CN209850936U - Micro-nano wire preparation device and micro-nano structure - Google Patents
Micro-nano wire preparation device and micro-nano structure Download PDFInfo
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- CN209850936U CN209850936U CN201920252988.9U CN201920252988U CN209850936U CN 209850936 U CN209850936 U CN 209850936U CN 201920252988 U CN201920252988 U CN 201920252988U CN 209850936 U CN209850936 U CN 209850936U
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Abstract
A micro-nano wire preparation device and a micro-nano structure belong to the technical field of microelectronics. The micro-nano wire preparation device comprises a liquid phase nano material storage device and a micro-nano wire arrangement mechanism; the liquid phase nano material storage device is provided with at least one liquid outlet hole, and the micro-nano wire arrangement mechanism and the liquid outlet holes are arranged in a one-to-one correspondence manner; the micro-nano line arrangement mechanism comprises at least two flexible wires, the surfaces of the flexible wires are provided with regularly distributed microstructures, the roots of the flexible wires are fixed on the liquid phase nano material storage device, the two flexible wires form a group, the end parts of the two flexible wires fall down on the substrate and are mutually abutted, and the included angle range of the two flexible wires abutted against the end parts of the two flexible wires after the two flexible wires are projected on the substrate is 1-5 degrees. The utility model discloses based on liquid phase nano-material's gravity, with the Laplace pressure differential and the asymmetric retentivity of flexible wire rod, can realize the rapid preparation of a little nano line.
Description
Technical Field
The utility model relates to a technique in the microelectronics field specifically is a receive line preparation facilities and receive structure a little.
Background
The micro-nano graph or the micro-nano line prepared on the specific substrate by using the liquid phase nano material has great research prospect in the aspects of integrated circuits, optical microelectronic devices, biosensors and biological detectors, and the performance of the devices in the fields depends on the one-dimensional micro-nano graph or the micro-nano line to a great extent. For example, micro-nano patterns or micro-nano lines prepared by using organic materials can improve the balance of electron and hole transfer, thereby improving the performance of integrated circuits and optical microelectronic devices.
In recent decades, there are many methods for preparing one-dimensional micro-nano patterns or micro-nano lines, such as photolithography, micro-contact printing, inkjet printing, etc., however, these methods have high cost and complex process, and the prepared micro-nano patterns are limited, and usually only some designed patterns can be transferred onto a substrate, and it is difficult to prepare nano-scale patterns. At present, a dripping method is generally adopted for preparing the nano-scale pattern, however, the success rate of preparing the micro-nano line by the dripping method is low, the preparation area is small, and the shape, the direction and the position of the micro-nano line are all uncontrollable randomly.
SUMMERY OF THE UTILITY MODEL
The utility model discloses it is not enough to the above-mentioned that prior art exists, provide a receive line preparation facilities a little and receive structure a little.
The utility model discloses a realize through following technical scheme:
the utility model relates to a micro-nano wire preparation device, which comprises a liquid phase nano material storage device and a micro-nano wire arrangement mechanism; the liquid phase nano material storage device is provided with at least one liquid outlet hole, and the micro-nano wire arrangement mechanism and the liquid outlet holes are arranged in a one-to-one correspondence manner; the micro-nano line arrangement mechanism comprises at least two flexible wires, the surfaces of the flexible wires are provided with regularly distributed microstructures, the roots of the flexible wires are fixed on the liquid phase nano material storage device, the two flexible wires form a group, the end parts of the two flexible wires fall down on the substrate and are mutually abutted, and the included angle range of the two flexible wires abutted against the end parts of the two flexible wires after the two flexible wires are projected on the substrate is 1-5 degrees.
The flexible wire is preferably animal hair.
The liquid phase nanometer material storage device stores liquid phase nanometer materials, and the liquid phase nanometer materials are at least one of quantum dot materials, fluorescent materials and conductive high polymer materials.
The substrate is made of any one of silicon-based materials and flexible materials, preferably flexible materials, and the flexible materials can be of a planar structure or a curved structure.
In some technical schemes, the liquid phase nano material storage device is fixedly connected with the motion execution mechanism through a bracket; preferably, the liquid-phase nano-material storage device can be arranged on the bracket in a vertical rotating manner, and the angle of the flexible wire rod which naturally falls is adjusted through rotation; further preferably, a hinge structure whose rotation angle is controllable is employed.
