, the first heat generating member 31 and the second heat generating member 33 are integrally connected to each other to form a conductive housing, and the conductive housing is insulated from the first magnetic field generating member 32 and the second magnetic field generating member 34.
Wherein the winding density of a segment of the inductor coil near the edge of the substrate is set to be greater than the winding density of a segment of the inductor coil near the center of the substrate, so that the rate of change of the magnetic field generated by the second magnetic field generating part 34 is greater than the rate of change of the magnetic field generated by the first magnetic field generating part 32, and further the rate of change of the magnetic flux passing through the second heat generating part 33 is greater than the rate of change of the magnetic flux passing through the first heat generating part 31.
With continuing reference to fig. 4 and fig. 6, on the basis of the above technical solution, optionally, an insulating material 35 is filled between the first heat generating component 31 and the inductor coil, and an insulating material 35 is filled between the second heat generating component 33 and the inductor coil, so that the first heat generating component 31 and the first magnetic field generating component 32 are not in contact with each other, so as to achieve an electrical insulation effect between the two, and meanwhile, the insulating material 35 may also play a role of protecting and fixing the inductor coil, and the insulating material 35 is filled between the second heat generating component 33 and the second magnetic field generating component 34, which is the same as that described above, and is not repeated. Illustratively, the insulating material 35 may be ceramic, which has high temperature resistance and can withstand high heat generated by heating the sensing substrate.
It will be appreciated that if the cable for winding the inductor is coated with an insulating layer, no insulating material 35 needs to be filled.
Fig. 7 is a top view of another heating sensor substrate according to an embodiment of the present invention. Fig. 8 is a top view of another heating sensor substrate according to an embodiment of the present invention. Fig. 9 is a cross-sectional view of the heated sensor substrate shown in fig. 8 taken along the direction C-C'. Referring to fig. 7 to 9, the control part of the heating sensing substrate further includes a turntable 37, the first magnetic field generating part and the second magnetic field generating part each include a plurality of permanent magnet irons 321, the plurality of permanent magnets 321 are disposed in the turntable 37, and a spatial distribution of magnetic fields generated by the plurality of permanent magnets 321 changes with rotation of the turntable 7, wherein N poles of at least some of the permanent magnets in the first magnetic field generating part face the heating surface of the heating sensing substrate, and S poles of at least some of the permanent magnets face the heating surface of the heating sensing substrate; the N pole of at least part of the permanent magnets in the second magnetic field generating component faces the heating surface of the heating sensing substrate, and the S pole of at least part of the permanent magnets faces the heating surface of the heating sensing substrate.
When the turntable 37 rotates, the spatial distribution of the magnetic field generated by the plurality of permanent magnets 321 changes with the rotation of the turntable 37, and the first heat generating component and the second heat generating component are fixed and are equivalent to that the first heat generating component and the second heat generating component are constantly in a changing magnetic field, that is, the magnetic flux passing through the first heat generating component and the magnetic flux passing through the second heat generating component are constantly in a changing state, so that eddy currents are generated in the first heat generating component and the second heat generating component, and heat is generated.
It should be noted that, in order to make the rate of change of the magnetic flux passing through the second heat generating component greater than the rate of change of the magnetic flux passing through the first heat generating component, the arrangement density of the permanent magnets 321 near the edge of the substrate is set to be greater than the arrangement density of the permanent magnets 321 near the center of the substrate, and the specific arrangement density and manner can be set by those skilled in the art according to actual conditions. In addition, fig. 7 to 9 exemplarily show that the top view of the rotating disc 37 is circular, and the top view of the permanent magnet 321 is bar-shaped, in other embodiments, the top view of the rotating disc 37 may also be rectangular, and the top view of the permanent magnet 321 may also be circular and/or arc-shaped, which is not limited in this application.
On the basis of the above technical solution, optionally, the heating sensor substrate further includes a third magnetic field generating member and a third heat generating member, the third magnetic field generating member is disposed between the first magnetic field generating member and the second magnetic field generating member, the third heat generating member is disposed between the first heat generating member and the second heat generating member, the third heat generating member is disposed in correspondence with the third magnetic field generating member, a magnetic flux passing through the third heat generating member changes based on a change in a magnetic field of the third magnetic field generating member, wherein a rate of change of a magnetic flux passing through the third heat generating part is between a rate of change of a magnetic flux passing through the first heat generating part and a rate of change of a magnetic flux passing through the second heat generating part, and/or the time for generating the magnetic field by the third magnetic field component is between the time for generating the magnetic field by the first magnetic field generating component and the time for generating the magnetic field by the second magnetic field generating component.
It should be noted that, the heating and sensing substrate may include a plurality of heat generating components and a plurality of magnetic field generating components, as long as the magnetic flux change rate of the plurality of heat generating components sequentially arranged from the center to the edge of the substrate is gradually increased, so that the average heat generated by the plurality of heat generating components sequentially arranged from the center to the edge of the substrate in a unit time is gradually increased, and further, the heat lost relatively to the inside of the edge of the heating and sensing substrate is compensated, thereby achieving the effect of uniform heating.
Alternatively, referring to fig. 4, 6 and 9, the apparatus further includes a conductive member 36, and the conductive member 36 is wrapped outside the first heat generating member 31 and the second heat generating member 33. If the heating sensing device is applied to a coating device based on plasma enhanced chemical vapor deposition, the conductive component 36 serves as a bottom plate to ensure conductivity and isolate corrosion of reaction gas to a conductive shell and the like inside the conductive component, and the conductive component 36 is made of aluminum, so that the conductivity is good.
The embodiment of the utility model provides a coating equipment is still provided, including the aforesaid any kind of coating equipment in the heating sensing device, therefore this coating equipment possesses corresponding function and beneficial effect.
