CN209886321U - High hydrogen gas bell-type annealing furnace hearth cleaning device - Google Patents
High hydrogen gas bell-type annealing furnace hearth cleaning device Download PDFInfo
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- CN209886321U CN209886321U CN201920474531.2U CN201920474531U CN209886321U CN 209886321 U CN209886321 U CN 209886321U CN 201920474531 U CN201920474531 U CN 201920474531U CN 209886321 U CN209886321 U CN 209886321U
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Abstract
The utility model discloses a high hydrogen gas bell-type annealing furnace hearth cleaning device, which comprises a cleaning box and an annealing furnace hearth, wherein the right side of the inner cavity of the cleaning box is provided with a water tank and a baking blast box, the left side of the inner cavity of the cleaning box is provided with a dust suction box, the positions of the right sides of the water tank and the baking blast box, which are close to the bottom, are all fixedly connected with water pipes, one ends of the two water pipes and the dust suction pipe are all fixedly connected with a butt joint ring, the inner cavity of the butt joint ring is respectively and fixedly connected with a brushing rod, a baking rod and a dust suction rod, and the bottoms of the brushing rod, the baking rod and the dust suction rod are respectively provided with a cleaning brush, a; the utility model discloses a high hydrogen gas bell-type annealing furnace stove top cleaning device through bull stick and fixed inserted bar isotructure, can make convenient and fast more when cleaning annealing furnace stove top, makes it can be quick carry out the dust absorption with annealing furnace stove top, has solved the slower problem of traditional clean mode efficiency.
Description
Technical Field
The utility model relates to an annealing furnace stove top cleaning device technical field, concretely relates to high hydrogen gas bell-type annealing furnace stove top cleaning device.
Background
An annealing furnace is a process used in semiconductor device fabrication that includes heating a plurality of semiconductor wafers. The thermal treatment is designed for different effects, and can heat the wafer to activate dopants, convert thin films into thin films or thin films into wafer substrate interfaces, repair implanted damage, move dopants or transfer dopants from one thin film to another or from a thin film into a wafer substrate.
At present, most annealing furnaces are placed on a hearth of the annealing furnaces when in use, and heat dissipation is carried out by utilizing the hearth of the annealing furnaces, but because the hearth of the annealing furnaces is exposed outside, a large amount of dust can be attached to the surface of the hearth of the annealing furnaces, and the heat dissipation performance of the hearth of the annealing furnaces can be affected when the dust is pushed and squeezed more, so that the hearth of the annealing furnaces needs to be cleaned, and the surface of the hearth needs to be kept clean; however, most of the existing annealing furnace benches are cleaned only by manual work, so that the efficiency is low, time and labor are wasted, and most of the annealing furnace benches are dried in the air after being brushed by water, which slows down the production process.
SUMMERY OF THE UTILITY MODEL
Aiming at the defects of the prior art, the utility model provides a high hydrogen gas hood-type annealing furnace hearth cleaning device, which comprises a cleaning box and an annealing furnace hearth, wherein the right side of the inner cavity of the cleaning box is provided with a water tank and a baking blast box, the positions of the left side and the right side of the cleaning box, which are close to the top, are fixedly connected with clamping rings, the left side of the inner cavity of the cleaning box is provided with a dust suction box, the positions of the right sides of the water tank and the baking blast box, which are close to the bottom, are fixedly connected with water pipes, one ends of the two water pipes and the dust suction pipe are fixedly connected with a butt joint ring, the inner cavity of the butt joint ring is respectively and fixedly connected with a scouring rod, a baking rod and a dust suction rod, the bottoms of the scouring rod baking rod and the dust suction rod are respectively provided with a cleaning brush, a blowing port and a dust collector, the joint inslot activity is pegged graft and is had fixed inserted bar, the left side integrated into one piece of fixed inserted bar has the leading truck, the top of leading truck is provided with the push rod, the surface activity of push rod has cup jointed the clamp ring, the push rod passes through spherical joint and leading truck swing joint, the straight guide pulley of inboard left side fixedly connected with of leading truck, the inboard bottom of leading truck is provided with universal guide pulley, the top fixedly connected with regulating block of universal guide pulley, the regulation hole has been seted up at the top of regulating block, it has fixed inserted bar to peg graft in the regulation hole, the central authorities through connection of regulating block has the bull stick.
