CN209740728U - Treatment equipment for recycling waste silicon sludge - Google Patents
Treatment equipment for recycling waste silicon sludge Download PDFInfo
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- CN209740728U CN209740728U CN201920042227.0U CN201920042227U CN209740728U CN 209740728 U CN209740728 U CN 209740728U CN 201920042227 U CN201920042227 U CN 201920042227U CN 209740728 U CN209740728 U CN 209740728U
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Abstract
the utility model provides a processing equipment for recycling waste silicon mud, which is mainly provided with a material carrying disc for containing the waste silicon mud, the material carrying disc is arranged in a cleaning device for cleaning the waste silicon mud, the cleaning device is sequentially provided with an ultrasonic cleaning tank, a magnetic separation reaction tank, a first cleaning tank, a pickling tank and a second cleaning tank, the magnetic separation reaction tank is provided with a dispersing agent injector, the pickling tank is provided with an acid agent injector, a mixing device is connected with the cleaning device, the mixing device is provided with another dispersing agent injector and is provided with an atmosphere pump, the mixing device is connected to a high-temperature reaction chamber by a material spraying pipe, the high-temperature reaction chamber is connected to a cyclone dust collector by a conveying pipe, a material collecting disc is arranged below the cyclone dust collector and is connected to a particle size grading device by a conveying device, thus, the waste silicon mud is made into high-purity silicon dioxide powder by the processing equipment, can be widely applied to industrial filling materials, and can recycle the waste silicon sludge.
Description
Technical Field
The utility model relates to a treatment facility that useless silicon mud was recycled especially indicates one kind and utilizes this treatment facility can make high-purity silica powder with useless silicon mud, can extensively apply to the industry filler.
Background
The waste silicon mud is produced by cutting or grinding processes in a semiconductor or solar wafer factory, the waste silicon mud does not contain cutting oil and silicon carbide generally, the liquid content is more than 80%, and the industry has a plurality of methods for recycling the waste silicon mud, such as drying the silicon mud to form low-purity silicon powder, adding a binder, uniformly mixing, and then pressing into silicon ingots or melting at high temperature to form silicon blocks; the utility model provides a new recovery technology, and the silica powder body of purifying can be applied to industry filler material.
SUMMERY OF THE UTILITY MODEL
The utility model aims at providing a treatment facility that useless silicon mud was recycled can regenerate useless silicon mud for high-purity silica powder, can extensively apply to the use of industry filler.
The utility model provides a processing apparatus that useless silicon mud was recycled, mainly be equipped with the material tray that carries that supplies the splendid attire useless silicon mud, should carry the material tray and put into in belt cleaning device, this belt cleaning device is equipped with an ultrasonic cleaning tank according to the preface, a magnetic separation reaction tank, a first washing tank, a descaling bath and a second washing tank, be equipped with a dispersion agent injector on this magnetic separation reaction tank, be equipped with an acid agent injector on this descaling bath, a mixing arrangement continues in this belt cleaning device, be equipped with another dispersion agent injector on this mixing arrangement, this mixing arrangement is equipped with an atmosphere pump, this mixing arrangement is connected to a high temperature reaction room by a spray pipe, this high temperature reaction room is by a duct connections to cyclone, this cyclone below is equipped with the collecting tray, this collecting tray is connected to a particle size grading plant by a conveyor.
The utility model discloses the treatment facility that useless silicon mud was recycled, wherein, the gas in this high temperature reaction chamber is oxygen or air.
The utility model discloses treatment facility that useless silicon mud was recycled, its advantage lies in: the method can simply and quickly regenerate the waste silicon sludge into high-purity silicon dioxide powder, and can be widely applied to industrial filling materials, so that the waste silicon sludge can be optimally recycled.
Drawings
Fig. 1 is a schematic view of a cleaning apparatus according to an embodiment of the present invention.
fig. 2 is a schematic view of a mixing device, a high-temperature reaction chamber, a cyclone dust collector and a particle size classifying device according to an embodiment of the present invention.
Fig. 3 is a manufacturing flow chart of the embodiment of the present invention.
description of reference numerals: a, waste silicon sludge; a1 slurry; a2 silica particles; a3 silicon dioxide powder particles; a4 high-purity silicon dioxide powder; 10, carrying a material tray; 2, cleaning the device; 20 ultrasonic cleaning tank; 21, a magnetic separation reaction tank; 210 a dispersant injector; 22 a first cleaning tank; 23, a pickling tank; 230 an acid agent injector; 24 a second cleaning tank; 3, a mixing device; 30 a dispersant injector; 31 an atmosphere pump; 32 a material spraying pipe; 4, a high-temperature reaction chamber; 40 conveying pipes; 5 a cyclone dust collector; 6, collecting a material tray; 7 a conveying device; 8 particle size grading plant.
Detailed Description
In order to achieve the above objects and advantages, the present invention provides a practical and preferred embodiment, which is shown in the accompanying drawings and detailed as follows:
in the embodiment of the present invention, please refer to fig. 1 and 2, a material loading tray 10 for containing waste silicon sludge a is mainly provided, the material loading tray 10 is placed in the cleaning device 2, the cleaning device 2 is sequentially provided with an ultrasonic cleaning tank 20, a magnetic separation reaction tank 21, a first cleaning tank 22, a pickling tank 23 and a second cleaning tank 24, the magnetic separation reaction tank 21 is provided with a dispersing agent injector 210, the pickling tank 23 is provided with an acid agent injector 230, a mixing device 3 is connected to the cleaning device 2, the mixing device 3 is provided with another dispersing agent injector 30, the mixing device 3 is provided with an atmosphere pump 31, the mixing device 3 is connected to a high temperature reaction chamber 4 through a material spraying pipe 32, the high temperature reaction chamber 4 is connected to a cyclone dust collector 5 through a conveying pipe 40, a material collecting tray 6 is provided below the cyclone dust collector 5, the material collecting tray 6 is connected to a particle size grading device 8 through a conveying device 7, thus, the waste silicon sludge is the treatment equipment for recycling the waste silicon sludge.