In some embodiments, the motion actuator includes a pair of X-axis linear displacement mechanisms, a Y-axis linear displacement mechanism mounted on the pair of X-axis linear displacement mechanisms, and a Z-axis linear displacement mechanism mounted on the Y-axis linear displacement mechanism, and the Z-axis linear displacement mechanism controls the pressure of the flexible wire relative to the substrate, and thus controls the width of the micro-nano wire.
In some embodiments, the motion actuator may be a robot, such as a parallel robot or a serial robot.
The utility model relates to a micro-nano structure, including the one-dimensional figure of receiving the line constitution a little, set up on the substrate, adopt the preparation of the above-mentioned preparation device of receiving the line a little to obtain.
Technical effects
Compared with the prior art, the utility model discloses following technological effect has:
1) the rapid preparation of the micro-nano wire can be realized based on the gravity of the liquid-phase nano material, the Laplace pressure difference with the flexible wire and the asymmetric holding force;
2) by controlling the movement direction, the movement speed and the pressure relative to the substrate of the flexible wire, the width and the thickness of the prepared micro-nano wire can be accurately controlled, and the physical and chemical properties of the micro-nano wire are ensured;
3) by stably moving the flexible wire, uniform micro-nano wires, especially flexible or curved substrates can be prepared on substrates of any shapes, so that the utility model has great application prospect in the production of wearable and implantable electronic devices;
4) the material and the device have wide selection range, low cost, low requirement on preparation conditions, simple process and large-area production.
Drawings
FIG. 1 is a schematic structural view of example 1;
FIG. 2 is a schematic structural diagram of a liquid-phase nanomaterial storage device in embodiment 1;
in the figure: the device comprises an X-axis linear displacement mechanism 100, a Y-axis linear displacement mechanism 200, a Z-axis linear displacement mechanism 300, a bracket 400, a liquid-phase nano-material storage device 500, a liquid outlet 501, an animal hair 600, a micro-nano line 700 and a substrate 800.
Detailed Description
The present invention will be described in detail with reference to the accompanying drawings and specific embodiments.
Example 1
As shown in fig. 1 and fig. 2, the present embodiment relates to a micro-nano wire manufacturing apparatus, including: a pair of X-axis linear displacement mechanisms 100, a Y-axis linear displacement mechanism 200, a Z-axis linear displacement mechanism 300, and a liquid-phase nanomaterial storage device 500, wherein a substrate 800 is disposed between the pair of X-axis linear displacement mechanisms 100; the liquid phase nano material storage device 500 is provided with liquid outlet holes 501 and micro-nano line arrangement mechanisms, and the micro-nano line arrangement mechanisms and the liquid outlet holes 501 are arranged in a one-to-one correspondence manner; the micro-nano line arrangement mechanism preferably comprises two animal hair 600, the roots of the two animal hair 600 are preferably bonded on the liquid phase nanometer material storage device 500, the liquid outlet 501 is arranged between the roots of the two animal hair 600, the end parts of the two animal hair 600 droop and are mutually abutted against each other at the drooping part, and the included angle range of the two animal hair 600 after being projected on the substrate 800 is 1-5 degrees.
The liquid phase nano-material storage device 500 is fixedly connected with the Z-axis linear displacement mechanism 300 through the bracket 400 and can stably move on the Z-axis linear displacement mechanism 300; the Z-axis linear displacement mechanism 300 is connected with the Y-axis linear displacement mechanism 200 and can stably move on the Y-axis linear displacement mechanism 200; the Y-axis linear displacement mechanism 200 is connected with the X-axis linear displacement mechanism 100 and can stably move on the X-axis linear displacement mechanism 100; the X-axis linear displacement mechanism 100 is fixed to a stable platform.
Preferably, the X-axis linear displacement mechanism 100, the Y-axis linear displacement mechanism 200, and the Z-axis linear displacement mechanism 300 are programmable linear displacement mechanisms, such as linear motor modules, which can precisely control the moving direction, moving speed, and pressure relative to the substrate of the animal hair 600.
The distance between the roots of 600 hairline hairs of two animals is 1-3 mm.
The angle and distance between the animal hair 600 and the substrate 800 can be adjusted by rotating the liquid-phase nanomaterial storage device 500 with respect to the support 400; preferably, the angle between the tangent to the root of 600 millihairs of the animal and the substrate 800 is 20-70, and the perpendicular distance from the root to the substrate is less than 7 cm.
