CN209662849U - Gaseous phase deposition stove tail gas oil removing filter device - Google Patents
Gaseous phase deposition stove tail gas oil removing filter device Download PDFInfo
- Publication number
- CN209662849U CN209662849U CN201920309111.9U CN201920309111U CN209662849U CN 209662849 U CN209662849 U CN 209662849U CN 201920309111 U CN201920309111 U CN 201920309111U CN 209662849 U CN209662849 U CN 209662849U
- Authority
- CN
- China
- Prior art keywords
- staving
- lid
- tail gas
- air inlet
- gaseous phase
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000007789 gas Substances 0.000 title claims abstract description 43
- 230000008021 deposition Effects 0.000 title claims abstract description 18
- 239000007792 gaseous phase Substances 0.000 title claims abstract description 18
- 239000004744 fabric Substances 0.000 claims abstract description 25
- 239000004677 Nylon Substances 0.000 claims description 3
- 229920001778 nylon Polymers 0.000 claims description 3
- 238000007789 sealing Methods 0.000 claims description 3
- 238000000605 extraction Methods 0.000 claims description 2
- 238000007740 vapor deposition Methods 0.000 abstract description 5
- 238000000151 deposition Methods 0.000 description 11
- 238000010521 absorption reaction Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 230000007613 environmental effect Effects 0.000 description 3
- 239000007788 liquid Substances 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000005484 gravity Effects 0.000 description 2
- 238000009825 accumulation Methods 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 238000009776 industrial production Methods 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000012071 phase Substances 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000003319 supportive effect Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Filtering Of Dispersed Particles In Gases (AREA)
Abstract
The utility model discloses a kind of gaseous phase deposition stove tail gas oil removing filter devices, including staving and lid, the lid is located at the top of the staving, the bottom of the staving is downwardly convex curved-surface structure, the center of the staving bottom is equipped with oil discharge outlet, side below the staving is equipped with air inlet, and the side far from the air inlet is equipped with exhaust outlet on the lid；Support frame inside the staving is equipped with several filter cloth bags being vertically arranged, level height at the top of the filter cloth bag is lower than the bottom of the exhaust outlet, the level height of the filter cloth bag bottom is higher than the level height of the air inlet bottom lower than the level height at the top of the air inlet.The gaseous phase deposition stove of the utility model using the above structure tail gas oil removing filter device, structure is simple, effectively removes the oil gas in vapor deposition furnace exhaust gas.
Description
Technical field
The utility model relates to the furnace accessory technical fields that is vapor-deposited, and are removed more particularly to a kind of gaseous phase deposition stove with tail gas
Oily filter device.
Background technique
Gaseous phase deposition stove is the principle using chemical vapor deposition (Chemical Vapor Deposition), will be participated in
The substance of chemical reaction is heated to certain technological temperature, under the graviational interaction that vacuum pump extract system generates, leads to settling chamber
It reacted, deposited, generate new solid matter.The furnace exhaust gas that is vapor-deposited in industrial production is complex in composition, in the prior art gas
The tail gas of phase cvd furnace is directly entered environmental protection equipment by sliding valve vacuum pump after negative pressure extraction out of furnace body and carries out vent gas treatment, but
It is that partly evaporation is extracted in the form of oil gas with tail gas after pumping fluid is heated in process of production, causes oily in tail gas
Gas content is excessively high, and tail gas cannot reach environmental protection standard after environmental protection equipment is handled.
Utility model content
The purpose of the utility model is to provide a kind of gaseous phase deposition stove tail gas oil removing filter devices, and structure is simple, effectively
Oil gas in removal vapor deposition furnace exhaust gas.
To achieve the above object, the utility model provides a kind of gaseous phase deposition stove tail gas oil removing filter device, including
Staving and lid, the lid are located at the top of the staving, and the bottom of the staving is downwardly convex curved-surface structure, described
The center of staving bottom is equipped with oil discharge outlet, and the side below the staving is equipped with air inlet, the separate air inlet on the lid
The side of mouth is equipped with exhaust outlet；
Support frame inside the staving is equipped with several filter cloth bags being vertically arranged, the water at the top of the filter cloth bag
Flat height is lower than the bottom of the exhaust outlet, and the level height of the filter cloth bag bottom is lower than the level at the top of the air inlet
Highly, and higher than the level height of the air inlet bottom.
Preferably, the lid is cylinder, and sealing ring, the lid and institute are equipped between the lid and the staving
It states and is bolted between staving.
Preferably, the lower section of the staving is equipped with bracket.
Preferably, the filter cloth bag is 250 mesh nylon net cloths.
Therefore, the gaseous phase deposition stove of the utility model using the above structure tail gas oil removing filter device, structure is simple, has
Oil gas in effect removal vapor deposition furnace exhaust gas.
The technical solution of the utility model is described in further detail below by drawings and examples.
Detailed description of the invention
Fig. 1 is the schematic diagram of the utility model gaseous phase deposition stove tail gas oil removing filter device embodiment.
Appended drawing reference
1, staving；2, lid；3, air inlet；4, exhaust outlet；5, support frame；6, filter cloth bag；7, oil discharge outlet；8, bracket.