The utility model discloses a high hydrogen gas bell-type annealing furnace stove top cleaning device, wherein the adjustment tank has been seted up on the right side in the leading truck outside, the figure of looking sideways at of adjustment tank is that the semicircle is cyclic annular and the motion trail of adjustment hole is corresponding on opening part and the regulating block.
The utility model discloses a high hydrogen gas bell-type annealing furnace stove top cleaning device, wherein the fixed slot that corresponds with it is all seted up in the left side of fixed inserted bar and bull stick, the fixed slot has two and all corresponding with the position after the regulation hole rotates.
The high hydrogen gas bell-type annealing furnace hearth cleaning device of the utility model is provided with a dust collector and a hot air blower in the dust collection box and the baking blast box respectively.
The utility model discloses a high hydrogen gas bell-type annealing furnace stove top cleaning device, wherein the top fixedly connected with push-and-pull rod of clean case, the bottom fixedly connected with case lid of push-and-pull rod, the right side of push-and-pull rod is provided with the water filling port, the water filling port run through the case lid and communicate with the water tank, the equal fixedly connected with gyro wheel in four corners department of clean bottom of the case portion.
The utility model discloses a high hydrogen gas bell-type annealing furnace stove top cleaning device, wherein the corner of dust absorption pipe and water pipe all is provided with the bellows, dust absorption pipe and two water pipes respectively with dust absorption pole, bake the pole and erode the inside sealed butt joint of inner tube of pole.
The utility model discloses a high hydrogen gas bell-type annealing furnace stove top cleaning device, wherein the joint groove of cleaning brush, mouth of blowing and dust catcher suction inlet left and right sides all with joint pole looks adaptation.
The utility model discloses a high hydrogen gas bell-type annealing furnace stove top cleaning device, wherein the bottom of cleaning brush has seted up three delivery port along horizontal equidistance, a plurality of fine and close apertures have been seted up on the delivery port.
Compared with the prior art, the beneficial effects of the utility model are as follows:
the utility model discloses a high hydrogen gas bell-type annealing furnace stove top cleaning device, through the leading truck, the joint pole, universal guide pulley, the straight guide pulley, spherical joint, the regulating block, the regulation hole, the adjustment tank, bull stick and fixed inserted bar isotructure, can make more convenient and fast when cleaning annealing furnace stove top, utilize leading truck and burnisher joint, make it can be quick carry out the dust absorption with annealing furnace stove top, erode and dry, realize the dust absorption, erode, the integration of drying, clear efficiency has been accelerated greatly, clean workman's pressure has been alleviateed, the process of production has also been accelerated simultaneously, for the mill has practiced thrift a large amount of clean time, the slower problem of traditional clean mode efficiency has been solved.
Drawings
The accompanying drawings, which are included to provide a further understanding of the application and are incorporated in and constitute a part of this application, illustrate embodiment(s) of the application and together with the description serve to explain the application and not to limit the application. In the drawings:
FIG. 1 is an overall front sectional structural view of a clean box;
FIG. 2 is a side view of the cleaning tank;
FIG. 3 is a front view of the guide frame;
FIG. 4 is a schematic view of a furnace platform structure of an annealing furnace;
FIG. 5 is a schematic top view of the water outlet;
FIG. 6 is a schematic view of a cleaning brush;
FIG. 7 is a schematic view of a suction port of the vacuum cleaner;
FIG. 8 is a schematic view of the structure of the air blowing port;
FIG. 9 is a schematic view of a retraction and lowering configuration of a universal idler;
FIG. 10 is a schematic view of the structure of the adjustment groove;
FIG. 11 is a side view of the fixing rod.
In the figure: 01. a box cover; 02. a water injection port; 03. a docking ring; 04. a water tank; 05. punching a rod; 06. A water pipe; 07. a hinge; 08. a cleaning brush; 09. a roller; 10. a suction opening of the dust collector; 11. a dust collection box; 12. a dust collection pipe; 13. a dust suction rod; 14. a snap ring; 15. a cleaning tank; 16. a baking rod; 17. an air blowing port; 18. an inner tube; 19. a clamping groove; 20. an annealing furnace hearth; 21. a guide frame; 22. a water outlet; 23. a push rod; 24. a clamping ring; 25. a clamping and connecting rod; 26. a universal guide wheel; 27. a straight guide wheel; 28. a spherical joint; 29. an adjusting block; 30. an adjustment hole; 31. an adjustment groove; 32. a rotating rod; 33. fixing the inserted rod; 34. and (5) baking the blast box.
