CN209880537U - Novel tray for ion beam etching equipment - Google Patents

Abstract

A novel tray for ion beam etching equipment relates to the technical field of chips. Comprises a tray body and an upper cover. A plurality of holding tanks that are used for holding the product have been seted up to the upper surface of tray body, and a plurality of radiating grooves have been seted up to the tray body lower surface, and every holding tank all corresponds and is provided with a radiating groove. Be provided with a plurality of fin in the radiating groove, the parallel, the interval of fin sets up and the tank bottom of equal perpendicular to radiating groove, has the clearance between two adjacent fin, and the fin is offered and is used for the breach with two adjacent clearance intercommunications. The tray body is also provided with communicating holes for communicating the radiating grooves with the accommodating grooves, and the communicating holes are distributed in the gaps. The upper cover is provided with an exposure hole for exposing a product positioned in the accommodating groove, the exposure hole is slightly smaller than the notch of the accommodating groove, and the upper cover is detachably covered on the upper surface of the tray body. It is good to the product fixed action, can also further strengthen the radiating efficiency simultaneously.

Description

Novel tray for ion beam etching equipment

Technical Field

The utility model relates to a chip technology field particularly, relates to a novel tray for ion beam etching equipment.

Background

The cooling process of the ion beam etching equipment on the market at present is generally cooling by using process cooling water. High heat is generated during the operation of ion beam etching equipment, and products sensitive to temperature have serious process result influence. The heat taken away by the process cooling water is constant, but the longer the working time of the ion beam etching equipment is, the larger the temperature change is, so that the process is not favorable for carrying out friendly control on the temperature. In order to solve the problems, the technology of carrying out temperature control by adopting a low-temperature air blowing mode appears at present, and the cooling effect is greatly improved. However, the product (such as a chip) is often displaced during the use process.

In view of this, the present application is specifically made.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a novel tray for ion beam etching equipment, its simple structure, it is good to the product fixed action, can avoid the product to take place the displacement at the in-process that low temperature air swept, guarantees smooth, the effective going on of course of working. Meanwhile, the heat dissipation efficiency can be further enhanced, heat overstock is prevented, and the product quality is guaranteed.

The embodiment of the utility model is realized like this:

a novel tray for an ion beam etching apparatus, comprising: tray body and upper cover. A plurality of holding tanks that are used for holding the product have been seted up to the upper surface of tray body, and a plurality of radiating grooves have been seted up to the tray body lower surface, and every holding tank all corresponds and is provided with a radiating groove. Be provided with a plurality of fin in the radiating groove, the parallel, the interval of fin sets up and the tank bottom of equal perpendicular to radiating groove, has the clearance between two adjacent fin, and the fin is offered and is used for the breach with two adjacent clearance intercommunications. The tray body is also provided with communicating holes for communicating the radiating grooves with the accommodating grooves, and the communicating holes are distributed in the gaps. The upper cover is provided with an exposure hole for exposing a product positioned in the accommodating groove, the exposure hole is slightly smaller than the notch of the accommodating groove, and the upper cover is detachably covered on the upper surface of the tray body.

Further, the mounting groove that is used for installing the upper cover is offered to the upper surface of tray body, and the degree of depth of mounting groove is the same with the thickness of upper cover, and the tank bottom in mounting groove is seted up to the holding tank.

Furthermore, one side edge of the upper cover is hinged to the tray body, and the other side edge of the upper cover is detachably connected to the tray body through a locking piece. The locking piece rotates the post and rotationally connects in tray body including rotating the post and supporting the preforming, supports the preforming fixed connection in rotating the post to the messenger can make to support the preforming and support the pressure in the mounting groove through rotatory rotation post.

