CN209762725U - Filling gas path distribution device - Google Patents

Abstract

The utility model discloses a fill dress gas circuit distributor, including holding body, outlet duct and distributing pipe, it holds the chamber to hold inside being provided with of body to hold the chamber and be cylindric structure, it is provided with N group's outlet duct to hold body week side top face, and inside the outlet duct runs through and holds the body, N group an outlet duct side all is provided with the manometer, manometer one side is and be located the outlet duct leading flank and be provided with the valve handle, hold the inside bottom face inner wall that holds the chamber of body and seted up the rectangular channel, the vertical compression spring of group that upwards is provided with of rectangular channel, N group compression spring keeps away from the one end of rectangular channel and is provided with and accepts the board, and it is located the rectangular channel to accept the board, the chamber top face inner wall that holds the. This fill gas circuit distributor has the effect that gas distribution was carried and sealed leak protection gas, convenient to use.

Description

filling gas path distribution device

Technical Field

The utility model belongs to the technical field of fill the dress gas circuit, concretely relates to fill dress gas circuit distributor.

Background

A gas distribution apparatus comprising: the device comprises an air inlet plate, an embedded distribution plate and a lower distribution plate; the air inlet plate is provided with an air inlet passage and a containing part communicated with the air inlet passage, and the embedded distributing plate is embedded into the containing part; the embedded distributing plate is provided with a distributing passage and a gap with the accommodating part; the lower distribution plate is positioned below the air inlet plate and encapsulates the embedded distribution plate in the accommodating part. Correspondingly, the invention also discloses plasma processing equipment adopting the gas distribution device. The gas distribution device has a simple structure, has low requirements on processing precision, and can reduce the manufacturing cost.

The existing gas circuit distribution device has poor tightness, so that frequent gas leakage is caused, and when gas circuits are distributed, a plurality of groups of gas circuit conveying cannot be replaced at any time.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a fill dress gas circuit distributor to solve the problem that proposes among the above-mentioned background art.

In order to achieve the above object, the utility model provides a following technical scheme: a filling gas circuit distribution device comprises a containing pipe body, gas outlet pipes and distribution pipes, wherein a containing cavity is arranged in the containing pipe body and is of a cylindrical structure, N groups of gas outlet pipes are arranged on the top end face of the periphery of the containing pipe body and penetrate through the containing pipe body, pressure gauges are arranged on one side faces of the N groups of gas outlet pipes, and a valve handle is arranged on one side of each pressure gauge and on the front side face of each gas outlet pipe;

the inner wall of the bottom end surface of the accommodating cavity in the accommodating pipe body is provided with a rectangular groove, N groups of compression springs are vertically and upwards arranged in the rectangular groove, one ends of the N groups of compression springs, which are far away from the rectangular groove, are provided with bearing plates, the bearing plates are positioned in the rectangular groove, the inner wall of the top end surface of the accommodating cavity in the accommodating pipe body is provided with a first step table, a distribution pipe is inserted in the accommodating cavity in the accommodating pipe body, the bottom end surface of the distribution pipe is provided with a sliding plate which is matched with the rectangular groove to slide, the top end surfaces on the peripheral sides of the distribution pipe are provided with second step tables which are matched with the first step tables to use, the through pipes are arranged on the inner wall of the accommodating pipe body and positioned between the N groups of outlet pipes and the first step tables, the top end surfaces of the second step tables are provided with, and an inner thread is arranged on the inner wall of one end of the distribution pipe.

Preferably, the distribution pipe is internally threaded with a filter screen, the filter screen is far away from one side of the second step table and is located inside the distribution pipe, and is threaded with a connecting plate, and N groups of second pipelines connected with the first pipeline inside the distribution pipe are transversely arranged in the connecting plate.

Preferably, a pin shaft is sleeved at the center of one side face of the valve handle close to the air outlet pipe, a disc is welded on one side of the pin shaft far away from the valve handle, and the diameter of the disc is the same as that of the inner ring of the air outlet pipe.

Preferably, a groove is transversely formed in one side of the outer wall of the accommodating pipe body, a first mounting plate is connected in the groove in a sliding mode, a sliding block matched with the groove is arranged on the first mounting plate, and N groups of fastening bolts are connected to the first mounting plate in a penetrating mode through threads.

Preferably, a second mounting plate is connected to one side of the accommodating pipe body in a threaded manner, the second mounting plate is of a disc-shaped structure, and N groups of internal thread holes are formed in the annular array.

