CN209785873U - Self-adaptive microwave antenna tight coupling device of flat plate type PECVD (plasma enhanced chemical vapor deposition) equipment - Google Patents
Self-adaptive microwave antenna tight coupling device of flat plate type PECVD (plasma enhanced chemical vapor deposition) equipment Download PDFInfo
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- CN209785873U CN209785873U CN201920424729.XU CN201920424729U CN209785873U CN 209785873 U CN209785873 U CN 209785873U CN 201920424729 U CN201920424729 U CN 201920424729U CN 209785873 U CN209785873 U CN 209785873U
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Abstract
The utility model discloses a flat PECVD equipment self-adaptation microwave antenna close coupling device, locate the connective bar at antenna both ends including antenna and two divisions, connective bar one end is inserted in the antenna, the connective bar inserts one end in the antenna is equipped with spherical convex part and an at least partition groove, makes the tip form claw formula elastic structure, spherical convex part with the inner wall of antenna closely laminates. The utility model has the advantages of simple structure, easy disassembly and assembly, good reliability, being beneficial to reducing the microwave power attenuation, etc.
Description
Technical Field
The utility model relates to a flat PECVD equipment especially relates to a flat PECVD equipment self-adaptation microwave antenna in close coupling device.
Background
PECVD (Plasma Enhanced Chemical Vapor Deposition) refers to a Plasma Enhanced Chemical Vapor Deposition method in which a gas containing atoms of a film component is ionized by microwaves, radio frequencies, or the like to locally form a Plasma, which is chemically active so that a Chemical reaction can be performed at a relatively low temperature to deposit a desired film on a substrate. The flat plate type PECVD equipment has obvious advantages, such as low basic temperature, high deposition rate, good film forming quality, less pinholes and difficult cracking.
When adopting microwave messenger gas ionization, in order to facilitate the maintenance, inside copper antenna and outside bar copper need adopt the connected mode of easy dismouting, adopt the cooperation of hole axle at present usually, because there is the fit clearance between copper antenna and the bar copper, the phenomenon that the internal and external conductor contact failure or contact resistance are too big appears easily, leads to the microwave attenuation too big.
SUMMERY OF THE UTILITY MODEL
The to-be-solved technical problem of the utility model is to overcome the not enough of prior art, provide a flat PECVD equipment self-adaptation microwave antenna in close coupling device of simple structure, easy dismouting, good reliability, be favorable to reducing the decay.
In order to solve the technical problem, the utility model discloses a following technical scheme:
A self-adaptive microwave antenna tight coupling device of a flat plate type PECVD device comprises an antenna and two connecting rods which are respectively arranged at two ends of the antenna, wherein one end of each connecting rod is inserted into the antenna, one end of each connecting rod, which is inserted into the antenna, is provided with a spherical convex part and at least one separating groove, so that the end parts form a claw type elastic structure, and the spherical convex parts are tightly attached to the inner wall of the antenna.
As a further improvement of the above technical solution: one end of the connecting rod inserted into the antenna is in a cone shape.
As a further improvement of the above technical solution: the connecting rod is provided with a limiting part, and the limiting part is abutted to the end part of the antenna.
As a further improvement of the above technical solution: the antenna is a tin bronze antenna or a red copper antenna, and the connecting rod is a tin bronze rod or a red copper rod.
Compared with the prior art, the utility model has the advantages of: the utility model discloses a flat PECVD equipment self-adaptation microwave antenna close coupling device, one end in the connective bar inserts the antenna sets up spherical convex part and at least one separating groove, make the tip form claw formula elastic structure, after the connective bar inserts the antenna hole, spherical convex part receives the antenna extrusion, the claw formula elastomer of separating groove both sides inwards warp and draws close each other, thereby with antenna internal diameter looks adaptation, guarantee spherical convex part and antenna inner wall in close contact with, eliminate the fit clearance between connective bar and the antenna, avoid appearing contact failure's phenomenon, and reducible contact resistance, reduce microwave power loss, improve equipment's work efficiency, simultaneously because the guide effect of cone also is convenient for the connective bar insert and take out.
Drawings
Fig. 1 is a schematic structural diagram of the adaptive microwave antenna tight coupling device of the flat PECVD apparatus of the present invention.
The reference numerals in the figures denote: 1. an antenna; 2. a connecting rod; 21. a separation tank; 22. a spherical convex portion; 23. a limiting part; 24 claw type elastic body.
Detailed Description
The invention is described in further detail below with reference to the drawings and specific examples.
