CN209727313U - A kind of stretchable tactile sensor array - Google Patents
A kind of stretchable tactile sensor array Download PDFInfo
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- CN209727313U CN209727313U CN201920760665.0U CN201920760665U CN209727313U CN 209727313 U CN209727313 U CN 209727313U CN 201920760665 U CN201920760665 U CN 201920760665U CN 209727313 U CN209727313 U CN 209727313U
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Abstract
A kind of stretchable tactile sensor array, including three big layers of structure, first big layer of structure includes flexible extensible substrate, first stretchable electrod-array of the stretchable sensing element array and connection setting corresponding with stretchable sensing element array that are formed in flexible extensible substrate, the second largest layer structure includes the second flexible extensible dielectric layer being bonded in first big layer of structure and the second stretchable electrod-array being formed on the second flexible extensible dielectric layer, the third-largest layer structure includes the third flexible extensible dielectric layer being bonded in the second largest layer structure, the encapsulated layer of the stretchable electrod-array of third and the covering stretchable electrod-array of third that are formed on third flexible extensible dielectric layer.The sensor array can measure the size of normal pressure under conditions of elongation strain, the device it is compact-sized, thickness is small, and manufacture craft is simple.
Description
Technical field
The utility model relates to touch sensor, especially a kind of stretchable tactile sensor array.
Background technique
With the fast development of microelectric technique and the communication technology, people obtain sizable convenience in such technology,
Meanwhile more humane, more comfortable, more high-tech content intellectual product is pursued in a hurry.Next-generation electronic equipment must have gently
Matter, flexible, the low in cost and characteristic that can be mass produced.Distributed sensor, Electronic Paper and flexible display screen device
Daily life is gradually stepped into etc. portable, wearable electronic.Portable, wearable electronic important feature
It is Grazing condition, the advantage of flexible electrode is increasingly prominent, there is very big freedom degree in terms of engineering design, stretchable highly sensitive soft
Property sensor array perceives the pressure distributed intelligence on curved surface with multisensor, has preferable application prospect in all various aspects,
It can be widely used in the application fields such as electronic product, health care, sports equipment, wearable device.
Flexible extensible sensor component is broadly divided into pressure sensor and stretchable strain transducer at present, respectively can be with
The size of normal pressure and strain is measured, still, the stretchable biography that normal pressure is capable of measuring strain again can be measured by how obtaining
Sensor, especially a kind of stretchable sensor that normal pressure can be measured under conditions of elongation strain, is prior art institute face
The problem of facing.
In addition, that there are devices is stretchable for the device portions of flexible extensible strain transducer at present, but electrode is non-stretchable,
The problem of needing additional external electrode；And the preparation process that then exists for having stretchable sensing element and stretchable electrode answers
It is miscellaneous, it is difficult to the problem of large scale preparation is applied.
Utility model content
The main purpose of the utility model is to overcome the defects of the prior art, provide a kind of stretchable touch sensor battle array
Column, can measure the size of normal pressure under conditions of elongation strain.
To achieve the above object, the utility model uses following technical scheme:
A kind of stretchable tactile sensor array, including first big layer of structure, the second largest layer structure and the third-largest layer structure,
The stretchable sensing element that first big layer of structure include flexible extensible substrate, is formed in the flexible extensible substrate
Array and the first stretchable electrod-array for connecting setting corresponding with the stretchable sensing element array, the first big layer
Structure forms stretchable strain transducer array, and the second largest layer structure includes be bonded in first big layer of structure
Two flexible extensible dielectric layers and the second stretchable electrod-array being formed on the second flexible extensible dielectric layer, it is described
The third-largest layer structure includes the third flexible extensible dielectric layer being bonded in the second largest layer structure, is formed in the third
The encapsulated layer of the stretchable electrod-array of third and the covering stretchable electrod-array of third on flexible extensible dielectric layer, institute
It states the second largest layer structure and the third-largest layer structure forms stretchable array of pressure sensors.
Further:
Each electrode in the second stretchable electrod-array and the stretchable electrod-array of the third is respectively along transverse and longitudinal side
It arranges to connection, two electrod-array vertical interlaceds.
It further include the first flexible extensible dielectric layer, the first stretchable electrod-array includes the laterally electricity of vertical interlaced
The part that the transverse electrode and longitudinal electrode intersect is separated by by pole and longitudinal electrode, the first flexible extensible dielectric layer
From.