Furthermore, an adjusting groove is concavely arranged on the groove wall of one side, close to the locking piece, of the mounting groove, and the adjusting groove is formed in a concave mode along the direction perpendicular to the groove wall of the mounting groove. The rotating column penetrates through the adjusting groove and is provided with an outer gear ring, and the outer gear ring is located in the adjusting groove. The adjusting groove is rotatably provided with a transmission gear, and the transmission gear is meshed with the outer gear ring. The outer edge of the transmission gear is provided with a convex edge extending along the circumferential direction of the transmission gear. The thickness of the convex edge is increased along the direction from one end part of the convex edge to the middle part of the convex edge, so that when the pressing piece is rotated away from the upper cover, the convex edge can move to the mounting groove from the adjusting groove and jack the upper cover.

Further, the surface of the convex rib is subjected to smoothing treatment.

Furthermore, the outer wall of the rotating column is provided with a bulge part in a fan ring shape, and the groove wall of the adjusting groove is also provided with a stop block which is used for abutting against the end part of the bulge part. The rotating cylinder has a first rotation dead center and a second rotation dead center. When the rotating column is positioned at the first rotating stop point, the stop block is abutted against one end wall of the protruding part, the abutting sheet is abutted against the upper cover, and the convex edge is accommodated in the adjusting groove. When the rotating column is located at the second rotating stop point, the stop block abuts against the end wall of the other end of the protruding portion, the pressing piece rotates away from the upper cover, and the convex edge moves to the mounting groove and jacks up the upper cover.

Furthermore, the pressing sheet is strip-shaped, and the width of the pressing sheet is one third to one half of the diameter of the rotating column.

The embodiment of the utility model provides a beneficial effect is:

the embodiment of the utility model provides a novel tray for ion beam etching equipment puts into the holding tank with product (for example: chip) in the use, covers the tray body with the upper cover again, because the hole that exposes slightly is less than the notch of holding tank, the product can not deviate from the holding tank, can guarantee that the product is stably placed in the holding tank, ensures that the product can not take place the skew. And the low temperature air blows from the bottom of tray body, and the low temperature air blows to the holding tank by the intercommunicating pore of radiating groove to directly cool down the product. Because the bottom of tray body has set up radiating groove and fin, its heat radiating area greatly increased helps the thermal dispersion and the transmission of product to improve the radiating efficiency. In addition, gaps in the whole radiating grooves are communicated into a whole through the gaps of the radiating fins, so that the air flow pressure in each radiating groove is basically the same, and the product is prevented from being damaged due to over-large local pressure. In addition, every radiating groove is mutually independent, and it can make the air pressure in every radiating groove all be mutually independent again, avoids the interval too big and cause the air pressure change too frequently to guarantee the heat-sinking capability's of every holding tank stability.

Generally, the embodiment of the utility model provides a novel tray simple structure for ion beam etching equipment is good to the product fixed action, can avoid the product to take place the displacement at the in-process that low temperature air swept, guarantees smooth, the effective going on of course of working. Meanwhile, the heat dissipation efficiency can be further enhanced, heat overstock is prevented, and the product quality is guaranteed.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings that are required to be used in the embodiments will be briefly described below, it should be understood that the following drawings only illustrate some embodiments of the present invention, and therefore should not be considered as limiting the scope, and for those skilled in the art, other related drawings can be obtained according to the drawings without inventive efforts.

Fig. 1 is a schematic structural view of a novel tray provided by an embodiment of the present invention;

FIG. 2 is a schematic structural view of the back side of the tray body of the novel tray of FIG. 1;

FIG. 3 is a schematic structural view of a heat sink of the tray body shown in FIG. 2;

FIG. 4 is an enlarged view of area A of FIG. 1;

FIG. 5 is a schematic view of the internal structure of the tray body of the new tray of FIG. 1;

FIG. 6 is an enlarged view of area B of FIG. 5;

FIG. 7 is a schematic view of the engagement between the protrusion of the rotary post and the stop block of FIG. 6;

FIG. 8 is a schematic view of the rib entering the mounting groove;

fig. 9 is a schematic view of another perspective of the transmission gear of fig. 6.

Icon: a new pallet 1000; a tray body 100; a receiving groove 110; a heat dissipation groove 120; a heat sink 121; a notch 122; a communication hole 130; a mounting groove 140; an adjustment groove 150; an upper cover 200; an exposure hole 210; a lock 300; a rotating post 310; an outer ring gear 320; a projection 330; a pressing piece 340; a transmission gear 400; a rib 410; a head end 411; a stop block 500.

