CN209748809U - audio device and electronic equipment - Google Patents

audio device and electronic equipment Download PDF

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Publication number
CN209748809U
CN209748809U CN201920662191.6U CN201920662191U CN209748809U CN 209748809 U CN209748809 U CN 209748809U CN 201920662191 U CN201920662191 U CN 201920662191U CN 209748809 U CN209748809 U CN 209748809U
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driving
mems
sound
frequency
circuit
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刘端
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Anhui Afei Acoustic Technology Co Ltd
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Anhui Afei Acoustic Technology Co Ltd
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Abstract

The utility model provides an audio device and electronic equipment, each sound producing unit includes: at least one MEMS speaker and drive circuitry; the input end of the MEMS loudspeaker is electrically connected with the output end of the driving circuit, and the output end of the driving circuit is used for outputting a driving signal for driving the MEMS loudspeaker to work; the frequency of the driving signal output by the driving circuit of at least one sound production unit is different from the frequency of the driving signal output by the driving circuits of the other sound production units, wherein the piezoelectric film of the MEMS loudspeaker comprises scandium-doped aluminum nitride. The MEMS loudspeaker is driven by the corresponding driving circuit of each of the different sound generating units, and the frequency of the driving signal output by the driving circuit of at least one sound generating unit is different from the frequency of the driving signal output by the other driving circuits, so that the sounds emitted by the different sound generating units can be finally superposed, and the purpose of outputting the sound signal with high sound pressure level is achieved.

Description

Audio device and electronic equipment
Technical Field
The utility model relates to a speaker technical field, more specifically say, relate to an audio device and electronic equipment.
background
With the development of electronic science and technology, and the development of portable electronic consumer products, there are increasingly high requirements for the size and power consumption of speakers nowadays. A MEMS (Micro-Electro-Mechanical System) speaker has advantages of small volume and low power consumption, and is expected to be widely applied to portable electronic consumer products. However, the volume of the audio speaker becomes small, which causes the sound pressure level of the audio speaker to be significantly lowered.
SUMMERY OF THE UTILITY MODEL
In view of this, the utility model provides an audio device and electronic equipment has effectively solved the problem that prior art exists, wherein, drive its MEMS speaker that includes through different sound generating unit's respective corresponding drive circuit, and the drive signal frequency of at least one sound generating unit's drive circuit output is different with the frequency of the drive signal of other drive circuit outputs, finally can make the sound that different sound generating unit sent superpose, and then reach the purpose of the sound signal of output high sound pressure level. And, the utility model provides an audio device adopts MEMS speaker to constitute, can make audio device reduce volume and consumption.
in order to achieve the above purpose, the utility model provides a technical scheme as follows:
an audio device, each of the sound emitting units comprising: at least one MEMS speaker and drive circuitry;
the input end of the MEMS loudspeaker is electrically connected with the output end of the driving circuit, and the output end of the driving circuit is used for outputting a driving signal for driving the MEMS loudspeaker to work;
the frequency of the driving signal output by the driving circuit of at least one sounding unit is different from the frequency of the driving signal output by the driving circuits of the rest sounding units;
wherein the piezoelectric film of the MEMS loudspeaker comprises scandium-doped aluminum nitride.
Optionally, the driving circuit includes:
The output end of the digital audio signal circuit is used for outputting a digital audio signal;
The input end of the digital-to-analog converter is electrically connected with the output end of the digital audio signal circuit;
the input end of the analog filter is electrically connected with the output end of the digital-to-analog converter;
the input end of the power amplifier is electrically connected with the output end of the analog filter;
And the output end of the power amplifier is electrically connected with the input end of the corresponding MEMS loudspeaker.
Optionally, the digital audio signal circuits of all the driving circuits are independent from each other;
Or, the digital audio signal circuits of all the driving circuits are integrated into a digital audio signal frequency divider.
optionally, the number of the sounding units with low resonance frequency is greater than the number of the sounding units with high resonance frequency;
Wherein the range of the low resonance frequency is not less than 20Hz and not more than 2kHz, and the range of the high resonance frequency is more than 2kHz and not more than 20 kHz.
optionally, the driving circuit is a printed circuit or an integrated circuit.
optionally, the driving manner of the MEMS speaker includes electrostatic driving, piezoelectric driving, electromagnetic driving, or electromechanical driving.
optionally, all at least one in the sound generating unit with all the rest the sound generating unit is simultaneously or not simultaneously sounded.
optionally, the MEMS speakers included in different sound generating units are separately distributed;
or, the MEMS speakers included in all the sound generating units are distributed in an integrated array.
correspondingly, the utility model also provides an electronic equipment, electronic equipment includes foretell audio device.