The flexible extensible substrate, the encapsulated layer and described first to third flexible extensible dielectric layer material packet
Include one of dimethyl silicone polymer (PDMS), Ecoflex, rubber, hydrogenated styrene-butadiene block copolymer (SEBS)
Or it is a variety of.
The material of the stretchable sensing element and the electrode includes carbon nanotube (CNT), nano silver, in graphene
It is one or more.
The material of the stretchable sensing element and the electrode is same material.
Described first is arranged at the stretchable tactile sensor array to the electrode of the stretchable electrod-array of third
Stretchable pleated structure with the stretchable directional spreding along the stretchable tactile sensor array when release conditions,
The pleated structure flattens and at least portion when the stretchable tactile sensor array is in tensional state along draw direction
Divide ground to offset the drawing force that the electrode is subject to, and restores the pleated structure when the drawing force disappears.
The utility model has the following beneficial effects:
The utility model provides a kind of stretchable tactile sensing array, by stretchable array of pressure sensors and stretchable answers
Become sensor array to be combined together, wherein first big layer of structure forms stretchable strain transducer, the second largest layer with it is the third-largest
Both layers match to form stretchable capacitance pressure transducer, and the big of normal pressure can be measured under conditions of elongation strain
Small, the thickness of device is small, and manufacture craft is simple.The stretchable tactile sensing array of the utility model passes through stretchable strain sensing
Device measures elongation strain, and the measurement of stretchable strain transducer can provide the variation of pressure sensor caused by stretching
Compensation, so that stretchable pressure sensor be enable to measure the size of normal pressure under conditions of elongation strain.
In the preferred scheme, the utility model provide it is a kind of production get up simply and effectively stretchable tactile sensing battle array
Column, wherein described first is arranged to be in the stretchable tactile sensor array to the electrode of the stretchable electrod-array of third
Stretchable pleated structure with the stretchable directional spreding along the stretchable tactile sensor array when release conditions, institute
State pleated structure when the stretchable tactile sensor array is in tensional state along draw direction flatten and at least partly
The drawing force that the electrode is subject to is offset on ground, and restores the pleated structure when the drawing force disappears, using this electrode
The stretchable tactile sensing array of structure has the advantages that big elongation strain range, high sensitivity and stability are high, can be realized
Be adapted to it is various need to measure elongation strain occasion, and its production is got up simple, and process flow is few, and cost is relatively low, is suitable for big rule
Mould preparation.
Detailed description of the invention
Fig. 1 is a kind of the schematic diagram of the section structure of embodiment of the stretchable tactile sensor array of the utility model；
Fig. 2 is first big layer of top view of the stretchable tactile sensor array of the utility model；
Fig. 3 is a kind of schematic perspective view of embodiment of the stretchable tactile sensor array of the utility model.
Specific embodiment
It elaborates below to the embodiments of the present invention.It is emphasized that following the description is only example
Property, rather than in order to limit the scope of the utility model and its application.
Refering to fig. 1 to Fig. 3, in one embodiment, a kind of stretchable tactile sensor array, including the first big layer knot
Structure, the second largest layer structure and the third-largest layer structure, first big layer of structure include flexible extensible substrate 1, be formed in it is described
Stretchable sensing element array 3 and connect corresponding with the stretchable sensing element array 3 in flexible extensible substrate 1 are set
The stretchable electrod-array of first set, first big layer of structure form stretchable strain transducer array, the second largest layer
Structure include the second flexible extensible dielectric layer 6 being bonded in first big layer of structure and be formed in second flexibility can
The second stretchable electrod-array 7 in tensile dielectric layer 6, the third-largest layer structure include being bonded in the second largest layer structure
On third flexible extensible dielectric layer 8, the stretchable electrode array of third that is formed on the third flexible extensible dielectric layer 8
Column 9 and the encapsulated layer 10 for covering the stretchable electrod-array 9 of third, the second largest layer structure and the third-largest layer structure
Form stretchable array of pressure sensors.