The utility model discloses a technological effect and advantage: the charging gas path distribution device is provided with the compression spring, the rectangular groove, the bearing plate and the distribution pipe, wherein the distribution pipe is slidably mounted with the rectangular groove through the sliding plate, and the compression spring and the bearing plate can effectively support the distribution pipe, so that the through hole is connected with the through pipe, and the effect of sealing and preventing gas leakage is achieved; the gas is introduced into the first pipeline and the through holes from the second pipeline by arranging the through pipe, the through holes, the connecting plate and the first pipeline and the second pipeline, and the connecting plate is connected with the distribution pipe, so that the gas is convenient to distribute and convey; the distribution pipe can be effectively matched and connected in the accommodating pipe body by arranging the first step table and the second step table, and the first step table and the second step table play a limiting role; this fill gas circuit distributor has the effect that gas distribution was carried and sealed leak protection gas, convenient to use.

Drawings

Fig. 1 is a schematic structural view of the present invention;

FIG. 2 is a schematic view of the valve handle connection structure of the present invention;

Fig. 3 is a schematic diagram of a first mounting plate structure of the present invention;

Fig. 4 is a schematic structural diagram of the dispensing tube of the present invention.

In the figure: 1 holds body, 2 outlet ducts, 3 distribution pipes, 4 second mounting panels, 5 internal thread holes, 6 manometer, 7 valve handles, 8 recesses, 9 rectangular channels, 10 round pin axles, 11 discs, 12 first mounting panels, 13 fastening bolt, 14 siphunculus, 15 first step, 16 second step, 17 compression spring, 18 take-up plate, 19 filter screens, 20 connecting plates, 21 second pipelines.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

The utility model provides a filling gas circuit distribution device as shown in figures 1-4, which comprises a containing pipe body 1, an outlet pipe 2 and a distribution pipe 3, wherein a containing cavity is arranged inside the containing pipe body 1 and is of a cylindrical structure, N groups of outlet pipes 2 are arranged on the top end surface of the periphery of the containing pipe body 1, the outlet pipes 2 penetrate through the containing pipe body 1, a pressure gauge 6 is arranged on one side surface of each of the N groups of outlet pipes 2, and a valve handle 7 is arranged on one side of the pressure gauge 6 and on the front side surface of the outlet pipe 2;

The inner wall of the bottom end face of the accommodating cavity in the accommodating pipe body 1 is provided with a rectangular groove 9, N groups of compression springs 17 are vertically and upwardly arranged in the rectangular groove 9, one end of each of the N groups of compression springs 17, which is far away from the rectangular groove 9, is provided with a bearing plate 18, the bearing plate 18 is positioned in the rectangular groove 9, the inner wall of the top end face of the accommodating cavity of the accommodating pipe body 1 is provided with a first step table 15, the accommodating cavity of the accommodating pipe body 1 is inserted with a distribution pipe 3, the bottom end face of the distribution pipe 3 is provided with a sliding plate which is matched with the rectangular groove 9 to slide, the top end faces of the periphery sides of the distribution pipe 3 are provided with second step tables 16 matched with the first step tables 15, through pipes 14 are arranged on the inner wall of the accommodating pipe body 1 and positioned between the N groups of outlet pipes 2 and the first step tables 15, and adopt sealing connection, the inside first pipeline of being connected with the through-hole that is provided with of distributing pipe 3, 3 one end inner walls of distributing pipe are provided with the internal thread, through setting up compression spring 17, rectangular channel 9, accepting board 18 and distributing pipe 3, distributing pipe 3 passes through slide and rectangular channel 9 slidable mounting, and compression spring 17 can effectually prop up the distributing pipe with accepting board 18 for the through-hole is connected with siphunculus 14, has sealed leak protection gas's effect.

specifically, 3 threaded connection of distributing pipe has filter screen 19, one side that second step 16 was kept away from to filter screen 19 and be located the inside threaded connection of distributing pipe 3 has connecting plate 20, and transversely be provided with N group in the connecting plate 20 and the inside first pipe connection's of distributing pipe 3 second pipeline 21, filter screen 19 can prevent that the dust from getting into, and distributing pipe 3 is connected to connecting plate 20 for gaseous follow second pipeline 21 lets in first pipeline and through-hole in, the gaseous distribution of being convenient for is carried.

Specifically, a pin shaft 10 is sleeved at the center of one side face of the valve handle 7 close to the air outlet pipe 2, a disc 11 is welded on one side of the pin shaft 10 far away from the valve handle 7, the diameter size of the disc 11 is the same as that of the inner ring of the air outlet pipe 2, and the valve handle 7 rotates through the pin shaft 10 to drive the disc 11 to perform air and gas flow.

