CN209798100U - Blade window type air flue throttling device - Google Patents
Blade window type air flue throttling device Download PDFInfo
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- CN209798100U CN209798100U CN201822073318.9U CN201822073318U CN209798100U CN 209798100 U CN209798100 U CN 209798100U CN 201822073318 U CN201822073318 U CN 201822073318U CN 209798100 U CN209798100 U CN 209798100U
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Abstract
The application discloses leaf window formula air flue throttling arrangement includes: a transmission device; the main blade is connected with the transmission device through a driving shaft; the plurality of slave blades are sequentially arranged on one side or two sides of the main blade; the pull rod is sequentially and movably connected with the main blade and the plurality of slave blades, and the angle of the plurality of slave blades is changed through the angle change of the main blade. The utility model discloses according to output turned angle, adjust the main leaf and from the big or small angle that opens and shuts of blade, reach the regulation gas velocity of flow size, finally realize the adjustable of the pressure in the vacuum chamber and gaseous density to control the forming technology of coating film rete more easily.
Description
Technical Field
the application relates to a throttling device, in particular to a blade window type air flue throttling device.
background
the throttling device is arranged at a main channel opening of an air exhaust system for obtaining vacuum of the vacuum coating equipment, is used for throttling partial gas, and must be arranged in order to ensure that a relatively stable pressure and a relatively uniform gas environment exist in a main cavity. In the process of magnetron sputtering coating, when a magnetron target starts a sputtering power supply, argon or other reaction gas is filled into a vacuum cavity, but in order to ensure that a relatively stable and uniform mixed gas space exists in the vacuum cavity, the magnetron sputtering work is carried out stably, and in order to ensure good uniformity of a generated film layer, a throttling device is required to be arranged on an air exhaust channel. In other ventilation systems, throttling devices are also installed to throttle some of the air, leaving a relatively constant flow rate in the main chamber.
at present, the throttling device applied to some vacuum coating equipment completes the intercepting work through simple reversal. The flow-stopping work can be completed by using the array small holes. The existing throttling devices are relatively simple, and the relatively simple throttling devices have the following defects:
1. In the closed state, the phenomena of blockage of the throttling device and the like are caused due to the fact that the gas flow rate and the equipment are easy to generate large-amplitude bending deformation in the heating process;
2. In the open state, the space occupied by the front and rear distances is larger, so that the volume of the volume body must be increased, the air extraction time is prolonged, and the working efficiency is reduced;
3. The resistance to air extraction is relatively large, and the air extraction time is easy to prolong;
4. the flow of the throttling gas is relatively fixed and cannot be adjusted.
SUMMERY OF THE UTILITY MODEL
In view of the above-mentioned drawbacks and deficiencies of the prior art, it is desirable to provide a louver type air passage throttling device capable of adjusting the amount of air flow and improving the work efficiency.
In order to realize the purpose, the utility model discloses the technical scheme who takes is:
A louvered airway throttle device comprising:
a transmission device;
The main blade is connected with the transmission device through a driving shaft;
The plurality of slave blades are sequentially arranged on one side or two sides of the main blade;
the pull rod is sequentially and movably connected with the main blade and the plurality of slave blades, and the angle of the plurality of slave blades is changed through the angle change of the main blade.
Further, the device also comprises a pin and a pair of pin seats arranged at intervals;
A pair of pin seats are fixedly connected to the main blade and each auxiliary blade respectively;
Through holes are arranged on the pull rod at intervals;
The tail ends of the pins are provided with pin holes, and split pins are inserted into the pin holes after the pins sequentially penetrate through the holes on one corresponding pin seat, the through holes on the corresponding pull rods and the holes on the other corresponding pin seat.
further, the device also comprises a fixed sleeve;
the main blade, the auxiliary blade and the pull rod are all arranged in the fixed sleeve, the two ends of the main blade and the auxiliary blade are connected with one end of a driven shaft through shaft seats, the other end of the driven shaft is connected with a shaft sleeve, and the shaft sleeve is fixedly connected with the inner wall of the fixed sleeve.
the peripheral shape of the fixed sleeve is consistent with the shape of the inner wall of the installation pipeline, and the peripheral shape surrounded by the main blade and the auxiliary blade is consistent with the shape of the inner wall of the installation pipeline.
