CN209766851U - Full-optical isolation control device of excimer laser charging power supply - Google Patents
Full-optical isolation control device of excimer laser charging power supply Download PDFInfo
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- CN209766851U CN209766851U CN201920566341.3U CN201920566341U CN209766851U CN 209766851 U CN209766851 U CN 209766851U CN 201920566341 U CN201920566341 U CN 201920566341U CN 209766851 U CN209766851 U CN 209766851U
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Abstract
The utility model discloses an all-optical isolation control device of an excimer laser charging power supply, which comprises a main control board, a first optical fiber receiving module, a second optical fiber receiving module, a DAC module, a linear optocoupler module and a laser charging power supply, wherein two optical signal output ends of the main control board are respectively connected with two input ends of the first optical fiber receiving module, the other three optical signal output ends of the main control board are respectively connected with three input ends of the second optical fiber receiving module, and two output ends of the first optical fiber receiving module are respectively connected with two input ends of the laser charging power supply; the utility model discloses at first through optical fiber transmission on-off control signal, secondly after control signal drive DAC produced analog voltage, rethread linear opto-coupler keeps apart the output, can realize the full gloss of entire system and keep apart, restrain electromagnetic interference, realize high reliable and stable control; and secondly, the DAC is adopted to output analog voltage and then is subjected to linear optical coupling isolation, so that high-precision and high-resolution power control can be realized.
Description
Technical Field
The utility model relates to a charging source's control technical field especially relates to an excimer laser charging source's full gloss isolation control device.
Background
Excimer laser in ultraviolet band has the features of short wavelength, high resolution, high photon energy, less heat effect, high power, great energy output, etc. and is widely used in spectroscopy, surface science, material science, reaction kinetics and other scientific research fields, ophthalmology, dermatology and other medical fields, micro machining, material surface modification and other industrial fields.
A common excimer laser adopts a discharge pumping working mode, a circuit structure is schematically shown in figure 1, the working process is that a capacitor charging power supply charges an energy storage capacitor Cs under the drive of signals, when the charging voltage on the Cs reaches a set value, the work is stopped, the voltage on the energy storage capacitor Cs does not rise any more and is maintained, then a control circuit generates a thyristor K trigger signal to enable a thyristor to be conducted, the charge on the Cs is transferred to a discharge capacitor Cd through loop inductance, when the voltage at two ends of the Cd exceeds the breakdown voltage of gas between electrodes, gas discharge is formed, excimer laser output is formed, when the thyristor K is conducted, the discharge high voltage of the Cs generally reaches 15 ~ 30kV, the discharge current peak value generally reaches 10 ~ 20kA, and the whole discharge time is dozens of nanoseconds, so that the intensity of ground wire crosstalk, space electromagnetic radiation interference and the like in the working process is large, and the control of a system, particularly the control of the capacitor charging power supply is very difficult.
The control of the charging power supply is usually realized by two signals, one is a switching value, and can be realized by an optical coupler or an optical fiber; the other analog signal for controlling the voltage amplitude of the capacitor charging can be realized by PWM or voltage-frequency-voltage conversion, but the precision is low, and the DAC chip can generate the high-precision analog signal, but the digital chips of the DAC type are easy to reset by electromagnetic interference, so that the digital chips cannot work normally.
SUMMERY OF THE UTILITY MODEL
The utility model aims at providing an all-optical isolation control device of excimer laser charging power supply in order to compensate the defects of the prior art.
The utility model discloses a realize through following technical scheme:
The utility model provides an all-optical isolation control device of excimer laser charging power supply, including the main control board, first optic fibre receiving module, second optic fibre receiving module, the DAC module, linear opto-coupler module and laser charging power supply, the two way optical signal output part of main control board is connected with two inputs of first optic fibre receiving module respectively, the other three routes optical signal output part of main control board is connected with the three input of second optic fibre receiving module respectively, two outputs of first optic fibre receiving module are connected two inputs of laser charging power supply respectively and are connected, the three input of DAC module is connected to the three output of second optic fibre receiving module, the input of linear opto-coupler module is connected to the output of DAC module, an input of laser charging power supply is connected to the output of linear opto-coupler module.
The main control board adopts a PIC series development board, wherein RD3 pins and RD4 pins of the main control board are respectively connected with two input ends of the first optical fiber receiving module, and RC2 pins, RC3/SCK pins and RC5/SDO pins are respectively connected with three input ends of the second optical fiber receiving module.
The laser charging power supply adopts a TDK-Lambda series high-voltage charging power supply, two output ends of the first optical fiber receiving module are respectively connected with an ENABLE/RESET pin and an INHIBIT pin of the laser charging power supply, and the output end of the linear optical coupling module is connected with a VPROGRAM pin of the laser charging power supply.
