CN209850688U - In-place detection device for intermediate frequency ripple error of aspheric optical element - Google Patents
In-place detection device for intermediate frequency ripple error of aspheric optical element Download PDFInfo
- Publication number
- CN209850688U CN209850688U CN201920341848.9U CN201920341848U CN209850688U CN 209850688 U CN209850688 U CN 209850688U CN 201920341848 U CN201920341848 U CN 201920341848U CN 209850688 U CN209850688 U CN 209850688U
- Authority
- CN
- China
- Prior art keywords
- displacement sensor
- optical element
- profile
- error
- plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn - After Issue
Links
Landscapes
- Machine Tool Sensing Apparatuses (AREA)
Abstract
The utility model discloses a detection device on throne for aspheric surface optical element intermediate frequency ripple error, the device carries on the grinding lathe, optical element to be measured places the workstation of grinding lathe, through adjusting inclination adjusting device make the plane standard mirror equal the string inclination of the profile that awaits measuring along the inclination of the profile that awaits measuring, displacement sensor moves to the termination point from the initial point of the profile that awaits measuring, displacement sensor two moves to the terminal from the initiating terminal of plane standard mirror simultaneously, carry the data of two displacement sensor collections to data processing system, calculate the full frequency range error that obtains the profile that awaits measuring through data processing system, get rid of the aspheric surface theoretical appearance of the profile that awaits measuring, low frequency shape error and high frequency roughness error, obtain intermediate frequency ripple error. The detection device realizes on-site detection on the original processing, forming and grinding machine tool, does not need to purchase a special high-precision measuring instrument, does not need to disassemble and assemble elements, and saves the detection cost and the detection time.
Description
Technical Field
The utility model relates to an optical detection's technical field, more specifically says so and relates to a detection device and method for aspheric surface optical element intermediate frequency ripple error.
Background
At present, a forming and grinding machine tool based on an X/Y/Z three-orthogonal linear shaft and a horizontal main shaft is used for forming and grinding large-caliber special-shaped aspheric optical elements, and has the advantages of high material removal rate, high forming precision, convenience in realizing automatic processing and the like.
However, the machining principle of the grinding machine for machining the large-caliber special-shaped aspheric optical element is based on a motion copying principle, and the arc diamond grinding wheel is used for performing enveloping grinding machining on the surface of the element according to an aspheric theoretical track, so that the contour of the arc grinding wheel is copied to the surface of the element to form small-scale ripples, namely, intermediate-frequency ripple errors, and generally, the spatial period of the intermediate-frequency ripple errors is controlled within a few tenths of millimeters to a few millimeters, and the amplitude is controlled within a few micrometers. If the amplitude of the ripple error is large, the smooth difficulty of the subsequent polishing surface is increased, and the working hour of cold machining is greatly prolonged, so the ripple error is reduced as much as possible. Modern large-scale optical systems put strict full-band error control requirements on optical elements, and the full-band errors include low-frequency shape errors, medium-frequency ripple errors and high-frequency roughness errors. In the aspheric optical element forming process stage, besides the control of the low-frequency shape error and the high-frequency roughness error of the element, the medium-frequency small-scale ripple error of the surface of the element also needs to be strictly controlled. Therefore, it is necessary to perform accurate in-situ measurement on the small-scale ripples generated in the parallel grinding process, and perform compensation correction processing on the small-scale ripple errors on the surface according to the measurement result, so as to improve the surface quality of the aspheric optical element.
However, the commercial profile inspection apparatus, such as the Taylor Hobson profile inspection apparatus, has high inspection accuracy, but it uses the contact measurement principle to scratch the surface of the component, and the cost is high, and the environment of the grinding field cannot meet the requirement of the precision apparatus. A contourgraph based on an optical interference principle is difficult to form reliable and stable interference fringes on the ground surface, a large number of data missing points are formed, and detection accuracy is difficult to guarantee. Chinese patent CN 105783766A discloses an object contour detection system, when the object to be detected moves along a straight line, the laser scanning curtain wall is used to scan the surface to be detected and collect the coordinates and contour data of the object, the system can only obtain the size of the contour of the object to be detected quickly, and there is an influence of the movement error of the object to be detected, and the small scale ripple data of the surface to be detected cannot be measured accurately. Chinese patent CN 207936926U discloses a target object contour detection system, which includes a bearing platform, a word line laser and a reflector, an image collector and a rotating device, which are arranged on the bearing platform, wherein the word line laser and the reflector are used for emitting line laser to irradiate on the surface of the object to be detected, the image collector obtains a contour image formed by the laser irradiating on the surface of the target object, and the contour image is obtained by data processing, and similarly, the system can only obtain the size of the contour of the object to be detected. In the prior art, the measurement cost is high, the requirement of in-situ detection of a processing field cannot be met, or only the size of the appearance of a measured workpiece can be obtained, but medium-frequency small-scale ripple data of the measured surface cannot be obtained at high precision.
Therefore, it is an urgent technical problem to be solved by those skilled in the art to provide an in-situ detection apparatus capable of accurately detecting the medium-frequency small-scale ripple error to improve the surface processing quality of the aspheric optical element.
SUMMERY OF THE UTILITY MODEL
In view of this, the utility model provides a detection device on throne that is used for aspheric surface optical element intermediate frequency ripple error has realized the detection on throne of aspheric surface optical element intermediate frequency ripple error.