Specific embodiment
The embodiments of the present invention is described further with reference to the accompanying drawing.
Fig. 1 is the schematic diagram of the utility model gaseous phase deposition stove tail gas oil removing filter device embodiment, as shown, one
Kind gaseous phase deposition stove tail gas oil removing filter device, including staving 1 and lid 2, lid 2 are cylinder, and lid 2 is located at staving 1
Top.It is bolted between lid 2 and staving 1, lid 2 is enable to dismantle, the convenient cleaning to 1 internal structure of staving
And maintenance.It is equipped with sealing ring between lid 2 and staving 1, guarantees the air-tightness between lid 2 and staving 1.The side of 1 lower section of staving
Face is equipped with air inlet 3, and the side far from air inlet 3 is equipped with exhaust outlet 4 on lid 2, and gas enters from air inlet 3, and tail gas passes through
It is discharged after processing from exhaust outlet 4.
Support frame 5 inside staving 1 is equipped with several filter cloth bags 6 being vertically arranged, and filter cloth bag 6 is 250 mesh nylon
Screen cloth, for adsorbing the oil gas in gaseous phase deposition stove tail gas.The level height at 6 top of filter cloth bag is lower than the bottom of exhaust outlet 4,
Gas inherent filtration cloth bag 6 enters exhaust outlet 4.The level height of 6 bottom of filter cloth bag is lower than the level height at 3 top of air inlet,
And it is higher than the level height of 3 bottom of air inlet, it realizes the maximum laying length of filter cloth bag 6, carries out filter cloth bag 6 to oil gas
Sufficiently absorption guarantees the deoiling effect of filter cloth bag 6.The bottom of staving 1 is downwardly convex curved-surface structure, in filter cloth bag 6
The oil gas cohesion of absorption is the bottom for collecting in staving 1 after drop by gravity, is convenient for discharge oil droplet.The center of 1 bottom of staving is set
There is oil discharge outlet 7, oil discharge outlet 7 is used to for the oil liquid collected being discharged.The lower section of staving 1 is equipped with bracket 8, and bracket 8 plays a supportive role, mentions
The stability of high staving 1.
In use, vapor deposition furnace exhaust gas enters staving 1 by the air inlet 3 of bottom, through filter cloth bag 6 in uphill process
It is discharged after carrying out oil gas absorption by the exhaust outlet 4 at top, the oil gas that filter cloth bag 6 is adsorbed agglomerates to collect in after drop by gravity
1 bottom of staving, oil liquid accumulation open oil discharge outlet 7 afterwards to a certain extent and oil liquid are discharged, after a period of use, lid 2 is unloaded
Under then take out filter cloth bag 6 and replaced and cleaned.
Therefore, the gaseous phase deposition stove of the utility model using the above structure tail gas oil removing filter device, structure is simple, has
Oil gas in effect removal vapor deposition furnace exhaust gas.
Finally, it should be noted that above embodiments are only to illustrate the technical solution of the utility model rather than limit it
System, although the utility model has been described in detail with reference to the preferred embodiment, those skilled in the art should manage
Solution: it still can be with the technical solution of the present invention is modified or equivalently replaced, and these are modified or equally replace
Changing also cannot make modified technical solution be detached from the spirit and scope of the technical scheme of the present invention.
Claims (4)
1. a kind of gaseous phase deposition stove tail gas oil removing filter device, it is characterised in that: including staving and lid, the lid is located at
The top of the staving, the bottom of the staving are downwardly convex curved-surface structure, and the center of the staving bottom is equipped with oil extraction
Mouthful, the side below the staving is equipped with air inlet, and the side far from the air inlet is equipped with exhaust outlet on the lid；
Support frame inside the staving is equipped with several filter cloth bags being vertically arranged, and the level at the top of the filter cloth bag is high
Degree is lower than the bottom of the exhaust outlet, and the level height of the filter cloth bag bottom is high lower than the level at the top of the air inlet
Degree, and it is higher than the level height of the air inlet bottom.
2. gaseous phase deposition stove according to claim 1 tail gas oil removing filter device, it is characterised in that: the lid is circle
Cylindricality is equipped with sealing ring, is bolted between the lid and the staving between the lid and the staving.
3. gaseous phase deposition stove according to claim 2 tail gas oil removing filter device, it is characterised in that: under the staving
Side is equipped with bracket.
4. gaseous phase deposition stove according to claim 3 tail gas oil removing filter device, it is characterised in that: the filter cloth bag
For 250 mesh nylon net cloths.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920309111.9U CN209662849U (en) | 2019-03-12 | 2019-03-12 | Gaseous phase deposition stove tail gas oil removing filter device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920309111.9U CN209662849U (en) | 2019-03-12 | 2019-03-12 | Gaseous phase deposition stove tail gas oil removing filter device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209662849U true CN209662849U (en) | 2019-11-22 |
Family
ID=68571183
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201920309111.9U Expired - Fee Related CN209662849U (en) | 2019-03-12 | 2019-03-12 | Gaseous phase deposition stove tail gas oil removing filter device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209662849U (en) |
-
2019
- 2019-03-12 CN CN201920309111.9U patent/CN209662849U/en not_active Expired - Fee Related
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20191122 |