Specifically, hold 1 outer wall one side of body and transversely seted up recess 8, sliding connection has first mounting panel 12 in the recess 8, be provided with the slider that the cooperation of recess 8 was used on the first mounting panel 12, screw thread through connection has N group fastening bolt 13 on the first mounting panel 12, is convenient for hold 1 wall installation of body.

specifically, it has second mounting panel 4 to hold 1 side threaded connection of body, second mounting panel 4 is discoid structure to annular array has seted up N internal thread hole 5 of group, and 5 internal thread connection in internal thread hole have the bolt to install and hold body 1.

Specifically, this fill dress gas circuit distributor, distributing pipe 3 passes through slide and 9 slidable mounting of rectangular channel, compression spring 17 with accept board 18 and can effectually prop up the distributing pipe, be connected the through-hole with siphunculus 14, filter screen 19 can prevent the dust entering, distributing pipe 3 is connected to connecting plate 20, gas lets in first pipeline and through-hole from second pipeline 21, valve handle 7 rotates through round pin axle 10, drive disc 11 and carry out the air gas flow, first mounting panel 12 and second mounting panel 4 are installed and are held body 1. This fill gas circuit distributor has the effect that gas distribution was carried and sealed leak protection gas, convenient to use.

Finally, it should be noted that: although the present invention has been described in detail with reference to the foregoing embodiments, it will be apparent to those skilled in the art that modifications and variations can be made in the embodiments or in part of the technical features of the embodiments without departing from the spirit and the scope of the invention.

Claims (5)

1. the utility model provides a fill dress gas circuit distributor, is including holding body (1), outlet duct (2) and distributing pipe (3), its characterized in that: the containing pipe body (1) is internally provided with a containing cavity which is of a cylindrical structure, N groups of air outlet pipes (2) are arranged on the top end face of the periphery of the containing pipe body (1), the air outlet pipes (2) penetrate through the containing pipe body (1), one side faces of the N groups of air outlet pipes (2) are provided with pressure gauges (6), and a valve handle (7) is arranged on one side of each pressure gauge (6) and on the front side face of each air outlet pipe (2);

The inner wall of the bottom end face of an accommodating cavity in the accommodating pipe body (1) is provided with a rectangular groove (9), N groups of compression springs (17) are vertically and upwards arranged in the rectangular groove (9), one ends, far away from the rectangular groove (9), of the compression springs (17) are provided with bearing plates (18), the bearing plates (18) are located in the rectangular groove (9), the inner wall of the top end face of the accommodating cavity of the accommodating pipe body (1) is provided with a first step platform (15), distribution pipes (3) are inserted in the accommodating cavity of the accommodating pipe body (1), the bottom end face of each distribution pipe (3) is provided with a sliding plate which is matched with the rectangular groove (9) to slide, second step platforms (16) which are matched with the first step platforms (15) to use are arranged on the top end faces of the sides of the distribution pipes (3), and through pipes (14) are arranged on the inner wall of the accommodating pipe body (1) and between the N groups of outlet pipes (2, the top end face of the second step table (16) is provided with a through hole matched with the through pipe (14) for use, the through hole is connected in a sealing mode, a first pipeline connected with the through hole is arranged inside the distribution pipe (3), and an inner thread is arranged on the inner wall of one end of the distribution pipe (3).

2. A filling gas path dispensing device as defined in claim 1, wherein: distributing pipe (3) internal thread connection has filter screen (19), one side of second step platform (16) is kept away from and be located distributing pipe (3) internal thread connection has connecting plate (20) in filter screen (19), and transversely be provided with second pipeline (21) that N group and distributing pipe (3) inside first pipe connection in connecting plate (20).

3. A filling gas path dispensing device as defined in claim 1, wherein: the valve handle (7) is close to a side face center position of the air outlet pipe (2) and is sleeved with a pin shaft (10), one side, far away from the valve handle (7), of the pin shaft (10) is welded with a disc (11), and the diameter size of the disc (11) is the same as that of an inner ring of the air outlet pipe (2).

4. A filling gas path dispensing device as defined in claim 1, wherein: the novel pipe is characterized in that one side of the outer wall of the accommodating pipe body (1) is transversely provided with a groove (8), a first mounting plate (12) is connected in the groove (8) in a sliding mode, a sliding block matched with the groove (8) is arranged on the first mounting plate (12), and N groups of fastening bolts (13) are connected to the first mounting plate (12) in a penetrating mode through threads.

5. A filling gas path dispensing device as defined in claim 1, wherein: accommodate body (1) a side threaded connection and have second mounting panel (4), second mounting panel (4) are discoid structure to annular array has seted up N internal thread hole (5) of group.