The stretchable tactile sensing array of the utility model is by stretchable array of pressure sensors and stretchable strain sensing
Device array is combined together, wherein first big layer of structure forms stretchable strain transducer, principle is in elongation strain condition
Under, sensing element resistance changes, to find out the size of elongation strain according to the size of resistance variations.The second largest layer and
Both three big layers match to form stretchable capacitance pressure transducer, principle be according to Hooke's law △ F=-k Δ d,
Normal pressure can be such that the medium thickness d between two layers of electrode reduces, according to parallel plate capacitor formula C=ε S/d, according to capacitor
Variation can find out the variation of medium thickness d, to measure the size of normal pressure.And in addition to normal pressure, it stretches
It will lead to medium thickness d to change, therefore general pressure sensor cannot measure normal direction under conditions of elongation strain
The size of pressure, but when the stretchable tactile sensing array of use the utility model, it can be drawn by what the first big layer was formed
Stretching strain sensor measurement elongation strain, to pass through Poisson's ratio formula v=- ε1/ ε, finding out stretching causes pressure sensor to be situated between
The variation of electric layer thickness d provides compensation to it, thus the stretchable pressure sensor for enabling the second largest layer and the third-largest layer to be formed
Enough sizes that normal pressure is measured under conditions of elongation strain.
In a preferred embodiment, in the described second stretchable electrod-array 7 and the stretchable electrod-array 9 of the third
Each electrode connects along transverse and longitudinal direction arrange respectively, two electrod-array vertical interlaceds.By this design, the second stretchable electrode
Array 7 and the stretchable electrod-array 9 of the third have response to the pulling force in two vertical direction, so as to survey two sides
To pulling force.
In a preferred embodiment, stretchable tactile sensing array further includes the first flexible extensible dielectric layer 5, and described
One stretchable electrod-array includes the transverse electrode 2 and longitudinal electrode 4 of vertical interlaced, the first flexible extensible dielectric layer 5
The part that the transverse electrode 2 and longitudinal electrode 4 intersect is isolated.The shape of first flexible extensible dielectric layer 5 is settable
At (but being not limited to) rectangle, circle, parallelogram etc..
In a preferred embodiment, the flexible extensible substrate 1, described first to third flexible extensible dielectric layer 5,
6,8, the material of the encapsulated layer 10 includes dimethyl silicone polymer (PDMS), Ecoflex (rouge manufactured by BASF Corp. of Germany
Fat race aromatic series atactic polyester), rubber, one of hydrogenated styrene-butadiene block copolymer (SEBS) or a variety of.
In a preferred embodiment, the material of the stretchable sensing element and/or the electrode includes carbon nanotube
(CNT), one of nano silver, graphene or a variety of.
In a preferred embodiment, the material of the stretchable sensing element and the electrode is same material.
In a preferred embodiment, described first is arranged to described to the electrode of the stretchable electrod-array 1,7,9 of third
With the stretchable side along the stretchable tactile sensor array when stretchable tactile sensor array is in release conditions
To the stretchable pleated structure of distribution, pleated structure edge when the stretchable tactile sensor array is in tensional state
Draw direction flattening and at least partly offset the drawing force that the electrode is subject to, and the drawing force disappear when restore institute
State pleated structure.
The stretchable tactile sensing array of the utility model is by stretchable array of pressure sensors and stretchable strain sensing
Device array is combined together, and the size of normal pressure, compact-sized, the thickness of the device can be measured under conditions of elongation strain
Spend small, manufacture craft is simple.Using the stretchable tactile sensing array of the utility model, measured by stretchable strain transducer
Elongation strain can be found out the variation for stretching and leading to pressure sensor by Poisson's ratio formula, compensation be provided to it, to make to draw
The size of normal pressure can be measured under conditions of elongation strain by stretching pressure sensor.
A method of preparing the stretchable tactile sensor array, comprising the following steps:
S1, production first big layer of structure, including flexible extensible substrate 1, it is formed in the flexible extensible substrate 1
On stretchable sensing element array 3 and the stretchable sensing element array 3 it is corresponding connection setting the first stretchable electricity
Pole array；
S2, the production second largest layer structure, including the second flexible extensible dielectric layer 6 and to be formed in described second flexible
The second stretchable electrod-array 7 on stretchable dielectric layer 6, and the second largest layer structure is bonded in the described first big layer knot
On structure；
S3, the production the third-largest layer structure, including third flexible extensible dielectric layer 8, to be formed in the third flexible
The encapsulated layer of third stretchable electrod-array 9 and the covering stretchable electrod-array 9 of third on stretchable dielectric layer 8, and
The third-largest layer structure is bonded in the second largest layer structure.
