CN209674136U - For the accurate liquid crystal micro mirror for focusing burnt with pendulum and use its optical microscopy - Google Patents

Abstract

The utility model discloses a kind of liquid crystal micro mirrors burnt with pendulum for accurate focusing, including successively the first anti-reflection film disposed in parallel from top to bottom, first substrate, first patterned electrodes, first liquid crystal layer, second liquid crystal initial orientation layer, first public electrode, second substrate, third substrate, second public electrode, third liquid crystal initial orientation layer, second liquid crystal layer, second patterned electrodes, 4th substrate, and second anti-reflection film, first patterned electrodes, first public electrode, second public electrode, and second patterned electrodes be arranged concentrically with respect to one another, first patterned electrodes include 2ⁿA equally distributed subgraph pattern electrode in circumferentially edge, i-th of subgraph pattern electrode of the first patterned electrodes, which is connected respectively in the first driving control signal group, controls voltage U_1‑iOne end.The utility model has the advantages that the modulation efficiency of imaging beam is high, sample to be observed and light field adaptability are good, manipulation is flexibly convenient and easily couples with other optics, photoelectricity, mechanical structure.

Description

For the accurate liquid crystal micro mirror for focusing burnt with pendulum and use its optical microscopy

Technical field

The utility model belongs to optical microscopy imaging observation, accurate measurement and control technology field, more particularly, to one Burnt liquid crystal micro mirror is focused and put to kind and using its optical microscopy for accurate.

Background technique

Currently, passing through sample (such as typical activity life that optical microphotograph sem observation thickness is larger, surface topography is more coarse The Biomedias such as object tissue, cell, gene or functionalization micro-nano material) when, used broadband light beam or coherent beam exist Irradiating sample and light reflect the two links, can face the scattering of stronger light wave and imaging position caused by this offset, Image field reduction, Noise enhancement, image be fuzzy, shake and the problems such as ghost image.

To solve the above-mentioned problems, conventional method mainly includes three kinds: first, is held to the sample horizontally or diagonally put Row translation, rotation or swinging operation；Second, adjust the enlargement ratio or visual field of optical microscopy；Third, using based on point diffusion The image information that function acquires optical microscopy is sharpened processing, and by more deep deep learning and is based on algorithm Training, to obtain the target image that intrinsic or scattering effect is mitigated.

However, the above method haves the defects that some can not ignore: firstly, for above-mentioned first method, by Very limited in the precision that Mechanical Moving is adjusted, conventional light microscope does not have real-time, fine modulation focal length (focusing) This function (is put burnt) with imaging light wave focus is swung, therefore can not be real for imaging position offset caused by light wave scattering Existing intense adjustment；Secondly, inclination is imaged since normal optical optical microscopy does not have for above-mentioned second method Face carry out fine Chromatography selection or between imaging surface quick agile ability, therefore it is scattered fundamentally to solve light wave Image field reduction and this problem of Noise enhancement caused by penetrating；Again, due to the micro-imaging optical system comprising object lens and eyepiece System has based on the intrinsic of point spread function, it is difficult to execute the real-time, continuous of the point spread function for determining imaging efficiency or jump Variant is adjusted, therefore can not be solved imaging position offset, image field reduction caused by light wave scattering and blurred image be asked Topic；Finally, due to which light wave scattering can be with the type of Biomedia or functionalization micro-nano material, activity, manner, environment feelings The variation of condition or distributed areas and different attribute or feature is presented, therefore as the point diffusion for differentiating imaging one of efficiency reference Space-variant or time-varying response will be presented in function therewith, therefore it is weak to solve imaging position offset, image field caused by light wave scattering Change and blurred image problem.

Utility model content

Aiming at the above defects or improvement requirements of the prior art, the utility model provides a kind of for accurate focusing and pendulum Burnt liquid crystal micro mirror and the optical microscopy using it, it is intended that solving above-mentioned skill present in existing optical microscopy Art problem, in addition, the optical microscopy of the utility model also has, the modulation efficiency of imaging beam is high, treats observing samples and light The advantages of field adaptability is good, manipulation is flexibly convenient and easily couples with other optics, photoelectricity, mechanical structure.

