CN209641626U - A kind of air-dried dust removal machine of graphite boat inserted sheet - Google Patents
A kind of air-dried dust removal machine of graphite boat inserted sheet Download PDFInfo
- Publication number
- CN209641626U CN209641626U CN201920557182.0U CN201920557182U CN209641626U CN 209641626 U CN209641626 U CN 209641626U CN 201920557182 U CN201920557182 U CN 201920557182U CN 209641626 U CN209641626 U CN 209641626U
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- CN
- China
- Prior art keywords
- cabinet
- graphite boat
- fan
- inserted sheet
- air
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Abstract
A kind of air-dried dust removal machine of graphite boat inserted sheet, which is characterized in that including the cabinet below graphite boat is arranged in, rectangular-shape is presented in cabinet, and cabinet two sides are respectively arranged with 2 insertion holes, and each insertion hole is square；It further include several fans being mounted in cabinet, 2 mounting plates are vertically arranged in cabinet, fan is arranged between mounting plate, and chassis bottom is located at below fan and is provided with metal ventilative board, metal ventilative board has been sequentially arranged above PP fibrous filter net, activated charcoal strainer.It inserts in the hole and is additionally provided with pressing type switch, circuit concatenates between pressing type switch and fan.The application's air-dries dust removal machine for a kind of graphite boat inserted sheet, simple in sturcture, ingenious in design, low to accessory requirement, easy to make quick, manufacturing cost is low, it can be realized graphite boat inserted sheet surface to need to keep drying as far as possible, and ambient enviroment keeps clean, has good practicability.
Description
Technical field
The utility model relates to a kind of graphite boat inserted sheets to air-dry dust removal machine.
Background technique
There is one of program to be called PECVD plated film in the production and processing of solar silicon wafers, effect is the sun for improving silicon wafer
It can conversion ratio.This process just uses graphite boat.Silicon wafer is put into graphite boat, generates chemical reaction by certain condition,
A tunic is plated in silicon chip surface.
In this process, graphite boat inserted sheet surface needs to keep drying as far as possible, and ambient enviroment keeps clean.
Therefore in the case where not being transformed to equipment, graphite boat can be improved.
Utility model content
The purpose of this utility model is to provide a kind of graphite boat inserted sheets to air-dry dust removal machine.
To achieve the above object, the utility model provides the following technical solutions:
A kind of air-dried dust removal machine of graphite boat inserted sheet, including the cabinet below graphite boat is arranged in, rectangular-shape is presented in cabinet,
Cabinet two sides are respectively arranged with 2 insertion holes, and each insertion hole is square；
Correspondingly, the cushion block in graphite boat improves, 2 cushion blocks with support foot, the shape of support foot is respectively set in two sides
Shape is corresponding with insertion hole；
Further include several fans being mounted in cabinet, 2 mounting plates are vertically arranged in cabinet, fan setting is being installed
Between plate, the wind direction of fan is upward, and chassis bottom is located at below fan and is provided with metal ventilative board, metal ventilative board top is successively
It is provided with PP fibrous filter net, activated charcoal strainer.It can guarantee that fan inner air is clean in this way, under the action of fan,
It reduces air plankton and enters graphite boat, protect production environment.
It inserts in the hole and is additionally provided with pressing type switch, after the support foot insertion of graphite boat is intact, pressing type switch is all connect
It is logical, fan work, that is, circuit concatenates between pressing type switch and fan.
Further, it inserts the orifice position in hole such as and is provided with extension mouth, correspondingly, the support foot of graphite boat is provided with and agrees with
Portion.
Compared with prior art, the utility model has the beneficial effects that a kind of air-drying for graphite boat inserted sheet for the application removes
Dirt machine, simple in sturcture, ingenious in design, low to accessory requirement, easy to make quick, manufacturing cost is low, can be realized graphite boat and inserts
Piece surface needs to keep drying as far as possible, and ambient enviroment keeps clean, has good practicability.