In order to achieve the above purpose, the utility model adopts the following technical scheme:
an in-situ detection device for a medium-frequency ripple error of an aspheric optical element, which is mounted on a grinding machine tool having an X/Y/Z three-orthogonal linear axis structure, and comprises:
the upper end surface of the inclination angle adjusting device is an inclined surface which is parallel to a connecting line from the highest point to the lowest point of any section of profile to be measured of the aspheric optical element to be measured;
the plane standard mirror is fixed on the inclined plane of the inclination angle adjusting device;
the displacement sensor assembly is fixed on a main shaft box body of the grinding machine tool and is provided with a first displacement sensor and a second displacement sensor, and the first displacement sensor is positioned above the profile to be measured of the aspheric optical element to be measured and used for measuring the appearance of the profile to be measured; the second displacement sensor is positioned above the plane standard mirror, the first displacement sensor and the second displacement sensor move synchronously in the measuring process, and the first displacement sensor acquires the shape of the profile to be measured and the second displacement sensor acquires the motion error of the grinding machine tool; the first displacement sensor and the second displacement sensor are in communication connection with a data processing system.
According to the above technical solution, compared with the prior art, the utility model discloses an in-situ detection device for the intermediate frequency ripple error of aspheric optical element, the aspheric optical element to be measured is placed on the workbench of the forming grinding machine tool based on X/Y/Z three-orthogonal linear axis or horizontal main axis, the inclination direction of the inclination angle adjusting device is consistent with the inclination direction of any section of the profile to be measured of the aspheric optical element to be measured, the inclination angle adjusting device is adjusted to make the inclination angle of the plane standard mirror equal to the theoretical chord inclination angle of the profile to be measured, the displacement sensor I is placed right above the initial point of the profile to be measured, the displacement sensor II is placed right above the initial end of the plane standard mirror, the displacement sensor I moves to the end point from the initial point of the profile to be measured, the displacement sensor II moves to the terminal from the initial end of the plane, and the machine tool numerical control instrument processes and calculates the data acquired by the first displacement sensor and the second displacement sensor to obtain the shape error of the profile to be measured, and removes the low-frequency shape error and the high-frequency roughness error through band-pass filtering to obtain the medium-frequency ripple error. The utility model provides a pair of a detection device on throne for aspheric surface optical element intermediate frequency ripple error has realized the detection on throne on original machine-shaping grinding lathe, need not to purchase special high-accuracy measuring instrument, also need not to carry out the dismouting to the component, has practiced thrift detection cost and check-out time.
Preferably, the inclination angle adjusting device comprises an inclined plate, a connecting pin, a connecting part, an adjusting screw rod, an adjusting nut and a bottom plate;
one end of the bottom plate is hinged with one end of the inclined plate through a pin shaft; the adjusting nut is rotationally connected to the bottom plate and is arranged close to the other end of the bottom plate;
the connecting part is arranged at the other end of the inclined plate and is provided with a long strip-shaped sliding groove or/and a long hole which is arranged along the inclined direction of the inclined plate, can be penetrated by a connecting pin and can slide along the length direction of the connecting groove or/and the long hole; the upper end of the adjusting screw rod is fixedly connected with the connecting pin, and the lower end of the adjusting screw rod is in threaded connection with the adjusting nut.
Preferably, the connecting part is a first connecting plate and a second connecting plate which are connected to the other end of the inclined plate and are arranged at intervals, and the connecting pin is sequentially connected with the first connecting plate, the adjusting bolt and the second connecting plate through a long-strip-shaped sliding groove or/and a long hole.
Furthermore, a long-strip-shaped hole is formed in the first connecting plate, a long-strip-shaped groove is formed in one side, close to the first connecting plate, of the second connecting plate, and the end portion of the connecting pin penetrates through the long-strip-shaped hole in sequence and is inserted into the long-strip-shaped groove in the upper end of the adjusting bolt located in the gap between the first connecting plate and the second connecting plate.
Preferably, the bottom plate is provided with a locking boss, and the bottom of the adjusting nut is provided with a groove which is in matched and sleeved connection with the locking boss and used for transversely locking the adjusting nut.
The beneficial effect who adopts above-mentioned scheme does: when the inclination angle of the inclination angle adjusting device is adjusted, the adjusting nut is rotated to drive the adjusting screw rod to move up and down in the threaded hole, so that the inclined plate and the connecting pin slide relatively in the elongated hole and the elongated groove to drive the inclined plate to ascend or descend, and the inclination angle of the inclination angle adjusting device is adjusted.
Preferably, the displacement sensor assembly further comprises a horizontal slide rail, two sliders and two sensor mounting parts; the horizontal guide rail is installed in one side of keeping away from the main shaft box, and two slider interval slip covers are established on the horizontal slide rail, and the adjusting bolt is vertically installed respectively to one side that the horizontal slide rail was kept away from to two sliders, and two sensor installation departments are corresponding threaded connection respectively on adjusting bolt one to one, and displacement sensor one and two one-to-one of displacement sensor are installed on two sensor installation departments.
Preferably, the horizontal sliding rail comprises a mounting plate and a guide rail, the mounting plate is fixed on the main shaft box body, and the guide rail is mounted on the mounting plate; the two sliding blocks are sleeved on the guide rail at intervals in a sliding manner.