To achieve the above object, it according to the one aspect of the utility model, provides a kind of burnt for accurate focusing and pendulum Liquid crystal micro mirror, including successively the first anti-reflection film disposed in parallel, the first substrate, the first patterned electrodes, first from top to bottom Liquid crystal layer, the second liquid crystal initial orientation layer, the first public electrode, the second substrate, third substrate, the second public electrode, third liquid Brilliant initial orientation layer, the second liquid crystal layer, the second patterned electrodes, the 4th substrate and the second anti-reflection film, the first patterned electricity Pole, the first public electrode, the second public electrode and the second patterned electrodes are arranged concentrically with respect to one another, the first patterned electrodes packet Include 2ⁿA equally distributed subgraph pattern electrode in circumferentially edge, wherein n is the natural number more than or equal to 2, circle where the circumference Between 100 to 500 microns, i-th of subgraph pattern electrode of the first patterned electrodes is connected respectively to first and controls the diameter of shape Voltage U is controled in signal group_1-iOne end, and have i ∈ [1,2ⁿ], the second patterned electrodes include it is multiple by circle along radial direction Uniform cutting is 2ⁿPart after formed and the mode partitioned arrangement that is electrically insulated from each other subgraph pattern electrode, the circular diameter 50 to In 100 micron ranges, i-th of subgraph pattern electrode of the second patterned electrodes, which is connected respectively in the second driving control signal group, controls electricity Press U_2-iOne end, one end of each in the first public electrode and the second public electrode is all connected in the first driving control signal group Side controls voltage U_1-iThe other end, the other end of each in the first public electrode and the second public electrode is all connected to Side controls voltage U in two driving control signal groups_2-iThe other end.

Preferably, the liquid crystal micro mirror further comprises be arranged between the first patterned electrodes and the first liquid crystal layer One liquid crystal initial orientation layer, and the 4th liquid crystal initial orientation being arranged between the second liquid crystal layer and the second patterned electrodes Layer.

Preferably, the first liquid crystal initial orientation layer, the second liquid crystal initial orientation layer, third liquid crystal initial orientation layer and 4th liquid crystal initial orientation layer is identical, is made of high-molecular organic material, and thickness 100 nanometers to 700 nanometers it Between.

Preferably, the first anti-reflection film and the second anti-reflection film are made of normal optical anti-reflection film, and the two thickness is identical, It is 100 nanometers to 700 nanometers, the first substrate, the second substrate, third substrate and the 4th substrate are made of translucent material, Its thickness is 1 millimeter to 5 millimeters, and the first liquid crystal layer and the second liquid crystal layer are identical, and thickness is 5 microns micro- to 100 Rice.

Preferably, the first public electrode and the second public electrode shapes and sizes are identical, and are solid circles, Diameter is greater than diameter of a circle where the circumference for forming the first patterned electrodes, circle where forming the circumference of the first patterned electrodes Area is greater than the area in region occupied by all pattern sub-electrodes of the second patterned electrodes.

According to the another aspect of the utility model, a kind of optical microscopy is provided, including is from left to right set along optical path The first object lens, the second object lens, above-mentioned the liquid crystal micro mirror and light-sensitive array burnt with pendulum for accurate focusing set, wherein to be measured One end that the first object lens deviate from the second object lens is arranged in object.

According to the another aspect of the utility model, a kind of optical microscopy is provided, including is from left to right set along optical path Liquid crystal micro mirror, first object lens, second object lens and the light-sensitive array burnt with pendulum for accurate focusing set, above-mentioned, wherein to be measured One end that liquid crystal micro mirror deviates from the first object lens is arranged in object.

In general, it can obtain down the above technical solutions conceived by the present invention are compared with the prior art, Column the utility model has the advantages that

1, the liquid crystal micro mirror that the utility model is focused by being configured to precision in optical microscopy imaging optical path with pendulum coke, Can be realized in the case where no Mechanical Moving imaging beam automatically controlled adjusting focus (focus) and automatically controlled swing imaging beam Focus (i.e. pendulum is burnt) operation, so that having the advantages that can automatically controlled intense adjustment imaging position, image definition and contrast.