The fixed sleeve is a circle, and the periphery surrounded by the main blade and the auxiliary blade is in a circle shape.
The main blade is arranged in the middle of the fixed sleeve, and the plurality of auxiliary blades are symmetrically arranged on two sides of the main blade.
the transmission device is a servo motor.
the transmission device is a rotary cylinder or a reciprocating cylinder connected with a crank connecting rod.
Compared with the prior art, the beneficial effects of the utility model are that:
The utility model adjusts the opening and closing angles of the main blade and the auxiliary blade according to the output rotation angle to adjust the flow velocity of the gas, and finally realizes the adjustment of the pressure in the vacuum cavity and the density of the gas, thereby controlling the forming process of the coating film more easily; adopt the utility model discloses a shutter type throttling arrangement, the passageway is when opening, and each blade is parallel to each other, compares the simple reversal after the throttle of current veneer, has shortened main bleed passage's distance, reduces vacuum wall body volume, shortens and obtains the vacuum time to improve work efficiency.
drawings
Other features, objects and advantages of the present application will become more apparent upon reading of the following detailed description of non-limiting embodiments thereof, made with reference to the accompanying drawings in which:
fig. 1 is a schematic structural diagram of a closed state of a louver type air passage throttling device according to an embodiment of the present invention;
FIG. 2 is a side view of FIG. 1;
FIG. 3 is an enlarged view of FIG. 1 at A;
fig. 4 is a schematic structural diagram of an open state of the louver type air passage throttling device according to the embodiment of the present invention;
FIG. 5 is a side view of FIG. 4;
FIG. 6 is an enlarged view of FIG. 4 at B;
fig. 7 is a schematic structural view of a fixing sleeve according to an embodiment of the present invention;
FIG. 8 is a side view of FIG. 7;
Fig. 9 is a schematic structural diagram of a combination of a master blade and a slave blade according to an embodiment of the present invention;
Fig. 10 is a schematic structural view of a shaft seat according to an embodiment of the present invention;
Fig. 11 is a schematic structural view of a shaft sleeve according to an embodiment of the present invention;
Fig. 12 is a schematic structural view of a pin seat according to an embodiment of the present invention;
FIG. 13 is a side view of FIG. 12;
fig. 14 is a schematic structural diagram of a pull rod according to an embodiment of the present invention;
Fig. 15 is a schematic structural diagram of a pin according to an embodiment of the present invention.
In the figure: the device comprises an installation pipeline 1, a fixing sleeve 2, a driven shaft 5, a driven shaft 6, a transmission 7, a driving shaft 8, a pin seat 9, a pull rod 10, a pin 11, a main blade 12 and a split pin 13.
Detailed Description
the present application will be described in further detail with reference to the following drawings and examples. It is to be understood that the specific embodiments described herein are merely illustrative of the relevant invention and are not limiting of the invention. It should be noted that, for convenience of description, only the portions related to the present invention are shown in the drawings.
it should be noted that the embodiments and features of the embodiments in the present application may be combined with each other without conflict. The present application will be described in detail below with reference to the embodiments with reference to the attached drawings.
referring to fig. 1-6, 12-15, a louvered airway throttling device comprising:
A transmission device 7;
the main blade 12 is connected with the transmission device 7 through the driving shaft 8;
a plurality of slave blades 3 sequentially disposed at one side or both sides of the master blade 12;
The pull rod 10 is sequentially and movably connected with the main blade 12 and the plurality of auxiliary blades 3, and the angle of the plurality of auxiliary blades 3 is changed through the angle change of the main blade 12.
the utility model disperses the stress points generated by the whole flow velocity to each secondary blade, thus reducing the deformation and blocking phenomena of the throttling device caused by the flow velocity; the problem that the working efficiency is reduced due to the interruption of the working process is prevented, and the production process is more stable and reliable. The utility model reduces the gas flow velocity resistance, quickly obtains higher vacuum environment, shortens the working time and improves the production efficiency; the gas flow can be controlled, the pressure in the cavity and the density of the coating gas can be ensured to be adjustable, and the adjustment of the coating forming process can be better mastered. The air passage space is reduced, thereby improving the air extraction efficiency.