Detailed Description

In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are some, but not all, embodiments of the present invention. The components of embodiments of the present invention, as generally described and illustrated in the figures herein, may be arranged and designed in a wide variety of different configurations.

Thus, the following detailed description of the embodiments of the present invention, presented in the accompanying drawings, is not intended to limit the scope of the invention, as claimed, but is merely representative of selected embodiments of the invention. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative efforts belong to the protection scope of the present invention.

It should be noted that: like reference numbers and letters refer to like items in the following figures, and thus, once an item is defined in one figure, it need not be further defined and explained in subsequent figures.

In the description of the present invention, it should also be noted that, unless otherwise explicitly specified or limited, the terms "disposed," "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood in specific cases to those skilled in the art.

Examples

Referring to fig. 1 to 3, the present embodiment provides a novel tray 1000 for an ion beam etching apparatus, the novel tray 1000 including: a tray body 100 and an upper cover 200.

The upper surface of the tray body 100 is provided with a plurality of accommodating grooves 110 for accommodating products, the lower surface of the tray body 100 is provided with a plurality of heat dissipation grooves 120, and each accommodating groove 110 is correspondingly provided with one heat dissipation groove 120. A plurality of radiating fins 121 are arranged in the radiating groove 120, the radiating fins 121 are parallel and arranged at intervals and are all perpendicular to the groove bottom of the radiating groove 120, a gap is formed between every two adjacent radiating fins 121, and notches 122 used for communicating every two adjacent gaps are formed in the radiating fins 121. The tray body 100 is further opened with communication holes 130 for communicating the heat dissipation grooves 120 with the receiving grooves 110, and the communication holes 130 are distributed in the gap. The upper cover 200 is provided with an exposing hole 210 for exposing a product located in the accommodating groove 110, the exposing hole 210 is slightly smaller than the notch of the accommodating groove 110, and the upper cover 200 is detachably covered on the upper surface of the tray body 100. Generally, the size of the receiving groove 110 is determined according to the size of the product, and the cavity of the receiving groove 110 is slightly larger than the product.

In the using process, the product (e.g., chip) is placed in the receiving groove 110, and then the upper cover 200 is covered on the tray body 100, since the exposing hole 210 is slightly smaller than the notch of the receiving groove 110, the product cannot be separated from the receiving groove 110, so that the product can be stably placed in the receiving groove 110, and the product is ensured not to deviate. And the low temperature air is blown from the bottom of the tray body 100, and the low temperature air is blown to the accommodating groove 110 through the communication hole 130 of the heat dissipation groove 120 to directly cool the product. Since the heat dissipation grooves 120 and the heat dissipation fins 121 are disposed at the bottom of the tray body 100, the heat dissipation area is greatly increased, which facilitates the heat dissipation and transfer of the product, thereby improving the heat dissipation efficiency. In addition, since the gaps in the whole heat dissipation grooves 120 are all communicated into a whole by the notches 122 of the heat dissipation fins 121, the pressure of the air flow in each heat dissipation groove 120 can be ensured to be basically the same, and the product is prevented from being damaged due to over-pressure of the local part. In addition, each heat dissipation groove 120 is independent, and the airflow pressure in each heat dissipation groove 120 can be independent, so that the problem that the airflow pressure changes too frequently due to too large intervals is avoided, and the stability of the heat dissipation capacity of each accommodating groove 110 is guaranteed.

Overall, novel tray 1000 simple structure is good to the product fixed action, can avoid the product to take place the displacement at the in-process that low temperature air swept, guarantees smooth, the effective of course of working. Meanwhile, the heat dissipation efficiency can be further enhanced, heat overstock is prevented, and the product quality is guaranteed.