Optionally, the electronic device includes a headset, a mobile phone, or a tablet computer.
Compared with the prior art, the utility model provides a technical scheme has following advantage at least:
the utility model provides an audio device and electronic equipment, each sound generating unit includes: at least one MEMS speaker and drive circuitry; the input end of the MEMS loudspeaker is electrically connected with the output end of the driving circuit, and the output end of the driving circuit is used for outputting a driving signal for driving the MEMS loudspeaker to work; the frequency of the driving signal output by the driving circuit of at least one sounding unit is different from the frequency of the driving signal output by the driving circuits of the rest sounding units.
According to the above, the utility model provides a technical scheme drives its MEMS speaker that includes through the respective corresponding drive circuit of different sound generating unit, and the drive signal frequency of at least one sound generating unit's drive circuit output is different with the drive signal's of remaining drive circuit output frequency, finally can make the sound that different sound generating unit sent superpose, and then reaches the purpose of the sound signal of output high sound pressure level. And, the utility model provides an audio device adopts MEMS speaker to constitute, can make audio device reduce volume and consumption.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required to be used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the provided drawings without creative efforts.
Fig. 1 is a schematic structural diagram of an audio device according to an embodiment of the present disclosure;
Fig. 2 is a schematic structural diagram of another audio device according to an embodiment of the present application;
Fig. 3 is a schematic structural diagram of another audio apparatus according to an embodiment of the present application;
Fig. 4 is a schematic structural diagram of another audio apparatus according to an embodiment of the present application;
Fig. 5 is a schematic diagram of an audio apparatus according to an embodiment of the present application;
Fig. 6 is a frequency response graph of an audio apparatus according to an embodiment of the present application;
fig. 7 is a schematic structural diagram of a piezoelectric driven MEMS speaker according to an embodiment of the present disclosure;
fig. 8 is a schematic structural diagram of a piezoelectric driven MEMS speaker according to an embodiment of the present disclosure.
Detailed Description
the technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
As described in the background, the audio speaker becomes smaller in size, which results in a significant reduction in the sound pressure level of the audio speaker. In particular, the MEMS speaker has a poor low-frequency response, which seriously affects the sound quality performance of the audio speaker, so that the sound quality is poor.
Based on this, the embodiment of the application provides an audio device and an electronic device, which effectively solve the problems existing in the prior art, wherein the MEMS speakers included in the audio device are driven by respective corresponding driving circuits of different sound generating units, and the frequency of the driving signal output by the driving circuit of at least one sound generating unit is different from the frequency of the driving signals output by the other driving circuits, so that the sounds generated by the different sound generating units can be finally superimposed, thereby achieving the purpose of outputting the sound signal with a high sound pressure level. The audio device provided by the embodiment of the application is formed by adopting the MEMS loudspeaker, so that the volume and the power consumption of the audio device can be reduced. In order to achieve the above object, the technical solutions provided by the embodiments of the present application are described in detail below, specifically with reference to fig. 1 to 8.
Referring to fig. 1, a schematic structural diagram of an audio device according to an embodiment of the present disclosure is shown, where each of the sound generating units 100 provided in the embodiment of the present disclosure includes:
at least one MEMS speaker 110 and a drive circuit 120;
the input end of the MEMS speaker 110 is electrically connected to the output end of the driving circuit 120, and the output end of the driving circuit 120 is used for outputting a driving signal for driving the MEMS speaker 110 to operate;
wherein, the frequency of the driving signal output by the driving circuit 120 of at least one of the sound generating units 100 is different from the frequency of the driving signals output by the driving circuits 120 of the other sound generating units 100.
the piezoelectric film of the MEMS loudspeaker comprises scandium-doped aluminum nitride.