referring to fig. 3, 6 and 10-15, the present embodiment further includes a pin 11 and a pair of pin bosses 9 spaced apart from each other on the basis of the above embodiments;
A pair of pin bosses 9 are respectively fixedly connected on the main blade 12 and each auxiliary blade 3;
through holes are arranged on the pull rod 10 at intervals;
the tail end of the pin 11 is provided with a pin hole, and after the pin 11 sequentially passes through the hole on the corresponding pin seat 9, the corresponding through hole on the pull rod 10 and the hole on the corresponding other pin seat 9, a cotter pin 13 is inserted into the pin hole.
the utility model discloses it is rotatory to drive main blade by the driving shaft, and main blade contacts the pull rod after rotatory, and it is rotatory to drive the pull rod, and the pull rod drives the pin rotation on the follow blade after the rotation to the certain angle that opens and shuts after the rotation of follow blade is driven.
the main blades are driven to rotate, power is transmitted to each driven blade through the pins and the pull rods by the main blades, so that the whole opening and closing action is achieved, the whole process of throttling opening and closing is completed, the rotating angle can be controlled by the servo motor, the opening and closing deflection angle of the blades is achieved, and the purpose of adjusting the gas flow is achieved.
Referring to fig. 1, 7, 8, 10 and 11, the present embodiment further includes a fixing sleeve 2 on the basis of the above embodiments;
The main blade 12, the slave blade 3 and the pull rod 10 are all arranged in the fixed sleeve 2, the two ends of the main blade 12 and the slave blade 3 are connected with one end of the driven shaft 5 through the shaft seat 4, the other end of the driven shaft 5 is connected with the shaft sleeve 6, and the shaft sleeve 6 is fixedly connected with the inner wall of the fixed sleeve 2.
The fixing sleeve is arranged, so that the two sides of the main blade and each auxiliary blade can be well fixedly installed. The main blade can also be arranged at the lowest part of the fixed sleeve, and the auxiliary blades are respectively arranged at the same side above the main blade.
referring to fig. 1, 7 and 9, the outer peripheral shape of the fixing sleeve 2 corresponds to the inner wall shape of the installation pipe 1, and the outer peripheral shape surrounded by the main blades 12 and the auxiliary blades 3 corresponds to the inner wall shape of the installation pipe 1.
Preferably, the utility model is suitable for a when circular pipeline, fixed cover 2 is the circle, and main blade 12 and the peripheral shape that encloses from blade 3 establish are the circle.
The utility model discloses an air flue throttling arrangement also can be used to square and other pipeline ventilation throttle, and its principle and mounting means all can be unchangeable, only change the shape of fixed cover appearance and blade can.
Referring to fig. 1 and 4, in order to realize the force-balanced transmission, the main blade 12 is disposed at the middle position of the stationary sleeve 2, and the plurality of sub-blades 3 are symmetrically disposed at both sides of the main blade 12.
preferably, the transmission 7 is a servomotor.
The main program controls the servo motor to transmit power, the adjustment of the gas flow rate is more controllable, and the gas flow control device has the advantage of relatively accurate gas flow control.
Further, the transmission device 7 may be a rotary cylinder or a reciprocating cylinder connected with a crank link for achieving the function of rotating the vane.
the utility model discloses a theory of operation:
The installed blade window type throttling device is fixed on the inner wall of a pipeline needing throttling, a driving shaft and a servo motor are fixed outside the pipe wall of the pipeline, and the servo motor is adjusted to be in a position required by a 90-degree rotary blade window switch.
the main program controls the servo motor to transmit power. Power is input by the driving shaft to drive the main blades to rotate, and then the main blades transmit the power to each driven blade through the pins and the pull rods, so that the integral opening and closing action is realized, the whole process of throttling opening and closing is completed, the rotating angle can be controlled by the servo motor, the opening and closing deflection angle of the blades is realized, and the purpose of adjusting the gas flow is realized.
the above description is only a preferred embodiment of the application and is illustrative of the principles of the technology employed. It will be understood by those skilled in the art that the scope of the present invention is not limited to the specific combination of the above-mentioned features, but also covers other embodiments formed by any combination of the above-mentioned features or their equivalents without departing from the spirit of the present invention. For example, the above features may be replaced with (but not limited to) features having similar functions disclosed in the present application.