Preferably, in step S1, the described first stretchable electrod-array of formation includes 2 He of transverse electrode of vertical interlaced
Longitudinal electrode 4 also forms the first flexible extensible dielectric layer 5, the part phase that the transverse electrode 2 and longitudinal electrode 4 are intersected
Isolation.The shape of first flexible extensible dielectric layer 5 can be set to (but being not limited to) rectangle, circle, parallelogram etc..
Preferably, in step S1, after first the flexible extensible substrate 1 is pre-stretched, then in the flexible extensible base
The upper spraying in 1 layer of bottom makes the first stretchable electrod-array 2, however by the flexible extensible substrate 1 under tensional state
After release restPoses, then the spraying production stretchable sensing element array 3 in the flexible extensible substrate 1；
In step S2, after first the second flexible extensible dielectric layer 6 is pre-stretched, then in second flexible extensible
Spraying makes the second stretchable electrod-array 7 on dielectric layer 6, then by the second flexible extensible dielectric layer 6 from drawing
It stretches release under state to restPose, then it is bonded together with first big layer of structure；
In step S3, after first the third flexible extensible dielectric layer 8 is pre-stretched, then in second flexible extensible
Spraying makes the stretchable electrod-array 9 of third on dielectric layer 6, then by the third flexible extensible dielectric layer 8 from drawing
It stretches release under state to restPose, then it is bonded together with the second largest layer structure.
When production, electrode will form the pleated structure, in use, to it because preparing in a stretched state after release
When stretching the strain for being less than and stretching when preparation, it is equivalent to and evens up pleated structure, this body length of electrode is constant, not the production of crackle
It is raw, therefore its resistance will not change or occur insignificant minor change.And the stretchable sensing element of the sensor is then
It is to prepare in the released state, sensing element can be made to generate certain crackle when stretching, to makes resistance that biggish change occur
Change, so as to the size strained by the measure of the change of resistance.
Preferably, the pre-stretching is be stretched to recoverable maximum strain degree 50% or more, more preferably 80% with
On.
Preferably, step S1 includes:
Carbon nanotube is dispersed in isopropanol, and carry out ultrasonic treatment acquisition to make the finely dispersed carbon nanometer of carbon nanotube
Pipe dispersion liquid；
After flexible extensible substrate pre-stretching, fit together with electrode mask plate, to the flexible extensible
Substrate carries out oxygen plasma treatment and the pre-heat treatment, and the carbon nano tube dispersion liquid dispersion liquid is sprayed by the electrode mask plate
It is coated onto the flexible extensible substrate, the described first stretchable electrod-array is formed with production；
The flexible extensible substrate release for spraying the good first stretchable electrod-array is restPosed, then
The flexible extensible substrate is fit together with sensing element mask plate, the carbon nano tube dispersion liquid is passed through described quick
Sensing unit mask plate sprays to the flexible extensible basal layer, forms the stretchable sensing element array with production.
Preferably, same mode can also be used in step S2 and step S3 and prepares stretchable electrod-array.
The structure feature and its preparation of the utility model specific embodiment described further below.
A kind of stretchable tactile sensor array of specific embodiment includes three big layers of structure, wherein the first big layer may make up
Flexible extensible strain transducer array, the second largest layer structure and the third-largest layer structure may make up stretchable pressure sensor battle array
Column.As shown, first big layer of structure includes substrate 1, stretchable transverse electrode 2, stretchable sensing element 3, stretchable longitudinal direction
Electrode 4 and dielectric layer 5.The material of substrate 1 is dimethyl silicone polymer (PDMS), Ecoflex, rubber, hydrogenated styrene-fourth two
The flexible extensibles transparent materials such as alkene block copolymer (SEBS), stretchable transverse electrode 2, stretchable sensing element 3 and Ke La
The material for stretching longitudinal electrode 4 is the conductive materials such as carbon nanotube (CNT), nano silver, graphene, and the material of dielectric layer 5 is poly- two
The flexible extensibles such as methylsiloxane (PDMS), Ecoflex, rubber, hydrogenated styrene-butadiene block copolymer (SEBS) are saturating
Bright insulating materials.Spray stretchable transverse electrode 2 and when stretchable longitudinal electrode 4 need for substrate to be pre-stretched 50% strain with
On, then need to discharge substrate under tensional state when spraying sensing element 3 restPose after spray.Dielectric layer
5 be that the Stretch material of liquid condition is covered on the partial electrode sprayed by spreading rod.