It should be noted that different sounding units provided in the embodiments of the present application are independent of each other, and thus, the situation that separate sounding is not affected by each other can be achieved.
according to the technical scheme provided by the embodiment of the application, the MEMS loudspeaker included in the sound generating unit is driven by the corresponding driving circuit of each of the different sound generating units, and the frequency of the driving signal output by the driving circuit of at least one sound generating unit is different from the frequency of the driving signal output by the other driving circuits, so that the sounds emitted by the different sound generating units can be finally superposed, and the purpose of outputting the sound signal with high sound pressure level is further achieved. That is, the technical solution provided in the embodiment of the present application utilizes the narrowband MEMS speaker included in the multiple sound generating units and the narrowband frequencies output by the multiple driving circuits to drive the respective corresponding sound generating units, so as to finally achieve the purpose of superimposing the sound signals output by the different sound generating units and further synthesizing the sound signal with a high sound pressure level. Moreover, the piezoelectric thin film provided by the application comprises scandium-doped aluminum nitride. However, when a driving circuit is used to drive an existing MEMS speaker including a piezoelectric thin film of PZT (lead zirconate titanate piezoelectric ceramic), a dc bias voltage is generally used to prevent depolarization of PZT and to avoid an influence on sound emission efficiency due to a decrease in piezoelectric coefficient. The MEMS loudspeaker comprising the scandium-doped aluminum nitride piezoelectric film is adopted, and the driving circuit does not need to additionally add direct-current bias voltage. Moreover, the manufacturing process of the MEMS speaker including the scandia aluminum nitride piezoelectric film is compatible with a CMOS (Complementary Metal Oxide Semiconductor) process, and is easy to integrate into an integrated circuit. In addition, compared with a PZT piezoelectric film containing lead, the scandium-doped aluminum nitride MEMS loudspeaker is more non-toxic and more environment-friendly.
The audio device provided by the embodiment of the application is composed of the MEMS loudspeaker, and the MEMS loudspeaker has the advantages of low power consumption and small volume due to the high process precision and good consistency of the MEMS device, so that the audio device composed of the MEMS loudspeaker has the advantages of small volume and low power consumption. Further, since the MEMS speaker has the above advantages, it is possible to achieve a higher integration of the audio device, that is, to arrange more sound emitting units in a limited space.
referring to fig. 2, a schematic structural diagram of another audio apparatus provided in the embodiment of the present application is shown, where the audio apparatus includes a plurality of sound generating units 100, and each of the sound generating units 100 includes:
At least one MEMS speaker 110 and a drive circuit 120;
the input end of the MEMS speaker 110 is electrically connected to the output end of the driving circuit 120, and the output end of the driving circuit 120 is used for outputting a driving signal for driving the MEMS speaker 110 to operate;
wherein, the frequency of the driving signal output by the driving circuit 120 of at least one of the sound generating units 100 is different from the frequency of the driving signals output by the driving circuits 120 of the other sound generating units 100;
the driving circuit 120 provided in the embodiment of the present application includes:
A digital audio signal circuit 121, an output terminal of the digital audio signal circuit 121 being configured to output a digital audio signal;
a digital-to-analog converter 122 having an input end electrically connected to the output end of the digital audio signal circuit 121;
an analog filter 123 having an input end electrically connected to the output end of the digital-to-analog converter 122;
A power amplifier 124 having an input terminal electrically connected to an output terminal of the analog filter 123;
And the output of the power amplifier 124 is electrically connected to the input of the corresponding MEMS speaker 110.
It can be understood that, in the audio apparatus provided in this embodiment of the present application, when each sound generating unit operates, first the digital audio signal circuit 121 outputs a digital audio signal, then the digital audio signal is converted into an analog audio signal through the digital-to-analog converter 122, the analog filter 123 filters the analog audio signal, then the analog audio signal is amplified through the power amplifier 124, and finally the MEMS speaker 110 is controlled to generate sound through the analog audio signal. Because the frequency of the driving signal output by the driving circuit of at least one sound production unit is different from the frequency of the driving signal output by the other driving circuits, the sounds emitted by different sound production units can be finally superposed, and the purpose of outputting sound signals with high sound pressure level is further achieved.