Detailed Description
In the following description, numerous implementation details are set forth in order to provide a more thorough understanding of the present invention. It should be understood, however, that these implementation details should not be used to limit the invention. That is, in some embodiments of the invention, details of these implementations are not necessary. In addition, some conventional structures and components are shown in simplified schematic form in the drawings.
In addition, the descriptions related to "first", "second", etc. in the present invention are only for description purposes, not specifically referring to the order or sequence, and are not intended to limit the present invention, but only to distinguish the components or operations described in the same technical terms, and are not to be construed as indicating or implying any relative importance or implicit indication of the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one such feature. In addition, the technical solutions in the embodiments may be combined with each other, but it must be based on the realization of those skilled in the art, and when the technical solutions are contradictory or cannot be realized, the combination of the technical solutions should not be considered to exist, and is not within the protection scope of the present invention.
The utility model relates to a high hydrogen gas bell-type annealing furnace hearth cleaning device, which comprises a cleaning box 15 and an annealing furnace hearth 20, the right side of the inner cavity of the cleaning box 15 is provided with a water tank 04 and a baking blast box 34, the positions of the left side and the right side of the cleaning box 15 close to the top are fixedly connected with a clamping ring 14, the design of the structure can utilize the clamping ring 14 to clamp a dust suction pipe 12 and a water pipe 06, the left side of the inner cavity of the cleaning box 15 is provided with a dust suction box 11, the positions of the right side of the water tank 04 and the baking blast box 34 close to the bottom are fixedly connected with a water pipe 06, one ends of the two water pipes 06 and the dust suction pipe 12 are fixedly connected with a butt joint ring 03, the design of the structure can utilize the butt joint ring 03 to rapidly and stably connect the water pipe 06 and the dust suction pipe 12 with an inner pipe 18 in a sealing way, water leakage, air leakage and dust leakage are prevented, dust leakage and, the bottom of the flushing rod 05, the bottom of the baking rod 16 and the bottom of the dust suction rod 13 are respectively provided with a cleaning brush 08, a blowing port 17 and a dust suction port 10 which are all connected through a hinge 07, the front and the back of the cleaning brush 08, the blowing port 17 and the dust suction port 10 are respectively provided with a clamping groove 19, the structure design can utilize the clamping groove 19 and a clamping rod 25 to carry out quick butt joint on a cleaning tool and a guide frame 21, a fixed inserting rod 33 is movably inserted in the clamping groove 19, the left side of the fixed inserting rod 33 is integrally formed with the guide frame 21, the top of the guide frame 21 is provided with a push rod 23, the structure design can utilize the fixed inserting rod 33 to enable the adjustment of an adjusting block 29 to be more convenient and quick, the outer surface of the push rod 23 is movably sleeved with a clamping ring 24, the push rod 23 is movably connected with the guide frame 21 through a spherical joint 28, the left side inside the guide frame 21 is fixedly connected with a straight guide, the design of this structure can utilize straight guide wheel 27 and universal guide wheel 26 to make the push-and-pull of leading truck 21 swift more and laborsaving, universal guide wheel 26's top fixedly connected with regulating block 29, regulating hole 30 has been seted up at regulating block 29's top, it has fixed inserted bar 33 to peg graft in the regulating hole 30, the central authorities through connection of regulating block 29 have bull stick 32, the design of this structure can utilize bull stick 32 and regulating hole 30 to make regulating block 29's regulation more firm.
The right side in leading truck 21 outside has seted up adjustment tank 31, and the side view figure of adjustment tank 31 is the semicircle ring-type and the opening part corresponds with the motion trail of regulation hole 30 on regulating block 29, and this structure can utilize adjustment tank 31 to make fixed inserted bar 33 convenient and fast more when pegging graft with regulation hole 30.
The left sides of the fixed inserted link 33 and the rotating link 32 are provided with fixing grooves corresponding to the fixed inserted link, the positions of the two fixing grooves after rotating with the adjusting hole 30 correspond to each other, and the fixed inserted link 33 can be more stably connected in a plugging mode through the fixing grooves.