More specifically, the mounting plate is magnetically adsorbed on a mounting frame of the grinding machine tool, and the mounting frame is fixed on the spindle box body through bolts.
Preferably, the two sensor mounting parts are provided with mounting holes, and the first displacement sensor and the second displacement sensor are fastened in the mounting holes through locking bolts in a one-to-one correspondence mode.
The beneficial effect who adopts above-mentioned technical scheme does, can carry out the regulation of level or vertical direction to displacement sensor one and displacement sensor two.
Preferably, the plane standard mirror is bonded on the inclined plate through normal temperature glue.
The beneficial effect who adopts above-mentioned technical scheme is, realizes the regulation of plane standard mirror along the profile direction inclination that awaits measuring, specifically as follows: through rotating adjusting nut, drive adjusting screw up-and-down motion in the screw hole, make the swash plate carry out the relative slip along rectangular hole and rectangular groove and connecting pin, drive the swash plate and rise or descend, thereby adjust the inclination of plane standard mirror along the profile direction that awaits measuring through adjusting inclination adjusting device's inclination.
The utility model provides a detection method on throne for aspheric surface optical element intermediate frequency ripple error, including following step:
s1, placing the optical element to be measured after grinding on a workbench of a grinding machine tool with an in-place detection device for the intermediate frequency ripple error of the aspheric optical element;
s1: calculating data 0 of the aspheric surface theoretical profile morphology Pf of the aspheric surface optical element to be measured profile and a chord dip angle alpha of the aspheric surface optical element to be measured profile according to an aspheric surface equation;
s3, adjusting the inclination angle adjusting device according to the chord inclination angle alpha of the profile to be measured of the aspheric optical element to be measured in the S2, so that the inclination angle of the plane standard mirror along the direction of the profile to be measured is equal to alpha;
s4, moving the machine tool spindle box body to enable the displacement sensor to be positioned right above the initial point A of the profile pf to be measured;
s5: the inclination angle adjusting device and the plane standard mirror are translated along the surface of the workbench, so that the two displacement sensors are positioned right above the starting end of the plane standard mirror;
s6, when the profile to be measured is a convex aspheric surface, vertically adjusting the first displacement sensor to enable the first displacement sensor to be located at the reading position of the lower limit value of the measurement range of the first displacement sensor; when the profile to be measured is a concave aspheric surface, vertically adjusting the first displacement sensor to enable the first displacement sensor to be located at the reading position of the upper limit value of the measurement range of the first displacement sensor;
s7, vertically adjusting the second displacement sensor to enable the second displacement sensor to be located at the middle reading position of the measuring range of the second displacement sensor;
s8, driving the first displacement sensor to move along the surface of the profile to be measured from the starting point A to the end point B of the profile to be measured by the main spindle box; the spindle box body drives a second displacement sensor to move along the surface of the plane standard mirror from the starting end to the terminal end of the plane standard mirror;
the data processing system collects the displacement data of the first displacement sensor and the second displacement sensor in real time to obtain collected data date1 of the first displacement sensor and collected data date2 of the second displacement sensor;
s9, calculating to obtain the real topography data date3 of the contour to be measured,
date3＝date1-date2；
s10, calculating to obtain the shape error of the contour to be measured, date4,
date4＝date3-date0；
and S11, performing band-pass filtering on the shape error date4 of the outline to be detected, and removing the low-frequency shape error and the high-frequency roughness error to obtain the intermediate-frequency ripple error.
According to the detection method, an in-situ detection device for the medium-frequency ripple error of the aspheric optical element is mounted on an existing forming and grinding machine tool, the original shape full-band error of the profile to be detected is measured, the original shape full-band error comprises the theoretical morphology, the low-frequency shape error, the medium-frequency ripple error and the high-frequency roughness error of the profile to be detected, the theoretical morphology of the profile to be detected is calculated by using an aspheric equation, the theoretical morphology is removed from the original shape full-band error, and the medium-frequency ripple error can be obtained by removing the low-frequency shape error and the high-frequency roughness error through band-pass filtering. The utility model provides a pair of a detection method in place for aspheric surface optical element intermediate frequency ripple error has realized the detection in place on original machine-shaping grinding lathe, need not to purchase special high-accuracy measuring instrument, also need not to carry out the dismouting to the component, has practiced thrift detection cost and check-out time.
The specific steps of calculating the data date0 of the aspheric surface theoretical profile morphology Pf of the profile to be measured and the chord inclination angle α of the profile to be measured in S2 are as follows:
s21: according to an aspheric equation, calculating to obtain a numerical value date0 of the aspheric theoretical morphology Pf at the measured position of the profile to be measured,
wherein C is 1/R, R is the aspheric vertex curvature radius, k is a conic coefficient, λ i is a high-order term coefficient, X, Y, Z are coordinate values in a three-dimensional coordinate, and date0 is a set of Z values;
s22: equally dividing the profile of the profile to be measured into a plurality of sections of profiles, calculating the aspheric theoretical profile morphology pf1 and pf2 … … pfi of each section of profile according to the aspheric equation in S21, ensuring that the chord height h of each section of profile is less than the measurement range of the displacement sensor,
hi＝Zimax-Zi minimum 2)；
S23: extracting the initial point Ai (X) of each section of profile morphology pfiAi,YAi,ZAi) End point Bi (X)Bi,YBi,ZBi) According to equation 3) and calculating the chord dip angle alpha of the section of the profilei，
The technical scheme has the advantages that the contour to be detected is equally divided into a plurality of sections of contours, and the chord height of each section of contour is smaller than the measuring range of the displacement sensor, so that the validity and the accuracy of data detection of the displacement sensor during detection are guaranteed.