2, the liquid crystal micro mirror of the utility model passes through the burnt operation of automatically controlled pendulum, can carry out finely Chromatography to inclination imaging surface Quick agile processing between selection and imaging surface, to can realize that light wave scattering condition has a down dip the image rectification, weak of oblique image field Change image field enhancing and optics denoising.

3, the liquid crystal micro mirror of the utility model can carry out automatically controlled adjusting to time-varying or space-variant point spread function, so as to solve Certainly imaging position offset, image field reduction caused by light wave scattering and blurred image problem.

4, the liquid crystal micro mirror of the utility model can the constraint of priori knowledge or micro-imaging situation, intervention or guidance under into Row focusing and the burnt operation of pendulum, have intelligent feature.

5, it is adjusted, is had high using the fine pack that liquid crystal micro mirror executes imaging beam due to the utility model The stability of structure, electricity and electro-optical parameters, control precision are high.

6, the utility model using liquid crystal micro mirror execute functionalization control light operation, be conveniently inserted in the optical path, easily and other Optics, photoelectricity or mechanical structure coupling.

Detailed description of the invention

Fig. 1 is the light according to a kind of embodiment of the utility model, including the liquid crystal micro mirror burnt with pendulum for accurate focusing It learns microscope and is in the schematic diagram for putting burnt working condition；

Fig. 2 is according to the utility model another embodiment, including the liquid crystal micro mirror burnt with pendulum for accurate focusing Optical microscopy is in the schematic diagram for putting burnt working condition；

Fig. 3 is according to another embodiment of the utility model, including the liquid crystal micro mirror burnt with pendulum for accurate focusing Optical microscopy is in focusing and puts the schematic diagram of burnt working condition；

Fig. 4 is according to another embodiment of the utility model, including the liquid crystal micro mirror burnt with pendulum for accurate focusing Optical microscopy is in focusing and puts the schematic diagram of burnt working condition；

Fig. 5 is a kind of structural schematic diagram of the liquid crystal micro mirror burnt with pendulum for accurate focusing of the utility model；

Fig. 6 is the structural schematic diagram of the utility model another kind liquid crystal micro mirror burnt with pendulum for accurate focusing；

Fig. 7 is the structural representation of the first patterned electrodes in the utility model liquid crystal micro mirror burnt with pendulum for accurate focusing Figure；

Fig. 8 is the structural representation of the second patterned electrodes in the utility model liquid crystal micro mirror burnt with pendulum for accurate focusing Figure；

Fig. 9 is the structural schematic diagram of public electrode in the utility model liquid crystal micro mirror burnt with pendulum for accurate focusing；

In all the appended drawings, identical appended drawing reference is used to denote the same element or structure, in which:

The first anti-reflection film of 1-；The first substrate of 2-；The first patterned electrodes of 3-；4- the first liquid crystal initial orientation layer；5- first Liquid crystal layer；6- the second liquid crystal initial orientation layer；The first public electrode of 7-；The second substrate of 8-；9- third substrate；10- second is public Electrode；11- third liquid crystal initial orientation layer；The second liquid crystal layer of 12-；The 4th liquid crystal initial orientation layer of 13-；14- second is patterned Electrode；The second anti-reflection film of 15-；The 4th substrate of 16-.

Specific embodiment

In order to make the purpose of the utility model, technical solutions and advantages more clearly understood, below in conjunction with attached drawing and implementation Example, the present invention will be further described in detail.It should be appreciated that specific embodiment described herein is only used to explain The utility model is not used to limit the utility model.In addition, institute in the various embodiments of the present invention described below The technical characteristic being related to can be combined with each other as long as they do not conflict with each other.

As shown in figure 5, it is according to the present utility model the first that embodiment there is provided one kind is burnt for accurate focusing and pendulum Liquid crystal micro mirror, including successively the first anti-reflection film 1 disposed in parallel, the first substrate 2, the first patterned electrodes 3, from top to bottom One liquid crystal initial orientation layer 4, the first liquid crystal layer 5, the second liquid crystal initial orientation layer 6, the first public electrode 7, the second substrate 8, Three substrates 9, the second public electrode 10, third liquid crystal initial orientation layer 11, the second liquid crystal layer 12, the 4th liquid crystal initial orientation layer 13, the second patterned electrodes 14, the 4th substrate 15 and the second anti-reflection film 16.