In an embodiment of the present application, the digital audio signal circuits of the different driving circuits provided in the present application may be independent circuits, and may also be integrated into a digital audio signal frequency divider, which is not limited in this application. Referring to fig. 3, a schematic structural diagram of another audio apparatus provided in the embodiment of the present application is shown, where the audio apparatus includes a plurality of sound generating units 100, and each of the sound generating units 100 includes:
At least one MEMS speaker 110 and a drive circuit 120;
the input end of the MEMS speaker 110 is electrically connected to the output end of the driving circuit 120, and the output end of the driving circuit 120 is used for outputting a driving signal for driving the MEMS speaker 110 to operate;
wherein, the frequency of the driving signal output by the driving circuit 120 of at least one of the sound generating units 100 is different from the frequency of the driving signals output by the driving circuits 120 of the other sound generating units 100;
The digital audio signal circuits 121 of all the driving circuits 120 provided in the embodiment of the present application are independent of each other, that is, the driving circuits 120 provided in the embodiment of the present application include:
A digital audio signal circuit 121, an output terminal of the digital audio signal circuit 121 being configured to output a digital audio signal;
A digital-to-analog converter 122 having an input end electrically connected to the output end of the digital audio signal circuit 121;
an analog filter 123 having an input end electrically connected to the output end of the digital-to-analog converter 122;
A power amplifier 124 having an input terminal electrically connected to an output terminal of the analog filter 123;
and the output of the power amplifier 124 is electrically connected to the input of the corresponding MEMS speaker 110.
alternatively, referring to fig. 4, a schematic structural diagram of another audio apparatus provided in the embodiment of the present application is shown, where the audio apparatus includes a plurality of sound units 100, and each of the sound units 100 includes:
at least one MEMS speaker 110 and a drive circuit 120;
the input end of the MEMS speaker 110 is electrically connected to the output end of the driving circuit 120, and the output end of the driving circuit 120 is used for outputting a driving signal for driving the MEMS speaker 110 to operate;
wherein, the frequency of the driving signal output by the driving circuit 120 of at least one of the sound generating units 100 is different from the frequency of the driving signals output by the driving circuits 120 of the other sound generating units 100;
in this embodiment, the digital audio signal circuits of all the driving circuits 120 provided in this application are integrated into the digital audio signal frequency divider 125, that is, the driving circuit 120 provided in this application includes:
A corresponding output 125a of the digital audio signal divider 125, the corresponding output 125a of the digital audio signal divider 125 being for outputting a digital audio signal corresponding to the driver circuit 120;
a digital-to-analog converter 122 having an input electrically connected to a corresponding output 125a of the digital audio signal divider 125;
an analog filter 123 having an input end electrically connected to the output end of the digital-to-analog converter 122;
A power amplifier 124 having an input terminal electrically connected to an output terminal of the analog filter 123;
and the output of the power amplifier 124 is electrically connected to the input of the corresponding MEMS speaker 110.
In any of the above embodiments of the present application, the number of the sound generating units with low resonant frequency provided by the present application is greater than the number of the sound generating units with high resonant frequency, so as to mainly improve the low-frequency performance.
Wherein the range of the low resonance frequency is not less than 20Hz and not more than 2kHz, and the range of the high resonance frequency is more than 2kHz and not more than 20 kHz.
referring to fig. 5, a sound emission diagram of an audio apparatus according to an embodiment of the present invention is shown, in which a sound signal emitted by a sound emission unit 201 with a low resonance frequency and a sound signal emitted by a sound emission unit 202 with a high resonance frequency are superimposed to synthesize a sound signal with a higher sound pressure level.
Referring to fig. 6, a frequency response graph of an audio apparatus according to an embodiment of the present application is shown. The resonance frequencies of the sounding units with different resonance frequencies are respectively 15kHz, 10kHz, 5kHz, 4kHz, 2kHz, 1kHz, 500Hz and 300Hz, the frequency response curves meet Gaussian distribution, and the relative bandwidths are all 100%. The combined frequency response is shown in fig. 6, which shows that on the one hand the sound pressure level is significantly improved and on the other hand the frequency response is smoother. Therefore, the number of the sounding units formed by the MEMS loudspeaker is optimized, and/or the parameters of the sounding units formed by the MEMS loudspeaker are optimized, so that a better sound output effect can be achieved. In addition, in practical application, a plurality of sound units with a certain resonant frequency can be adopted to enhance the signal intensity of a certain frequency band, and the application is not particularly limited.