Preferably, in S3, the adjusting nut is rotated to drive the adjusting screw to move up and down in the threaded hole, so as to raise or lower the inclined plate, thereby adjusting the inclination angle of the planar standard mirror along the direction of the profile to be measured, so that the inclination angle is equal to the chord inclination angle α of the profile to be measured of the aspheric optical element to be measured.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required to be used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the provided drawings without creative efforts.
Fig. 1 is a schematic structural diagram of an in-place detection apparatus for a medium-frequency ripple error in an aspheric optical element according to the present invention;
FIG. 2 is a schematic structural diagram of a pitch angle adjusting device according to the present invention;
FIG. 3 is a schematic structural diagram of a bottom plate of the device for adjusting a tilt angle according to the present invention;
FIG. 4 is a schematic view of an adjusting screw structure of the device for adjusting a tilt angle according to the present invention;
FIG. 5 is a schematic structural diagram of a sensor assembly according to the present invention;
in the figure:
1-grinding machine tool, 2-workbench, 3-aspheric optical element to be measured, 4-displacement sensor I, 5-displacement sensor II;
6-inclination angle adjusting device, 60-inclined plate, 61-connecting pin, 62-adjusting screw, 621-boss, 622-pin hole, 63-adjusting nut, 64-bottom plate, 641-locking boss, 642-through hole, 65-pin shaft, 66-first connecting plate, 67-second connecting plate, 68-elongated hole and 69-elongated groove;
7-a planar standard mirror;
8-displacement sensor assembly, 81-mounting plate, 82-guide rail, 83-sliding block, 84-sensor mounting part, 85-vertical adjusting bolt and 86-locking bolt;
9-main shaft box body and 10-mounting rack.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
The embodiment of the utility model discloses detection device on throne for aspheric surface optical element intermediate frequency ripple error has realized the detection on throne of aspheric surface optical element intermediate frequency ripple error.
Referring to fig. 1-5, the present invention provides an in-situ detection device for a medium frequency ripple error of an aspheric optical element, which is mounted on a grinding machine 1, the grinding machine 1 is a three-orthogonal linear axis structure as shown by coordinate axes in fig. 1),
the upper end surface of the inclination angle adjusting device 6 is an inclined surface, the inclined surface is parallel to a connecting line from the highest point to the lowest point of any section of profile to be measured of the aspheric optical element to be measured, namely when the inclination angle adjusting device is placed, the lower point of the inclined surface at the upper end of the inclination angle adjusting device 6 is horizontal to the lower point of the profile to be measured of the aspheric optical element to be measured, and the higher point of the inclined surface at the upper end of the inclination angle adjusting device 6 is horizontal to the higher point of the profile to be measured of the aspheric optical element to be measured;
the plane standard mirror 7, the plane standard mirror 7 is fixed on the inclined plane of the inclination angle adjusting device 6;
the displacement sensor assembly 8 is fixed on a grinding machine spindle box body 9, a first displacement sensor 4 and a second displacement sensor 5 are arranged on the displacement sensor assembly 8, the first displacement sensor 4 is located above the profile to be measured of the aspheric optical element 3 to be measured, and the first displacement sensor 4 is used for measuring the appearance of the profile to be measured; the second displacement sensor 5 is positioned above the plane standard mirror 7, the first displacement sensor 4 and the second displacement sensor 5 move synchronously in the measuring process, and the first displacement sensor 4 acquires the profile morphology to be measured and the second displacement sensor 5 acquires the motion error of the grinding machine tool 1; and the first displacement sensor 4 and the second displacement sensor 5 are in communication connection with the data processing system.
The utility model provides a pair of a detection device on throne for aspheric surface optical element intermediate frequency ripple error, place aspheric surface optical element 3 that awaits measuring on workstation 2 based on the shaping grinding lathe of three quadrature straight-line axes of XYZ or horizontal main shaft, inclination adjusting device 6 places in one side of aspheric surface optical element that awaits measuring, and guarantee when placing that the low point on the inclined plane of inclination adjusting device 6 upper end is in the level with the low point of the 3 profile that awaits measuring of aspheric surface optical element that awaits measuring, the high point on the inclined plane of inclination adjusting device 6 upper end is in horizontal position with the high point of the profile that awaits measuring of aspheric surface optical element that awaits measuring. The plane standard mirror 7 is fixed on an inclined plane of the inclination angle adjusting device 6, the inclination angle adjusting device 6 is adjusted to enable the inclination angle of the plane standard mirror 7 to be equal to the theoretical chord inclination angle of the profile to be measured, the first displacement sensor 4 is arranged right above the initial point of the profile to be measured, the second displacement sensor 5 is arranged right above the initial end of the plane standard mirror 7, the machine tool spindle box body 9 is moved from the initial point to the end point of the profile to be measured, the machine tool numerical controller calculates the original full-band error of the profile to be measured according to data collected by the first displacement sensor 4 and the second displacement sensor 5, the aspheric surface theoretical morphology of the profile to be measured is removed, and the low-frequency shape error and the high-frequency roughness error are removed through band-pass filtering. The utility model provides a pair of a detection device on throne for aspheric surface optical element intermediate frequency ripple error has realized the detection on throne on original machine-shaping grinding lathe, need not to purchase special high-accuracy measuring instrument, has practiced thrift the detection cost, owing to carry out the detection on throne on original grinding lathe, makes the operation get up more convenient, skilled and can guarantee to detect the precision.