First anti-reflection film 1 and the second anti-reflection film 16 are made of normal optical anti-reflection film, and the two thickness is identical, is 100 nanometers to 700 nanometers.

First substrate 2, the second substrate 8, third substrate 9 and the 4th substrate 15 be by translucent material (such as quartz, Glass etc.) it is made, thickness is 1 millimeter to 5 millimeters.

First liquid crystal layer 5 is identical with the second liquid crystal layer 12, and thickness is 5 microns to 100 microns.

First liquid crystal initial orientation layer 4, the second liquid crystal initial orientation layer 6, third liquid crystal initial orientation layer 11 and the 4th Liquid crystal initial orientation layer 13 is identical, by the high-molecular organic material system of such as polyimides (Polymide, abbreviation PI) At, and thickness is between 100 nanometers to 700 nanometers.

First patterned electrodes 3, the first public electrode 7, the second public electrode 10 and the second patterned electrodes 14 are each other It is arranged concentrically.

As shown in fig. 7, the first patterned electrodes 3 include 2ⁿA equally distributed subgraph pattern electrode (wherein n in circumferentially edge For the natural number more than or equal to 2), circular diameter is between 100 to 500 microns where the circumference.

In Fig. 7, which is by replacing one side composition of rectangle, and the curve and circumference with a curve It is overlapped.I-th of subgraph pattern electrode of the first patterned electrodes 3, which is connected respectively in the first driving control signal group, controls voltage U_1-i's One end, and have i ∈ [1,2ⁿ]。

In other embodiments, subgraph pattern electrode is also possible to trapezoidal, rectangle etc..

As shown in figure 8, the second patterned electrodes 14 include it is multiple by circle along radially uniform cutting be 2ⁿFormed after part, And the subgraph pattern electrode for the mode partitioned arrangement that is electrically insulated from each other, the circular diameter is in 50 to 100 micron ranges.

The subgraph pattern electrode can be 1/2ⁿRound (being 1/4 circle as shown in Figure 8), triangle, rectangle, square, circle Shape etc..I-th of subgraph pattern electrode of the second patterned electrodes 14, which is connected respectively in the second driving control signal group, controls voltage U_2-i's One end.

It as shown in figure 9, the first public electrode 7 is identical with 10 shapes and sizes of the second public electrode, and is solid Circle, diameter of a circle where having a diameter larger than the circumference to form the first patterned electrodes 3, forms the circle of the first patterned electrodes 3 The area of circle is greater than the area in region occupied by all pattern sub-electrodes of the second patterned electrodes 14 where all.

One end of each in first public electrode 7 and the second public electrode 10 is all connected in the first driving control signal group Side controls voltage U_1-iThe other end, the other end of each in the first public electrode 7 and the second public electrode 10 is all connected to Side controls voltage U in two driving control signal groups_2-iThe other end.

The size that side controls voltage each may be the same or different in first driving signal group；Second driving letter The size that side controls voltage each may be the same or different in number group.

As shown in fig. 6, second according to the present utility model is used for precision embodiment there is provided one kind and focuses and pendulum coke Liquid crystal micro mirror, it is essentially identical for accurate focusing and the liquid crystal micro mirror of pendulum coke in structure and the first embodiment, uniquely Difference be the liquid crystal lens not and include the first liquid crystal initial orientation layer 4 and the 4th liquid crystal in the first embodiment Initial orientation layer 13.In addition to this, the structure of each patterned electrodes, public electrode, liquid crystal layer, substrate and anti-reflection film is equal Identical with the first embodiment, it is no longer repeated herein.

As shown in Figure 1, it shows according to a kind of optical microscopy of embodiment of the utility model comprising along optical path The first object lens, the second object lens, liquid crystal micro mirror (its work burnt with pendulum for accurate focusing as described above being from left to right arranged In pendulum coke-like state) and light-sensitive array, wherein one end that the first object lens deviate from the second object lens is arranged in determinand.