In any of the above embodiments of the present application, the driving circuit provided by the present application is a printed circuit or an integrated circuit. Preferably, the driving circuit provided by the embodiment of the present application is an integrated circuit, wherein the MEMS speaker is compatible with a semiconductor process, so that the MEMS speaker is easy to integrate with the integrated circuit, thereby further reducing the volume and power consumption of the audio device and improving the reliability of the audio device.
in any of the above embodiments of the present application, the driving manner of the MEMS speaker provided by the present application includes electrostatic driving, piezoelectric driving, electromagnetic driving, or electromechanical driving.
referring to fig. 7, a schematic structural diagram of a piezoelectric MEMS speaker provided in an embodiment of the present application is shown, where the MEMS speaker includes:
a substrate 4001 having a hollow structure, wherein the substrate 4001 may be a silicon substrate;
a structural beam 4002 located above the substrate 4001;
A bottom electrode 4003 located on a side of the structure beam 4002 facing away from the substrate 4001;
a composite diaphragm 4004 located on a side of the bottom electrode 4003 facing away from the substrate 4001;
and a top electrode 4005 located on a side of the composite diaphragm 4004 facing away from the substrate 4001.
as can be appreciated, in the piezoelectric driven MEMS speaker shown in fig. 7 in the present embodiment, the substrate 4001 and the structural beam 4002 play a supporting role; and the main material of the composite diaphragm 4004 is a piezoelectric thin film which emits an acoustic wave into the air under voltage excitation of the bottom electrode 4003 and the top electrode 4005.
Alternatively, referring to fig. 8, a schematic structural diagram of another piezoelectric MEMS speaker provided in the embodiment of the present application is shown, where the MEMS speaker includes:
A substrate 4001 having a hollow structure, wherein the substrate 4001 may be a silicon substrate;
A structural beam 4002 located above the substrate 4001;
a bottom electrode 4003 located on a side of the structure beam 4002 facing away from the substrate 4001;
A piezoelectric film 4004 on a side of the bottom electrode 4003 facing away from the substrate 4001;
a top electrode 4005 located on a side of the piezoelectric film 4004 opposite to the substrate 4001, wherein a hollow structure from the through hole 4008 to the substrate 4001 is provided through the structural beam 4002, the bottom electrode 4003, the piezoelectric film 4004 and the top electrode 4005;
a coupling block 4006 located above via 4008;
And a diaphragm 4007 which is covered from the coupling block 4006 to the side surface of the substrate 4001 from the periphery.
in one embodiment, piezoelectric film 4004 comprises scandium-doped aluminum nitride. However, when a driving circuit is used to drive an existing MEMS speaker including a piezoelectric thin film of PZT (lead zirconate titanate piezoelectric ceramic), a dc bias voltage is generally used to prevent depolarization of PZT and to avoid an influence on sound emission efficiency due to a decrease in piezoelectric coefficient. The MEMS loudspeaker comprising the scandium-doped aluminum nitride piezoelectric film 4004 is adopted, and the driving circuit does not need to additionally add a direct current bias voltage. Moreover, the MEMS speaker including the scandia aluminum nitride piezoelectric film 4004 of the present application is compatible with CMOS (Complementary Metal Oxide Semiconductor) technology, and is easy to integrate into an integrated circuit. In addition, compared with a PZT piezoelectric film containing lead, the scandium-doped aluminum nitride MEMS loudspeaker is more non-toxic and more environment-friendly.
as can be appreciated, in the piezoelectric driven MEMS speaker shown in fig. 8 in the present embodiment, the substrate 4001 and the structural beam 4002 play a supporting role; and a piezoelectric cantilever structure formed by the structural beam 4002, the bottom electrode 4003, the piezoelectric film 4004 and the top electrode 4005 is used as a drive, the coupling block 4006 is connected with the piezoelectric cantilever structure and the vibration film 4007, and the vibration film 4007 emits sound waves into the air.
it should be noted that, when the MEMS speaker provided in the embodiment of the present application is driven by a piezoelectric actuator, the MEMS speaker is not limited to the MEMS speaker structure shown in fig. 7 and 8, and may also be in other shapes, and the present application is not limited in particular.
In any of the above-mentioned embodiments of the present application, all that this application provided at least one of the sound generating units with all the rest the sound generating units produce sound simultaneously or not simultaneously.
In any of the foregoing embodiments of the present application, the MEMS speakers included in different sound generating units provided in the embodiments of the present application are separately distributed;
Or, the MEMS speakers included in all the sound generating units are distributed in an integrated array.
correspondingly, the embodiment of the application further provides electronic equipment, and the electronic equipment comprises the audio device provided by any one of the embodiments.
optionally, the electronic device provided in the embodiment of the present application includes an earphone, a mobile phone, or a tablet computer, which is not specifically described in the present application.