In an embodiment of the present invention, referring specifically to fig. 2-4, the tilt angle adjusting device 6 includes a tilt plate 60, a connecting portion, a connecting pin 61, an adjusting screw 62, an adjusting nut 63, and a bottom plate 64;
one end of the bottom plate 64 is hinged with one end of the inclined plate 60 through a pin shaft 65, and the adjusting nut 63 is rotatably connected with the other end of the bottom plate 64; specifically, a locking boss 641 is disposed at the other end of the bottom plate 64, and a groove adapted to the locking boss 641 is disposed at the bottom of the adjusting nut 63, and the groove and the locking boss 641 are matched to lock the adjusting nut 63 in the transverse direction;
the connecting part is a first connecting plate 66 and a second connecting plate 67 which are connected to the other end of the inclined plate 60 and are arranged at intervals, a long-strip-shaped hole 68 is formed in the side face of the first connecting plate 66 and can be a long-strip-shaped groove, a long-strip-shaped groove 69 is formed in the side face of the second connecting plate 67 and can also be a long-strip-shaped hole, a gap is formed between the first connecting plate 66 and the second connecting plate 67, the upper end of the adjusting screw 62 is arranged in the gap, the upper end of the adjusting screw 62 is fixedly connected with the connecting pin 61, the first connecting plate 66, the adjusting screw 62 and the second connecting plate 67 are connected through the connecting pin 61, and the lower end of the adjusting screw 62 is in.
Specifically, the upper end of the adjusting screw 62 has a boss 621, the boss 621 has a pin hole 622, the connecting pin 61 passes through the pin hole 622 and is in interference fit with the pin hole 622, the boss 621 is accommodated in the gap between the first connecting plate 66 and the second connecting plate 67, and both ends of the connecting pin 61 are respectively inserted into the elongated hole 68 of the first connecting plate 66 and the elongated groove 69 of the second connecting plate 67.
In addition, in order to allow the adjusting screw 62 to have a space for movement during the up-and-down movement, on one hand, the thickness of the adjusting nut 63 may be increased, and the adjusting screw 62 may have a space for movement in the cavity of the threaded hole, on the other hand, a through hole 642 may be provided at the center of the locking boss 641, the through hole 642 may communicate with the threaded hole of the adjusting nut 63, and the adjusting screw 62 may move up and down in the cavity of the through hole 642. When the inclination angle of the inclination angle adjusting device 6 is adjusted, the adjusting nut 63 is rotated, the adjusting screw 62 moves up and down in the cavity of the threaded hole or through hole 642, and the inclined plate 60 and the connecting pin 61 slide relatively in the elongated hole 68 and the elongated groove 69, bringing the inclined plate 60 to move up and down, thereby adjusting the inclination angle of the inclination angle adjusting device.
In another embodiment of the present invention, referring specifically to fig. 5, the sensor assembly 8 further comprises a horizontal slide rail, two sliders 83 and two sensor mounting portions 84.
The horizontal sliding rail comprises a mounting plate 81 and a guide rail 82, the mounting plate 81 is magnetically adsorbed on a mounting rack 10 on the spindle box body 9, and the mounting rack 10 is fixed on the spindle box body 9 through a bolt.
The two sliders 83 are mounted on the guide rail 82 at intervals, and the two sensor mounting portions 84 are in one-to-one correspondence with the two sliders 83 and are in threaded connection through vertical adjusting bolts 85.
The two sensor mounting portions 84 are respectively provided with mounting holes, and the first displacement sensors and the second displacement sensors are correspondingly fastened in the mounting holes through locking bolts 86.
On the basis of the above embodiment, the bottom plate 64 of the tilt angle adjusting device 6 is made of carbon steel material, the workbench 2 is a magnetic workbench, and the bottom plate 64 is magnetically adsorbed on the workbench 2.
The plane standard mirror 7 is adhered to the inclined plate 60 through normal temperature glue, so that the inclination angle of the plane standard mirror 7 in the profile direction of the profile to be measured can be adjusted as follows: by rotating the adjusting nut 63, the adjusting screw 62 is driven to move up and down in the threaded hole, so that the inclined plate 60 and the connecting pin 61 slide relatively in the elongated hole 68 and the elongated groove 69 to move up and down the inclined plate 60, and the inclination angle of the plane standard mirror 7 along the direction of the profile to be measured is adjusted by adjusting the inclination angle of the inclination angle adjusting device.