The DAC module adopts AD5721R chip U1, linear opto-coupler module include first operational amplifier IC2, second operational amplifier IC3 and linear opto-coupler IC1, linear opto-coupler IC 1's model is IL300, chip U1's SDI pin, + SYNC pin and SCLK pin are connected respectively with the three output of second optical fiber receiving module, chip U1's VOUT pin is connected with the noninverting input of first operational amplifier IC2, the led + pin of linear opto-coupler IC1 is connected to the output of first operational amplifier IC2, the pd2+ pin of linear opto-coupler IC1 is connected with the noninverting input of second operational amplifier IC3, the output of second operational amplifier IC3 is connected with the VPROGRAM pin of laser charging power supply.
The first operational amplifier IC2 and the second operational amplifier IC3 are of the type MC 1458.
The utility model discloses the course of work is for at first the master control board produces 5 optical signal and gives optical isolation power system board, after the optic fibre receiving module of control panel received optical signal, convert optical signal into the signal of telecommunication through photoelectric conversion ENABLE and INHIBIT two way signals direct transfer for laser charging source, wherein ENABLE controls laser charging source's power supply, INHIBIT is used for controlling laser charging source's operating time, the time of charging for energy storage capacitor Cs of laser instrument promptly SCLK, FYNC and SDI three way signal transfer give DAC chip AD5721R, this DAC chip has 12 bit serial input, pass through SPI serial communication with the master control board, 8 software programmable output scope has 0V ~ 5V, 0V ~ 10V, 0V ~ 16V etc., can satisfy the control to the analog signal Vprogram of different laser charging source demands the analog signal that DAC produced gives opto-coupler linearity IL300, pass through after electrical isolation again and transfer the laser charging source and be used for controlling high-voltage charging bottleneck voltage, laser charging source output voltage can not exceed the high-voltage value of settlement promptly.
The utility model has the advantages that: the utility model discloses at first through optical fiber transmission on-off control signal, secondly after control signal drive DAC produced analog voltage, rethread linear opto-coupler keeps apart the output, can realize the full gloss of entire system and keep apart, restrain electromagnetic interference, realize high reliable and stable control; and secondly, the DAC is adopted to output analog voltage and then is subjected to linear optical coupling isolation, so that high-precision and high-resolution power control can be realized.
Drawings
FIG. 1 is a circuit diagram of an excimer laser discharge pump.
Fig. 2 is a block diagram of the working principle of the present invention.
Fig. 3 is a circuit diagram of a DAC module.
Fig. 4 is a circuit diagram of a linear optocoupler module.
Detailed Description
As shown in fig. 2, an all-optical isolation control device of an excimer laser charging power supply comprises a main control board 1, a first optical fiber receiving module 2, and a second optical fiber receiving module 3, the optical transceiver comprises a DAC module 4, a linear optocoupler module 5 and a laser charging power supply 6, wherein two paths of optical signal output ends of a main control board 1 are respectively connected with two input ends of a first optical fiber receiving module 2, the other three paths of optical signal output ends of the main control board 1 are respectively connected with three input ends of a second optical fiber receiving module 3, two output ends of the first optical fiber receiving module 2 are respectively connected with two input ends of the laser charging power supply 6, three output ends of the second optical fiber receiving module 3 are connected with three input ends of the DAC module 4, the output end of the DAC module 4 is connected with the input end of the linear optocoupler module 5, and the output end of the linear optocoupler module 5 is connected with one input end of the; the main control board 1 generates five paths of optical signals which are FYNC, SCLK, SDI, ENABLE and INHIBIT respectively, wherein the two paths of signals of ENABLE and INHIBIT are sent to the first optical fiber receiving module 2 respectively, the first optical fiber receiving module 2 directly sends the ENABLE and INHIBIT to the laser charging power supply 6 after performing photoelectric conversion on the two paths of signals of ENABLE and INHIBIT respectively, and the two paths of signals of ENABLE and INHIBIT respectively control the power supply and the working time of the laser charging power supply 6; FYNC, SCLK and SDI three-way signal send respectively for second optical fiber receiving module 3, second optical fiber receiving module 3 carries out photoelectric conversion with FYNC, SCLK and SDI three-way signal respectively after, send for DAC module 4, after digital-to-analog conversion, DAC module 4 sends the analog signal Vprogram _ pre of output for linear opto-coupler module 5, after 5 electric isolation of linear opto-coupler module the Vprogram signal of output sends for laser charging source 6 and controls the bottleneck voltage of the high pressure that charges, laser charging source output voltage can not exceed the high-voltage value of settlement promptly.
The main control board 1 adopts a PIC series development board, wherein pins RC2, RC3/SCK, RC5/SDO, RD3 and RD4 of the main control board respectively generate five signals of FYNC, SCLK, SDI, ENABLE and INHIBIT.