Claims (8)
1. A louvered airway throttling device, comprising:
A transmission device;
the main blade is connected with the transmission device through a driving shaft;
The plurality of slave blades are sequentially arranged on one side or two sides of the main blade;
The pull rod is sequentially and movably connected with the main blade and the plurality of slave blades, and the angle of the plurality of slave blades is changed through the angle change of the main blade.
2. The louvered airway throttle device of claim 1, further comprising a pin and a pair of pin bosses spaced apart;
a pair of pin seats are fixedly connected to the main blade and each auxiliary blade respectively;
through holes are arranged on the pull rod at intervals;
The tail ends of the pins are provided with pin holes, and split pins are inserted into the pin holes after the pins sequentially penetrate through the holes on one corresponding pin seat, the through holes on the corresponding pull rods and the holes on the other corresponding pin seat.
3. the louvered airway throttle device of claim 2, further comprising a retaining sleeve;
the main blade, the auxiliary blade and the pull rod are all arranged in the fixed sleeve, the two ends of the main blade and the auxiliary blade are connected with one end of a driven shaft through shaft seats, the other end of the driven shaft is connected with a shaft sleeve, and the shaft sleeve is fixedly connected with the inner wall of the fixed sleeve.
4. The louvered duct throttling assembly of claim 3, wherein said hub has an outer peripheral shape conforming to the shape of the inner wall of the mounting tube, and wherein said primary and secondary vanes define an outer peripheral shape conforming to the shape of the inner wall of the mounting tube.
5. The louvered airway throttle device of claim 4, wherein the retainer is a circle and the peripheral shape enclosed by the primary and secondary vanes is a circle.
6. the louvered duct throttle device of claim 3, wherein the primary blade is disposed at a middle position of the harness, and the plurality of secondary blades are symmetrically disposed on both sides of the primary blade.
7. the louvered airway throttle device of any one of claims 1-6, wherein the transmission is a servo motor.
8. The louver air passage throttling device according to any one of claims 1 to 6, wherein the transmission device is a rotary cylinder or a reciprocating cylinder connected with a crank connecting rod.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201822073318.9U CN209798100U (en) | 2018-12-11 | 2018-12-11 | Blade window type air flue throttling device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201822073318.9U CN209798100U (en) | 2018-12-11 | 2018-12-11 | Blade window type air flue throttling device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209798100U true CN209798100U (en) | 2019-12-17 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201822073318.9U Active CN209798100U (en) | 2018-12-11 | 2018-12-11 | Blade window type air flue throttling device |
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| Country | Link |
|---|---|
| CN (1) | CN209798100U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113897593A (en) * | 2021-09-13 | 2022-01-07 | 浙江陶特容器科技股份有限公司 | Solid precursor source storage sublimator |
| CN117160215A (en) * | 2023-09-11 | 2023-12-05 | 苏州特福佳实验室系统工程有限公司 | Multi-stage desulfurization spray tower for flue gas purification |
-
2018
- 2018-12-11 CN CN201822073318.9U patent/CN209798100U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113897593A (en) * | 2021-09-13 | 2022-01-07 | 浙江陶特容器科技股份有限公司 | Solid precursor source storage sublimator |
| CN113897593B (en) * | 2021-09-13 | 2023-08-11 | 浙江陶特容器科技股份有限公司 | Solid-state precursor source storage sublimator |
| CN117160215A (en) * | 2023-09-11 | 2023-12-05 | 苏州特福佳实验室系统工程有限公司 | Multi-stage desulfurization spray tower for flue gas purification |
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Effective date of registration: 20210707 Address after: 518129 1st floor, building 2, xintianxia industrial city, Longping Road, Bantian street, Longgang District, Shenzhen City, Guangdong Province Patentee after: Shenzhen youtonghui Technology Co.,Ltd. Address before: 810600 5th floor, Haidong Hotel, Ping'an Avenue, Ping'an County, Qinghai Province Patentee before: QINGHAI SHOUNENG PHOTOVOLTAIC Co.,Ltd. |