The second largest layer structure is bonded together by bonding technology and first big layer of structure, and the second largest layer structure includes dielectric
Layer 6 and stretchable electrod-array 7, the material of dielectric layer 6 are dimethyl silicone polymer (PDMS), Ecoflex, rubber, hydrogenation of benzene
The flexible extensibles transparent insulation materials such as ethylene-butadiene block copolymer (SEBS), the material of stretchable electrod-array 7 are carbon
The conductive materials such as nanotube (CNT), nano silver, graphene.Wherein stretchable electrod-array 7 is sprayed on dielectric using spraying process
Layer 6 on, needed when spray stretchable electrode 7 will dielectric layer 6 pre-stretching 50% strain more than progress, after releasing stress by its with
First big layer is bonded together.
The third-largest layer structure includes dielectric layer 8, stretchable electrod-array 9 and encapsulated layer 10, dielectric layer 8 and encapsulated layer 10
Material is that dimethyl silicone polymer (PDMS), Ecoflex, rubber, hydrogenated styrene-butadiene block copolymer (SEBS) etc. are soft
Property stretchable transparent insulation material, the material of stretchable electrode 9 is the conduction materials such as carbon nanotube (CNT), nano silver, graphene
Material.Wherein stretchable electrode 9 is sprayed on dielectric layer 8 using spraying process, needs to be situated between when spraying stretchable electrod-array 9
50% strain of the pre-stretching of electric layer 8 is above to be carried out, it is bonded together with the second largest layer after releasing stress, completes stretchable tactile
The preparation of sensor array.
Example of making:
This example makes stretchable tactile sensor array, specifically includes the following steps:
1) SEBS (Japanese Asahi Kasei Corporation, H1221) is mixed according to the ratio of mass ratio 1:3 with toluene, stirring is added
Son is put it on magnetic stirring apparatus after being sufficiently stirred 90 minutes under 500r.p.m revolving speed, it is revolved by sol evenning machine
It is coated in 4 cun of Si on pieces of one layer of PDMS of covering, spin coating machine speed 300r/min, then 60 DEG C of bakings on hot plate by Si piece
Make its film-forming after 20min, prepares three pieces SEBS altogether.Then it is performed etching, is obtained to wherein a piece of by laser engraving machine
To the square-shaped patterns of 80mm × 80mm, SEBS is taken off from Si on piece then and is fixed on covering one after being stretched 80% strain
The Si on piece of layer PDMS.
2) be dispersed in the isopropanol of 100mL with the P3-SWNT that assay balance weighs 20mg, using ultrasonic machine to carbon pipe into
Row ultrasound 3h.Using biomixer ultrasound 1h, carbon nanotube is made to be uniformly dispersed；
3) the Si piece after SEBS elongation strain is fit together with electrode mask plate, and in lower section magnet that it is close
Fitting, carries out 2min oxygen plasma treatment to SEBS, hot plate is adjusted to 120 DEG C, 5min is preheated to Si piece, by scattered carbon pipe
It measures starting electricity driving displacement platform after 8ml is packed into airbrush with liquid-transfering gun to be sprayed, wherein airbrush and sample distance are 10cm, gas cylinder
Air pressure be 0.25Mpa.
4) SEBS for having sprayed electrode layer is discharged, is restPosed, then be fixed in and be covered with one layer of PDMS's
Si on piece fits together with sensing element mask plate, and is fitted closely in lower section with magnet, and the carbon being centrifuged is effective
Liquid-transfering gun measures starting electricity driving displacement platform after 2ml is packed into airbrush and is sprayed, and wherein airbrush and sample distance are 10cm, gas cylinder
Air pressure is 0.25Mpa.
5) SEBS after spraying is put into after baking oven vacuumizes and toasts 1h under the conditions of 100 DEG C.
6) sensing element is covered one layer by spreading rod by pre-arranged SEBS solution, under the conditions of 60 DEG C on hot plate
20min is dried, the preparation of first big layer of structure is completed.