It will be seen from figure 1 that before not using the liquid crystal micro mirror burnt with pendulum for accurate focusing of the utility model, It can be seen that the focal beam spot of practical light is generated at microscopical light-sensitive array lower end (as shown in the focus-A in figure) because surveying Imaging position shift phenomenon caused by surrounding medium reason is tried, dotted portion is that it does not focus light by the light of surrounding medium interference Spot will be distributed over microscopical light-sensitive array upper end (as shown in the virtual focus-A in figure), by the second object lens and light-sensitive array Between place the liquid crystal micro mirror burnt with pendulum for accurate focusing of the utility model, can by this for accurate focusing and pendulum Burnt liquid crystal micro mirror applies external control signal, makes its work in Wobbing focus spot state, so as to which focal beam spot is incident upon light Imaging operation is executed on the correct position of sensitive array.

As shown in Fig. 2, it shows according to a kind of optical microscopy of embodiment of the utility model comprising along optical path It is being from left to right arranged, as described above to be used for accurate focus and the liquid crystal micro mirror of pendulum coke (its work is in pendulum coke-like state), first Object lens, the second object lens and light-sensitive array, wherein one end that liquid crystal micro mirror deviates from the first object lens is arranged in determinand.

In Fig. 2, dotted line instruction by the imaging optical path of surrounding medium interference and the effect of liquid crystal micro mirror and is not formed along its row Into light convergence after virtual focus-B, solid line indicate across surrounding medium, liquid crystal micro mirror, object lens -1 and object lens -2 practical light Road.

Figure it is seen that by placing focusing for accurate for the utility model between the first object lens and observation object Burnt liquid crystal micro mirror, the light for being influenced by surrounding medium and deviateing default imaging optical path can be swung, make its focus with pendulum It is overlapped with virtual focus-B, to remove influence of the surrounding medium to imaging position.

As shown in figure 3, it shows according to a kind of optical microscopy of embodiment of the utility model comprising along optical path The first object lens, the second object lens, liquid crystal micro mirror (its work burnt with pendulum for accurate focusing as described above being from left to right arranged Focusing and putting coke-like state) and light-sensitive array, wherein one end that the first object lens deviate from the second object lens is arranged in determinand.

In Fig. 3, the imaging optical path and formation being emitted by virtual object that dotted line instruction is not interfered by surrounding medium are traveled along Light convergence after focus-C, solid line indicates the practical optical path across surrounding medium, object lens -1 and object lens -2, and virtual focus-C is Actually cut through the extending line intersection point of the convergence light of object lens -2.

From figure 3, it can be seen that by placing adjusting for accurate for the utility model between the second object lens and light-sensitive array The coke liquid crystal micro mirror burnt with pendulum, can be by applying external control signal to the liquid crystal micro mirror, making its work in focusing and putting burnt State is completed for the focus of imaging beam to be moved at light-sensitive array and optical axes crosspoint from virtual focus-C along optical axis, Yi Jijin One step swings to focus-C and locates this two operations, executes so as to which focal beam spot to be incident upon on the correct position of light-sensitive array Imaging operation realizes blur-free imaging.

As shown in figure 4, it shows according to a kind of optical microscopy of embodiment of the utility model comprising along optical path (coke-like is being focused and is being put in its work to the liquid crystal micro mirror burnt with pendulum for accurate focusing being from left to right arranged, as described above State), the first object lens, the second object lens and light-sensitive array, wherein one that liquid crystal micro mirror deviates from the first object lens is arranged in determinand End.

In Fig. 4, dotted line instruction is not interfered the imaging acted on liquid crystal micro mirror by surrounding medium by what virtual object -1 was emitted Road, and the virtual focus-D after the light convergence traveled along is formed, solid line is indicated across surrounding medium, liquid crystal micro mirror, object lens -1 With the practical optical path of object lens -2, and the focus-D after the light convergence traveled along is formed, passes through surrounding medium and micro- by liquid crystal Practical light after mirror effect is emitted by virtual object -2.

From fig. 4, it can be seen that by placing focusing for accurate for the utility model between the first object lens and determinand The burnt liquid crystal micro mirror with pendulum can keep its work burnt in focusing state and pendulum by applying external control signal to the liquid crystal micro mirror State can be moved the light for being influenced by surrounding medium and deviateing default imaging optical path, make its focus-D and virtual focus-D weight It closes, to remove influence of the surrounding medium to imaging position and accurate imaging.