Fig. 1 shows the utility model discloses an embodiment of flat PECVD equipment self-adaptation microwave antenna close coupling device, the flat PECVD equipment self-adaptation microwave antenna close coupling device of this embodiment, locate the connective bar 2 at antenna 1 both ends including antenna 1 and two branches, in the antenna 1 is inserted to connective bar 2 one end, the one end that connective bar 2 inserted in antenna 1 is equipped with spherical convex part 22 and separating groove 21, makes the tip form claw formula elastic structure, and spherical convex part 22 closely laminates with the inner wall of antenna 1. It should be noted that, in other embodiments, the end of the connecting rod 2 inserted into the antenna 1 may be divided into a plurality of parts, and the function may be similarly realized, but the manufacturing process of the connecting rod 2 may be increased.
The self-adaptive microwave antenna tight coupling device of the flat plate type PECVD equipment is characterized in that one end of a connecting rod 2 inserted into an antenna 1 is provided with a spherical convex part 22 and at least one separating groove 21, so that the end part forms a claw type elastic structure, after the connecting rod 2 is inserted into the antenna 1, the spherical convex part 22 is extruded by the antenna 1, claw type elastic bodies 24 on two sides of the separating groove 21 deform inwards to be close to each other, and thus the connecting rod is matched with the inner diameter of the antenna 1, the spherical convex part 22 is ensured to be in tight contact with the inner wall of the antenna 1, a matching gap between the connecting rod 2 and the antenna 1 is eliminated, poor contact is avoided, contact resistance can be reduced, microwave power loss is reduced, the working efficiency of the equipment is improved, and meanwhile, the connecting.
Further, in the present embodiment, the end of the connecting rod 2 inserted into the antenna 1 is tapered. The conical shape is adopted, so that the connecting rod 2 can be further conveniently inserted into the antenna 1.
Further, in this embodiment, the connecting rod 2 is provided with a limiting portion 23, and the limiting portion 23 abuts against the end of the antenna 1. In the assembling process, when the limiting part 23 is abutted against the end part of the antenna 1, the connecting rod 2 is inserted in place, so that the insertion transition is avoided, and the structure is simple and reliable.
Further, in the present embodiment, the antenna 1 may be a tin bronze antenna or a red copper antenna, and the connecting rod 2 may be a tin bronze rod or a red copper rod. The antenna 1 and the connecting rod 2 are made of tin bronze or red copper, so that good conductivity and good elasticity can be guaranteed.
Although the present invention has been described with reference to the preferred embodiments, it is not intended to limit the present invention. The technical solution of the present invention can be used by anyone skilled in the art to make many possible variations and modifications, or to modify equivalent embodiments, without departing from the scope of the technical solution of the present invention, using the technical content disclosed above. Therefore, any simple modification, equivalent change and modification made to the above embodiments by the technical entity of the present invention should fall within the protection scope of the technical solution of the present invention.
Claims (4)
1. The utility model provides a flat PECVD equipment self-adaptation microwave antenna close coupling device, includes that antenna (1) and two parts locate connective bar (2) at antenna (1) both ends, connective bar (2) one end is inserted in antenna (1), its characterized in that: one end of the connecting rod (2) inserted into the antenna (1) is provided with a spherical convex part (22) and at least one separation groove (21), and the spherical convex part (22) is tightly attached to the inner wall of the antenna (1).
2. The apparatus of claim 1, wherein the apparatus comprises: one end of the connecting rod (2) inserted into the antenna (1) is in a conical shape.
3. The apparatus of claim 1, wherein the apparatus comprises: be equipped with spacing portion (23) on connective bar (2), spacing portion (23) with the tip of antenna (1) supports and leans on.
4. the flat plate type PECVD apparatus adaptive microwave antenna close coupling device of any one of claims 1 to 3, wherein: the antenna (1) is a tin bronze antenna or a red copper antenna, and the connecting rod (2) is a tin bronze rod or a red copper rod.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920424729.XU CN209785873U (en) | 2019-03-29 | 2019-03-29 | Self-adaptive microwave antenna tight coupling device of flat plate type PECVD (plasma enhanced chemical vapor deposition) equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920424729.XU CN209785873U (en) | 2019-03-29 | 2019-03-29 | Self-adaptive microwave antenna tight coupling device of flat plate type PECVD (plasma enhanced chemical vapor deposition) equipment |
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| Publication Number | Publication Date |
|---|---|
| CN209785873U true CN209785873U (en) | 2019-12-13 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201920424729.XU Active CN209785873U (en) | 2019-03-29 | 2019-03-29 | Self-adaptive microwave antenna tight coupling device of flat plate type PECVD (plasma enhanced chemical vapor deposition) equipment |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111578851A (en) * | 2020-05-12 | 2020-08-25 | 晶澳太阳能有限公司 | Method for testing plate type PECVD microwave capability |
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2019
- 2019-03-29 CN CN201920424729.XU patent/CN209785873U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111578851A (en) * | 2020-05-12 | 2020-08-25 | 晶澳太阳能有限公司 | Method for testing plate type PECVD microwave capability |
| CN111578851B (en) * | 2020-05-12 | 2021-08-17 | 晶澳太阳能有限公司 | Method for testing plate type PECVD microwave capability |
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