7) SEBS that step 1 prepares performs etching it by laser engraving machine, obtains the rectangle of 80mm × 60mm
Then it is taken off the Si on piece that one layer of PDMS of covering is fixed on after being stretched 80% strain by figure from Si on piece.Again will
Si piece after SEBS elongation strain fits together with electrode mask plate, and is fitted closely in lower section with magnet, to SEBS
2min oxygen plasma treatment is carried out, hot plate is adjusted to 120 DEG C, 5min is preheated to Si piece, by the effective liquid-transfering gun amount of scattered carbon
Starting electricity driving displacement platform is sprayed after taking 8ml to be packed into airbrush, and wherein airbrush and sample distance are 10cm, and the air pressure of gas cylinder is
0.25Mpa completes the preparation of the second largest layer structure after discharging it under tensional state.
8) step 7 is repeated, covers one layer with SEBS prepared by step 1 on the SEBS for having sprayed carbon pipe by spreading rod, In
20min is dried under the conditions of 60 DEG C on hot plate, completes the preparation of the third-largest layer structure.
9) three big layers of structure are bonded together by alignment machine, complete the preparation of stretchable tactile sensor array.
The above content is specific/preferred embodiment further detailed description of the utility model is combined, no
It can assert that the specific implementation of the utility model is only limited to these instructions.For the common skill of the utility model technical field
For art personnel, without departing from the concept of the premise utility, the embodiment that these have been described can also be made
Some replacements or modifications, and these substitutions or variant all shall be regarded as belonging to the protection scope of the utility model.
Claims (7)
1. a kind of stretchable tactile sensor array, which is characterized in that including first big layer of structure, the second largest layer structure and third
Big layer structure, first big layer of structure include flexible extensible substrate, are formed in drawing in the flexible extensible substrate
Stretch sensing element array and the first stretchable electrod-array for connecting setting corresponding with the stretchable sensing element array, institute
It states first big layer of structure and forms stretchable strain transducer array, the second largest layer structure includes being bonded in the described first big layer
The second flexible extensible dielectric layer in structure and the second stretchable electricity being formed on the second flexible extensible dielectric layer
Pole array, the third-largest layer structure include the third flexible extensible dielectric layer being bonded in the second largest layer structure, shape
At the stretchable electrod-array of third on the third flexible extensible dielectric layer and cover the stretchable electrode array of third
The encapsulated layer of column, the second largest layer structure and the third-largest layer structure form stretchable array of pressure sensors.
2. stretchable tactile sensor array as described in claim 1, which is characterized in that the second stretchable electrod-array
Arrangement is connected along transverse and longitudinal direction respectively with each electrode in the stretchable electrod-array of the third, two electrod-arrays are vertically handed over
It is wrong.
3. stretchable tactile sensor array as claimed in claim 1 or 2, which is characterized in that further include that the first flexibility can be drawn
Dielectric layer is stretched, the first stretchable electrod-array includes the transverse electrode and longitudinal electrode of vertical interlaced, and described first is flexible
The part that the transverse electrode and longitudinal electrode intersect is isolated by stretchable dielectric layer.
4. stretchable tactile sensor array as claimed in claim 1 or 2, which is characterized in that the flexible extensible substrate,
The encapsulated layer and described first to third flexible extensible dielectric layer material include dimethyl silicone polymer (PDMS),
One of Ecoflex, rubber, hydrogenated styrene-butadiene block copolymer (SEBS) are a variety of.
5. stretchable tactile sensor array as claimed in claim 1 or 2, which is characterized in that the stretchable sensing element
Material with the electrode includes one of carbon nanotube (CNT), nano silver, graphene or a variety of.
6. stretchable tactile sensor array as claimed in claim 1 or 2, which is characterized in that the stretchable sensing element
Material with the electrode is same material.
7. stretchable tactile sensor array as claimed in claim 1 or 2, which is characterized in that described first to third can draw
Stretch electrod-array electrode be arranged to when the stretchable tactile sensor array is in release conditions have along it is described can
The stretchable pleated structure of the stretchable directional spreding of tactile sensor array is stretched, the pleated structure is in the stretchable touching
Feel that sensor array at least partly offsets the stretching that the electrode is subject to when be in tensional state along draw direction flattening
Power, and the pleated structure is restored when the drawing force disappears.
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