The embodiment of the application provides an audio device and electronic equipment, each sound generating unit includes: at least one MEMS speaker and drive circuitry; the input end of the MEMS loudspeaker is electrically connected with the output end of the driving circuit, and the output end of the driving circuit is used for outputting a driving signal for driving the MEMS loudspeaker to work; the frequency of the driving signal output by the driving circuit of at least one sounding unit is different from the frequency of the driving signal output by the driving circuits of the rest sounding units.
As can be seen from the above, in the technical solution provided in the embodiment of the present application, the MEMS speakers included in the different sound generating units are driven by the respective corresponding driving circuits of the different sound generating units, and the frequency of the driving signal output by the driving circuit of at least one sound generating unit is different from the frequency of the driving signals output by the remaining driving circuits, so that the sounds emitted by the different sound generating units can be finally superimposed, thereby achieving the purpose of outputting the sound signal at a high sound pressure level. The audio device provided by the embodiment of the application is formed by adopting the MEMS loudspeaker, so that the volume and the power consumption of the audio device can be reduced.
The previous description of the disclosed embodiments is provided to enable any person skilled in the art to make or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the invention. Thus, the present invention is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims (10)

1. an audio device comprising a plurality of sound emitting units, each of the sound emitting units comprising: at least one MEMS speaker and drive circuitry;
The input end of the MEMS loudspeaker is electrically connected with the output end of the driving circuit, and the output end of the driving circuit is used for outputting a driving signal for driving the MEMS loudspeaker to work;
the frequency of the driving signal output by the driving circuit of at least one sounding unit is different from the frequency of the driving signal output by the driving circuits of the rest sounding units;
wherein the piezoelectric film of the MEMS loudspeaker comprises scandium-doped aluminum nitride.
2. The audio device according to claim 1, wherein the driving circuit comprises:
the output end of the digital audio signal circuit is used for outputting a digital audio signal;
the input end of the digital-to-analog converter is electrically connected with the output end of the digital audio signal circuit;
The input end of the analog filter is electrically connected with the output end of the digital-to-analog converter;
the input end of the power amplifier is electrically connected with the output end of the analog filter;
And the output end of the power amplifier is electrically connected with the input end of the corresponding MEMS loudspeaker.
3. The audio device according to claim 2, wherein the digital audio signal circuits of all the driving circuits are independent from each other;
or, the digital audio signal circuits of all the driving circuits are integrated into a digital audio signal frequency divider.
4. the audio device according to claim 1, wherein the number of sound emitting units of low resonance frequency is larger than the number of sound emitting units of high resonance frequency;
wherein the range of the low resonance frequency is not less than 20Hz and not more than 2kHz, and the range of the high resonance frequency is more than 2kHz and not more than 20 kHz.
5. the audio device of claim 1, wherein the driver circuit is a printed circuit or an integrated circuit.
6. The audio device according to claim 1, wherein the MEMS speaker is driven by an electrostatic drive, a piezoelectric drive, an electromagnetic drive, or an electromechanical drive.
7. The audio device according to claim 1, wherein at least one of the sound emitting units emits sound at the same time or different time from the rest of the sound emitting units.
8. the audio device according to claim 1, wherein the MEMS speakers included in different ones of the sound generating units are distributed in a separated manner;
Or, the MEMS speakers included in all the sound generating units are distributed in an integrated array.
9. An electronic device, characterized in that the electronic device comprises an audio apparatus according to any one of claims 1 to 8.
10. the electronic device of claim 9, wherein the electronic device comprises a headset, a cell phone, or a tablet.
CN201920662191.6U 2019-05-09 2019-05-09 audio device and electronic equipment Active CN209748809U (en)

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110290449A (en) * 2019-05-09 2019-09-27 安徽奥飞声学科技有限公司 A kind of audio devices and electronic equipment
CN111262982A (en) * 2020-01-15 2020-06-09 Oppo广东移动通信有限公司 Electronic device
WO2021134686A1 (en) * 2019-12-31 2021-07-08 瑞声声学科技(深圳)有限公司 Mems speaker

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110290449A (en) * 2019-05-09 2019-09-27 安徽奥飞声学科技有限公司 A kind of audio devices and electronic equipment
WO2021134686A1 (en) * 2019-12-31 2021-07-08 瑞声声学科技(深圳)有限公司 Mems speaker
CN111262982A (en) * 2020-01-15 2020-06-09 Oppo广东移动通信有限公司 Electronic device

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