As it will be easily appreciated by one skilled in the art that the above is only the preferred embodiment of the utility model only, not To limit the utility model, any modification made within the spirit and principle of the present invention, equivalent replacement and change Into etc., it should be included within the scope of protection of this utility model.

Claims (7)

1. a kind of liquid crystal micro mirror burnt with pendulum for accurate focusing, including from top to bottom successively the first anti-reflection film disposed in parallel, First substrate, the first patterned electrodes, the first liquid crystal layer, the second liquid crystal initial orientation layer, the first public electrode, the second substrate, Third substrate, the second public electrode, third liquid crystal initial orientation layer, the second liquid crystal layer, the second patterned electrodes, the 4th substrate, And second anti-reflection film, which is characterized in that

First patterned electrodes, the first public electrode, the second public electrode and the second patterned electrodes are arranged concentrically with respect to one another；

First patterned electrodes include 2ⁿA equally distributed subgraph pattern electrode in circumferentially edge, wherein n is more than or equal to 2 Natural number, circular diameter is between 100 to 500 microns where the circumference；

I-th of subgraph pattern electrode of the first patterned electrodes, which is connected respectively in the first driving control signal group, controls voltage U_1-iOne End, and have i ∈ [1,2ⁿ]；

Second patterned electrodes include it is multiple by circle along radially uniform cutting be 2ⁿFormation and the mode that is electrically insulated from each other after part The subgraph pattern electrode of partitioned arrangement, the circular diameter is in 50 to 100 micron ranges；

I-th of subgraph pattern electrode of the second patterned electrodes, which is connected respectively in the second driving control signal group, controls voltage U_2-iOne End；

One end of each in first public electrode and the second public electrode is all connected in the first driving control signal group side and controls Voltage U_1-iThe other end, the other end of each in the first public electrode and the second public electrode is all connected to second and controls letter Side controls voltage U in number group_2-iThe other end.

2. liquid crystal micro mirror according to claim 1, which is characterized in that further comprise setting in the first patterned electrodes and The first liquid crystal initial orientation layer between first liquid crystal layer, and be arranged between the second liquid crystal layer and the second patterned electrodes 4th liquid crystal initial orientation layer.

3. liquid crystal micro mirror according to claim 2, which is characterized in that the first liquid crystal initial orientation layer, the second liquid crystal are initial Oriented layer, third liquid crystal initial orientation layer and the 4th liquid crystal initial orientation layer are identical, by high-molecular organic material system At, and thickness is between 100 nanometers to 700 nanometers.

4. liquid crystal micro mirror according to claim 1, which is characterized in that

First anti-reflection film and the second anti-reflection film are made of normal optical anti-reflection film, and the two thickness is identical, are 100 nanometers and arrive 700 nanometers；

First substrate, the second substrate, third substrate and the 4th substrate are made of translucent material, and thickness is 1 millimeter To 5 millimeters；

First liquid crystal layer and the second liquid crystal layer are identical, and thickness is 5 microns to 100 microns.

5. liquid crystal micro mirror according to claim 1, which is characterized in that

First public electrode and the second public electrode shapes and sizes are identical, and are solid circles, have a diameter larger than shape At diameter of a circle where the circumference of the first patterned electrodes；

The area of circle is greater than all pattern sub-electrode institutes of the second patterned electrodes where forming the circumference of the first patterned electrodes Occupy the area in region.

6. a kind of optical microscopy, which is characterized in that including be from left to right arranged along optical path the first object lens, the second object lens, The liquid crystal micro mirror and light-sensitive array burnt with pendulum for accurate focusing as claimed in any of claims 1 to 5, One end that the first object lens deviate from the second object lens is arranged in middle determinand.

7. a kind of optical microscopy, which is characterized in that including it is being from left to right arranged along optical path, according to claim 1 in 5 Liquid crystal micro mirror, first object lens, second object lens and the light-sensitive array burnt with pendulum for accurate focusing described in any one, One end that liquid crystal micro mirror deviates from the first object lens is arranged in middle determinand.