In the present embodiment, the receiving slots 110 are distributed in a rectangular array on the tray body 100. Accordingly, the heat dissipation grooves 120 and the exposure holes 210 are also distributed in a rectangular array. The upper surface of the tray body 100 is provided with a mounting groove 140 for mounting the upper cover 200, the depth of the mounting groove 140 is the same as the thickness of the upper cover 200, and the receiving groove 110 is arranged at the bottom of the mounting groove 140. Through this design, make novel tray 1000's structure compacter on the one hand, also make upper cover 200 stability after the installation finishes better simultaneously, the planarization on novel tray 1000 surface is also better, is convenient for process and use.

Further, referring to fig. 4, one side edge of the upper cover 200 is hinged to the tray body 100, and the other side edge is detachably connected to the tray body 100 by the locking member 300. The locking member 300 includes a rotating column 310 and a pressing piece 340, the rotating column 310 is rotatably connected to the tray body 100, and the pressing piece 340 is fixedly connected to the rotating column 310, so that the pressing piece 340 can press the upper cover 200 against the mounting groove 140 by rotating the rotating column 310.

Specifically, referring to fig. 5 to 9, an adjusting groove 150 is concavely formed on a groove wall of the mounting groove 140 near the locking member 300, and the adjusting groove 150 is concavely formed along a direction perpendicular to the groove wall of the mounting groove 140. The rotary column 310 penetrates to the adjustment groove 150, and the rotary column 310 has an outer ring gear 320, and the outer ring gear 320 is located in the adjustment groove 150. The adjustment groove 150 is rotatably installed with a driving gear 400, and the driving gear 400 is engaged with the outer ring gear 320. The outer edge of the driving gear 400 is provided with a rib 410 extending along the circumferential direction thereof, and the rib 410 is protruded from the outer wall of the driving gear 400 in the radial direction thereof. The thickness of the rib 410 increases in a direction from the head end 411 of the rib 410 toward the middle thereof, so that the rib 410 can move from the adjustment groove 150 to the installation groove 140 and lift up the upper cover 200 when the pressing piece 340 is rotated away from above the upper cover 200.

Through the above design, when the upper cover 200 needs to be removed, the rotating column 310 is rotated first, so that the pressing piece 340 is rotated away from the upper side of the upper cover 200, and the locking of the pressing piece 340 to the upper cover 200 is released. When the rotary post 310 rotates, the driving gear 400 is driven, so that the protruding rib 410 of the driving gear 400 enters the installation groove 140 from the adjustment groove 150. The leading end 411 of the rib 410 first enters and contacts the bottom side of the upper cover 200 during the process of entering the mounting groove 140. Because the height of the upper surface of the rib 410 relative to the lower surface thereof is increased (i.e. the thickness of the rib 410 increases along the direction from the head end 411 of the rib 410 to the middle thereof), the upper surface of the rib 410 will jack up the upper cover 200 as the head end 411 continues to move into the mounting groove 140, thereby facilitating the removal of the movable end of the upper cover 200 from the mounting groove 140, facilitating the opening of the upper cover 200, and facilitating the insertion and removal of products.

In this embodiment, the surface of the rib 410 is smoothed.

Further, the outer wall of the rotating column 310 has a protruding portion 330 in a fan-ring shape, and the wall of the adjusting groove 150 is further provided with a stop block 500 for abutting against the end of the protruding portion 330. The rotating cylinder 310 has a first rotation dead center and a second rotation dead center. When the rotating column 310 is located at the first rotation stop point, the stop block 500 abuts against an end wall of the protruding portion 330, the pressing piece 340 abuts against the upper cover 200, and the rib 410 is received in the adjusting groove 150. When the rotating column 310 is located at the second rotation stop point, the stop block 500 abuts against the end wall of the other end of the protruding part 330, the pressing piece 340 rotates away from the upper cover 200, and the protruding rib 410 moves to the mounting groove 140 and jacks up the upper cover 200. In the present embodiment, the pressing sheet 340 is a strip, and the width of the pressing sheet 340 is one third to one half of the diameter of the rotating column 310.