The embodiment of the utility model provides a theory of operation as follows:
the liquid phase nanometer material flows into the gap between two animal hair 600 through the liquid outlet 501 under the action of gravity;
when the animal hair 600 contacts the substrate 800, the liquid phase nano material in the gap is continuously and controllably transferred onto the substrate 800 under the action of gravity, laplace pressure difference and asymmetric holding force to form the micro-nano line 700 with uniform width, and the micro-nano line 700 has the same functional attribute with the liquid phase nano material.
The shape of the micronano line 700 changes according to the motion track of the animal millihair 600, the width and thickness of the micronano line 700 can be controlled at nanometer level, wherein the thickness of the micronano line depends on the moving speed, the length of the millihair and the liquid surface tension; preferably, the micro-nano wire 700 has a width of 50-1000nm and a thickness of 40-150 nm.
It is to be emphasized that: the above embodiments are only preferred embodiments of the present invention, and are not intended to limit the present invention in any form, and any simple modifications, equivalent changes and modifications made by the technical spirit of the present invention to the above embodiments are all within the scope of the technical solution of the present invention.
Claims (10)
1. A micro-nano wire preparation device is characterized by comprising a liquid phase nano material storage device and a micro-nano wire arrangement mechanism; the liquid phase nano material storage device is provided with at least one liquid outlet hole, and the micro-nano wire arrangement mechanism and the liquid outlet holes are arranged in a one-to-one correspondence manner; the micro-nano line arrangement mechanism comprises at least two flexible wires, the surfaces of the flexible wires are provided with regularly distributed microstructures, the roots of the flexible wires are fixed on the liquid phase nano material storage device, the two flexible wires are in one group, the end parts of the two flexible wires fall down on the substrate and are mutually abutted, and the included angle range of the two flexible wires with the end parts mutually abutted after the two flexible wires are projected on the substrate is 1-5 degrees.
2. The device for preparing a micro-nano wire according to claim 1, wherein the substrate is made of any one of a silicon-based material and a flexible material.
3. The micro-nano wire manufacturing apparatus according to claim 1, wherein the flexible wire is made of animal hair.
4. The micro-nano wire preparation device of claim 1, wherein the liquid-phase nano-material storage device is fixedly connected with the motion actuator through a bracket.
5. The micro-nano wire manufacturing apparatus as claimed in claim 4, wherein the liquid-phase nano-material storage means is rotatably disposed up and down on the support.
6. The micro-nano wire manufacturing apparatus of claim 5, wherein the liquid-phase nano-material storage device is fixed on the support through a hinge structure with a controllable rotation angle.
7. The device for preparing the micro-nano wire according to claim 4, wherein the liquid-phase nano material storage device stores a liquid-phase nano material, and the liquid-phase nano material is at least one of a quantum dot material, a fluorescent material and a conductive high polymer material.
8. The micro-nano wire manufacturing apparatus as set forth in claim 4, wherein the motion actuator includes a pair of X-axis linear displacement mechanisms, a Y-axis linear displacement mechanism provided on the pair of X-axis linear displacement mechanisms, and a Z-axis linear displacement mechanism provided on the Y-axis linear displacement mechanism.
9. A micro-nano structure, which is characterized by comprising a one-dimensional graph formed by micro-nano lines, the one-dimensional graph is arranged on a substrate, and the micro-nano structure is prepared by adopting the micro-nano line preparation device of any one of claims 1 to 8.
10. A micro-nano structure according to claim 9, wherein the micro-nano lines have a width of 50-1000nm and a thickness of 40-150 nm.
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| CN201920252988.9U CN209850936U (en) | 2019-02-28 | 2019-02-28 | Micro-nano wire preparation device and micro-nano structure |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109807907A (en) * | 2019-02-28 | 2019-05-28 | 西交利物浦大学 | Micro-nano line preparation facilities and micro-nano structure |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109807907A (en) * | 2019-02-28 | 2019-05-28 | 西交利物浦大学 | Micro-nano line preparation facilities and micro-nano structure |
| WO2020173301A1 (en) * | 2019-02-28 | 2020-09-03 | 西交利物浦大学 | Micro-nano wire manufacturing device and micro-nano structure |
| GB2594537A (en) * | 2019-02-28 | 2021-11-03 | Xian Jiaotong Liverpool Univ | Micro-nano wire manufacturing device and micro-nano structure |
| GB2594537B (en) * | 2019-02-28 | 2023-05-03 | Xian Jiaotong Liverpool Univ | Micro-nano wire manufacturing device and micro-nano structure |
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