The dust suction box 11 and the baking blast box 34 are respectively provided with a dust collector and a hot blast blower, and the structure can utilize the dust collector to suck dust on the annealing furnace hearth 20 and simultaneously utilize the hot blast blower to quickly dry the annealing furnace hearth 20.
The top fixedly connected with push-and-pull rod of cleaning box 15, the bottom fixedly connected with case lid 01 of push-and-pull rod, the right side of push-and-pull rod is provided with water filling port 02, water filling port 02 run through case lid 01 and communicate with water tank 04, the equal fixedly connected with gyro wheel 09 in four corners department of cleaning box 15 bottom, this structure can utilize water filling port 02 to carry out the water injection to water tank 04 fast, it is more convenient to utilize gyro wheel 09 to make cleaning box 15 remove simultaneously.
The corrugated pipes are arranged at the corners of the dust suction pipe 12 and the water pipes 06, the dust suction pipe 12 and the two water pipes 06 are in sealing butt joint with the dust suction rod 13, the baking rod 16 and the inner pipe 18 inside the scouring rod 05 respectively, the corrugated pipes can be utilized to enable the dust suction pipe 12 and the two water pipes 06 to be used more conveniently, and meanwhile, the inner pipe 18 is utilized to enable the dust suction pipe 12 and the two water pipes 06 to be more stable and convenient in butt joint.
The cleaning brush 08, the air blowing port 17 and the clamping grooves 19 on the left side and the right side of the suction port 10 of the dust collector are matched with the clamping rod 25, and the structure can utilize the clamping grooves 19 and the clamping rods 25 to enable the cleaning tool to be connected with the guide frame 21 more conveniently and quickly.
Three water outlets 22 are formed in the bottom of the cleaning brush 08 at equal intervals along the horizontal direction, a plurality of fine small holes are formed in the water outlets 22, the structure can be more convenient to wash the annealing furnace hearth 20 by using the water outlets 22, and meanwhile, the output quantity of water is effectively controlled by using the small openings of the water outlets, so that water is prevented from being sputtered or sprayed out in a large quantity.
When the utility model is used, firstly the cleaning box 15 is pushed to one side of the annealing furnace hearth 20, then the guide frame 21 is inserted with the air blowing port 17, the cleaning brush 08 and the dust collector suction port 10, the dust collector switch is opened, then the guide frame 21 is erected at the edge of the annealing furnace hearth 20 through the straight guide wheel 27 and the universal guide wheel 26, the dust collecting rod 13 is clamped by the clamping ring 24, the push rod 23 is grasped to collect dust around the cylindrical annealing furnace hearth 20, the dust of the annealing furnace hearth 20 can be quickly absorbed by the straight guide wheel 27 and the universal guide wheel 26, then the water tank 04 switch is opened, meanwhile, the universal guide wheel 26 is folded by the fixing inserted rod 33 and the adjusting block 29, the cleaning brush 08 and the water outlet 22 at the bottom of the cleaning brush are utilized to quickly wash the annealing furnace hearth 20 around the ring shape, finally the switch of the baking blast box 34 is opened, the universal guide wheel 26 is put down and fixed by the fixing inserted rod 33, the air blowing port 17 is used for rapidly drying the annealing furnace base 20 in a ring shape, and the dust absorption, the scouring and the drying are integrated, so that the annealing furnace base 20 is rapidly cleaned.
The above description is only an embodiment of the present invention, and is not intended to limit the present invention. Various modifications and changes may occur to those skilled in the art. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention should be included in the scope of the claims of the present invention.