Through the design, the excessive adjustment can not occur in the process of adjusting the rotating column 310, and after the adjustment is in place, the protruding part 330 abuts against the stop block 500, so that the adjustment of the rotating column 310 is more accurate.

In the present embodiment, the protrusion 330 is located at a side of the outer ring gear 320 away from the upper surface of the tray body 100, and the rotating cylinder 310 is provided with a head for matching with a screwdriver for facilitating rotation.

In conclusion, the novel tray 1000 is simple in structure, good in fixing effect on products, capable of avoiding displacement of the products in the low-temperature air blowing process and capable of guaranteeing smooth and effective processing of the processing process. Meanwhile, the heat dissipation efficiency can be further enhanced, heat overstock is prevented, and the product quality is guaranteed.

The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention, and various modifications and changes may be made by those skilled in the art. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims (7)

1. A novel tray for an ion beam etching apparatus, comprising: the tray comprises a tray body and an upper cover; the upper surface of the tray body is provided with a plurality of accommodating grooves for accommodating products, the lower surface of the tray body is provided with a plurality of radiating grooves, and each accommodating groove is correspondingly provided with one radiating groove; a plurality of radiating fins are arranged in the radiating grooves, the radiating fins are parallel and spaced and are perpendicular to the bottoms of the radiating grooves, a gap is formed between every two adjacent radiating fins, and notches for communicating the two adjacent gaps are formed in the radiating fins; the tray body is also provided with communicating holes for communicating the heat dissipation groove with the accommodating groove, and the communicating holes are distributed in the gap;

the upper cover is provided with an exposure hole for enabling the product to be located in the accommodating groove, the exposure hole is slightly smaller than the notch of the accommodating groove, and the upper cover is detachably covered on the upper surface of the tray body.

2. The novel tray as claimed in claim 1, wherein the tray body has an upper surface formed with an installation groove for installing the upper cover, the installation groove has a depth equal to a thickness of the upper cover, and the accommodation groove is formed at a bottom of the installation groove.

3. The novel tray of claim 2, wherein one side edge of the upper cover is hinged to the tray body, and the other side edge is detachably connected to the tray body by a locking piece; the locking piece comprises a rotating column and a pressing piece, the rotating column is rotatably connected to the tray body, and the pressing piece is fixedly connected to the rotating column, so that the pressing piece can be used for pressing the upper cover to the mounting groove by rotating the rotating column.

4. The novel tray as claimed in claim 3, wherein an adjusting groove is concavely formed on a side wall of the mounting groove close to the locking member, and the adjusting groove is concavely formed in a direction perpendicular to the wall of the mounting groove; the rotating column penetrates through the adjusting groove and is provided with an outer gear ring, and the outer gear ring is positioned in the adjusting groove; the adjusting groove is rotatably provided with a transmission gear, and the transmission gear is meshed with the outer gear ring; the outer edge of the transmission gear is provided with a convex edge extending along the circumferential direction of the transmission gear; the thickness of the convex rib is increased along the direction from one end part of the convex rib to the middle part of the convex rib, so that when the pressing piece is rotated away from the upper part of the upper cover, the convex rib can move from the adjusting groove to the mounting groove and jack up the upper cover.

5. The novel tray of claim 4, wherein the surface of the ribs is smoothed.

6. The new tray as claimed in claim 4, characterized in that the outer wall of the rotating column has a bulge in the shape of a sector ring, the wall of the adjusting groove is further provided with a stop block for abutting against the end of the bulge; the rotating column is provided with a first rotating stop point and a second rotating stop point; when the rotating column is positioned at the first rotating stop point, the stop block abuts against the end wall of one end of the protruding part, the abutting sheet abuts against the upper cover, and the convex edge is accommodated in the adjusting groove; when the rotating column is located at the second rotating stop point, the stop block abuts against the end wall of the other end of the protruding portion, the pressing piece rotates away from the upper cover, and the convex edge moves to the mounting groove and jacks up the upper cover.

7. The new tray according to claim 6, characterized in that said pressing sheet is in the shape of a strip, the width of which is one third to one half of the diameter of said rotating column.