Detailed description of the invention
Fig. 1 is the improvement schematic diagram of graphite boat, and A is graphite boat, and a is the cushion block with support foot.
Fig. 2 is the structural schematic diagram that a kind of graphite boat inserted sheet air-dries dust removal machine.
Fig. 3 is the insertion hole schematic diagram that a kind of graphite boat inserted sheet air-dries dust removal machine.
Fig. 4 is the cabinet inside schematic diagram that a kind of graphite boat inserted sheet air-dries dust removal machine.
Specific embodiment
The following will be combined with the drawings in the embodiments of the present invention, carries out the technical scheme in the embodiment of the utility model
Clearly and completely describe.
As shown in Figures 1 to 4, a kind of graphite boat inserted sheet air-dries dust removal machine, including the cabinet 1 below graphite boat A is arranged in,
Rectangular-shape is presented in cabinet 1, and 1 two sides of cabinet are respectively arranged with 2 insertion holes 3, and each insertion hole 3 is square；
Correspondingly, the cushion block in graphite boat A improves, 2 cushion block a with support foot are respectively set in two sides, support foot
Shape and insertion hole 3 are corresponding；
Further include several fans 2 being mounted in cabinet 1,2 mounting plates 5 are vertically arranged in cabinet 1, fan 3 is arranged
Between mounting plate 2, the wind direction of fan 2 is upward, and 1 bottom of cabinet is located at below fan 2 and is provided with metal ventilative board 6, metal is saturating
Aerofoil 6 has been sequentially arranged above PP fibrous filter net 7, activated charcoal strainer 8.It can guarantee that 2 inner air of fan is clean in this way,
Under the action of fan 2, reduces air plankton and enter graphite boat A, protect production environment.
Insertion is additionally provided with pressing type switch 4 in hole 3, and after the support foot insertion of graphite boat A is intact, pressing type switch 4 is complete
Portion connects, and fan 2 works, that is, circuit concatenates between pressing type switch 4 and fan 2.
Further, it inserts the orifice position in hole 3 such as and is provided with extension mouth 31, correspondingly, the support foot of graphite boat A is provided with contract
Conjunction portion.
Obviously, the described embodiments are only a part of the embodiments of the utility model, instead of all the embodiments.Base
In the embodiments of the present invention, institute obtained by those of ordinary skill in the art without making creative efforts
There are other embodiments, fall within the protection scope of the utility model.
Claims (2)
1. a kind of graphite boat inserted sheet air-dries dust removal machine, which is characterized in that including the cabinet below graphite boat is arranged in, cabinet is presented
Rectangular-shape, cabinet two sides are respectively arranged with 2 insertion holes, and each insertion hole is square；
Further include several fans being mounted in cabinet, be vertically arranged with 2 mounting plates in cabinet, fan setting mounting plate it
Between, chassis bottom is located at below fan and is provided with metal ventilative board, metal ventilative board be sequentially arranged above PP fibrous filter net,
Activated charcoal strainer；It inserts in the hole and is additionally provided with pressing type switch, circuit concatenates between pressing type switch and fan.
2. a kind of graphite boat inserted sheet described in accordance with the claim 1 air-dries dust removal machine, which is characterized in that be inserted into the orifice position in hole
It is provided with extension mouth.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920557182.0U CN209641626U (en) | 2019-04-23 | 2019-04-23 | A kind of air-dried dust removal machine of graphite boat inserted sheet |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920557182.0U CN209641626U (en) | 2019-04-23 | 2019-04-23 | A kind of air-dried dust removal machine of graphite boat inserted sheet |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209641626U true CN209641626U (en) | 2019-11-15 |
Family
ID=68497851
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201920557182.0U Expired - Fee Related CN209641626U (en) | 2019-04-23 | 2019-04-23 | A kind of air-dried dust removal machine of graphite boat inserted sheet |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209641626U (en) |
-
2019
- 2019-04-23 CN CN201920557182.0U patent/CN209641626U/en not_active Expired - Fee Related
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20191115 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |