CN209662982U - The de-watering apparatus of arsine gas - Google Patents
The de-watering apparatus of arsine gas Download PDFInfo
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- CN209662982U CN209662982U CN201822257140.3U CN201822257140U CN209662982U CN 209662982 U CN209662982 U CN 209662982U CN 201822257140 U CN201822257140 U CN 201822257140U CN 209662982 U CN209662982 U CN 209662982U
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- arsine
- condensing unit
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Abstract
The utility model provides a kind of de-watering apparatus of arsine gas.The de-watering apparatus includes: electrolysis unit, at least one condensing unit and the refrigerant feeding mechanism for supplying refrigerant to condensing unit.Electrolysis unit is provided with arsine mixed gas outlet；Condensing unit is connected with the arsine mixed gas outlet on electrolysis unit；Refrigerant feeding mechanism is connected with condensing unit, and condensing unit includes: the condensing unit for condensing the water vapour in arsine gaseous mixture, and condensing unit is connected with arsine mixed gas outlet.Electrolysis unit can prepare the arsine mixed gas containing arsine and vapor, the refrigerant that condensing unit is supplied by means of refrigerant feeding mechanism, the arsine gaseous mixture entered in condensing unit is cooled down, to convert condensate liquid (liquid water) for the water vapour condensation in arsine gaseous mixture, to realize the effect of vapor in removal arsine gaseous mixture.The structure of above-mentioned de-watering apparatus is simple, and has many advantages, such as removal process convenient for operating and handling cost.
Description
Technical field
The utility model relates to arsine preparation fields, in particular to a kind of de-watering apparatus of arsine gas.
Background technique
In recent years, IC industry development was swift and violent in global range, and China also has become one of the important base of wafer processing.
China's semiconductor industry is started late, overall technology strength compared with international industry level without apparent competitive advantage, as complete
The maximum country of ball semiconductor demand, China's semi-conductor market are continue to rely heavily on import, and the product degree of self-sufficiency is still in lower
It is horizontal.
In order to improve above-mentioned status, under the support of country, the semiconductor industry in China flourishes, conduct at the same time
Semiconductor must the arsine gas of raw material certainly will also welcome fast development.The country prepares arsine producer mainly using at present
Learn preparation.Chemical preparation method simple process, raw material are easy to get, and equipment investment is few, but product yield is low, and impurity content is high, need
It can be used by complicated refinement treatment rear.Usually using electrochemical process, electrochemical process can be for external mainstream arsine producer
Arsine, yield and purity is high are generated under the conditions of constant density, device is easily controllable.Compared to chemical preparation method, electrochemical process has
Apparent production capacity advantage, while it being more favorable to the system integration of product, therefore electrochemistry preparation will become arsine gas
Main stream approach certainly will cause paying close attention to and first developing for domestic related research and development unit and manufacturing enterprise.
During the electrolytic experiment of small flow arsine gas preparation, there is presently no the arsines of a set of high comprehensive performance
Gaseous mixture removes water scheme, to remove the vapor in arsine gaseous mixture.By institute's moisture vapor weight hundred in arsine gaseous mixture
Point content is larger (13%), if dealt with improperly, component service life used in gas piping and using terminal can be generated compared with
Big influence.On this basis, it is highly desirable to develop a kind of method that can remove the water vapour in small flow arsine gas.
Utility model content
The main purpose of the utility model is to provide a kind of de-watering apparatus of arsine gas, small to solve electrolysis method progress
It is good and at low cost to there is can not having both water removal effect in de-watering apparatus used in the preparation process of flow arsine.
To achieve the goals above, a kind of de-watering apparatus of arsine gas, de-watering apparatus are provided according to the utility model
It include: electrolysis unit, at least one condensing unit and the refrigerant feeding mechanism for supplying refrigerant to condensing unit.Electrolysis unit
It is provided with arsine mixed gas outlet；Condensing unit is connected with the arsine mixed gas outlet on electrolysis unit；Refrigerant feeding mechanism with
Condensing unit is connected, and condensing unit includes: the condensing unit for condensing the water vapour in arsine gaseous mixture, condensation dress
It sets and is connected with arsine mixed gas outlet.
Further, refrigerant feeding mechanism is provided with refrigerant supply opening and refrigerant recovering mouth；Condensing unit include: shell and
Condenser coil, shell are provided with refrigerant inlet and refrigerant exit, and refrigerant inlet is connected with refrigerant supply opening, refrigerant exit with it is cold
Matchmaker's recovery port is connected；The inside of shell is arranged in condenser coil, and condenser coil is provided with first entrance and clean gas outlet,
First entrance is connected with arsine mixed gas outlet.
Further, condensing unit further include condensation liquor collecting device, condensation liquor collecting device be provided with second entrance and
Communication port, second entrance are connected with arsine mixed gas outlet, and communication port is connected with first entrance.
Further, condensate outlet is arranged in condensation liquor collecting device, and electrolysis unit is provided with condensate liquid recovery port, condenses
Liquid recovery port is connected with condensate outlet by condensate liquid recovery pipe.
Further, de-watering apparatus further includes the first pneumatic stopping valve, and the setting of the first pneumatic stopping valve is recycled in condensate liquid
Main line.
Further, electrolysis unit is additionally provided with purge gass entrance, and de-watering apparatus is additionally provided with blow device, blow device
It is provided with purge gass supply opening, purge gass supply opening is connected with purge gass entrance by purge gass transfer pipeline.
Further, de-watering apparatus further includes the second pneumatic stopping valve, and the setting of the second pneumatic stopping valve is conveyed in purge gass
On pipeline.
Using the technical solution of the utility model, in arsine de-watering apparatus provided by the utility model, electrolysis unit can
The arsine mixed gas containing arsine and vapor is prepared, the refrigerant that condensing unit is supplied by means of refrigerant feeding mechanism will
It is cooled down into the arsine gaseous mixture in condensing unit, converts condensate liquid for the water vapour condensation in arsine gaseous mixture
(liquid water), to realize the effect of vapor in removal arsine gaseous mixture.The structure of above-mentioned de-watering apparatus is simple, and has
Removal process is convenient for the advantages that operating and handling cost.
Detailed description of the invention
The Figure of description for constituting a part of the utility model is used to provide a further understanding of the present invention, this
The illustrative embodiments and their description of utility model do not constitute the improper limit to the utility model for explaining the utility model
It is fixed.In the accompanying drawings:
The structure that Fig. 1 shows the arsine de-watering apparatus that a kind of preferred embodiment according to the present utility model provides is shown
It is intended to；
Fig. 2 shows a kind of structural representations for the condensing unit that preferred embodiment provides according to the present utility model
Figure；And Fig. 3 shows condensing unit that a kind of preferred embodiment according to the present utility model provides and condensing unit
Connection relationship diagram.
Wherein, the above drawings include the following reference numerals:
10, electrolysis unit；
20, condensing unit；21, condensing unit；211, shell；212, condenser coil；22, liquor collecting device is condensed；
30, refrigerant feeding mechanism；40, blow device；
101, the first pneumatic stopping valve；102, the second pneumatic stopping valve；103, check valve；104, delivery pump.
Specific embodiment
It should be noted that in the absence of conflict, the feature in the embodiments of the present invention and embodiment can
To be combined with each other.The utility model is described in detail below in conjunction with embodiment.
As described in background technique, electrolysis method carries out de-watering apparatus used in the preparation process of small flow arsine and deposits
The good and at low cost problem of water removal effect can not had both.In order to solve the above-mentioned technical problem, the utility model provides one kind
The de-watering apparatus of arsine gas, as shown in Figure 1, the de-watering apparatus includes: electrolysis unit 10, at least one condensing unit 20 and uses
In the refrigerant feeding mechanism 30 for supplying refrigerant to condensing unit 20；Electrolysis unit 10 is provided with arsine mixed gas outlet；Condensation is single
Member 20 is connected with the arsine mixed gas outlet on electrolysis unit 10, and condensing unit 20 includes: for making in arsine gaseous mixture
The condensing unit 21 that water vapour is condensed, condensing unit 21 are connected with the arsine gaseous mixture entrance of electrolysis unit 10.
In arsine de-watering apparatus provided by the utility model, electrolysis unit 10 can be prepared containing arsine and vapor
Arsine mixed gas, the refrigerant that condensing unit 20 is supplied by means of refrigerant feeding mechanism 30 will enter the arsenic in condensing unit 20
Alkane gaseous mixture is cooled down, and condensate liquid (liquid water) is converted by the water vapour condensation in arsine gaseous mixture, to realize
Remove the effect of vapor in arsine gaseous mixture.The structure of above-mentioned de-watering apparatus is simple, and have removal process convenient for operation and
The advantages that processing cost.
The vapor in small flow arsine gas is removed using above-mentioned arsine de-watering apparatus to be not only convenient for operating, and is had
Higher economic value.As long as above-mentioned condensing unit 21 can be realized the function of condensing the vapor in arsine gaseous mixture
, structure is not particularly limited.In a kind of preferred embodiment, as shown in Fig. 2, refrigerant feeding mechanism 30 is provided with refrigerant
Supply opening and refrigerant recovering mouth；Condensing unit 21 include shell 211 and condenser coil 212, shell 211 be provided with refrigerant inlet and
Refrigerant exit, refrigerant inlet are connected with refrigerant supply opening, and refrigerant exit is connected with refrigerant recovering mouth；Condenser coil 212 is set
It sets in the inside of shell 211, and condenser coil 212 is provided with first entrance and clean gas outlet, first entrance is mixed with arsine
Gas outlet is connected.Core component by condenser coil 212 as condensing unit 21, this be conducive to improve arsine gaseous mixture with it is cold
The contact area of matchmaker improves the de-water ratio in arsine gaseous mixture to improve the condensation efficiency of condensing unit 21.
For the ease of the collection of condensate liquid, in a kind of preferred embodiment, as shown in Fig. 2, condensing unit 20 further includes
Liquor collecting device 22 is condensed, condensation liquor collecting device 22 is provided with second entrance and communication port, second entrance and arsine gaseous mixture
Outlet is connected, and communication port is connected with first entrance.Second entrance is connected with arsine mixed gas outlet can make arsine
Gaseous mixture is introduced into condensation liquor collecting device 22, so that steady air current, then again through the communication port on condensation liquor collecting device 22
Into being cooled down in condenser coil 212, this is conducive to the safety for improving entire condensation process.
In electrolytic process, a large amount of water is needed, in order to save the dosage of water, it is preferable that electrolysis unit 10 is provided with condensation
Liquid recovery port, condensate liquid recovery port are connected with condensate outlet respectively.Condensate outlet is connected with condensate liquid recovery port
Be conducive to recycle in cooling water from arsine gaseous mixture.
In order to further increase the de-water ratio to arsine gaseous mixture, it is preferable that above-mentioned de-watering apparatus further includes being sequentially communicated
Two condensing units 20, condensation liquor collecting device and electrolysis unit along the flow direction of material, in previous condensing unit
10 are connected, and the gas outlet on the condenser coil in liquor collecting device and previous condensing unit is condensed in the latter condensing unit
It is connected, the clean gas outlet discharge that purified gas is arranged through the latter condensing unit.Two condensing units 20 it is specific
Connection type is shown in Fig. 3.
When above-mentioned de-watering apparatus further includes two condensing units 20 being sequentially communicated, in a kind of preferred embodiment, such as
Shown in Fig. 1, above-mentioned de-watering apparatus is provided with condensate liquid recycling main line, the first condensate liquid recycling branch and the second condensate liquid
Branch is recycled, the outlet end that condensate liquid recovery port and condensate liquid recycle main line is connected, and the first condensate outlet is through the
One condensate liquid recycles branch and is connected with the arrival end of condensate liquid recycling main line, and the second condensate outlet is through the second condensation
Liquid recycles branch and is connected with the arrival end of condensate liquid recycling main line；De-watering apparatus further includes the first pneumatic stopping valve
101 and check valve 103, the setting of the first pneumatic stopping valve 101 recycles main line in condensate liquid, and the setting of check valve 103 is the
Two condensate liquids recycle branch road.The first pneumatic stopping valve 101 is set on condensate liquid recycling main feedline road, while cold second
Solidifying recycling branch road setting check valve 103, can make arsine by closing the first pneumatic stopping valve 101 and check valve 103
Mixed gas fully enters previous condensing unit (along the flow direction of material), to be conducive to improve removing for arsine gaseous mixture
Water rate.
In order to improve the flow rate of condensed water in condensate liquid main line, it is preferable that as shown in Figure 1, above-mentioned water removal
System further includes delivery pump 104, which is arranged on condensate liquid main feedline road.
In a kind of preferred embodiment, as shown in Figure 1, electrolysis unit 10 is additionally provided with purge gass entrance, de-watering apparatus
It is additionally provided with blow device 40, blow device 40 is provided with purge gass supply opening, and purge gass supply opening passes through with purge gass entrance
Purge gass transfer pipeline is connected.It should be noted that as shown in Figure 1, the Flow of Goods and Materials direction in the route of part can be it is double
To.
In terms of the safety of the de-watering apparatus, the pipeline for being related to arsine gas circuit is all made of VCR connector, and slip is allowing
In range, to operator and environment without danger, while testing entire pipeline after the completion and having carried out nitrogen purging, avoid arsenic
The pipeline remaining of alkane gas, greatly reduces operational risk in pipeline maintenance process.Simple and effective principle and structure design,
Reliable pipeline sealing means and nitrogen purging design and bring dual protection to the removal process of arsine gas, effectively protect
The safe and reliable operation of whole system has been demonstrate,proved, and has largely reduced the buying and operating cost of system.
In a kind of preferred embodiment, as shown in Figure 1, de-watering apparatus further includes the second pneumatic stopping valve 102, the second gas
Dynamic shut-off valve 102 is arranged on purge gass transfer pipeline.Being provided with for second pneumatic stopping valve 102 is purged conducive to control nitrogen
The operation or stopping of journey.
The utility model is described in further detail below in conjunction with specific embodiment, these embodiments should not be understood as limiting
The utility model range claimed processed.
Embodiment 1
Using the vapor in the removal arsine gaseous mixture of the de-watering apparatus as shown in Fig. 1 to 3.
The content 13wt% of vapor in the arsine gaseous mixture generated in electrolysis unit.
Refrigerant feeding mechanism 30 supplies 30 DEG C of cooling water as refrigerant into two condensing units 20 respectively.Electrolytic process
In, the first pneumatic stopping valve 101 and the second pneumatic stopping valve 102 simultaneously close off, the arsine gaseous mixture being discharged in electrolysis unit 10
Enter in the condensation liquor collecting device 22 of first condensing unit 20 through arsine gaseous mixture entrance.In the first pneumatic stopping valve 101
With the limitation of check valve 103, then arsine gaseous mixture through communication port enter first condensing unit 20 condensing unit in carry out
Condensation, obtains condensate liquid and the first purified gas after condensation, the condensate liquid that condensate liquid is back to first condensing unit 20 collects dress
In setting, purified gas enters second condensing unit 20 through the first purified gas entrance.
By tentatively removing water to obtain the first purified gas into the condensation liquor collecting device of second condensing unit 20, then
Enter in the condensing unit of second condensing unit 20 through communication port and condensed, condensate liquid and purified gas are obtained after condensation, it is cold
Lime set is back in the condensation liquor collecting device of second condensing unit 20, and purified gas is that (vapour content is final product
0.5wt%, de-water ratio 96.2wt%).
After electrolytic process, the first pneumatic stopping valve 101 is opened first, will be condensed by the effect of delivery pump 104
Water pumpback is into electrolysis unit 10.
After condensed water is cleaned, the second pneumatic stopping valve 102 is opened, while the first pneumatic stopping valve 101 stays open shape
State is led to nitrogen into entire de-watering apparatus from nitrogen purging device 40 and carries out purging and arsine displacement.
The above descriptions are merely preferred embodiments of the present invention, is not intended to limit the utility model, for this
For the technical staff in field, various modifications and changes may be made to the present invention.It is all in the spirit and principles of the utility model
Within, any modification, equivalent replacement, improvement and so on should be included within the scope of protection of this utility model.
Claims (7)
1. a kind of de-watering apparatus of arsine gas, which is characterized in that the de-watering apparatus includes:
Electrolysis unit (10), the electrolysis unit (10) are provided with arsine mixed gas outlet；
At least one condensing unit (20), the arsine mixed gas outlet phase of the condensing unit (20) and the electrolysis unit (10)
Even；And
For the refrigerant feeding mechanism (30) to the condensing unit (20) supply refrigerant, the refrigerant feeding mechanism (30) and institute
It states condensing unit (20) to be connected, the condensing unit (20) includes: for condensing the water vapour in arsine gaseous mixture
Condensing unit (21), the condensing unit (21) are connected with the arsine mixed gas outlet.
2. de-watering apparatus according to claim 1, which is characterized in that the refrigerant feeding mechanism (30) is provided with refrigerant confession
Answer mouth and refrigerant recovering mouth；The condensing unit (21) includes:
Shell (211), the shell (211) are provided with refrigerant inlet and refrigerant exit, and the refrigerant inlet and the refrigerant supply
Mouth is answered to be connected, the refrigerant exit is connected with the refrigerant recovering mouth；
Condenser coil (212), the condenser coil (212) are arranged in the inside of the shell (211), and the condenser coil
(212) it is provided with first entrance and clean gas outlet, the first entrance is connected with the arsine mixed gas outlet.
3. de-watering apparatus according to claim 2, which is characterized in that the condensing unit (20) further includes that condensate liquid is collected
Device (22), the condensation liquor collecting device (22) are provided with second entrance and communication port, the second entrance and the arsine
Mixed gas outlet is connected, and the communication port is connected with the first entrance.
4. de-watering apparatus according to claim 3, which is characterized in that condensate liquid is arranged in the condensation liquor collecting device (22)
Outlet, the electrolysis unit (10) are provided with condensate liquid recovery port, and the condensate liquid recovery port passes through with the condensate outlet
Condensate liquid recycling main line is connected.
5. de-watering apparatus according to claim 4, which is characterized in that the de-watering apparatus further includes the first pneumatic stopping valve
(101), the first pneumatic stopping valve (101) setting is on condensate liquid recycling main feedline road.
6. de-watering apparatus according to any one of claim 1 to 5, which is characterized in that the electrolysis unit (10) also sets
It is equipped with purge gass entrance, the de-watering apparatus is additionally provided with blow device (40), and the blow device (40) is provided with purge gass
Supply opening, the purge gass supply opening are connected with the purge gass entrance by purge gass transfer pipeline.
7. de-watering apparatus according to claim 6, which is characterized in that the de-watering apparatus further includes the second pneumatic stopping valve
(102), second pneumatic stopping valve (102) is arranged on the purge gass transfer pipeline.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201822257140.3U CN209662982U (en) | 2018-12-29 | 2018-12-29 | The de-watering apparatus of arsine gas |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201822257140.3U CN209662982U (en) | 2018-12-29 | 2018-12-29 | The de-watering apparatus of arsine gas |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209662982U true CN209662982U (en) | 2019-11-22 |
Family
ID=68564412
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201822257140.3U Active CN209662982U (en) | 2018-12-29 | 2018-12-29 | The de-watering apparatus of arsine gas |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209662982U (en) |
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2018
- 2018-12-29 CN CN201822257140.3U patent/CN209662982U/en active Active
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20210115 Address after: Unit 611, unit 3, 6 / F, building 1, yard 30, Yuzhi East Road, Changping District, Beijing 102208 Patentee after: Zishi Energy Co.,Ltd. Address before: Room a129-1, No. 10, Zhongxing Road, science and Technology Park, Changping District, Beijing Patentee before: DONGTAI HI-TECH EQUIPMENT TECHNOLOGY Co.,Ltd. |
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| TR01 | Transfer of patent right |