Claims (8)
1. The utility model provides a high hydrogen gas bell-type annealing furnace stove top cleaning device, includes clean case (15) and annealing furnace stove top (20), its characterized in that: the right side of the inner cavity of the cleaning box (15) is provided with a water tank (04) and a baking blast box (34), the left side and the right side of the cleaning box (15) are close to a clamping ring (14) which is fixedly connected with the position of the top, the left side of the inner cavity of the cleaning box (15) is provided with a dust suction box (11), the right side of the water tank (04) and the baking blast box (34) are close to a water pipe (06) which is fixedly connected with the position of the bottom, two water pipes (06) and one end of a dust suction pipe (12) are fixedly connected with a butt joint ring (03), the inner cavity of the butt joint ring (03) is respectively and fixedly connected with a brushing rod (05), a baking rod (16) and a dust suction rod (13), the bottoms of the brushing rod (05), the baking rod (16) and the dust suction rod (13) are respectively provided with a cleaning brush (08), a blowing port (17) and a, the cleaning brush is characterized in that the front and the back of the cleaning brush (08), the front and the back of the air blowing port (17) and the suction port (10) of the dust collector are respectively provided with a clamping groove (19), a fixed inserted rod (33) is movably inserted in the clamping groove (19), a guide frame (21) is integrally formed on the left side of the fixed inserted rod (33), the top of the guide frame (21) is provided with a push rod (23), the outer surface of the push rod (23) is movably sleeved with a clamping ring (24), the push rod (23) is movably connected with the guide frame (21) through a spherical joint (28), the left side of the inner side of the guide frame (21) is fixedly connected with a straight guide wheel (27), the bottom of the inner side of the guide frame (21) is provided with a universal guide wheel (26), the top of the universal guide wheel (26) is fixedly connected with an adjusting block (29), the top of the adjusting block (29) is provided with an adjusting hole, the center of the adjusting block (29) is connected with a rotating rod (32) in a penetrating way.
2. The high-hydrogen gas hood-type annealing furnace hearth cleaning device according to claim 1, wherein: adjusting groove (31) have been seted up on the right side in leading truck (21) outside, the side view figure of adjusting groove (31) is the semicircle annular and the opening part corresponds with the motion trail of regulation hole (30) on regulating block (29).
3. The high-hydrogen gas hood-type annealing furnace hearth cleaning device according to claim 1, wherein: the left sides of the fixed inserted bar (33) and the rotating bar (32) are provided with fixing grooves corresponding to the fixed inserted bar, and the two fixing grooves correspond to the positions of the adjusting holes (30) after rotation.
4. The high-hydrogen gas hood-type annealing furnace hearth cleaning device according to claim 1, wherein: a dust collector and a hot air blower are respectively arranged in the dust collection box (11) and the baking blast box (34).
5. The high-hydrogen gas hood-type annealing furnace hearth cleaning device according to claim 1, wherein: the cleaning box is characterized in that a push-pull rod is fixedly connected to the top of the cleaning box (15), a box cover (01) is fixedly connected to the bottom of the push-pull rod, a water injection port (02) is formed in the right side of the push-pull rod, the water injection port (02) penetrates through the box cover (01) and is communicated with a water tank (04), and idler wheels (09) are fixedly connected to four corners of the bottom of the cleaning box (15).
6. The high-hydrogen gas hood-type annealing furnace hearth cleaning device according to claim 1, wherein: the corner of dust absorption pipe (12) and water pipe (06) all is provided with the bellows, dust absorption pipe (12) and two water pipe (06) respectively with dust absorption pole (13), toast pole (16) and wash away the inside inner tube (18) of pole (05) and seal the butt joint.
7. The high-hydrogen gas hood-type annealing furnace hearth cleaning device according to claim 1, wherein: the cleaning brush (08), the air blowing port (17) and the clamping grooves (19) on the left side and the right side of the suction port (10) of the dust collector are matched with the clamping rods (25).
8. The high-hydrogen gas hood-type annealing furnace hearth cleaning device according to claim 1, wherein: the bottom of the cleaning brush (08) is provided with three water outlets (22) at equal intervals along the horizontal direction, and the water outlets (22) are provided with a plurality of fine small holes.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920474531.2U CN209886321U (en) | 2019-04-10 | 2019-04-10 | High hydrogen gas bell-type annealing furnace hearth cleaning device |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920474531.2U CN209886321U (en) | 2019-04-10 | 2019-04-10 | High hydrogen gas bell-type annealing furnace hearth cleaning device |
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| CN209886321U true CN209886321U (en) | 2020-01-03 |
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| CN201920474531.2U Active CN209886321U (en) | 2019-04-10 | 2019-04-10 | High hydrogen gas bell-type annealing furnace hearth cleaning device |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112985094A (en) * | 2021-03-30 | 2021-06-18 | 郑员锋 | Waste gas collecting and purifying treatment device for sintering furnace |
-
2019
- 2019-04-10 CN CN201920474531.2U patent/CN209886321U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112985094A (en) * | 2021-03-30 | 2021-06-18 | 郑员锋 | Waste gas collecting and purifying treatment device for sintering furnace |
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