the waste silicon sludge is produced by cutting or grinding process in semiconductor or solar wafer factory, wherein the silicon content is more than 90%, the utility model discloses a treatment method of waste silicon sludge recycling equipment, please refer to fig. 1-3, its method is as follows:
(1) Putting the waste silicon sludge A into a material carrying tray 10, putting the material carrying tray into an ultrasonic cleaning tank 20 for batch times, and performing ultrasonic cleaning under the cleaning condition of 50-200 KHz for 5-15 minutes; then taking out the magnetic particles and placing the magnetic particles in a magnetic separation reaction tank 21 for magnetic separation, wherein the magnetic separation time is 5-15 minutes, 3-20% of a dispersing agent is added into the magnetic separation reaction tank 21 from a dispersing agent injector 210 before magnetic separation, the dispersing agent is alcohol, and the alcohol is one or a mixture of methanol, ethanol, ethylene glycol, diethylene glycol, polyethylene glycol and isopropanol; then taking out the mixture and placing the mixture into a first cleaning tank 22 to be cleaned by deionized water for 5-15 minutes, taking out the mixture after cleaning and placing the mixture into a pickling tank 23 to be pickled for 5-15 minutes, wherein the acid agent is inorganic acid and is a mixture of 25% pure hydrochloric acid, 10% pure sulfuric acid, 20% pure nitric acid, 10% pure phosphoric acid and 35% deionized water; then taking out the mixture and placing the mixture into a second cleaning tank 24 for cleaning by deionized water for 15-30 minutes;
(2) Putting the waste silicon sludge A obtained in the step (1) into a mixing device 3, wherein the solid-liquid ratio is 1: 5-50, mixing with deionized water to prepare slurry A1, and adding an alcohol as a dispersant from a dispersant injector 30 for dispersion, for example: one or a mixture of methanol, ethanol, ethylene glycol, diethylene glycol, polyethylene glycol and isopropanol, wherein the dispersion time is more than 30 minutes;
(3) Injecting the slurry A1 obtained in the step (2) into a high-temperature reaction chamber 4 through a material injection pipe 32 by virtue of an atmosphere pump 31 at high pressure, wherein the high-temperature reaction chamber 4 is an atmosphere furnace capable of controlling the atmosphere, the gas in the atmosphere furnace can be oxygen or air, the temperature of the gas is 1200-1800 ℃, and the slurry A1 is subjected to oxidation reaction in the high-temperature reaction chamber 4 to form silicon dioxide particles A2;
(4) The silicon dioxide particles A2 obtained from (3) enter a cyclone dust collector 5 through a conveying pipe 40 to obtain high-purity micron-sized silicon dioxide powder particles A3, and the silicon dioxide powder particles are collected by a material collecting tray 6;
(5) The silicon dioxide powder particles A3 obtained in the step (4) enter a particle size grading device 8 through a conveying device 7 for particle size grading, and high-purity silicon dioxide powder A4 with uniform particle size and more than 99 percent can be obtained;
Thus, the high-purity silicon dioxide powder A4 can be widely applied to industrial filling materials, and can recycle waste silicon sludge.
the foregoing description is intended to be illustrative rather than limiting, and it will be appreciated by those skilled in the art that many modifications, variations or equivalents may be made without departing from the spirit and scope of the invention as defined in the appended claims.
Claims (2)
1. The utility model provides a treatment facility that useless silicon mud was recycled which characterized in that: the device is mainly provided with a material carrying disc for containing waste silicon mud, the material carrying disc is placed in a cleaning device, the cleaning device is sequentially provided with an ultrasonic cleaning tank, a magnetic separation reaction tank, a first cleaning tank, a pickling tank and a second cleaning tank, the magnetic separation reaction tank is provided with a dispersing agent injector, the pickling tank is provided with an acid agent injector, a mixing device is connected with the cleaning device, the mixing device is provided with another dispersing agent injector, the mixing device is provided with an atmosphere pump, the mixing device is connected to a high-temperature reaction chamber through a material spraying pipe, the high-temperature reaction chamber is connected to a cyclone dust collector through a conveying pipe, a material collecting disc is arranged below the cyclone dust collector, and the material collecting disc is connected to a particle size grading device through a conveying device.
2. the apparatus for treating waste silicon sludge as claimed in claim 1, wherein the gas in the high temperature reaction chamber is oxygen or air.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920042227.0U CN209740728U (en) | 2019-01-10 | 2019-01-10 | Treatment equipment for recycling waste silicon sludge |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920042227.0U CN209740728U (en) | 2019-01-10 | 2019-01-10 | Treatment equipment for recycling waste silicon sludge |
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| Publication Number | Publication Date |
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| CN209740728U true CN209740728U (en) | 2019-12-06 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201920042227.0U Active CN209740728U (en) | 2019-01-10 | 2019-01-10 | Treatment equipment for recycling waste silicon sludge |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110002450A (en) * | 2019-01-11 | 2019-07-12 | 成亚资源科技股份有限公司 | The processing method that useless silicon mud recycles |
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2019
- 2019-01-10 CN CN201920042227.0U patent/CN209740728U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110002450A (en) * | 2019-01-11 | 2019-07-12 | 成亚资源科技股份有限公司 | The processing method that useless silicon mud recycles |
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