The laser charging power supply 6 adopts a TDK-Lambda series high-voltage charging power supply, two paths of signals, namely ENABLE and INHIBIT, output by the first optical fiber receiving module 2 are respectively sent to an ENABLE/RESET pin and an INHIBIT pin of the laser charging power supply 6, and a Vprogram signal output by the linear optical coupling module 5 is sent to a VPROGRAM pin of the laser charging power supply 6.
As shown in fig. 3 and 4, the DAC module 4 employs an AD5721R chip U1, the linear optical coupler module 5 includes a first operational amplifier IC2, a second operational amplifier IC3 and a linear optical coupler IC1, the model of the linear optical coupler IC1 is IL300, an SDI pin, + SYNC pin and an SCLK pin of the chip U1 respectively receive SDI, FYNC and SCLK signals sent by the second optical fiber receiving module, a VOUT pin of the chip U1 is connected to a non-inverting input terminal of the first operational amplifier IC2, an output terminal of the first operational amplifier IC2 is connected to a led + pin of the linear optical coupler IC1, a pd2+ pin of the linear optical coupler IC1 is connected to a non-inverting input terminal of the second operational amplifier IC3, and an output terminal of the second operational amplifier IC3 is connected to a vprogam pin of the laser charging power supply.
The two operational amplifiers MC1458 act as an impedance transformation that enhances the ability of the analog signal Vprogram to be loaded. The operational amplifier herein is used as a voltage follower.
Claims (5)
1. The utility model provides an all-optical isolation control device of excimer laser charging power supply which characterized in that: the optical fiber charging device comprises a main control board, a first optical fiber receiving module, a second optical fiber receiving module, a DAC module, a linear optocoupler module and a laser charging power supply, wherein two optical signal output ends of the main control board are respectively connected with two input ends of the first optical fiber receiving module, the other three optical signal output ends of the main control board are respectively connected with three input ends of the second optical fiber receiving module, two output ends of the first optical fiber receiving module are respectively connected with two input ends of the laser charging power supply, three output ends of the second optical fiber receiving module are connected with three input ends of the DAC module, the output end of the DAC module is connected with the input end of the linear optocoupler module, and the output end of the linear optocoupler module is connected with one input end of.
2. The all-optical isolation control device of the excimer laser charging power supply according to claim 1, wherein: the main control board adopts a PIC series development board, wherein RD3 pins and RD4 pins of the main control board are respectively connected with two input ends of the first optical fiber receiving module, and RC2 pins, RC3/SCK pins and RC5/SDO pins are respectively connected with three input ends of the second optical fiber receiving module.
3. The all-optical isolation control device of the excimer laser charging power supply according to claim 1, wherein: the laser charging power supply adopts a TDK-Lambda series high-voltage charging power supply, two output ends of the first optical fiber receiving module are respectively connected with an ENABLE/RESET pin and an INHIBIT pin of the laser charging power supply, and the output end of the linear optical coupling module is connected with a VPROGRAM pin of the laser charging power supply.
4. The all-optical isolation control device of the excimer laser charging power supply according to claim 3, wherein: the DAC module adopts AD5721R chip U1, linear opto-coupler module include first operational amplifier IC2, second operational amplifier IC3 and linear opto-coupler IC1, linear opto-coupler IC 1's model is IL300, chip U1's SDI pin, + SYNC pin and SCLK pin are connected respectively with the three output of second optical fiber receiving module, chip U1's VOUT pin is connected with the noninverting input of first operational amplifier IC2, the led + pin of linear opto-coupler IC1 is connected to the output of first operational amplifier IC2, the pd2+ pin of linear opto-coupler IC1 is connected with the noninverting input of second operational amplifier IC3, the output of second operational amplifier IC3 is connected with the VPROGRAM pin of laser charging power supply.
5. The all-optical isolation control device of the excimer laser charging power supply according to claim 4, wherein: the first operational amplifier IC2 and the second operational amplifier IC3 are of the type MC 1458.
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| CN201920566341.3U CN209766851U (en) | 2019-04-24 | 2019-04-24 | Full-optical isolation control device of excimer laser charging power supply |
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| CN201920566341.3U CN209766851U (en) | 2019-04-24 | 2019-04-24 | Full-optical isolation control device of excimer laser charging power supply |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109950783A (en) * | 2019-04-24 | 2019-06-28 | 安徽中科艾克西玛光电科技有限公司 | A kind of full optical isolation control device of excimer laser charge power supply |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109950783A (en) * | 2019-04-24 | 2019-06-28 | 安徽中科艾克西玛光电科技有限公司 | A kind of full optical isolation control device of excimer laser charge power supply |
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