And simultaneously, the utility model provides a detection method on throne that is used for aspheric surface optical element intermediate frequency ripple error, including following step:
s1: placing the optical element 3 to be measured after grinding on a workbench 2 of a grinding machine tool;
s2: calculating data date0 of the aspheric theoretical profile morphology Pf of the profile to be measured and a chord dip angle alpha of the profile to be measured according to an aspheric standard equation;
s3: adjusting the inclination angle adjusting device 6 according to the chord inclination angle alpha of the profile to be measured of the aspheric optical element to be measured in S2, so that the inclination angle of the plane standard mirror 7 along the profile direction to be measured is equal to alpha;
by rotating the adjusting nut 63, the adjusting screw 62 is driven to move up and down in the threaded hole, so that the inclined plate 60 is lifted up or lowered down, and the inclination angle of the plane standard mirror 7 along the direction of the profile to be measured is adjusted to be equal to the chord inclination angle alpha of the profile to be measured of the aspheric optical element 3 to be measured.
S4: moving a main shaft box body 9 of the machine tool to enable a first displacement sensor 4 to be positioned right above a starting point A of the profile pf to be measured;
s5: the inclination angle adjusting device 6 and the plane standard mirror 7 are translated along the surface of the workbench 2, so that the second displacement sensor 5 is positioned right above the starting end of the plane standard mirror 7;
the starting end of the plane standard mirror 7 is determined according to the chord dip angle of the profile to be measured, along the measuring movement direction of the profile to be measured, when the z value of the profile to be measured is gradually increased, the chord dip angle alpha is a positive value, and the starting end of the plane standard mirror is the lower end placed on the dip angle adjusting device 6; along the measuring movement direction, when the z value of the profile to be measured is gradually reduced, the chord dip angle alpha is a negative value, and the starting end of the plane standard mirror is placed at the higher end of the dip angle adjusting device; when the chord inclination angle alpha is 0, the plane standard mirror is horizontally placed on the inclination angle adjusting device 6, and any one end of the plane standard mirror can be a starting end.
S6: when the profile to be measured is a convex aspheric surface, vertically adjusting the first displacement sensor 4 to enable the first displacement sensor 4 to be located at the reading position of the lower limit value of the measuring range; when the profile to be measured is a concave aspheric surface, vertically adjusting the first displacement sensor 4 to enable the first displacement sensor 4 to be located at the reading position of the upper limit value of the measuring range;
s7: vertically adjusting the second displacement sensor 5 to enable the second displacement sensor 5 to be located at the middle reading position of the measuring range of the second displacement sensor;
the measuring range of the displacement sensor is determined according to the type of the displacement sensor, generally, the higher the accuracy of the sensor is, the smaller the measuring range is, in the embodiment, the measuring ranges of the first displacement sensor and the second displacement sensor are 3mm, the median value of the measuring ranges is 1.5mm, and the accuracy is 0.1 μm.
S8: the main shaft box body 9 drives the first displacement sensor 4 to move along the surface of the profile to be measured from the starting point A to the end point B of the profile to be measured; the main shaft box body 9 drives the second displacement sensor 5 to move along the surface of the plane standard mirror 7 from the starting end to the terminal end of the plane standard mirror;
the machine tool numerical control instrument collects displacement data of the first displacement sensor 4 and the second displacement sensor 5 in real time to obtain data gate 1 of the first displacement sensor and data gate 2 of the second displacement sensor;
s9: calculating to obtain the real topography data date3 of the profile to be measured,
date3＝date1-date2；
s10: calculating the shape error of the contour to be measured, date4,
date4＝date3-date0；
s11: and performing band-pass filtering on the shape error of the profile to be detected, and removing the low-frequency shape error and the high-frequency roughness error to obtain the intermediate-frequency ripple error.
The main shaft box body 9 drives the displacement sensor I4 to move from the starting point A of the profile to be measured to the end point B by adopting a linear interpolation method. Linear interpolation is a commonly used interpolation method on a lathe, in which interpolation between two points is approximated along a group of points of a straight line along which the movement of a tool is controlled. The linear interpolation is used for the interpolation mode that the actual contour is a straight line, if the actual contour is not a straight line, the curve can be approximated by a segment line segment in an approximation mode, and therefore each segment line segment can be interpolated by the straight line. Firstly, assuming that a small segment (a pulse equivalent) is taken along the x direction at the starting point of the actual contour, and the end point is found to be below the actual contour, the next segment is taken along the y direction, at this time, if the end point of the segment is still below the actual contour, the segment is continuously taken along the y direction, until the segment is above the actual contour, the segment is taken along the x direction again, and so on. Until the end of the profile is reached. Thus, the actual contour is formed by splicing a segment of broken lines, and although the broken lines are broken lines, if each segment of the feed line is very small (within the precision range), the broken line and the actual contour can be approximately regarded as the same curve.