It should be noted that the foregoing is only a preferred embodiment of the present invention and the technical principles applied. It will be understood by those skilled in the art that the present invention is not limited to the particular embodiments described herein, but is capable of various obvious changes, rearrangements and substitutions as will now become apparent to those skilled in the art without departing from the scope of the invention. Therefore, although the present invention has been described in greater detail with reference to the above embodiments, the present invention is not limited to the above embodiments, and may include other equivalent embodiments without departing from the scope of the present invention.
Claims (10)
1. The heating sensing device in the coating equipment comprises a temperature sensing part, a heating sensing substrate and a control part, wherein the temperature sensing part is electrically connected with the control part so as to send the collected heating temperature of the heating sensing substrate to the control part; a first heat generating part and a second heat generating part sequentially arranged from the center to the edge of the substrate;
the control component is respectively connected with the first magnetic field generating component and the second magnetic field generating component so as to control the first magnetic field generating component to generate a variable magnetic field and control the second magnetic field generating component to generate a variable magnetic field;
the first heat generating member is provided in correspondence with the first magnetic field generating member, and a magnetic flux passing through the first heat generating member is changed based on a change in a magnetic field of the first magnetic field generating member, and the second heat generating member is provided in correspondence with the second magnetic field generating member, and a magnetic flux passing through the second heat generating member is changed based on a change in a magnetic field of the second magnetic field generating member.
2. The heating sensor device in a plating apparatus according to claim 1, wherein a rate of change of a magnetic flux passing through the second heat generating member is larger than a rate of change of a magnetic flux passing through the first heat generating member;
and/or the time for which the second magnetic field generating component generates the magnetic field is longer than the time for which the first magnetic field generating component generates the magnetic field.
3. The heating sensor device in a plating apparatus according to claim 2, wherein the first magnetic field generating member and the second magnetic field generating member are two induction coils independent of each other, and a current in the induction coil near the edge of the substrate is larger than a current in the induction coil near the center of the substrate;
and/or the time for leading the current into the inductance coil close to the edge of the substrate is longer than the time for leading the current into the inductance coil close to the center of the substrate.
4. The heating sensor device in a plating apparatus according to claim 2, wherein the first magnetic field generating member and the second magnetic field generating member are two electromagnetic coils electrically connected, and a winding density of a section of the inductor coil near an edge of the substrate is greater than a winding density of a section of the inductor coil near a center of the substrate.
5. The heating sensor device in a plating apparatus according to claim 2, wherein the control part further comprises a turntable, the first magnetic field generating part and the second magnetic field generating part each comprise a plurality of permanent magnet irons, and an arrangement density of the permanent magnets near the edge of the substrate is larger than an arrangement density of the permanent magnets near the center of the substrate;
the permanent magnets are arranged in the turntable, and the spatial distribution of the magnetic field generated by the permanent magnets changes along with the rotation of the turntable;
wherein the N pole of at least part of the permanent magnets in the first magnetic field generating component faces the heating surface of the heating sensing substrate, and the S pole of at least part of the permanent magnets faces the heating surface of the heating sensing substrate; the N pole of at least part of the permanent magnets in the second magnetic field generating component faces the heating surface of the heating sensing substrate, and the S pole of at least part of the permanent magnets faces the heating surface of the heating sensing substrate.
6. The heating sensor device for use in a plating apparatus according to any one of claims 1 to 3, wherein the first heat generating member and the second heat generating member are two conductive cases independent of each other, and the two conductive cases are respectively covered with an insulating material outside the first magnetic field generating member and the second magnetic field generating member.
7. The plating apparatus according to any one of claims 1 to 4, wherein the first heat generating member and the second heat generating member are a single conductive case connected integrally, and the single conductive case is covered with insulation over the first magnetic field generating member and the second magnetic field generating member.
8. The heating sensor device in the plating apparatus according to claim 3 or 4, wherein an insulating material is filled between the first heat generating member and the induction coil, and an insulating material is filled between the second heat generating member and the induction coil;
or, the cable for winding the inductance coil is coated with an insulating layer.
9. The heating sensor device in a plating apparatus according to claim 2, further comprising a third magnetic field generation section and a third heat generation section,
the third magnetic field generation member is provided between the first magnetic field generation member and the second magnetic field generation member;
the third heat generating member is disposed between the first heat generating member and the second heat generating member, the third heat generating member is disposed to correspond to the third magnetic field generating member, and a magnetic flux passing through the third heat generating member is varied based on a variation in a magnetic field of the third magnetic field generating member;
wherein a rate of change of a magnetic flux passing through the third heat generating part is between a rate of change of a magnetic flux passing through the first heat generating part and a rate of change of a magnetic flux passing through the second heat generating part, and/or a time when the third magnetic field part generates a magnetic field is between a time when the first magnetic field generating part generates a magnetic field and a time when the second magnetic field generating part generates a magnetic field.
10. A plating apparatus, characterized by comprising a heat sensing device in the plating apparatus according to any one of claims 1 to 9.
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| CN201920522140.3U CN209906878U (en) | 2019-04-17 | 2019-04-17 | Heating sensing device in coating equipment and coating equipment |
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| CN201920522140.3U CN209906878U (en) | 2019-04-17 | 2019-04-17 | Heating sensing device in coating equipment and coating equipment |
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| CN209906878U true CN209906878U (en) | 2020-01-07 |
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Address after: 215301 No. 1, Longteng Road, Kunshan Development Zone, Jiangsu, Suzhou Patentee after: Kunshan Longteng Au Optronics Co. Address before: 215301 No. 1, Longteng Road, Kunshan Development Zone, Jiangsu, Suzhou Patentee before: Infovision Optoelectronics (Kunshan) Co.,Ltd. |
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