Specifically, in S2, the specific steps of calculating the data date0 of the aspheric theoretical profile shape Pf of the profile to be measured and the chord inclination angle α of the profile to be measured are as follows:
s21: calculating and obtaining data date0 of the aspheric theoretical morphology Pf at the measured position of the profile to be measured according to an aspheric equation,
wherein C is 1/R, R is the aspheric vertex curvature radius, k is a conic coefficient, λ i is a high-order term coefficient, X, Y, Z are coordinate values in a three-dimensional coordinate, and date0 is a set of Z values;
s22: equally dividing the profile of the profile to be measured into a plurality of sections of profiles, calculating the aspheric theoretical profile morphology pf1 and pf2 … … pfi of each section of profile according to the aspheric equation in S21, ensuring that the chord height h of each section of profile is less than the measurement range of the displacement sensor,
hi＝Zimax-Zi minimum 2)；
S23: extracting the initial point Ai (X) of each section of profile morphology pfiAi,YAi,ZAi) End point Bi (X)Bi,YBi,ZBi) According to equation 3) and calculating the chord dip angle alpha of the section of the profilei，
According to the on-site detection method for the intermediate-frequency ripple error of the aspheric optical element, an on-site detection device for the intermediate-frequency ripple error of the aspheric optical element is carried on an existing forming and grinding machine tool to measure the original shape full-band error of the profile to be measured, the original shape full-band error comprises the theoretical morphology, the low-frequency shape error, the intermediate-frequency ripple error and the high-frequency roughness error of the profile to be measured, the theoretical morphology of the profile to be measured is calculated by using an aspheric equation, the theoretical morphology is removed from the original shape full-band error, and the intermediate-frequency ripple error can be obtained by removing the low-frequency shape error and the high-frequency roughness error through band-pass filtering processing. The utility model provides a pair of a detection method in place for aspheric surface optical element intermediate frequency ripple error has realized the detection in place on original machine-shaping grinding lathe, need not to purchase special high-accuracy measuring instrument, has practiced thrift the detection cost, owing to carry out the detection in place on original grinding lathe, makes the operation get up more convenient and can guarantee to detect the precision.
The embodiments in the present description are described in a progressive manner, each embodiment focuses on differences from other embodiments, and the same and similar parts among the embodiments are referred to each other. The device disclosed by the embodiment corresponds to the method disclosed by the embodiment, so that the description is simple, and the relevant points can be referred to the method part for description.
The previous description of the disclosed embodiments is provided to enable any person skilled in the art to make or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the invention. Thus, the present invention is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.
Claims (10)
1. An in-situ detection device for intermediate frequency ripple errors of aspheric optical elements is mounted on a grinding machine tool (1), wherein the grinding machine tool (1) is an X/Y/Z three-orthogonal linear axis grinding machine tool; it is characterized by comprising:
the inclination angle adjusting device (6) is placed on the workbench (2) of the grinding machine tool and located on one side of the aspheric optical element (3) to be detected, the upper end surface of the inclination angle adjusting device (6) is an inclined surface, and the inclined surface is parallel to a connection line from the highest point to the lowest point of the profile to be detected of the aspheric optical element (3) to be detected;
the plane standard mirror (7), the said plane standard mirror (7) is fixed on the said inclined plane;
the displacement sensor assembly (8) is fixed on a main shaft box body (9) of the grinding machine tool, and is provided with a first displacement sensor (4) and a second displacement sensor (5), the first displacement sensor (4) is located above the profile to be measured of the aspheric optical element (3) to be measured, and the second displacement sensor (5) is located above the plane standard mirror (7); the first displacement sensor (4) and the second displacement sensor (5) are in communication connection with a data processing system.
2. The in-place detection device for the intermediate frequency ripple error of the aspheric optical element according to claim 1, wherein the tilt angle adjusting device (6) comprises a tilt plate (60), a connecting pin (61), a connecting part, an adjusting screw (62), an adjusting nut (63) and a bottom plate (64);
one end of the bottom plate (64) is hinged with one end of the inclined plate (60) through a pin shaft (65); the adjusting nut (63) is rotatably connected to the bottom plate (64) and is arranged close to the other end of the bottom plate (64);
the connecting part is arranged at the other end of the inclined plate (60), and is provided with a long strip-shaped sliding groove or/and a long hole which is arranged along the inclined direction of the inclined plate (60), can be penetrated by the connecting pin (61) and can slide along the length direction of the connecting pin; the upper end of the adjusting screw rod (62) is fixedly connected with the connecting pin (61), and the lower end of the adjusting screw rod is in threaded connection with the adjusting nut (63).
3. The in-place detection device for the intermediate frequency ripple error of the aspheric optical element according to claim 2, wherein the connecting portion is a first connecting plate (66) and a second connecting plate (67) connected to the other end of the inclined plate (60) and arranged at an interval, and the connecting pin (61) connects the first connecting plate (66), the adjusting screw (62) and the second connecting plate (67) in sequence through the elongated sliding slot or/and the elongated hole.
4. The on-site detection device for the intermediate frequency moire error of the aspheric optical element as claimed in claim 3, wherein the first connecting plate (66) is provided with an elongated hole (68), one side of the second connecting plate (67) close to the first connecting plate (66) is provided with an elongated groove (69), and the end of the connecting pin (61) sequentially passes through the elongated hole (68) and the upper end of the adjusting screw (62) located in the gap between the first connecting plate (66) and the second connecting plate (67) to be inserted into the elongated groove (69).
5. The in-place detection device for the frequency ripple error in the aspheric optical element as recited in claim 2, wherein the base plate (64) has a locking boss (641), and the bottom of the adjusting nut (63) has a groove adapted to fit with the locking boss (641).
6. An in-situ detection apparatus for frequency ripple errors in aspheric optical elements as in any of claims 1-5, characterized in that the displacement sensor assembly (8) further comprises a horizontal slide rail, two sliders (83) and two sensor mounts (84);
the horizontal sliding rail is arranged on one side far away from the main shaft box body (9);
the two sliding blocks (83) are sleeved on the horizontal sliding rail at intervals in a sliding manner;
adjusting bolts (85) are respectively vertically arranged on one sides of the two sliding blocks (83) far away from the horizontal sliding rail; two sensor installation department (84) are corresponding threaded connection respectively one-to-one on adjusting bolt (85), displacement sensor one (4) with two (5) one-to-one of displacement sensor are installed on two sensor installation departments (84).
7. The in-place detection device for the intermediate frequency ripple error of the aspheric optical element as recited in claim 6, wherein the horizontal slide comprises a mounting plate (81) and a guide rail (82), the mounting plate (81) is fixed on the spindle box (9), and the guide rail (82) is fixed on the mounting plate (81); the two sliding blocks (83) are sleeved on the guide rail (82) at intervals in a sliding mode.
8. The in-situ detection device for the intermediate frequency ripple error of the aspheric optical element as recited in claim 7, characterized in that a mounting bracket (10) is fixed at one end of the spindle box (9), and the mounting plate (81) is magnetically adsorbed on the mounting bracket (10) of the grinding machine tool (1).
9. The in-place detection device for the intermediate frequency ripple error of the aspheric optical element as recited in claim 6, wherein two of the sensor mounting parts (84) are provided with mounting holes, and the first displacement sensor (4) and the second displacement sensor (5) are fastened in the mounting holes in a one-to-one correspondence manner through locking bolts (86).
10. The in-place detection device for the intermediate frequency ripple error of the aspheric optical element as recited in claim 2, wherein the planar standard mirror (7) is bonded on the tilted plate (60) by normal temperature glue.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920341848.9U CN209850688U (en) | 2019-03-18 | 2019-03-18 | In-place detection device for intermediate frequency ripple error of aspheric optical element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920341848.9U CN209850688U (en) | 2019-03-18 | 2019-03-18 | In-place detection device for intermediate frequency ripple error of aspheric optical element |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209850688U true CN209850688U (en) | 2019-12-27 |
Family
ID=68934128
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201920341848.9U Withdrawn - After Issue CN209850688U (en) | 2019-03-18 | 2019-03-18 | In-place detection device for intermediate frequency ripple error of aspheric optical element |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209850688U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109955148A (en) * | 2019-03-18 | 2019-07-02 | 中国工程物理研究院激光聚变研究中心 | For aspherical optical element intermediate frequency ripple error in level detecting apparatus and method |
-
2019
- 2019-03-18 CN CN201920341848.9U patent/CN209850688U/en not_active Withdrawn - After Issue
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109955148A (en) * | 2019-03-18 | 2019-07-02 | 中国工程物理研究院激光聚变研究中心 | For aspherical optical element intermediate frequency ripple error in level detecting apparatus and method |
| CN109955148B (en) * | 2019-03-18 | 2023-09-22 | 中国工程物理研究院激光聚变研究中心 | In-situ detection device and method for medium-frequency ripple error of aspheric optical element |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN109955148B (en) | In-situ detection device and method for medium-frequency ripple error of aspheric optical element | |
| CN105890550B (en) | A kind of disc wheel flatness detection method | |
| CN106767558B (en) | A kind of decoupled identification method of guide rail basal plane straightness error | |
| CN110231009B (en) | Automatic detection device and method for position degree of wheel bolt hole | |
| CN107607077B (en) | Building ground measurement method of planeness | |
| CN112296822B (en) | Polishing method of steel pipe end spiral weld polishing robot | |
| CN209850688U (en) | In-place detection device for intermediate frequency ripple error of aspheric optical element | |
| CN106872104A (en) | It is a kind of for tuning for Controllable Pitch Propeller blade center of gravity measurement and the compound platform of amendment | |
| CN106705880B (en) | A kind of large caliber reflecting mirror face shape profile detection method and device in place | |
| CN116551472A (en) | Automatic polishing method and system for ship parts | |
| CN107560563B (en) | A kind of calibration of line laser three-dimensional measuring apparatus and error compensating method | |
| CN112157561B (en) | Polishing machine with disk surface in-place measurement and trimming functions | |
| CN209945303U (en) | Automatic detection device for position degree of wheel bolt hole | |
| CN218893931U (en) | Pavement detector for road construction | |
| CN218865020U (en) | Three-dimensional size rapid detection device for pipe piece finished product | |
| CN113739671B (en) | Elastic self-adaptive floor thickness detection device and construction method | |
| CN206772495U (en) | It is a kind of to be used for tuning for Controllable Pitch Propeller blade center of gravity measurement and the compound platform of amendment | |
| CN211147630U (en) | Inner hole roughness automatic detection machine | |
| CN105935917A (en) | Automobile engine sump machining device | |
| CN110293471A (en) | The processing method of a kind of curve surface work pieces and for the equipment in this method | |
| CN210833451U (en) | Marking frame for measuring vehicle overall dimension | |
| CN220783470U (en) | Polygonal columnar workpiece grinding and polishing device | |
| CN104764394A (en) | Shaft hole parameter measuring device | |
| CN214173251U (en) | Measuring device for form and position tolerance of automobile plate spring | |
| CN219121342U (en) | Coordinate detection device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned | ||
| AV01 | Patent right actively abandoned | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20191227 Effective date of abandoning: 20230922 |
|
| AV01 | Patent right actively abandoned |
Granted publication date: 20191227 Effective date of abandoning: 20230922 |